Patents by Inventor Haiting Wang

Haiting Wang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11004748
    Abstract: This disclosure relates to a method of fabricating semiconductor devices with a gate-to-gate spacing that is wider than a minimum gate-to-gate spacing and the resulting semiconductor devices. The method includes forming gate structures over an active structure, the gate structures including a first gate structure, a second gate structure, and a third gate structure. The second gate structure is between the first and third gate structures. A plurality of epitaxial structures are formed adjacent to the gate structures, wherein the second gate structure separates two epitaxial structures and the two epitaxial structures are between the first and third gate structures. The second gate structure is removed. A conductive region is formed to connect the epitaxial structures between the first and third gate structures.
    Type: Grant
    Filed: June 5, 2019
    Date of Patent: May 11, 2021
    Assignee: GLOBALFOUNDRIES U.S. Inc.
    Inventors: Sipeng Gu, Jiehui Shu, Haiting Wang
  • Publication number: 20210111264
    Abstract: The present disclosure generally relates to semiconductor structures and, more particularly, to gate structures and methods of manufacture. The method includes: forming a first gate structure and a second gate structure with gate materials; etching the gate materials within the second gate structure to form a trench; and depositing a conductive material within the trench so that the second gate structure has a metal composition different than the first gate structure.
    Type: Application
    Filed: October 11, 2019
    Publication date: April 15, 2021
    Inventors: Jiehui SHU, Sipeng GU, Haiting WANG
  • Publication number: 20210111065
    Abstract: A method and related structure provide a void-free dielectric over trench isolation region in an FDSOI substrate. The structure may include a first transistor including a first active gate over the substrate, a second transistor including a second active gate over the substrate, a first liner extending over the first transistor, and a second, different liner extending over the second transistor. A trench isolation region electrically isolates the first transistor from the second transistor. The trench isolation region includes a trench isolation extending into the FDSOI substrate and an inactive gate over the trench isolation. A dielectric extends over the inactive gate and in direct contact with an upper surface of the trench isolation region. The dielectric is void-free, and the liners do not extend over the trench isolation.
    Type: Application
    Filed: October 9, 2019
    Publication date: April 15, 2021
    Inventors: Yongjun Shi, Wei Hong, Chun Yu Wong, Haiting Wang, Liu Jiang
  • Patent number: 10971625
    Abstract: A semiconductor device is provided, which includes an array of active regions, gate stacks and substantially uniform epitaxial structures. The gate stacks of the array include a first gate stack and a second gate stack over an active region. An active pillar between the first gate stack and the second gate stack, and the active pillar separating two substantially uniform epitaxial structures. A contact structure over the active pillar, positioned equidistant from the first gate stack and the second gate stack.
    Type: Grant
    Filed: June 30, 2019
    Date of Patent: April 6, 2021
    Assignee: GLOBALFOUNDRIES U.S. INC.
    Inventors: Michael V Aquilino, Daniel Jaeger, Man Gu, Bradley Morgenfeld, Haiting Wang, Kavya Sree Duggimpudi, Wang Zheng
  • Publication number: 20210098591
    Abstract: The present disclosure generally relates to semiconductor structures and, more particularly, to air spacer structures and methods of manufacture. The structure includes: a plurality of gate structures comprising active regions; contacts extending to the active regions; a plurality of anchor structures between the active regions; and air spacer structures adjacent to the contacts.
    Type: Application
    Filed: September 27, 2019
    Publication date: April 1, 2021
    Inventors: Julien FROUGIER, Ali RAZAVIEH, Haiting WANG
  • Patent number: 10937693
    Abstract: At least one method, apparatus and system disclosed herein involves forming local interconnect regions during semiconductor device manufacturing. A plurality of fins are formed on a semiconductor substrate. A gate region is over a portion of the fins. A trench silicide (TS) region is formed adjacent a portion of the gate region. The TS region comprises a first TS metal feature and a second TS metal feature. A bi-layer self-aligned contact (SAC) cap is formed over a first portion of the TS region and electrically coupled to a portion of the gate region. A portion of the bi-layer SAC cap is removed to form a first void. A first local interconnect feature is formed in the first void.
    Type: Grant
    Filed: October 2, 2018
    Date of Patent: March 2, 2021
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Ruilong Xie, Andreas Knorr, Haiting Wang, Hui Zang
  • Patent number: 10937685
    Abstract: The present disclosure generally relates to semiconductor devices and processing. The present disclosure also relates to isolation structures formed in active regions, more particularly, diffusion break structures in an active semiconductor layer of a semiconductor device. The present disclosure also relates to methods of forming such structures and replacement metal gate processes.
    Type: Grant
    Filed: June 19, 2019
    Date of Patent: March 2, 2021
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Sipeng Gu, Haiting Wang, Jiehui Shu
  • Publication number: 20210050419
    Abstract: Structures for a field-effect transistor and methods of forming a structure for a field-effect transistor. A gate structure is arranged over a channel region of a semiconductor body. A first source/drain region is coupled to a first portion of the semiconductor body, and a second source/drain region is located in a second portion the semiconductor body. The first source/drain region includes an epitaxial semiconductor layer containing a first concentration of a dopant. The second source/drain region contains a second concentration of the dopant. The channel region is positioned in the semiconductor body between the first source/drain region and the second source/drain region.
    Type: Application
    Filed: August 15, 2019
    Publication date: February 18, 2021
    Inventors: Jiehui Shu, Baofu Zhu, Haiting Wang, Sipeng Gu
  • Publication number: 20210050412
    Abstract: A semiconductor device is provided, which includes an active region, a first structure, a second gate structure, a first gate dielectric sidewall, a second gate dielectric sidewall, a first air gap region, a second air gap region and a contact structure. The active region is formed over a substrate. The first and second gate structures are formed over the active region and between the first gate structure and the second gate structure are the first gate dielectric sidewall, the first air gap region, the contact structure, the second air gap region and a second gate dielectric sidewall.
    Type: Application
    Filed: August 12, 2019
    Publication date: February 18, 2021
    Inventors: Chun Yu WONG, Haiting Wang, Yong Jun Shi, Xiaoming Yang, Liu Jiang
  • Publication number: 20210043766
    Abstract: A laterally diffused metal-oxide semiconductor (LDMOS) device is disclosed. The LDMOS FET includes a gate structure between a source region and a drain region over a p-type semiconductor substrate; and a trench isolation partially under the gate structure and between the gate structure and the drain region. A p-well is under and adjacent the source region; and an n-well is under and adjacent the drain region. A counter doping region abuts and is between the p-well and the n-well, and is directly underneath the gate structure. The counter doping region increases drain-source breakdown voltage compares to conventional approaches.
    Type: Application
    Filed: August 7, 2019
    Publication date: February 11, 2021
    Inventors: Baofu Zhu, Shesh Mani Pandey, Jiehui Shu, Sipeng Gu, Haiting Wang
  • Publication number: 20210014431
    Abstract: Embodiments of the present disclosure provide a method and apparatus for capturing video, an electronic device and a computer readable storage medium. The method includes: receiving a video capture trigger operation from a user via a video playing interface for an original video; superimposing a video capture window on the video playing interface, in response to the video capture trigger operation; receiving a video capture operation from the user via the video playing interface: and capture a user video in response to the video capture operation, and displaying the user video via the video capture window. According to the embodiments of the present disclosure, a user only needs to perform operations related to capturing a user video on the video playing interface, thereby implementing a function of combining video, and the operation process is simple and fast. The user video can represent the user's feelings, comments, or viewing reactions to the original video.
    Type: Application
    Filed: December 26, 2018
    Publication date: January 14, 2021
    Inventors: Haidong CHEN, Yipeng HAO, Haiting WANG, Junjie LIN
  • Publication number: 20200411684
    Abstract: One illustrative integrated circuit product disclosed herein includes a gate structure positioned above a semiconductor substrate, a source region and a drain region, both of which comprise an epi semiconductor material, wherein at least a portion of the epi semiconductor material in the source and drain regions is positioned in the substrate. In this example, the IC product also includes an isolation structure positioned in the substrate between the source region and the drain region, wherein the isolation structure comprises a channel-side edge and a drain-side edge, wherein the channel-side edge is positioned vertically below the gate structure and wherein a portion of the substrate laterally separates the isolation structure from the epi semiconductor material in the drain region.
    Type: Application
    Filed: June 27, 2019
    Publication date: December 31, 2020
    Inventors: Jiehui Shu, Judson R. Holt, Sipeng Gu, Haiting Wang
  • Publication number: 20200411053
    Abstract: Disclosed are a video processing method and apparatus, a terminal and a medium. The method includes acquiring a first editing parameter of a playback speed of a continuous video and a second editing parameter of a playback speed of each of at least one target video segment, where the continuous video is synthesized from at least two video segments and the at least one target video segment includes at least one of the at least two video segments; calculating a target playback speed of each of the at least two video segments according to the first editing parameter and the second editing parameter corresponding to the each of the at least one target video segment; and synthesizing, based on the target playback speed of the each of the at least two video segments, the at least two video segments into a target video conforming to a preset duration.
    Type: Application
    Filed: September 15, 2020
    Publication date: December 31, 2020
    Inventors: Xu HAN, Haiting WANG, Pingfei FU
  • Patent number: 10872979
    Abstract: An integrated circuit product is disclosed that includes a transistor device that includes a final gate structure, a gate cap, a low-k sidewall spacer positioned on and in contact with opposing sidewalls of the final gate structure, first and second contact etch stop layers (CESLs) located on opposite sides of the final gate structure, whereby the CESLs are positioned on and in contact with the low-k sidewall spacer, and a high-k spacer located on opposite sides of the final gate structure, wherein the high-k spacer is positioned in recesses formed in an upper portion of the CESLs.
    Type: Grant
    Filed: January 30, 2020
    Date of Patent: December 22, 2020
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Hui Zang, Chung Foong Tan, Guowei Xu, Haiting Wang, Yue Zhong, Ruilong Xie, Tek Po Rinus Lee, Scott Beasor
  • Patent number: 10840245
    Abstract: A semiconductor device comprising a substrate, a first fin and a second fin disposed on the substrate and an isolation material disposed on the substrate, wherein the isolation material separates the first fin and the second fin. A dielectric block is disposed between the first fin and the second fin, wherein the dielectric block is over the isolation material. A gate electrode covers the dielectric block.
    Type: Grant
    Filed: July 14, 2019
    Date of Patent: November 17, 2020
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Shesh Mani Pandey, Jiehui Shu, Haiting Wang
  • Publication number: 20200357647
    Abstract: Structures for a field effect-transistor and methods of forming a structure for a field-effect transistor. A gate electrode arranged adjacent to an outer sidewall spacer and an inner sidewall spacer. The gate electrode has a top surface that is recessed relative to the outer sidewall spacer and the inner sidewall spacer. A gate cap includes a first section of a first width arranged over the first section of the gate electrode and a second section of a second width arranged over the first section of the gate cap and the inner sidewall spacer. The second width is greater than the first width, and the inner sidewall spacer is composed of a low-k dielectric material.
    Type: Application
    Filed: May 9, 2019
    Publication date: November 12, 2020
    Inventors: Yanping Shen, Haiting Wang, Hui Zang
  • Patent number: 10832839
    Abstract: Device structures and fabrication methods for an on-chip resistor. A dielectric layer includes a trench with a bottom and a sidewall arranged to surround the bottom. A metal layer is disposed on the dielectric layer at the sidewall of the trench. The metal layer includes a surface that terminates the metal layer at the bottom of the trench to define a discontinuity that extends along a length of the trench.
    Type: Grant
    Filed: September 13, 2019
    Date of Patent: November 10, 2020
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Scott Beasor, Haiting Wang, Sipeng Gu, Jiehui Shu
  • Patent number: 10833169
    Abstract: Disclosed is a metal gate (e.g., a replacement metal gate (RMG) for a field effect transistor (FET) and a method of forming the metal gate. The method includes depositing a conformal dielectric layer to line a gate opening and performing a series of unclustered and clustered conformal metal deposition and chamfer processes to selectively adjust the heights of conformal metal layers within the gate opening. By selectively controlling the heights of the conformal metal layers, the method provides improved overall gate height control and gate quality particularly when the metal gate has a small critical dimension (CD) and/or a high aspect ratio (AR). The method can also include using different etch techniques during the different chamfer processes and, particularly, when different materials and/or different material interfaces are exposed to an etchant in order to ensure an essentially uniform etch rate of the conformal metal layer(s) at issue in a direction that is essentially vertical.
    Type: Grant
    Filed: April 22, 2019
    Date of Patent: November 10, 2020
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Tao Chu, Rongtao Lu, Ayse M. Ozbek, Wei Ma, Haiting Wang
  • Patent number: 10832966
    Abstract: Structures and fabrication methods for a field-effect transistor. First and second spacers are formed adjacent to opposite sidewalls of a gate structure. A section of the gate structure is partially removed with a first etching process to form a cut that extends partially through the gate structure. After partially removing the section of the gate structure with the first etching process, upper sections of the first and second sidewall spacers arranged above the gate structure inside the cut are at least partially removed. After at least partially removing the upper sections of the first and second sidewall spacers, the section of the gate structure is completely removed from the cut with a second etching process. A dielectric material is deposited inside the cut to form a dielectric pillar.
    Type: Grant
    Filed: February 20, 2018
    Date of Patent: November 10, 2020
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Chang Seo Park, Haiting Wang, Shimpei Yamaguchi, Junsic Hong, Yong Mo Yang, Scott Beasor
  • Patent number: 10832965
    Abstract: Integrated circuit devices include trenches in a material layer that divide the material layer into fins. With such devices, an insulator partially fills the trenches and contacts the material layer. The top surface of the insulator (e.g., the surface opposite where the insulator contacts the material layer) has a convex dome shape between at least two of the fins. The dome shape has a first thickness from (from the bottom of the trench) where the insulator contacts the fins, and a second thickness that is greater than the first thickness where the insulator is between the fins. Further, there is a maximum thickness difference between the first and second thicknesses at the midpoint between the fins (e.g., the highest point of the dome shape is at the midpoint between the fins). Also, the top surface of the first insulator has concave divots where the first insulator contacts the fins.
    Type: Grant
    Filed: January 11, 2018
    Date of Patent: November 10, 2020
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Yiheng Xu, Haiting Wang, Qun Gao, Scott Beasor, Kyung Bum Koo, Ankur Arya