Abstract: A method and apparatus for forming tungsten features in semiconductor devices is provided. The method includes exposing a top opening of a feature formed in a substrate to a physical vapor deposition (PVD) process to deposit a tungsten liner layer within the feature. The PVD process is performed in a first processing region of a first processing chamber and the tungsten liner layer forms an overhang portion, which partially obstructs the top opening of the feature. The substrate is transferred from the first processing region of the first processing chamber to a second processing region of a second processing chamber without breaking vacuum. The overhang portion is exposed to nitrogen-containing radicals in the second processing region to inhibit subsequent growth of tungsten along the overhang portion. The feature is exposed to a tungsten-containing precursor gas to form a tungsten fill layer over the tungsten liner layer within the feature.

Abstract: Embodiments of the present disclosure provide a method for forming a semiconductor package. In one embodiment, the method includes providing a first integrated circuit die having a first circuit design on a substrate, providing a second integrated circuit die having a second circuit design on the substrate, wherein the first and second integrated circuit dies are separated from each other by a scribe line.

Abstract: Interconnect structures and method of forming the same are disclosed herein. An exemplary interconnect structure includes a first contact feature in a first dielectric layer, a second dielectric layer over the first dielectric layer, a third dielectric layer over the second dielectric layer, a second contact feature extending through the second dielectric layer and the third dielectric layer, and a graphene layer between the second contact feature and the third dielectric layer.

Abstract: A method of decoding a bitstream by an electronic device is provided. The method determines a block unit from an image frame received from the bitstream. To reconstruct the block unit, the method receives, from a candidate list, first motion information having a first list flag for selecting a first reference frame and second motion information having a second list flag for selecting a second reference frame. The method then stores a predefined one of the first and second motion information for a sub-block determined in the block unit when the first list flag is identical to the second list flag.

Abstract: A control device for an electronic aerosol provision system is provided. The control device is configured to receive a replaceable component to form an electronic aerosol provision system. The control device includes a communication interface for performing communications external to the electronic aerosol provision system; a memory configured to hold a set of stored identifiers; and a control system. The control system is configured to: receive control information from a remote server via the communication interface; update the set of stored identifiers based on the control information received from the remote server; receive an identifier from a replaceable component received by the control device; make a comparison of the received identifier against the set of stored identifiers; and perform a control action for the electronic aerosol provision system dependent upon the result of said comparison.

Abstract: An auxiliary positioning system includes an ultra-wideband (UWB) element, and a service management and orchestration (SMO) apparatus and a near-real time ran intelligent controller (Near-RT RIC) connected with each other, wherein the SMO apparatus includes a non-real time ran intelligent controller (Non-RT RIC). The UWB element is connected to a second application disposed at at least one of the SMO apparatus, the Near-RT RIC and the Non-RT RIC through a first application. The UWB element is configured to output positioning information of a user device to the second application through the first application.

Abstract: A battery pack includes, a module stack in which a plurality of battery modules are stacked; a pack housing having a lower housing for supporting the module stack at a lower side thereof and an upper housing coupled to the lower housing from an upper side of the module stack; a plurality of weld nuts fixed to a lower surface of the lower housing; and a plurality of fastening bolts fastened to the weld nuts through the pack housing and the module stack.

Abstract: A system for expansion of open radio access network includes a service management and orchestration (SMO) apparatus and a near-real time ran intelligent controller (Near-RT RIC) connected with each other, wherein the SMO apparatus includes a non-real-time ran intelligent controller (Non-RT RIC). Each of the SMO apparatus, the Near-RT RIC and the Non-RT RIC includes a first decoder, and at least one of the SMO apparatus, the Near-RT RIC and the Non-RT RIC includes a second decoder. The first decoder is configured to decode a first packet of a first communication protocol, the second decoder is configured to decode a second packet of a second communication protocol, and the first communication protocol is different from the second communication protocol.

Abstract: The memory device includes at least one memory block with source and drain sides and a plurality of memory cells arranged in a plurality of word lines. The word lines are arranged in a plurality of independently programmable and erasable sub-blocks. Control circuitry is configured to program the memory cells of a selected sub-block and determine a location of the within the at least one memory block and determine a programming condition of at least one unselected sub-block. The control circuitry is also configured to program at least one word line in the selected sub-block in a plurality of program loops that include pre-charging processes. The control circuitry pre-charges a plurality of channels from either the source or drain side based on at least one of the location of the selected sub-block within the memory block and the programming condition of the at least one unselected sub-block.

Abstract: Disclosed are a pixel circuit and a driving method thereof, an array substrate and a display apparatus. The pixel circuit includes a pixel sub-circuit. The pixel sub-circuit includes a first adjusting circuit and a second adjusting circuit. The first adjusting circuit is configured to receive a first data signal and a light-emitting control signal to control a magnitude of a driving current used for driving a light-emitting element to emit light; the second adjusting circuit is configured to receive a second data signal and a time control signal to control a time duration in which the driving current is applied to the light-emitting element; and the time control signal changes within a time period during which the light-emitting control signal allows the driving current to be generated.

Abstract: A method and a system for inspecting an extreme ultra violet mask and a mask pod for such masks is provided. An EUV mask inspection tool inspects a mask retrieved from a mask pod placed on the load port positioned exterior of the mask inspection tool. The inspection process is performed during a selected period of time. After the inspection process is initiated, a robotic handling mechanism such as a robotic arm or an AMHS picks up the mask pod and inspects the mask pod for foreign particles. A mask pod inspection tool determines whether the mask pod needs cleaning or replacing based on a selected swap criteria. The mask pod is retrieved from the mask pod inspection tool and placed on the load port before the selected period of time lapses. This method and system promotes a reduction in the overall time required for inspecting the mask and the mask pod.

Abstract: An electronic vapor provision system includes a control unit configured to provide power from a battery in the control unit to components of the system, and including a controller configured to control components of the system; and an aerosolizable substrate material carrying portion separably connectable to the control unit to obtain power from the battery, and including a first electrical circuit including a characteristic-carrying element; and a second electrical circuit including a vapor generating element configured to generate an inhalable vapor from an aerosolizable substrate material; wherein: the second electrical circuit can be selectively provided with power from the battery when power is supplied to the aerosolizable substrate material carrying portion; and the controller is configured to operate in a first mode in which a characteristic of the characteristic-carrying element is determined by providing power from the battery to the first electrical circuit, and in a second mode in which the vapor

Abstract: Various embodiments of the present disclosure are directed towards a semiconductor processing system including an overlay (OVL) shift measurement device. The OVL shift measurement device is configured to determine an OVL shift between a first wafer and a second wafer, where the second wafer overlies the first wafer. A photolithography device is configured to perform one or more photolithography processes on the second wafer. A controller is configured to perform an alignment process on the photolithography device according to the determined OVL shift. The photolithography device performs the one or more photolithography processes based on the OVL shift.

Abstract: Embodiments of methods and associated apparatus for filling features in a silicon-containing dielectric layer of a substrate are provided herein. In some embodiments, a method of filling features in a silicon-containing dielectric layer of a substrate includes: depositing a discontinuous liner layer in the feature via a physical vapor deposition (PVD) process in a first process chamber; performing a hydrogen plasma process in a second process chamber to form silicon-hydrogen bonds on surfaces of the feature not covered by the discontinuous liner layer; and depositing a bulk tungsten layer on the discontinuous liner layer and over the silicon-hydrogen bonds to fill the feature with tungsten in a third process chamber.

Abstract: A decision support system of the industrial copper procurement is disclosed. The decision support system includes storage device, processing device and output device. The storage device stores a plurality of copper data and a plurality of algorithms. The processing device connects to the storage device. The processing device conduct a plurality of control commands to access the storage device and to implement copper price forecasting module, copper demand forecasting module, broken copper price forecasting module and purchasing decision reasoning module. The output device connected to the storage device and the processing device. The decision recommendation is output to the decision maker by the output device for deciding the copper procurement.

Abstract: An adaptive learning algorithm based on a single hidden layer neural network is disclosed. The algorithm includes the following steps: generating the initial single layer neural network with the first m+1 data by the initializing module; selecting the training data for the current round and determining whether the single layer neural network of the current round can achieve the learning goal. If so, checking all the hidden nodes by the reorganizing module and performing the deleting action to the hidden nodes to avoid the overfitting problems. If not, adjusting the weight parameters by the matching module and determining whether the adjusted neural network is acceptable, adding three new hidden nodes by the cramming module to obtain the acceptable neural network. The hidden nodes of the updated network are checked by the reorganization module to avoid the overfitting. The training process continues adding new data until all training data is trained.

Abstract: A method of forming a semiconductor device structure includes forming a nucleation layer within at least one feature. The method includes exposing the nucleation layer to a nitrogen plasma treatment. The nitrogen plasma treatment preferentially treats the top field and sidewalls while leaving the bottom surface substantially untreated to encourage bottom up metal growth.

Abstract: The electronic device includes a first substrate, a second substrate, a first support member, a planarization layer, and an alignment layer. The second substrate is opposite to the first substrate. The first support member is disposed in the peripheral region and located between the first substrate and the second substrate. The planarization layer is disposed on the first substrate and has a first portion and an opening. The first portion is disposed between the opening, and the first support member and the first portion are overlapped in a normal direction of the first substrate. The alignment layer is disposed on the planarization layer. The alignment layer on the first portion has a first thickness. The alignment layer in the opening has a second thickness. The first thickness is greater than or equal to zero and less than the second thickness.

Abstract: A method of forming a structure on a substrate includes forming a tungsten nucleation layer within at least one feature. The method includes forming the nucleation layer via a cyclic vapor deposition process. The cyclic vapor deposition process includes forming a portion of the nucleation layer and then exposing the exposing the nucleation layer a chemical vapor transport (CVT) process to remove impurities from the portion of the nucleation layer. The CVT process may be performed at a temperature of 400 degrees Celsius or less and comprises forming a plasma from a processing gas comprising greater than or equal to 90% of hydrogen gas of a total flow of hydrogen gas and oxygen.

Abstract: A method of control for an aerosol delivery device can include measuring airflow during a plurality of inhalations of a user of the aerosol delivery device; and modelling one or more inhalation airflow profiles of the user based upon the measurements.