Patents by Inventor Hideki Horii
Hideki Horii has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11393980Abstract: A variable resistance memory device includes a first electrode on a substrate, a variable resistance pattern on the first electrode, a second electrode on the variable resistance pattern, a selection pattern structure on the second electrode, and a third electrode on the selection pattern structure. The selection pattern structure may include a first leakage current prevention pattern and a selection pattern sequentially stacked, and the first leakage current pattern may include a two-dimensional transition metal dichalcogenide (TMDC) material.Type: GrantFiled: June 11, 2020Date of Patent: July 19, 2022Assignee: Samsung Electronics Co., Ltd.Inventors: Hideki Horii, Jungmoo Lee
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Patent number: 11387410Abstract: A semiconductor device includes a base structure comprising a semiconductor substrate, a first conductive structure disposed on the base structure, and extending in a first direction, the first conductive structure including lower layers, and at least one among the lower layers including carbon, and a data storage pattern disposed on the first conductive structure. The semiconductor device further includes an intermediate conductive pattern disposed on the data storage pattern, and including intermediate layers, at least one among the intermediate layers including carbon, a switching pattern disposed on the intermediate conductive pattern, and a switching upper electrode pattern disposed on the switching pattern, and including carbon. The semiconductor device further includes a second conductive structure disposed on the switching upper electrode pattern, and extending in a second direction intersecting the first direction, and a hole spacer disposed on a side surface of the data storage pattern.Type: GrantFiled: February 25, 2020Date of Patent: July 12, 2022Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Jeonghee Park, Kwangmin Park, Jiho Park, Gyuhwan Oh, Jungmoo Lee, Hideki Horii
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Publication number: 20210167285Abstract: A variable resistance memory device includes a first electrode on a substrate, a variable resistance pattern on the first electrode, a second electrode on the variable resistance pattern, a selection pattern structure on the second electrode, and a third electrode on the selection pattern structure. The selection pattern structure may include a first leakage current prevention pattern and a selection pattern sequentially stacked, and the first leakage current pattern may include a two-dimensional transition metal dichalcogenide (TMDC) material.Type: ApplicationFiled: June 11, 2020Publication date: June 3, 2021Inventors: Hideki HORII, Jungmoo LEE
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Publication number: 20200388758Abstract: A semiconductor device includes a base structure comprising a semiconductor substrate, a first conductive structure disposed on the base structure, and extending in a first direction, the first conductive structure including lower layers, and at least one among the lower layers including carbon, and a data storage pattern disposed on the first conductive structure. The semiconductor device further includes an intermediate conductive pattern disposed on the data storage pattern, and including intermediate layers, at least one among the intermediate layers including carbon, a switching pattern disposed on the intermediate conductive pattern, and a switching upper electrode pattern disposed on the switching pattern, and including carbon. The semiconductor device further includes a second conductive structure disposed on the switching upper electrode pattern, and extending in a second direction intersecting the first direction, and a hole spacer disposed on a side surface of the data storage pattern.Type: ApplicationFiled: February 25, 2020Publication date: December 10, 2020Applicant: SAMSUNG ELECTRONICS CO., LTD.Inventors: Jeonghee PARK, Kwangmin Park, Jiho Park, Gyuhwan Oh, Jungmoo Lee, Hideki Horii
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Patent number: 10714685Abstract: Forming a semiconductor device that includes a memory cell array may include performing a switching firing operation on one or more memory cells of the memory array to cause a threshold voltage distribution associated with threshold switching devices in the memory cells to be reduced. The switching device firing operation may be performed such that the threshold voltage distribution is reduced while maintaining the one or more threshold switching devices in the amorphous state. Performing the switching device firing operation on a threshold switching device may include heating the threshold switching device, applying a voltage to the threshold switching device, applying a current to the threshold switching device, some combination thereof, or the like.Type: GrantFiled: August 1, 2019Date of Patent: July 14, 2020Assignee: Samsung Electronics Co., Ltd.Inventors: Min Kyu Yang, Seong Geon Park, Dong Jun Seong, Dong Ho Ahn, Jung Moo Lee, Seol Choi, Hideki Horii
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Patent number: 10636968Abstract: A variable resistance memory device includes first conductive lines positioned above a substrate. Each of the first conductive lines extends in a first direction and a second direction. Second conductive lines extend in the first direction and the second direction. The second conductive lines are positioned above the first conductive lines. A memory is positioned between the first and second conductive lines. The memory unit overlaps the first and second conductive lines in a third direction. The memory unit includes a first electrode, a variable resistance pattern positioned on the first electrode, and a second electrode positioned on the variable resistance pattern. A selection pattern is positioned on each memory unit. A third electrode is positioned above the selection pattern. The third electrode is in direct contact with a lower surface of each of the second conductive lines.Type: GrantFiled: February 15, 2019Date of Patent: April 28, 2020Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Hideki Horii, Seong-Geon Park, Dong-Ho Ahn, Jung-Moo Lee
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Patent number: 10546894Abstract: A memory device includes a plurality of word lines extending along a first direction and spaced apart from each other along a second direction that is perpendicular to the first direction; a plurality of bit lines extending along the second direction and spaced apart from each other in the first direction, the plurality of bit lines being spaced apart from the plurality of word lines in a third direction that is perpendicular to both the first and second directions; and a plurality of memory cells being respectively arranged between the corresponding word and bit lines. Each of the memory cells includes a selection device layer, and a variable resistance layer, wherein the selection device layer includes a chalcogenide switching material having a composition according to a particular chemical formula.Type: GrantFiled: December 20, 2018Date of Patent: January 28, 2020Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Zhe Wu, Dong-ho Ahn, Hideki Horii, Soon-oh Park, Jeong-hee Park, Jin-woo Lee, Dong-jun Seong, Seol Choi
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Patent number: 10468594Abstract: A variable resistance memory device includes a pattern of one or more first conductive lines, a pattern of one or more second conductive lines, and a memory structure between the first and second conductive lines. The pattern of first conductive lines extends in a first direction on a substrate, and the first conductive lines extend in a second direction crossing the first direction. The pattern of second conductive lines extends in the second direction on the first conductive lines, and the second conductive lines extend in the first direction. The memory structure vertically overlaps a first conductive line and a second conductive line. The memory structure includes an electrode structure, an insulation pattern on a central upper surface of the electrode structure, and a variable resistance pattern on an edge upper surface of the electrode structure. The variable resistance pattern at least partially covers a sidewall of the insulation pattern.Type: GrantFiled: November 22, 2016Date of Patent: November 5, 2019Assignee: Samsung Electronics Co., Ltd.Inventors: Jin-Woo Lee, Soon-Oh Park, Jeong-Hee Park, Hideki Horii
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Patent number: 10403818Abstract: Forming a semiconductor device that includes a memory cell array may include performing a switching firing operation on one or more memory cells of the memory array to cause a threshold voltage distribution associated with threshold switching devices in the memory cells to be reduced. The switching device firing operation may be performed such that the threshold voltage distribution is reduced while maintaining the one or more threshold switching devices in the amorphous state. Performing the switching device firing operation on a threshold switching device may include heating the threshold switching device, applying a voltage to the threshold switching device, applying a current to the threshold switching device, some combination thereof, or the like.Type: GrantFiled: January 9, 2017Date of Patent: September 3, 2019Assignee: Samsung Electronics Co., Ltd.Inventors: Min Kyu Yang, Seong Geon Park, Dong Jun Seong, Dong Ho Ahn, Jung Moo Lee, Seol Choi, Hideki Horii
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Patent number: 10403681Abstract: A memory device is provided. The memory device includes a variable resistance layer. A selection device layer is electrically connected to the variable resistance layer. The selection device layer includes a chalcogenide switching material having a composition according to chemical formula 1 below, [GeASeBTeC](1-U)[X]U??(1) where 0.20?A?0.40, 0.40?B?0.70, 0.05?C?0.25, A+B+C=1, 0.0?U?0.20, and X is at least one selected from boron (B), carbon (C), nitrogen (N), oxygen (O), phosphorus (P), or sulfur (S).Type: GrantFiled: December 6, 2017Date of Patent: September 3, 2019Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Dong-ho Ahn, Zhe Wu, Soon-oh Park, Hideki Horii
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Patent number: 10388867Abstract: A variable resistance memory device including a selection pattern; an intermediate electrode contacting a first surface of the selection pattern; a variable resistance pattern on an opposite side of the intermediate electrode relative to the selection pattern; and a first electrode contacting a second surface of the selection pattern and including a n-type semiconductor material, the second surface of the selection pattern being opposite the first surface thereof.Type: GrantFiled: October 17, 2016Date of Patent: August 20, 2019Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Zhe Wu, Soon-Oh Park, Jeong-Hee Park, Dong-Ho Ahn, Hideki Horii
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Publication number: 20190189920Abstract: A variable resistance memory device includes first conductive lines positioned above a substrate. Each of the first conductive lines extends in a first direction and a second direction. Second conductive lines extend in the first direction and the second direction. The second conductive lines are positioned above the first conductive lines. A memory is positioned between the first and second conductive lines. The memory unit overlaps the first and second conductive lines in a third direction. The memory unit includes a first electrode, a variable resistance pattern positioned on the first electrode, and a second electrode positioned on the variable resistance pattern. A selection pattern is positioned on each memory unit. A third electrode is positioned above the selection pattern. The third electrode is in direct contact with a lower surface of each of the second conductive lines.Type: ApplicationFiled: February 15, 2019Publication date: June 20, 2019Inventors: Hideki Horii, Seong-Geon Park, Dong-Ho Ahn, Jung-Moo Lee
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Publication number: 20190148456Abstract: A memory device includes a plurality of word lines extending along a first direction and spaced apart from each other along a second direction that is perpendicular to the first direction; a plurality of bit lines extending along the second direction and spaced apart from each other in the first direction, the plurality of bit lines being spaced apart from the plurality of word lines in a third direction that is perpendicular to both the first and second directions; and a plurality of memory cells being respectively arranged between the corresponding word and bit lines. Each of the memory cells includes a selection device layer, and a variable resistance layer, wherein the selection device layer includes a chalcogenide switching material having a composition according to a particular chemical formula.Type: ApplicationFiled: December 20, 2018Publication date: May 16, 2019Inventors: Zhe Wu, Dong-ho Ahn, Hideki Horii, Soon-oh Park, Jeong-hee Park, Jin-woo Lee, Dong-jun Seong, Seol Choi
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Patent number: 10236444Abstract: A variable resistance memory device includes first conductive lines positioned above a substrate. Each of the first conductive lines extends in a first direction and a second direction. Second conductive lines extend in the first direction and the second direction. The second conductive lines are positioned above the first conductive lines. A memory is positioned between the first and second conductive lines. The memory unit overlaps the first and second conductive lines in a third direction. The memory unit includes a first electrode, a variable resistance pattern positioned on the first electrode, and a second electrode positioned on the variable resistance pattern. A selection pattern is positioned on each memory unit. A third electrode is positioned above the selection pattern. The third electrode is in direct contact with a lower surface of each of the second conductive lines.Type: GrantFiled: February 14, 2017Date of Patent: March 19, 2019Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Hideki Horii, Seong-Geon Park, Dong-Ho Ahn, Jung-Moo Lee
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Patent number: 10224371Abstract: A memory device includes a variable resistance layer and a selection device layer electrically connected to the variable resistance layer. The memory device further included a chalcogenide switching material that reduces leakage current and has, for example, a composition according to chemical formula 1 below, [GeXSiY(AsaTe1-a)Z](1-U)[N]U??(1) (where 0.05?X?0.1, 0.15?Y?0.25, 0.7?Z?0.8, X+Y+Z=1, 0.45?a?0.6, and 0.08?U?0.2).Type: GrantFiled: February 1, 2017Date of Patent: March 5, 2019Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Zhe Wu, Dong-ho Ahn, Hideki Horii, Soon-oh Park, Jeong-hee Park, Jin-woo Lee, Dong-jun Seong, Seol Choi
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Patent number: 10186552Abstract: A variable resistance memory device may include: a first electrode layer; a selection device layer on the first electrode layer, the selection device layer including a chalcogenide switching material consisting essentially of germanium (Ge), selenium (Se), and antimony (Sb), wherein a content of the Ge is less than a content of the Se based on an atomic weight; a second electrode layer on the selection device layer; a variable resistance layer on the second electrode layer, the variable resistance layer including a chalcogenide material; and a third electrode layer on the variable resistance layer.Type: GrantFiled: March 1, 2017Date of Patent: January 22, 2019Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Seol Choi, Hideki Horii, Dong-ho Ahn, Seong-geon Park, Dong-jun Seong, Min-kyu Yang, Jung-moo Lee
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Publication number: 20180277601Abstract: A memory device is provided. The memory device includes a variable resistance layer. A selection device layer is electrically connected to the variable resistance layer. The selection device layer includes a chalcogenide switching material having a composition according to chemical formula 1 below, [GeASeBTeC](1-U)[X]U??(1) where 0.20?A?0.40, 0.40?B?0.70, 0.05?C?0.25, A+B+C=1, 0.0?U?0.20, and X is at least one selected from boron (B), carbon (C), nitrogen (N), oxygen (O), phosphorus (P), or sulfur (S).Type: ApplicationFiled: December 6, 2017Publication date: September 27, 2018Inventors: Dong-ho Ahn, Zhe Wu, Soon-oh Park, Hideki Horii
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Publication number: 20180047899Abstract: A variable resistance memory device includes first conductive lines positioned above a substrate. Each of the first conductive lines extends in a first direction and a second direction. Second conductive lines extend in the first direction and the second direction. The second conductive lines are positioned above the first conductive lines. A memory is positioned between the first and second conductive lines. The memory unit overlaps the first and second conductive lines in a third direction. The memory unit includes a first electrode, a variable resistance pattern positioned on the first electrode, and a second electrode positioned on the variable resistance pattern. A selection pattern is positioned on each memory unit. A third electrode is positioned above the selection pattern. The third electrode is in direct contact with a lower surface of each of the second conductive lines.Type: ApplicationFiled: February 14, 2017Publication date: February 15, 2018Inventors: HIDEKI HORII, SEONG-GEON PARK, DONG-HO AHN, JUNG-MOO LEE
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Patent number: 9893281Abstract: Provided are a semiconductor device and a method of fabricating the same. The semiconductor device may include a selection element, a lower electrode pattern provided on the selection element to include a horizontal portion and a vertical portion; and a phase-changeable pattern on the lower electrode pattern. The vertical portion may extend from the horizontal portion toward the phase-changeable pattern and have a top surface, whose area is smaller than that of a bottom surface of the phase-changeable pattern.Type: GrantFiled: November 7, 2016Date of Patent: February 13, 2018Assignee: Samsung Electronics Co., Ltd.Inventors: Hideki Horii, Jeonghee Park, Sugwoo Jung
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Publication number: 20180040818Abstract: Forming a semiconductor device that includes a memory cell array may include performing a switching firing operation on one or more memory cells of the memory array to cause a threshold voltage distribution associated with threshold switching devices in the memory cells to be reduced. The switching device firing operation may be performed such that the threshold voltage distribution is reduced while maintaining the one or more threshold switching devices in the amorphous state. Performing the switching device firing operation on a threshold switching device may include heating the threshold switching device, applying a voltage to the threshold switching device, applying a current to the threshold switching device, some combination thereof, or the like.Type: ApplicationFiled: January 9, 2017Publication date: February 8, 2018Applicant: Samsung Electronics Co., Ltd.Inventors: Min Kyu YANG, Seong Geon PARK, Dong Jun SEONG, Dong Ho AHN, Jung Moo LEE, Seol CHOI, Hideki HORII