Abstract: The present invention provide with a rinse solution for lithography and a resist pattern forming method using the same, which can prevent an inclination and peeling-off of a resist pattern and form a resist pattern having a high aspect ratio with high reproducibility. The rinse solution for lithography of the present invention comprises water and a nonionic surfactant having an ethyleneoxy group but not having a fluorine atom. The resist forming method of the present invention comprises the step of rinsing the pattern after development treatment with the rinse solution for lithography.

Abstract: A method of manufacturing a synthetic resin lens, comprising: adjusting a degree of change in transmittance of a lens member made of synthetic resin for a blue violet laser beam with accumulated application of the blue violet laser beam, by applying to the lens member an electromagnetic wave shorter in wavelength than the blue violet laser beam.

Abstract: The present invention is to provide a method for producing a semiconductor laser diode (LD) with an enhanced ESD resistance. The method includes a step for forming an aluminum film on a facet of the LD and a step for forming an aluminum oxide film on the aluminum film. The underlying aluminum film is oxidized during the formation of the aluminum oxide film to form a double aluminum oxide layer. The ratio of the oxide composition of the underlying aluminum oxide film is smaller than that of the upper aluminum oxide film.

Abstract: An information processor for preventing information contained in a file, which has a first area storing first data, a second area storing second data and a third area, from being lost when a format of the file is transformed includes extension unit for extending the second area, a first storage for storing the first data, which is stored in the first area, in the third area, a format analyzer for reconstructing the second data stored in the second area on the basis of a first format and an extended area storage for storing the reconstructed second data in the extended second area.

Abstract: In a CD-DA, encoded content in which audio information is encoded using a content key, the content key, and two usage right files are recorded in predetermined regions. The usage right files are a CD-DA usage right file having CD-DA usage rights, and a CD-R usage right file having CD-R usage rights. The usage rights recorded in the CD-DA usage right file regulate the usage on a CD-DA.

Abstract: An internal combustion engine for a vehicle comprises a pair of intake collectors (3A, 3B) and a communicating pipe (13) connecting the pair of intake collectors (3A, 3B). A negative pressure supply port (15) supplying intake negative pressure of the internal combustion engine to a brake booster is provided at an end of the communicating pipe (13). By providing an air amount deviation compensating arrangement which compensates for a deviation in the amounts of air flowing into the pair of intake collectors (3A, 3B) from the brake booster when braking of the vehicle is released, the amounts of air supplied to the internal combustion engine from the pair of the intake collectors (3A, 3B) are equalized.

Abstract: An objective lens formed of a synthetic resin material having characteristics of substantially not reducing transmittance of the objective lens when a first laser beam having a first wavelength passes through the objective lens, and reducing the transmittance according to an elapsed time to apply a second laser beam when the second laser beam having a second wavelength shorter than the first wavelength and longer than a wavelength of ultraviolet light passes through the objective lens, the objective lens being irradiated with the ultraviolet light in advance for a predetermined time such that a change in the transmittance for the second laser beam is set within a predetermined range.

Abstract: A SiC device includes: a substrate; a drift layer; a base region; a source region; a channel layer connecting the drift layer and the source region; a gate oxide film on the channel layer and the source region; a gate electrode on the gate oxide film; an interlayer insulation film with a contact hole having a barrier layer and a BPSG insulation film on the gate electrode; a source electrode having upper and lower wiring electrodes on the interlayer insulation film and in the contact hole for connecting the base region and the source region; and a drain electrode on the substrate. The barrier layer prevents a Ni component in the lower wiring electrode from being diffused into the BPSG insulation film.

Abstract: A method for actuating active vibration insulators includes the steps of generating an idling control signal in an idling range of a vehicle, generating a running control signal in a running range of the vehicle, and actuating an electromagnetic actuator of an active vibration insulator based on the idling control signal or the running control signal, thereby inhibiting vibrations of a vehicle engine from transmitting by the electromagnetic actuator. The idling control signal is produced by adding a higher order harmonic signal component with respect to a control frequency, based on a cyclic pulsating signal emitted from the vehicle engine, to a fundamental-wave signal component of the control frequency. The running control signal is composed of the fundamental-wave signal component of the control signal. The method can inhibit noises from generating by actuating simple electromagnetic actuators, and can damp vibrations of vehicle engines simply and less expensively.

Abstract: An active vibration insulator includes an electromagnetic actuator, a control-signals generating device, a driver, a calculator, and a judging device. The electromagnetic actuator generates vibrating forces depending on electric-current supplies. The control-signals generating device generates cyclic control signals based on cyclic pulsating signals output from a vibration generating source of a vehicle. The cyclic control signals actively inhibit vibrations generated by the vibration generating source from transmitting to a specific part of the vehicle. The driver drives the electromagnetic actuator by making the electric-current supplies variable based on the cyclic control signals. The calculator calculates an estimated transfer function composed of estimated values of a transfer function for a transfer system including the electromagnetic actuator and the driver. The judging device judges an inoperative malfunction of the electromagnetic actuator based the estimated transfer function.

Abstract: This invention provides an optical disc device and method for discriminating between DVD and HD-DVD more rapidly. After an optical pickup has been stopped above a data region on the optical disc, a tracking error signal generator acquires amplitude “Vdpp” based on a DPP method and amplitude “Vdpd” based on a DPD method as tracking error signals. A disc discriminator discriminates the kind of optical disc by comparing the acquired “Vdpp” and “Vdpd” data with a threshold level “Vth”. Alternatively, the optical pickup is stopped above the data region and a system lead-in region on the optical disc, and then amplitude values “Vdata” and “Vlead” of tracking error signals are acquired and compared.

Abstract: A method of manufacturing a silicon carbide semiconductor device having a MOS structure includes preparing a substrate made of silicon carbide, and forming a channel region, a first impurity region, a second impurity region, a gate insulation layer, and a gate electrode to form a semiconductor element on the substrate. In addition, a film is formed on the semiconductor element to provide a material of an interlayer insulation layer, and a reflow process is performed at a temperature about 700° C. or over in an wet atmosphere so that the interlayer insulation layer is formed from the film and an edge portion of the gate electrode is rounded and oxidized.

Abstract: A method of manufacturing a silicon carbide semiconductor device having a MOS structure includes preparing a substrate made of silicon carbide, and forming a channel region, a first impurity region, a second impurity region, a gate insulation layer, and a gate electrode to form a semiconductor element on the substrate. In addition, a film is formed on the semiconductor element to provide a material of an interlayer insulation layer, and a reflow process is performed at a temperature about 700° C. or over in an wet atmosphere so that the interlayer insulation layer is formed from the film. Furthermore, a dehydration process is performed at about 700° C. or lower in an inert gas atmosphere after the reflow process is performed.

Abstract: The present invention is to provide a method for producing a semiconductor laser diode (LD) with an enhanced ESD resistance. The method includes a step for forming an aluminum film on a facet of the LD and a step for forming an aluminum oxide film on the aluminum film. The underlying aluminum film is oxidized during the formation of the aluminum oxide film to form a double aluminum oxide layer. The ratio of the oxide composition of the underlying aluminum oxide film is smaller than that of the upper aluminum oxide film.

Abstract: An acceleration sensor state detecting apparatus for detecting a state of an acceleration sensor provided at a vibrating body includes a calculating method for calculating a difference between measured results of the acceleration sensor obtained per first predetermined time that is shorter than a vibration period of the vibrating body, and a determining method for determining that the acceleration sensor is in an error state in a case that a state in which the difference calculated falls into a range between a predetermined upper limit value and a predetermined lower limit value continues for a second predetermined time or more.

Abstract: An active vibration damping device having a solenoid actuator designed with a movable element positioned inserted into a guide hole of a stator having a yoke member is attached about a coil to form a stator-side magnetic path with the guide hole lying on its center axis, so that current passed through the coil creates actuating force in the axial direction between the stator and the movable element. A magnetic acting force stabilizing portion having a shape that gradually varies in association with axial displacement of the movable element an level of magnetic acting force between a movable element-side magnetic pole forming portion and a stator-side magnetic pole forming portion is disposed on the movable element-side magnetic pole forming portion where a magnetic pole is produced in the movable element and/or the stator-side magnetic pole forming portion where a magnetic pole is produced in the stator.

Abstract: An electromagnetic actuator having: a stator and a movable member disposed in a central hole of a coil member of the stator movable in an axial direction; a coupling rod fixed to the movable member; and an elastic stopper having a ring shaped sealing unit at its outer periphery part, a first stopper unit at its center part, a coupling unit that mutually couples the sealing unit and the first stopper unit, and second stopper units located radially between the sealing unit and the first stopper unit at respective circumferential positions. The sealing unit is compressed between the bottom wall of a housing and a lid member to form a sealing mechanism that fluid-tightly close an opening of an adjustment hole. The first stopper unit axially faces the coupling rod bottom with a first separation distance, and the second stopper units axially face the movable member bottom with a second separation distance greater than the first.

Abstract: An acceleration sensor state detecting apparatus for detecting a state of an acceleration sensor provided at a vibrating body includes a calculating method for calculating a difference between measured results of the acceleration sensor obtained per first predetermined time that is shorter than a vibration period of the vibrating body, and a determining method for determining that the acceleration sensor is in an error state in a case that a state in which the difference calculated falls into a range between a predetermined upper limit value and a predetermined lower limit value continues for a second predetermined time or more.

Abstract: A fluid-filled active vibration damping device wherein a solenoid actuator designed with a movable element positioned inserted into a guide hole of a stator having a yoke member is attached about a coil to form a stator-side magnetic path with the guide hole lying on its center axis, so that current passed through the coil creates actuating force in an axial direction between the stator and the movable element. A bias urging assembly is disposed for urging the movable element in one axis-perpendicular direction to the stator. A plastic deformation member disposed between opposing faces of the movable element and the oscillation member, and is adapted to be deformed in a plastic deformation region exceeding an elastic deformation domain so as to define approaching ends of the movable element and the oscillation member in a mutually approaching direction.

Abstract: An active vibration insulator includes an electromagnetic actuator, a cyclic-control-signals output device, and an electromagnetic-actuator driver. The electromagnetic-actuator driver includes an asymmetric half-bridge circuit, and an actuating-signals output device. The actuating-signal output device outputs a signal for turning on one of a high-side switch and a low-side switch of the asymmetric half-bridge circuit, and outputs a pulse-width-modulated actuating signal for actuating the other one of them by means of pulse-width modulation based on the cyclic control signals, which the cyclic-control-signals output device outputs, or outputs a pulse-width-modulated actuating signal for actuating both of them by means of pulse-width modulation when the cyclic control signals are positive.