Abstract: An electron beam apparatus used in a cell projection method has a system for correcting the electron optics. A figured electron beam that has been passed through a cell having a complex figure shape is directed onto a stage on which a substrate is positioned. A fine hole is formed in the substrate and an electron detector is positioned underneath the fine hole to receive the electrons that pass through the fine hole. The output signal of the electron detector is processed to provide a representation of the degree of focus and astigmatism correction of the electron optics. When a line and space pattern is used to shape the electron beam, the output signal from the electron detector has a series of peak intensity values that, when maximized, indicate an optimum correction of the electron optics. Optionally, a limited aperture is positioned between the substrate having a fine hole and the electron detector to limit the detection of scattered electrons that have not passed through the fine hole.

Abstract: A clock signal supply system is disclosed for a semiconductor device with a semiconductor chip and a wiring substrate connected in flip-chip fashion and an optical waveguide interposed in the space between electrode members, in which the mutual arrangement of the electrical interconnection and the optical waveguide interconnection on the wiring substrate is not affected and can be used separately from each other for different applications, thereby improving the throughput of the interconnections as a whole.

Abstract: An electron beam writing system which permits a relatively low voltage to be applied to perform high speed focus correction with high accuracy. The electron beam writing system includes a focus corrector arranged inside a lens which provides the largest product of the magnification factors of the lens and all succeeding lenses and the optical path length of the lens at issue. Thus, the electron beam provides high sensitivity and a small change in the magnification ratio due to the correction.

Abstract: A process for producing an optical element using a liquid crystalline polymer and superior in heat resistance is provided. In a process for producing an optical element comprising a light transmitting substrate, an alignment film formed on the substrate and a layer of a liquid crystalline polymer formed on the alignment film, or in a process for producing an optical element, involving transferring a layer of a liquid crystalline polymer formed on an orientating substrate onto a light transmitting substrate, the said liquid crystalline polymer being a heat-polymerizable polymer which exhibits a nematic orientation or a twisted nematic orientation in the state of liquid crystal and which assumes a glassy state at a temperature below the liquid crystal transition point thereof, the liquid crystalline polymer layer is heat-treated during an orientating treatment, or after fixing of the orientation obtained, or after the transfer.

Abstract: A cap is attached to a high-tension cable terminal for sealing an opening formed on an automobile engine. The cap includes a hollow cap body made of rubber and having a cylindrical portion, a hood integrally formed with and extending outwardly from the cap body, and a seal ring securely mounted on the cylindrical portion of the cap body. The seal ring is made of rubber different from the rubber of the cap body and has a high heat resistance and a sufficient elasticity. When the cap is mounted on the opening, the seal ring engages the inner peripheral surface of the opening to provide a seal against dirt, dust and water. Alternatively, the seal ring may be made of rubber of the same quality as the cap body. In this case, the hardness of the seal ring is rendered to be less than that of the cap body.

Abstract: Drift values of exposure position of an electron beam are obtained through detection of a reference mark on a sample stage and a drift characteristic formula which expresses the exposure positions of the electron beam is corrected by using a plurality of the drift values. The electron beam is controlled to expose some lithographic pattern by estimating the exposure position in real time at which the electron beam is irradiated at the estimated exposure position based on the drift characteristic formula without detecting the reference mark, and further to expose other lithographic pattern by calculating the exposure position based on the drift characteristic formula by detecting the reference mark. The measuring of the drift which takes much time are partly taken place at few limitted positions and the correction of the exposure positions is effectively in a short time.

Abstract: Disclosed herein is a process comprising introducing a chlorine-containing gas through an adsorbent to adsorb chlorine and thereafter reducing the pressure of the adsorbent to a pressure lower than that during the introduction, thereby obtaining an effluent gas with a higher chlorine concentration than that of the introduced gas. Among preferably usable adsorbents are zeolite, non-zeolite-type porous acidic oxides and active carbon.

Abstract: A flame retardant resin composition which includes the following component (A) and component (B) blended in the ratio (A):(B)=100:1-40 parts by weight. Component (A) is a thermoplastic resin including 0-70% by weight of a rubber component and 100-30% by weight of a polymer component formed from monomers comprising a methylated aromatic vinyl monomer and an hydroxylated aromatic vinyl monomer and, optionally, an aromatic vinyl monomer other than the above monomers, a cyanated vinyl monomer, a (meth)acrylic acid ester monomer, maleic anhydride, and a maleimide monomer; graft ratio of the thermoplastic resin being 10-150% when the rubber component is used. Component (B) is a flame retarder.

Abstract: A method and an apparatus for concentrating/purifying a chlorine gas are disclosed in which a pressure swing adsorption method for alternately repeating an adsorbing operation and a desorbing operation employing one or more adsorption towers packed with an adsorbent for adsorbing the chlorine gas are used to obtain a high-purity concentrated/purified chlorine gas and an exhaust gas containing virtually no chlorine gas is obtained from the chlorine gas containing impurities by terminating the adsorption operation when the rate of temperature rise near the outlet end of an adsorption tower due to adsorption of chlorine therein rises above a predetermined amount.

Abstract: In a high speed logic circuit using a vertical hetero-junction bipolar transistor, in which two-dimensional carriers formed at a semiconductor hetero-junction interface are used as a base layer, the uppermost layer being a collector layer, the lowest layer being an emitter layer, two base electrodes making contact with the base layer are disposed so as to put a collector electrode, which is electrically in contact with the collector layer, therebetween. The base electrodes are used at the same time as a source electrode and a drain electrode, respectively, of a field effect transistor using the two-dimensional carriers as an active layer. The high speed logic circuit is so constructed that one of the base electrodes of the bipolar transistor is an input terminal; the other is connected with a power supply; the emitter is grounded; and the collector is an output terminal.

Abstract: A nonlinear optical material having a high nonlinear optical constant useful for frequency doubler of laser beam which comprises a chiral smectic C liquid crystalline polyester consisting essentially of the structural units having the general formulae (A), (B) and (C); ##STR1## Wherein X is a structural unit selected from the group consisting of ##STR2## Wherein Y is a group having at least one optically active carbon and the total carbon number of Y is 3-12. ##STR3## wherein n is an integer of 2-10.

Abstract: An electron beam writing system is used in variable shaping and cell projection methods to produce LSI and reticles. In the cell projection method, the beam is deflected to define a writing position. In the time it takes to define the writing position, an operation of forming the beam is concluded, which operation includes the deflection of the beam to select a cell graphic, re-deflection for correcting the origin position of the written graphic, astigmatism correction of the written graphic, and focus correction for reducing the Coulomb effect. An electrostatic deflector is used as the deflector for the cell graphic selection. The arrangement of graphics includes a square aperture centrally located with a group of cell projection apertures positioned adjacent two sides of the square aperture.

Abstract: A flip-flop circuit receives a pair of complementary data signals, then outputs complementary signals corresponding to the pair of complementary data signals. The pair of data signals are also supplied to a driving gate means which outputs a signal corresponding to at least one data signal of the pair of data signals supplied thereto. The driving gate means also comprises at least one try-state gate controlled by a clock signal. An output signal of the driving gate means is held by a memory means, and also outputted as complementary output signals.

Abstract: A flame retardant resin composition including the following components (A), (B) and (C) in the ratio (A):(B):(C)=15-99:0-84:1-30% by weight; and wherein the molar ratio of bromine atom and antimony atom is 1.2-4.5:1.

Abstract: A gaseous mixture containing chlorine, carbon dioxide and non-condensable gas is compressed and cooled to separate it into a residual gas formed principally of a major portion of the non-condensable gas and a condensate formed primarily of chlorine. The condensate is fed to a stripping column to desorb carbon dioxide and a minor portion of the non-condensable gas dissolved in the condensate. The stripped gas formed primarily of chlorine and carbon dioxide may be treated further. Namely, the stripped gas is mixed with the residual gas. At least a portion of the mixed gas is fed into an absorption column, whereby a major portion of remaining chlorine is absorbed to lower the chlorine content Removal of chlorine from such a gaseous mixture or an off-gas from the above process can be achieved by washing it with an aqueous solution or suspension containing an alkali metal sulfite and/or an alkaline earth metal sulfite while controlling the pH of the solution or suspension within a range of 1.9-6.3.

Abstract: A chiral smectic C liquid crystalline polyester consisting essentially of structural units (A), (B) and (C) of the following formulae:______________________________________ (A) ##STR1## 40-60 mole % (B) ##STR2## 1-60 mole % which is optically active and wherein R represents an alkyl group having 1 to 3 carbon atoms, or chlorine, and l is an integer of 1 to 4, and (C) OR'O 0-59 mole % ______________________________________wherein R' represents a straight chain or branched divalent hydrocarbon group having 2 to 18 carbon atoms.

Abstract: A connection construction of a high-voltage resistance wire, in which an insulating coating layer is stripped from a distal end portion of the high-voltage resistance wire so as to expose a portion of a winding conductor constituted by an insulating core and a resistance wire wound around the insulating core; wherein a contact piece is mounted on the portion of the winding conductor so as to enclose the portion of the winding conductor in a state where the contact piece is pressed against the portion of the winding conductor; wherein the portion of the winding conductor is folded back onto the insulating coating layer such that the contact piece is brought into facial pressing contact with a terminal.

Abstract: There is here disclosed a method for obtaining high-purity cinnamic acid containing less metals from crude cinnamic acid containing a metallic catalyst which is a mixture prepared by the synthetic reaction of a cinnamic acid ester. A disclosed purifying means is the combination of alkali hydrolysis, active carbon adsorption, solvent extraction and precipitation with an acid.

Abstract: An optical rotator comprising a light transmitting base, an alignment film layer formed on said base, and a film layer formed of a liquid crystalline polymer. The film layer exhibits a twisted nematic orientation in the state of liquid crystal and assumes a glassy state at a temperature below a liquid crystal transition point of the polymer. The polymer is a polyester which includes an ortho-substituted aromatic unit.

Abstract: A slippage preventer for an ignition cable terminal comprises a holder cap 11 for covering a head of a grommet 3, a holder body 10 having an opening 10a into which the grommet is inserted and for covering a lower hanging portion, and locking means provided on the holder body 10 for engaging with a fitting portion provided on said ignition tower so that the holder body is secured to the ignition tower. The holder cap 11 is rotatably supported on the holder body 10. The preventer has a very simple construction and can set a direction of the grommet 3 to be attached to an ignition tower irrespective of the kind of the tower.