Patents by Inventor Hiroyuki Yasuda

Hiroyuki Yasuda has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20180102334
    Abstract: To provide a wafer laminate which permits easy bonding between a support and a wafer, permits easy delamination of a wafer from a support, enables enhanced productivity of a thin wafer, and is suited to production of a thin wafer, and for a method of producing the wafer laminate. The wafer laminate includes a support, an adhesive layer formed on the support, and a wafer laminated in such a manner that its front surface having a circuit surface faces the adhesive layer. The adhesive layer includes a light-shielding resin layer A and a non-silicone thermoplastic resin-coating resin layer B in this order from the support side. The resin layer A is composed of a resin that contains a repeating unit having a condensed ring, and the resin layer B has a storage elastic modulus E? at 25° C. of 1 to 500 MPa and a tensile break strength of 5 to 50 MPa.
    Type: Application
    Filed: October 10, 2017
    Publication date: April 12, 2018
    Applicant: SHIN-ETSU CHEMICAL CO., LTD.
    Inventors: Hiroyuki Yasuda, Michihiro Sugo, Hideto Kato
  • Publication number: 20180102333
    Abstract: Disclosed herein is a wafer laminate suitable for production of thin wafers and a method for producing the wafer laminate. The wafer laminate can be formed easily by bonding between the support and the wafer and it can be easily separated from each other. It promotes the productivity of thin wafers. The wafer laminate includes a support, an adhesive layer formed on the support, and a wafer which is laminated on the adhesive layer in such a way that that surface of the wafer which has the circuit surface faces toward the adhesive layer, wherein the adhesive layer is a cured product of an adhesive composition composed of resin A and resin B, the resin A having the light blocking effect and the resin B having the siloxane skeleton.
    Type: Application
    Filed: October 10, 2017
    Publication date: April 12, 2018
    Applicant: Shin-Etsu Chemical Co., Ltd.
    Inventors: Hiroyuki Yasuda, Michihiro Sugo, Hideto Kato
  • Patent number: 9941145
    Abstract: A temporary bonding arrangement for wafer processing is provided comprising a first temporary bond layer (A) of thermoplastic resin, a second temporary bond layer (B) of thermosetting siloxane polymer, and a third temporary bond layer (C) of thermosetting polymer. Layer (B) is cured with a curing catalyst contained in layer (A) which is laid contiguous to layer (B). An adhesive layer of uniform thickness is formed without insufficient step coverage and other failures.
    Type: Grant
    Filed: June 29, 2016
    Date of Patent: April 10, 2018
    Assignee: SHIN-ETSU CHEMICAL CO., LTD.
    Inventors: Masahito Tanabe, Michihiro Sugo, Hiroyuki Yasuda
  • Patent number: 9934996
    Abstract: A bonding arrangement comprising a silicone-base adhesive composition is suited for temporarily bonding a wafer to a support for wafer processing. The bonding arrangement includes a first temporary bond layer of non-silicone thermoplastic resin, and a second temporary bond layer of thermosetting silicone polymer and/or a third temporary bond layer of thermosetting siloxane-modified polymer. The second and/or third bond layer contains an antistatic agent.
    Type: Grant
    Filed: August 9, 2016
    Date of Patent: April 3, 2018
    Assignee: SHIN-ETSU CHEMICAL CO., LTD.
    Inventors: Michihiro Sugo, Hiroyuki Yasuda, Shohei Tagami, Masahito Tanabe
  • Patent number: 9884979
    Abstract: The present invention is a temporary adhesion method for temporarily bonding a support and a wafer via a temporary adhesive material, including attaching the wafer to the support via the temporary adhesive material including a complex temporary adhesive material layer that consists of a thermoplastic resin layer (A) exhibiting a storage modulus E? of 1 to 500 MPa and a tensile rupture strength of 5 to 50 MPa at 25° C. and a thermosetting polymer layer (B) exhibiting a storage modulus E? of 1 to 1000 MPa and a tensile rupture strength of 1 to 50 MPa at 25° C.
    Type: Grant
    Filed: September 20, 2016
    Date of Patent: February 6, 2018
    Assignee: SHIN-ETSU CHEMICAL CO., LTD.
    Inventors: Hiroyuki Yasuda, Michihiro Sugo, Masahito Tanabe
  • Patent number: 9856229
    Abstract: Provided is a method for producing a cyclic carbonate obtained by reacting epoxide and carbon dioxide in the presence of a quaternary onium salt as a counter ion or a quaternary phosphonium salt having a halogenated anion as a counter ion, or in the presence of a solid catalyst obtained by immobilizing the quaternary onium salt onto a carrier, wherein an organohalogen compound containing at least one halogen atom in one molecule is added to the reaction system.
    Type: Grant
    Filed: July 18, 2014
    Date of Patent: January 2, 2018
    Assignees: National Institute of Advanced Industrial Science and Technology, MARUZEN PETROCHEMICAL CO., LTD.
    Inventors: Toshikazu Takahashi, Hiroyuki Yasuda, Shouji Yamamoto, Takashi Naniki, Yasunori Hayashi, Takeshi Haruna, Takuro Furukawa
  • Publication number: 20170352637
    Abstract: A wafer laminate has an adhesive layer (2) sandwiched between a support (1) and a wafer (3), with a circuit-forming surface of the wafer facing the adhesive layer. The adhesive layer (2) includes a light-shielding resin layer (2a), an epoxy-containing siloxane skeleton resin layer (2b), and a non-silicone thermoplastic resin layer (2c).
    Type: Application
    Filed: May 16, 2017
    Publication date: December 7, 2017
    Applicant: Shin-Etsu Chemical Co., Ltd.
    Inventors: Hiroyuki Yasuda, Michihiro Sugo
  • Patent number: 9834536
    Abstract: A method for producing a heterogeneous catalyst for use of synthesizing cyclic carbonates by reacting an epoxide and carbon dioxide in the presence of the catalyst. A method for making a catalyst that includes forming a catalyst precursor then reacting the catalyst precursor with a tertiary phosphine.
    Type: Grant
    Filed: April 22, 2014
    Date of Patent: December 5, 2017
    Assignees: National Institute of Advanced Industrial Science and Technology, MARUZEN PETROCHEMICAL CO., LTD.
    Inventors: Toshikazu Takahashi, Hiroyuki Yasuda, Toshiyasu Sakakura, Shouji Yamamoto, Takashi Naniki, Takuro Furukawa
  • Patent number: 9796892
    Abstract: The purpose of the present invention is to provide an adhesive composition using a silicone polymer compound, which does not require exposure, baking and development processes for the production, thereby making the production cost low and making the productivity high, which has good characteristics such as good adhesiveness, good hermetic sealing properties after thermal curing and low moisture absorption that are required for adhesives, which provides a cured film having high reliabilities such as high heat resistance and high light resistance, and which is capable of suppressing warping of a bonded substrate after back grinding that is necessary in the three-dimensional mounting production.
    Type: Grant
    Filed: November 10, 2014
    Date of Patent: October 24, 2017
    Assignee: SHIN-ETSU CHEMICAL CO., LTD.
    Inventors: Hiroyuki Yasuda, Kyoko Soga, Michihiro Sugo
  • Publication number: 20170267701
    Abstract: An object of the present invention is to provide a method for producing tetraalkoxysilane while saving energy at a high yield. Tetraalkoxysilane can be produced while saving energy at a high yield by the method including a first step of reacting alcohol with carbon dioxide in the presence of a dehydrating agent and/or in a reactor provided with a dehydrating means, and a second step of reacting a reaction mixture obtained in the first step with silicon oxide.
    Type: Application
    Filed: April 30, 2015
    Publication date: September 21, 2017
    Applicant: NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
    Inventors: Norihisa Fukaya, Seong-Jib Choi, Jun-Chul Choi, Toshio Horikoshi, Kazuhiko Sato, Hiroyuki Yasuda
  • Publication number: 20170225156
    Abstract: A metal complex represented by the following Formula (1): (wherein M represents palladium or platinum; L represents a ligand selected from carbon monoxide, an olefin compound, an amine compound, a phosphine compound, an N-heterocyclic carbene compound, a nitrile compound and an isocyanide compound; n represents an integer of 0 to 2 showing the number of the ligand; and each of R1 to R4 represents an organic group). The metal complex described above can be fixed on an inorganic oxide while maintaining a skeletal structure thereof to obtain a supported metal complex, and this makes it possible to allow the supported metal complex to maintain the same catalytic activity as that of the original metal complex. Also, calcining the supported metal complex obtained in the manner described above makes it possible to obtain a supported metal catalyst which is improved in catalytic activity to a greater extent than conventional supported metal catalysts.
    Type: Application
    Filed: March 2, 2017
    Publication date: August 10, 2017
    Inventors: Jun-Chul Choi, Norihisa Fukaya, Hiroyuki Yasuda
  • Publication number: 20170154802
    Abstract: A wafer laminate has an adhesive layer (3) sandwiched between a transparent substrate (1) and a water (2), with a circuit-forming surface of the wafer facing the adhesive layer. The adhesive layer (3) includes a first cured resin layer (3a) disposed adjacent the substrate and having light-shielding properties and a second cured resin layer (3b) disposed adjacent the wafer and comprising a cured product of a thermosetting resin composition.
    Type: Application
    Filed: November 23, 2016
    Publication date: June 1, 2017
    Applicant: SHIN-ETSU CHEMICAL CO., LTD.
    Inventors: Hiroyuki Yasuda, Michihiro Sugo, Hideto Kato
  • Patent number: 9646868
    Abstract: A method for temporarily bonding a wafer to a support via a temporary bonding arrangement is provided. The arrangement is a composite temporary adhesive layer consisting of a non-silicone thermoplastic resin layer (A) which is releasably bonded to the wafer, a thermosetting siloxane polymer layer (B) laid thereon, and a thermosetting siloxane-modified polymer layer (C) releasably bonded to the support. The method comprises the steps of providing a wafer laminate having a thermosetting silicone composition layer (B?) formed on the resin layer (A) which has been formed on the wafer, providing a support laminate having a siloxane-containing composition layer (C?) formed on the support, joining and heating layer (B?) and layer (C?) in vacuum for bonding and curing the layers together.
    Type: Grant
    Filed: December 22, 2015
    Date of Patent: May 9, 2017
    Assignee: SHIN-ETSU CHEMICAL CO., LTD.
    Inventors: Hiroyuki Yasuda, Michihiro Sugo, Shohei Tagami, Masahito Tanabe
  • Publication number: 20170110360
    Abstract: A wafer processing laminate including support, temporary adhesive material layer formed on support, and wafer stacked on temporary adhesive material layer, wafer having front surface on which circuit is formed and back surface to be processed, wherein temporary adhesive material layer includes a three-layered complex temporary adhesive material layer that includes first temporary adhesive layer composed of thermoplastic organopolysiloxane polymer layer (A) having thickness of less than 100 nm and releasably laminated to front surface of wafer, second temporary adhesive layer composed of thermosetting siloxane-modified polymer layer (B) releasably laminated to first temporary adhesive layer, and third temporary adhesive layer composed of thermoplastic organopolysiloxane polymer layer (A?) having thickness of less than 100 nm, releasably laminated to second temporary adhesive layer, and releasably laminated to support.
    Type: Application
    Filed: October 3, 2016
    Publication date: April 20, 2017
    Applicant: SHIN-ETSU CHEMICAL CO., LTD.
    Inventors: Shohei TAGAMI, Michihiro SUGO, Hiroyuki YASUDA, Masahito TANABE
  • Publication number: 20170101555
    Abstract: The present invention is a temporary adhesion method for temporarily bonding a support and a wafer via a temporary adhesive material, including attaching the wafer to the support via the temporary adhesive material including a complex temporary adhesive material layer that consists of a thermoplastic resin layer (A) exhibiting a storage modulus E? of 1 to 500 MPa and a tensile rupture strength of 5 to 50 MPa at 25° C. and a thermosetting polymer layer (B) exhibiting a storage modulus E? of 1 to 1000 MPa and a tensile rupture strength of 1 to 50 MPa at 25° C.
    Type: Application
    Filed: September 20, 2016
    Publication date: April 13, 2017
    Applicant: SHIN-ETSU CHEMICAL CO., LTD.
    Inventors: Hiroyuki YASUDA, Michihiro SUGO, Masahito TANABE
  • Patent number: 9616418
    Abstract: A metal complex represented by the following Formula (1): (wherein M represents palladium or platinum; L represents a ligand selected from carbon monoxide, an olefin compound, an amine compound, a phosphine compound, an N-heterocyclic carbene compound, a nitrile compound and an isocyanide compound; n represents an integer of 0 to 2 showing the number of the ligand; and each of R1 to R4 represents an organic group). The metal complex described above can be fixed on an inorganic oxide while maintaining a skeletal structure thereof to obtain a supported metal complex, which makes it possible to allow the supported metal complex to maintain the same catalytic activity as that of the original metal complex. Also, calcining the supported metal complex obtained in the manner described above makes it possible to obtain a supported metal catalyst improved in catalytic activity to a greater extent than conventional supported metal catalysts.
    Type: Grant
    Filed: March 13, 2014
    Date of Patent: April 11, 2017
    Assignee: National Institute of Advanced Industrial Science and Technology
    Inventors: Jun-Chul Choi, Norihisa Fukaya, Hiroyuki Yasuda
  • Publication number: 20170069521
    Abstract: A temporary adhesive material for a wafer processing, used for temporarily bonding a support and a wafer having a circuit-forming front surface and a back surface to be processed, contains a complex temporary adhesive material layer having a three-layered structure that includes a first temporary adhesive layer composed of a non-silicone thermoplastic resin layer capable of releasably adhering to the front surface of the wafer, a second temporary adhesive layer composed of a thermosetting siloxane polymer layer laminated on the first temporary adhesive layer, and a third temporary adhesive layer composed of a thermosetting siloxane-modified polymer layer laminated on the second temporary adhesive layer and capable of releasably adhering to the support. A wafer processing laminate and temporary adhesive material for a wafer processing facilitate temporary adhesion and separation, have excellent CVD resistance, and can increase productivity of thin wafers, and a method manufactures a thin wafer using the same.
    Type: Application
    Filed: March 3, 2015
    Publication date: March 9, 2017
    Applicant: SHIN-ETSU CHEMICAL CO., LTD.
    Inventors: Michihiro SUGO, Hiroyuki YASUDA, Shohei TAGAMI, Masahito TANABE
  • Patent number: 9586927
    Abstract: Provided is a method for continuously producing a cyclic carbonate, by which generation of a glycol in a reaction for synthesizing a cyclic carbonate is suppressed, and a cyclic carbonate having a high purity can be efficiently obtained even by simple purification. A method for continuously producing a cyclic carbonate, including filling a catalyst in a fixed-bed tube reactor, and continuously feeding carbon dioxide and an epoxide to the fixed-bed tube reactor to thereby bringing the carbon dioxide and the epoxide into contact with the catalyst, while continuously withdrawing the reaction liquid in the fixed-bed tube reactor, wherein the method includes a pre-treatment step in which a pre-treatment liquid containing a cyclic carbonate is brought into contact with the catalyst before feeding the carbon dioxide and the epoxide to the fixed-bed tube reactor, and the generated glycol is removed out of the system.
    Type: Grant
    Filed: July 18, 2014
    Date of Patent: March 7, 2017
    Assignees: MARUZEN PETROCHEMICAL CO., LTD., National Institute of Advanced Industrial Science and Technology
    Inventors: Takashi Naniki, Yasunori Hayashi, Goro Sawada, Takuro Furukawa, Takeshi Haruna, Toshikazu Takahashi, Hiroyuki Yasuda, Shouji Yamamoto
  • Publication number: 20170053821
    Abstract: A bonding arrangement comprising a silicone-base adhesive composition is suited for temporarily bonding a wafer to a support for wafer processing. The bonding arrangement includes a first temporary bond layer of non-silicone thermoplastic resin, and a second temporary bond layer of thermosetting silicone polymer and/or a third temporary bond layer of thermosetting siloxane-modified polymer. The second and/or third bond layer contains an antistatic agent.
    Type: Application
    Filed: August 9, 2016
    Publication date: February 23, 2017
    Applicant: SHIN-ETSU CHEMICAL CO., LTD.
    Inventors: Michihiro Sugo, Hiroyuki Yasuda, Shohei Tagami, Masahito Tanabe
  • Patent number: 9550931
    Abstract: A temporary adhesive material for a wafer includes a first temporary adhesive layer of a silicone-containing polymer layer containing a photo base generator and a second temporary adhesive layer of a silicone-containing polymer layer which is laminated on the first temporary adhesive layer, does not contain the photo base generator, and is different from the polymer layer. Thereby, there can be formed a temporary adhesive layer having high thickness uniformity, even on a wafer having a step. Because of the thickness uniformity, a thin wafer having a uniform thickness of 50 ?m or less can be easily obtained. When a thin wafer is produced and then delaminated from a support, the wafer can be delaminated from the support by exposure at a low exposure dose without stress. Therefore, a brittle thin wafer can be easily handled without causing damage, and a thin wafer can be easily produced.
    Type: Grant
    Filed: May 6, 2014
    Date of Patent: January 24, 2017
    Assignee: SHIN-ETSU CHEMICAL CO., LTD.
    Inventors: Hiroyuki Yasuda, Michihiro Sugo