Abstract: A FinFET device and a method for fabricating a FinFET device are disclosed. An exemplary method of fabricating a FINFET device includes providing a substrate including a fin structure including a plurality of fins and shallow trench isolation (STI) features between each fin of the fin structure. A first gate structure is formed over the fin structure. First gate spacers are formed on sidewalls of the first gate structure. The first gate spacers are removed while leaving portions of the first gate spacers within corners where the fin structure and the first gate structure meet. Second gate spacers are formed on sidewalls of the first gate structure. A dielectric layer is formed over the fin structure, the first gate structure, and the second gate spacers. The first gate structure and the portions of the first gate spacers are removed, thereby exposing sidewalls of the second gate spacers.

Abstract: A structure and method for implementation of high voltage devices within multi-gate device structures includes a substrate having a fin extending therefrom and a fin-embedded isolation region. In some examples, the fin-embedded isolation region includes an STI region. In some embodiments, the fin-embedded isolation separates a first portion of the fin from a second portion of the fin. Also, in some examples, the first portion of the fin includes a channel region. In various embodiments, a source region is formed in the first portion of the fin, a drain region is formed in the second portion of the fin, and an active gate is formed over the channel region. In some examples, the active gate is disposed adjacent to the source region. In addition, a plurality of dummy gates may be formed over the fin, to provide a uniform growth environment and growth profile for source and drain region formation.

Abstract: A device includes a wafer substrate including an isolation feature, at least two fin structures embedded in the isolation feature, and at least two gate stacks disposed around the two fin structures respectively. A first inter-layer dielectric (ILD) layer is disposed between the two gate stacks, with a dish-shaped recess formed therebetween, such that a bottom surface of the recess is below the top surface of the adjacent two gate stacks. A second ILD layer is disposed over the first ILD layer, including in the dish-shaped recess. The second ILD includes nitride material; the first ILD includes oxide material.

Abstract: In a method for manufacturing a semiconductor device, a fin structure including a first semiconductor layer, an oxide layer disposed over the first semiconductor layer and a second semiconductor layer disposed over the oxide layer is formed. An isolation insulating layer is formed so that the second semiconductor layer of the fin structure protrudes from the isolation insulating layer while the oxide layer and the first semiconductor layer are embedded in the isolation insulating layer. A third semiconductor layer is formed on the exposed second semiconductor layer so as to form a channel.

Abstract: A semiconductor device and a method of forming the same are disclosed. The method includes receiving a substrate having a fin projecting through an isolation structure over the substrate; etching a portion of the fin, resulting in a trench; forming a doped material layer on sidewalls of the trench; and growing at least one epitaxial layer in the trench. The method further includes exposing a first portion of the at least one epitaxial layer over the isolation structure; and performing an annealing process, thereby driving dopants from the doped material layer into a second portion of the at least one epitaxial layer. The first portion of the at least one epitaxial layer provides a strained channel for the semiconductor device and the second portion of the at least one epitaxial layer provides a punch-through stopper.

Abstract: A structure and method for implementation of high voltage devices within multi-gate device structures includes a substrate having a fin extending therefrom and a fin-embedded isolation region. In some examples, the fin-embedded isolation region includes an STI region. In some embodiments, the fin-embedded isolation separates a first portion of the fin from a second portion of the fin. Also, in some examples, the first portion of the fin includes a channel region. In various embodiments, a source region is formed in the first portion of the fin, a drain region is formed in the second portion of the fin, and an active gate is formed over the channel region. In some examples, the active gate is disposed adjacent to the source region. In addition, a plurality of dummy gates may be formed over the fin, to provide a uniform growth environment and growth profile for source and drain region formation.

Abstract: A semiconductor device is provided. The semiconductor device includes a channel region disposed between a source region and a drain region, a gate structure over the channel region, an interlayer dielectric (ILD) layer proximate the gate structure, an ILD stress layer proximate the top portion of gate structure and over the ILD layer. The gate structure includes a first sidewall, a second sidewall and a top portion. A first stress memorization region is also provided. The first stress memorization region is proximate the top portion of the gate structure. A method of making a semiconductor device is also provided.

Abstract: A structure and method for implementation of high voltage devices within multi-gate device structures includes a substrate having a fin extending therefrom and a fin-embedded isolation region. In some examples, the fin-embedded isolation region includes an STI region. In some embodiments, the fin-embedded isolation separates a first portion of the fin from a second portion of the fin. Also, in some examples, the first portion of the fin includes a channel region. In various embodiments, a source region is formed in the first portion of the fin, a drain region is formed in the second portion of the fin, and an active gate is formed over the channel region. In some examples, the active gate is disposed adjacent to the source region. In addition, a plurality of dummy gates may be formed over the fin, to provide a uniform growth environment and growth profile for source and drain region formation.

Abstract: A device includes a semiconductor substrate, isolation regions in the semiconductor substrate, and a Fin Field-Effect Transistor (FinFET). The FinFET includes a channel region over the semiconductor substrate, a gate dielectric on a top surface and sidewalls of the channel region, a gate electrode over the gate dielectric, a source/drain region, and an additional semiconductor region between the source/drain region and the channel region. The channel region and the additional semiconductor region are formed of different semiconductor materials, and are at substantially level with each other.

Abstract: A FinFET device and a method for fabricating a FinFET device are disclosed. An exemplary method of fabricating a FINFET device includes providing a substrate including a fin structure including a plurality of fins and shallow trench isolation (STI) features between each fin of the fin structure. A first gate structure is formed over the fin structure. First gate spacers are formed on sidewalls of the first gate structure. The first gate spacers are removed while leaving portions of the first gate spacers within corners where the fin structure and the first gate structure meet. Second gate spacers are formed on sidewalls of the first gate structure. A dielectric layer is formed over the fin structure, the first gate structure, and the second gate spacers. The first gate structure and the portions of the first gate spacers are removed, thereby exposing sidewalls of the second gate spacers.

Abstract: A semiconductor device is provided. The semiconductor device includes a channel region disposed between a source region and a drain region, a gate structure over the channel region, an interlayer dielectric (ILD) layer proximate the gate structure, an ILD stress layer proximate the top portion of gate structure and over the ILD layer. The gate structure includes a first sidewall, a second sidewall and a top portion. A first stress memorization region is also provided. The first stress memorization region is proximate the top portion of the gate structure. A method of making a semiconductor device is also provided.

Abstract: Embodiments include Multiple Gate Field-Effect Transistors (MuGFETs) and methods of forming them. In an embodiment, a structure includes a substrate, a fin, masking dielectric layer portions, and a raised epitaxial lightly doped source/drain (LDD) region. The substrate includes the fin. The masking dielectric layer portions are along sidewalls of the fin. An upper portion of the fin protrudes from the masking dielectric layer portions. A first spacer is along a sidewall of a gate structure over a channel region of the fin. A second spacer is along the first spacer. The raised epitaxial LDD region is on the upper portion of the fin, and the raised epitaxial LDD region adjoins a sidewall of the first spacer and is disposed under the second spacer. The raised epitaxial LDD region extends from the upper portion of the fin in at least two laterally opposed directions and a vertical direction.

Abstract: A device includes a semiconductor substrate, isolation regions in the semiconductor substrate, and a Fin Field-Effect Transistor (FinFET). The FinFET includes a channel region over the semiconductor substrate, a gate dielectric on a top surface and sidewalls of the channel region, a gate electrode over the gate dielectric, a source/drain region, and an additional semiconductor region between the source/drain region and the channel region. The channel region and the additional semiconductor region are formed of different semiconductor materials, and are at substantially level with each other.

Abstract: A FinFET device and a method for fabricating a FinFET device is disclosed. An exemplary FinFET device includes a substrate including a fin structure, the fin structure including a first and a second fin. The FinFET device further includes a shallow trench isolation (STI) feature disposed on the substrate and between the first and the second fins. The FinFET device further includes a gate dielectric disposed on the first and the second fins. The FinFET device further includes a gate structure disposed on the gate dielectric. The gate structure traverses the first fin, the second fin, and the STI feature between the first fin and the second fin and has a longitudinal stepped profile.

Abstract: Embodiments include Multiple Gate Field-Effect Transistors (MuGFETs) and methods of forming them. In an embodiment, a structure includes a substrate, a fin, masking dielectric layer portions, and a raised epitaxial lightly doped source/drain (LDD) region. The substrate includes the fin. The masking dielectric layer portions are along sidewalls of the fin. An upper portion of the fin protrudes from the masking dielectric layer portions. A first spacer is along a sidewall of a gate structure over a channel region of the fin. A second spacer is along the first spacer. The raised epitaxial LDD region is on the upper portion of the fin, and the raised epitaxial LDD region adjoins a sidewall of the first spacer and is disposed under the second spacer. The raised epitaxial LDD region extends from the upper portion of the fin in at least two laterally opposed directions and a vertical direction.

Abstract: A method of fabricating a fin field effect transistor (FinFET) includes forming a first fin and a second fin extending upward from a substrate major surface to a first height, forming an insulation layer comprising a top surface extending upward from the substrate major surface to a second height less than the first height, selectively forming a bulbous epitaxial layer covering a portion of each fin, annealing the substrate to convert at least a portion of the bulbous epitaxial layer to silicide and depositing a metal layer at least in the cavity. The first fin and the second fin are adjacent. A portion of the first fin and a portion of the second fin extend beyond the top surface of the insulation layer. The bulbous epitaxial layer defines an hourglass shaped cavity between adjacent fins.

Abstract: A semiconductor arrangement is provided. The semiconductor arrangement includes a first semiconductor device. The first semiconductor device includes a first active region having a first doped region and a second doped region over the first doped region. The second doped region includes a first bottom portion and a first sidewall. The first bottom portion includes a first bottom portion inner surface, a first bottom portion outer surface, a first bottom portion height and a first bottom portion width. The first sidewall includes a first sidewall inner surface, a first sidewall outer surface, a first sidewall width and a first sidewall height, the first sidewall height greater than the first bottom portion height. A method of making a semiconductor device is also provided.

Abstract: A semiconductor arrangement is provided. The semiconductor arrangement includes a first semiconductor device. The first semiconductor device includes a first active region having a first doped region and a second doped region over the first doped region. The second doped region includes a first bottom portion and a first sidewall. The first bottom portion includes a first bottom portion inner surface, a first bottom portion outer surface, a first bottom portion height and a first bottom portion width. The first sidewall includes a first sidewall inner surface, a first sidewall outer surface, a first sidewall width and a first sidewall height, the first sidewall height greater than the first bottom portion height. A method of making a semiconductor device is also provided.

Abstract: A device includes a wafer substrate including an isolation feature, at least two fin structures embedded in the isolation feature, and at least two gate stacks disposed around the two fin structures respectively. A first inter-layer dielectric (ILD) layer is disposed between the two gate stacks, with a dish-shaped recess formed therebetween, such that a bottom surface of the recess is below the top surface of the adjacent two gate stacks. A second ILD layer is disposed over the first ILD layer, including in the dish-shaped recess. The second ILD includes nitride material; the first ILD includes oxide material.

Abstract: A method of fabricating a fin field effect transistor (FinFET) comprises providing a substrate comprising a major surface, forming a first and second fin extending upward from the substrate major surface to a first height, forming an insulation layer comprising a top surface extending upward from the substrate major surface to a second height less than the first height, wherein a portion of the first and second fin extend beyond the top surface of the insulation layer. The method also includes selectively growing an epitaxial layer covering each fin, annealing the substrate to have each fin covered by a bulbous epitaxial layer defining an hourglass shaped cavity between adjacent fins, wherein the cavity comprises an upper and lower portion. The method includes forming a metal material over the bulbous epitaxial layer and annealing the substrate to convert the bulbous epitaxial layer bordering the lower portion of the cavity to silicide.