Abstract: The present disclosure relates to a vertical MOSFET device, a manufacturing method and application thereof.

Abstract: The present invention relates to a semiconductor memory cell structure, a semiconductor memory as well as preparation method and application thereof. The semiconductor memory cell structure includes: a substrate; and a first transistor layer, an isolation layer and a second transistor layer. The first transistor layer includes a first stack structure formed by stacking a first source, a first channel, and a first drain from bottom to top; and a first gate located on a sidewall of the first stack structure. The second transistor layer includes: a second stack structure formed by stacking a second drain, a second channel, and a second source from bottom to top; and a second gate located on a sidewall of the second stack structure, at least a part of a sidewall of the second drain is in direct contact with the first gate.

Abstract: A storage device is provided, including: a substrate; word lines extending in a first direction; bit lines extending in a second direction perpendicular to the first direction; and a storage unit including a plurality of storage units, each of which is electrically connected to a word line and a bit line. Each storage unit includes: an active region extending in a third direction inclined with the first direction; a vertical stack of a first source/drain layer, a channel layer and a second source/drain layer; and gate stacks between the first source/drain layer and the second source/drain layer, and on opposite sides of the channel layer in a fourth direction orthogonal to the third direction, to sandwich the channel layer. The word line corresponding to each storage unit extends across the storage unit in the first direction to be electrically connected to the gate stacks on opposite sides.

Abstract: A semiconductor device with a sidewall interconnection structure and a method for manufacturing the same, and an electronic apparatus including the semiconductor device are provided. According to embodiments, the semiconductor device includes: a vertical stack including a plurality of element layers, wherein each element layer of the plurality of element layers includes a plurality of semiconductor elements and a metallization layer for the plurality of semiconductor elements; and an interconnection structure laterally adjoined the vertical stack. The interconnection structure includes: an electrical isolation layer; and a conductive structure in the electrical isolation layer, wherein at least a part of a conductive structure in the metallization layer of the each element layer is in contact with and electrically connected to the conductive structure at a corresponding height in the interconnection structure in a lateral direction.

Abstract: A storage device includes a substrate, a storage unit array, and word lines extending in the first direction. The storage unit array includes storage units arranged along a first direction and a second direction. Each storage unit includes: an active region extending in a third direction and including a vertical stack of first source/drain, channel and second source/drain layers, and a gate stack between the first and second source/drain layers in a vertical direction and sandwiching the channel layer from at least two opposite sides. First source/drain layers of each column are continuous to form a bit line extending in the second direction in a zigzag shape. Each word line extends in the first direction to intersect the active regions of a respective row, and is electrically connected to the gate stack of each storage unit on two opposite sides of the channel layer.

Abstract: A memory device includes a memory unit array on substrate, the memory unit array includes a plurality of memory units, each memory unit includes: a left and a right stack arranged at intervals in a horizontal direction. The left stack and right stacks each include a lower isolation layer, PMOS layer, first NMOS layer, upper isolation layer and second NMOS layer stacked on the substrate sequentially. The PMOS layer, and the first and second NMOS layer each include first source/drain layer, channel layer and second source/drain layer vertically stacked. The channel layer is laterally recessed relative to the first and second source/drain layers; and a gate stack between the first and second source/drain layers in the vertical direction, and disposed on opposite sides of the channel layer and embedded into a lateral recess of the channel layer.

Abstract: A method of manufacturing a parallel structure of semiconductor devices includes: disposing a semiconductor stack, which includes source/drain layers disposed vertically in sequence and channel layers therebetween, on a substrate; patterning the semiconductor stack into a predetermined shape to define an active region; forming gate stacks around at least part of peripheries of the channel layers; forming an isolation layer on peripheries of the active region and the gate stack; forming first to third conductive channels on a sidewall of the isolation layer; determining the pre-determined shape and a shape of the gate stacks, such that one of the source/drain layers on two sides of the channel layer passes through the isolation layer to contact the first conductive channel, while the other one passes through the isolation layer to contact the second conductive channel, and the gate stack passes through the isolation layer to contact the third conductive channel.

Abstract: Disclosed are a semiconductor device with a spacer and a C-shaped channel portion, a method of manufacturing the same, and an electronic apparatus including the semiconductor device. The semiconductor device may include: a channel portion on a substrate, wherein the channel portion includes a curved nanosheet or nanowire with a C-shaped cross-section; a first source/drain portion and a second source/drain portion respectively located at upper and lower ends of the channel portion with respect to the substrate; a first gate stack and a second gate stack located on opposite sides of the channel portion; a first spacer located between the first gate stack and the first source/drain portion and between the first gate stack and the second source/drain portion respectively; and a second spacer located between the second gate stack and the first source/drain portion and between the second gate stack and the second source/drain portion respectively.

Abstract: A semiconductor apparatus with a heat dissipation conduit in a sidewall interconnection structure, a method of manufacturing the semiconductor apparatus, and an electronic device including the semiconductor apparatus. According to the embodiments, the semiconductor apparatus includes: a carrier substrate having a first region and a second region adjacent to each other; a semiconductor device on the first region; and an interconnection structure on the second region, wherein the interconnection structure includes: an electrical isolation layer; a conductive structure in the electrical isolation layer, wherein at least a part of components require to be electrically connected in the semiconductor device is in contact with and therefore electrically connected to the conductive structure in a lateral direction, wherein the conductive structure is located at a corresponding height in the interconnection structure; and a heat dissipation conduit in the electrical isolation layer.

Abstract: Provided are a vertical semiconductor device with a body contact, a manufacturing method, and an electronic apparatus. The semiconductor device includes: an active region vertically disposed on a substrate relative to the substrate, including lower and upper source/drain regions, and a middle portion between the lower and upper source/drain regions for defining a channel region; first and second gate stacks which are disposed on first and second sides of the active region which are opposite to each other in a lateral direction relative to the substrate; and a body contact layer disposed on the second side of the active region to overlap a part of the middle portion of the active region, so as to apply a body bias to the active region, wherein the second gate stack includes first and second portions below and above the body contact layer respectively.

Abstract: A memory device, a method of manufacturing the same, and an electronic apparatus including the same. The memory device includes: a plurality of cell active layers vertically stacked on a substrate, each cell active layer including a lower source/drain region and an upper source/drain region located at different vertical heights and a channel region between the lower source/drain region and the upper source/drain region; a gate stack on the substrate and extending vertically relative to the substrate to pass through the cell active layers, the gate stack including a gate conductor layer and a memory functional layer arranged between the gate conductor layer and the cell active layers, and a memory cell being defined at an intersection of the gate stack and each cell active layer; and a conductive metal layer arranged on a lower surface of each cell active layer and/or an upper surface of each cell active layer.

Abstract: Disclosed are a vertical semiconductor device with a body contact, a manufacturing method, and an electronic apparatus. The semiconductor device includes: an active region vertically disposed on a substrate, including lower and upper source/drain regions, and a middle portion between lower and upper source/drain regions for defining a channel region; a gate stack on a first side of the active region in a lateral direction to at least overlap with the middle portion; and a body contact layer on a second side of the active region opposite to the first side in the lateral direction to overlap with the middle portion to apply a body bias to the active region. In a vertical direction, distances between a part of the middle portion overlapping with the body contact layer and the lower source/drain region and between the part and the upper source/drain region are first and second spacing distances, respectively.

Abstract: A memory device and a method for manufacturing the same, and an electronic apparatus including the memory device are provided. The memory device may include: a substrate (1001); an electrode structure on the substrate (1001), in which the electrode structure includes a plurality of first electrode layers and a plurality of second electrode layers that are alternately stacked; a plurality of vertical active regions penetrating the electrode structure; a first gate dielectric layer and a second gate dielectric layer, in which the first gate dielectric layer is between the vertical active region and each first electrode layer of the electrode structure, and the second gate dielectric layer is between the vertical active region and each second electrode layer of the electrode structure, each of the first gate dielectric layer and the second gate dielectric layer constitutes a data memory structure.

Abstract: Disclosed are a NOR-type memory device, a method of manufacturing the NOR-type memory device, and an electronic apparatus including the NOR-type memory device. According to an embodiment, the NOR-type memory device may include: a plurality of device layers disposed on a substrate, wherein each of the plurality of device layers includes a stack of a first source/drain layer, a first channel layer, and a second source/drain layer; and a gate stack that extends vertically with respect to the substrate to pass through the stack in the each of the plurality of device layers, wherein the gate stack includes a gate conductor layer and a memory functional layer disposed between the gate conductor layer and the stack, and a memory cell is defined at an intersection of the gate stack and the stack.

Abstract: A nanowire/nanosheet device having a ferroelectric or negative capacitance material and a method of manufacturing the same, and an electronic apparatus including the nanowire/nanosheet device are provided. According to embodiments, the semiconductor device may include: a substrate; a nanowire/nanosheet on the substrate and spaced apart from a surface of the substrate; a gate electrode surrounding the nanowire/nanosheet; a ferroelectric or negative capacitance material layer formed on a sidewall of the gate electrode; and source/drain layers at opposite ends of the nanowire/nanosheet and adjoining the nanowire/nanosheet.

Abstract: The disclosed technology provides a semiconductor device, a manufacturing method thereof, and an electronic device including the device. An example semiconductor device includes a substrate; a first device and a second device on the substrate. Each of the first device and the second device include a first source/drain layer, a channel layer, and a second source layer that are sequentially stacked, from bottom to top, on the substrate, and a gate stack around at least a part of an outer periphery of the channel layer, with sidewalls of the respective channel layers of the first device and the second device extending at least partially along different crystal planes or crystal plane families.

Abstract: Disclosed are a NOR-type memory device, a method of manufacturing the NOR-type memory device, and an electronic apparatus. The NOR-type memory device includes: a memory cell layer including a first source/drain layer, a first channel layer, a second source/drain layer, a second channel layer, and a third source/drain layer which are stacked in a vertical direction; a gate stack that extends vertically and includes a gate conductor layer and a memory functional layer between the gate conductor layer and the memory cell layer; and at least one of a source line contact portion and a bulk contact portion. The source line contact portion extends vertically to pass through the memory cell layer, and is electrically connected to the first and third source/drain layers. The bulk contact portion extends vertically to pass through the memory cell layer, and is electrically connected to the first and second channel layers.

Abstract: Disclosed are a NOR-type memory device, a method of manufacturing the NOR-type memory device, and an electronic apparatus. The NOR-type memory device includes: at least one memory cell layer including a first source/drain layer, a first channel layer, a second source/drain layer, a second channel layer, and a third source/drain layer that are stacked on each other; at least one gate stack that extends vertically and includes a gate conductor layer and a memory functional layer between the gate conductor layer and the at least one memory cell layer. A memory cell is defined at an intersection of the gate stack and the memory cell layer. At least one bit line is electrically connected to the second source/drain layer in the memory cell layer; and at least one source line is electrically connected to the first and third source/drain layers in the memory cell layer.

Abstract: Disclosed are a semiconductor apparatus with a sidewall interconnection structure, a method of manufacturing the semiconductor apparatus, and an electronic device. The semiconductor apparatus includes: a plurality of device stacks, wherein each device stack includes a plurality of semiconductor devices stacked, and each semiconductor device includes a first source/drain layer, a channel layer, and a second source/drain layer stacked in a vertical direction, and a gate electrode surrounding the channel layer; and an interconnection structure between the plurality of device stacks. The interconnection structure includes: an electrical isolation layer; and a conductive structure in the electrical isolation layer.

Abstract: An NOR-type memory device, a method of manufacturing the NOR-type memory device, and an electronic apparatus including the NOR-type memory device. The NOR-type memory device includes: a gate stack including a gate conductor layer and a memory functional layer; and a first semiconductor layer and a second semiconductor layer that surround a periphery of the gate stack. The first and second semiconductor layers are respectively located at different heights with respect to the substrate. The memory functional layer is located between the gate conductor layer and each of the first and second semiconductor layers. Each of the first and second semiconductor layers includes a first source/drain region, a channel region, and a second source/drain region that are disposed in sequence in a vertical direction. A memory cell is defined at an intersection of the gate stack and each of the first and second semiconductor layers.