Patents by Inventor I-Wen Wu

I-Wen Wu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20200075421
    Abstract: A method includes providing a structure having first and second fins over a substrate and oriented lengthwise generally along a first direction and source/drain (S/D) features over the first and second fins; forming an interlayer dielectric (ILD) layer covering the S/D features; performing a first etching process at least to an area between the S/D features, thereby forming a trench in the ILD layer; depositing a dielectric material in the trench; performing a second etching process to selectively recess the dielectric material; and performing a third etching process to selectively recess the ILD layer, thereby forming a contact hole that exposes the S/D features.
    Type: Application
    Filed: August 9, 2019
    Publication date: March 5, 2020
    Inventors: I-Wen Wu, Chen-Ming Lee, Fu-Kai Yang, Mei-Yun Wang, Chang-Yun Chang, Ching-Feng Fu, Peng Wang
  • Patent number: 10510614
    Abstract: A semiconductor arrangement and method of forming the same are described. A semiconductor arrangement includes a third metal connect in contact with a first metal connect in a first active region and a second metal connect in a second active region, and over a shallow trench isolation region located between the first active region and a second active region. A method of forming the semiconductor arrangement includes forming a first opening over the first metal connect, the STI region, and the second metal connect, and forming the third metal connect in the first opening. Forming the third metal connect over the first metal connect and the second metal connect mitigates RC coupling.
    Type: Grant
    Filed: April 29, 2019
    Date of Patent: December 17, 2019
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: I-Wen Wu, Hsien-Cheng Wang, Mei-Yun Wang, Shih-Wen Liu, Chao-Hsun Wang, Yun Lee
  • Patent number: 10504990
    Abstract: Semiconductor devices and methods of fabricating semiconductor devices are provided. The present disclosure provides a semiconductor device that includes a first fin structure and a second fin structure each extending from a substrate; a first gate segment over the first fin structure and a second gate segment over the second fin structure; a first isolation feature separating the first and second gate segments; a first source/drain (S/D) feature over the first fin structure and adjacent to the first gate segment; a second S/D feature over the second fin structure and adjacent to the second gate segment; and a second isolation feature also disposed in the trench. The first and second S/D features are separated by the second isolation feature, and a composition of the second isolation feature is different from a composition of the first isolation feature.
    Type: Grant
    Filed: February 27, 2018
    Date of Patent: December 10, 2019
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: I-Wen Wu, Fu-Kai Yang, Chen-Ming Lee, Mei-Yun Wang, Jr-Hung Li, Bo-Cyuan Lu
  • Patent number: 10490459
    Abstract: A method includes providing a structure that includes a substrate; first and second gate structures over the substrate; first and second source/drain (S/D) features over the substrate; a first dielectric layer over sidewalls of the first and second gate structures and the first and second S/D features; and a second dielectric layer over the first dielectric layer. The first and second S/D features are adjacent to the first and second gate structures respectively. The first and second S/D features comprise different materials. The method further includes etching the first and second dielectric layers to expose the first and second S/D features; doping a p-type dopant to the first and second S/D features; and performing a selective etching process to the first and second S/D features after the doping of the p-type dopant. The selective etching process recesses the first S/D feature faster than it recesses the second S/D feature.
    Type: Grant
    Filed: August 25, 2017
    Date of Patent: November 26, 2019
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Shao-Ming Koh, Chen-Ming Lee, I-Wen Wu, Fu-Kai Yang, Jia-Heng Wang, Mei-Yun Wang
  • Publication number: 20190252265
    Abstract: A semiconductor arrangement and method of forming the same are described. A semiconductor arrangement includes a third metal connect in contact with a first metal connect in a first active region and a second metal connect in a second active region, and over a shallow trench isolation region located between the first active region and a second active region. A method of forming the semiconductor arrangement includes forming a first opening over the first metal connect, the STI region, and the second metal connect, and forming the third metal connect in the first opening. Forming the third metal connect over the first metal connect and the second metal connect mitigates RC coupling.
    Type: Application
    Filed: April 29, 2019
    Publication date: August 15, 2019
    Inventors: I-Wen WU, Hsien-Cheng Wang, Mei-Yun Wang, Shih-Wen Liu, Chao-Hsun Wang, Yun Lee
  • Publication number: 20190157387
    Abstract: Semiconductor devices and methods of fabricating semiconductor devices are provided. The present disclosure provides a semiconductor device that includes a first fin structure and a second fin structure each extending from a substrate; a first gate segment over the first fin structure and a second gate segment over the second fin structure; first isolation feature separating the first and second gate segments; a first source/drain (S/D) feature over the first fin structure and adjacent to the first gate segment; a second S/D feature over the second fin structure and adjacent to the second gate segment; and a second isolation feature also disposed in the trench. The first and second S/D features are separated by the second isolation feature, and a composition of the second isolation feature is different from a composition of the first isolation feature.
    Type: Application
    Filed: February 27, 2018
    Publication date: May 23, 2019
    Inventors: I-Wen Wu, Fu-Kai Yang, Chen-Ming Lee, Mei-Yun Wang, Jr-Hung Li, Bo-Cyuan Lu
  • Patent number: 10276448
    Abstract: A semiconductor arrangement and method of forming the same are described. A semiconductor arrangement includes a third metal connect in contact with a first metal connect in a first active region and a second metal connect in a second active region, and over a shallow trench isolation region located between the first active region and a second active region. A method of forming the semiconductor arrangement includes forming a first opening over the first metal connect, the STI region, and the second metal connect, and forming the third metal connect in the first opening. Forming the third metal connect over the first metal connect and the second metal connect mitigates RC coupling.
    Type: Grant
    Filed: October 22, 2018
    Date of Patent: April 30, 2019
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: I-Wen Wu, Hsien-Cheng Wang, Mei-Yun Wang, Shih-Wen Liu, Chao-Hsun Wang, Yun Lee
  • Publication number: 20190067130
    Abstract: A method includes providing a structure that includes a substrate; first and second gate structures over the substrate; first and second source/drain (S/D) features over the substrate; a first dielectric layer over sidewalls of the first and second gate structures and the first and second S/D features; and a second dielectric layer over the first dielectric layer. The first and second S/D features are adjacent to the first and second gate structures respectively. The first and second S/D features comprise different materials. The method further includes etching the first and second dielectric layers to expose the first and second S/D features; doping a p-type dopant to the first and second S/D features; and performing a selective etching process to the first and second S/D features after the doping of the p-type dopant. The selective etching process recesses the first S/D feature faster than it recesses the second S/D feature.
    Type: Application
    Filed: August 25, 2017
    Publication date: February 28, 2019
    Inventors: Shao-Ming Koh, Chen-Ming Lee, I-Wen Wu, Fu-Kai Yang, Jia-Heng Wang, Mei-Yun Wang
  • Publication number: 20190057906
    Abstract: A semiconductor arrangement and method of forming the same are described. A semiconductor arrangement includes a third metal connect in contact with a first metal connect in a first active region and a second metal connect in a second active region, and over a shallow trench isolation region located between the first active region and a second active region. A method of forming the semiconductor arrangement includes forming a first opening over the first metal connect, the STI region, and the second metal connect, and forming the third metal connect in the first opening. Forming the third metal connect over the first metal connect and the second metal connect mitigates RC coupling.
    Type: Application
    Filed: October 22, 2018
    Publication date: February 21, 2019
    Inventors: I-Wen WU, Hsien-Cheng WANG, Mei-Yun WANG, Shih-Wen LIU, Chao-Hsun WANG, Yun LEE
  • Patent number: 10109530
    Abstract: A semiconductor arrangement and method of forming the same are described. A semiconductor arrangement includes a third metal connect in contact with a first metal connect in a first active region and a second metal connect in a second active region, and over a shallow trench isolation region located between the first active region and a second active region. A method of forming the semiconductor arrangement includes forming a first opening over the first metal connect, the STI region, and the second metal connect, and forming the third metal connect in the first opening. Forming the third metal connect over the first metal connect and the second metal connect mitigates RC coupling.
    Type: Grant
    Filed: September 1, 2017
    Date of Patent: October 23, 2018
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: I-Wen Wu, Hsien-Cheng Wang, Mei-Yun Wang, Shih-Wen Liu, Chao-Hsun Wang, Yun Lee
  • Publication number: 20180012807
    Abstract: A semiconductor arrangement and method of forming the same are described. A semiconductor arrangement includes a third metal connect in contact with a first metal connect in a first active region and a second metal connect in a second active region, and over a shallow trench isolation region located between the first active region and a second active region. A method of forming the semiconductor arrangement includes forming a first opening over the first metal connect, the STI region, and the second metal connect, and forming the third metal connect in the first opening. Forming the third metal connect over the first metal connect and the second metal connect mitigates RC coupling.
    Type: Application
    Filed: September 1, 2017
    Publication date: January 11, 2018
    Inventors: I-Wen WU, Hsien-Cheng Wang, Mei-Yun Wang, Shih-Wen Liu, Chao-Hsun Wang, Yun Lee
  • Patent number: 9754838
    Abstract: A semiconductor arrangement and method of forming the same are described. A semiconductor arrangement includes a third metal connect in contact with a first metal connect in a first active region and a second metal connect in a second active region, and over a shallow trench isolation region located between the first active region and a second active region. A method of forming the semiconductor arrangement includes forming a first opening over the first metal connect, the STI region, and the second metal connect, and forming the third metal connect in the first opening. Forming the third metal connect over the first metal connect and the second metal connect mitigates RC coupling.
    Type: Grant
    Filed: November 28, 2016
    Date of Patent: September 5, 2017
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: I-Wen Wu, Hsien-Cheng Wang, Mei-Yun Wang, Shih-Wen Liu, Chao-Hsun Wang, Yun Lee
  • Publication number: 20170076988
    Abstract: A semiconductor arrangement and method of forming the same are described. A semiconductor arrangement includes a third metal connect in contact with a first metal connect in a first active region and a second metal connect in a second active region, and over a shallow trench isolation region located between the first active region and a second active region. A method of forming the semiconductor arrangement includes forming a first opening over the first metal connect, the STI region, and the second metal connect, and forming the third metal connect in the first opening. Forming the third metal connect over the first metal connect and the second metal connect mitigates RC coupling.
    Type: Application
    Filed: November 28, 2016
    Publication date: March 16, 2017
    Inventors: I-Wen Wu, Hsien-Cheng Wang, Mei-Yun Wang, Shih-Wen Liu, Chao-Hsun Wang, Yun Lee
  • Patent number: 9508844
    Abstract: A semiconductor arrangement and method of forming the same are described. A semiconductor arrangement includes a third metal connect in contact with a first metal connect in a first active region and a second metal connect in a second active region, and over a shallow trench isolation region located between the first active region and a second active region. A method of forming the semiconductor arrangement includes forming a first opening over the first metal connect, the STI region, and the second metal connect, and forming the third metal connect in the first opening. Forming the third metal connect over the first metal connect and the second metal connect mitigates RC coupling.
    Type: Grant
    Filed: January 6, 2014
    Date of Patent: November 29, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: I-Wen Wu, Mei-Yun Wang, Hsien-Cheng Wang, Shih-Wen Liu, Yun Lee, Chao-Hsun Wang
  • Patent number: 9449886
    Abstract: A semiconductor device and method of formation are provided herein. A semiconductor device includes a first active region adjacent a first side of a shallow trench isolation (STI) region. The first active region including a first proximal fin having a first proximal fin height adjacent the STI region, and a first distal fin having a first distal fin height adjacent the first proximal fin, the first proximal fin height less than the first distal fin height. The STI region includes oxide, the oxide having an oxide volume, where the oxide volume is inversely proportional to the first proximal fin height. A method of formation includes forming a first proximal fin with a first proximal fin height less than a first distal fin height of a first distal fin, such that the first proximal fin is situated between the first distal fin and an STI region.
    Type: Grant
    Filed: April 15, 2016
    Date of Patent: September 20, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: I-Wen Wu, Hsien-Cheng Wang, Hsin-Ying Lin, Mei-Yun Wang, Hsiao-Chiu Hsu, Shih-Wen Liu
  • Publication number: 20160233131
    Abstract: A semiconductor device and method of formation are provided herein. A semiconductor device includes a first active region adjacent a first side of a shallow trench isolation (STI) region. The first active region including a first proximal fin having a first proximal fin height adjacent the STI region, and a first distal fin having a first distal fin height adjacent the first proximal fin, the first proximal fin height less than the first distal fin height. The STI region includes oxide, the oxide having an oxide volume, where the oxide volume is inversely proportional to the first proximal fin height. A method of formation includes forming a first proximal fin with a first proximal fin height less than a first distal fin height of a first distal fin, such that the first proximal fin is situated between the first distal fin and an STI region.
    Type: Application
    Filed: April 15, 2016
    Publication date: August 11, 2016
    Inventors: I-Wen Wu, Hsien-Cheng Wang, Hsin-Ying Lin, Mei-Yun Wang, Hsiao-Chiu Hsu, Shih-Wen Liu
  • Patent number: 9318488
    Abstract: A semiconductor device and method of formation are provided herein. A semiconductor device includes a first active region adjacent a first side of a shallow trench isolation (STI) region. The first active region including a first proximal fin having a first proximal fin height adjacent the STI region, and a first distal fin having a first distal fin height adjacent the first proximal fin, the first proximal fin height less than the first distal fin height. The STI region includes oxide, the oxide having an oxide volume, where the oxide volume is inversely proportional to the first proximal fin height. A method of formation includes forming a first proximal fin with a first proximal fin height less than a first distal fin height of a first distal fin, such that the first proximal fin is situated between the first distal fin and an STI region.
    Type: Grant
    Filed: January 6, 2014
    Date of Patent: April 19, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: I-Wen Wu, Mei-Yun Wang, Hsien-Cheng Wang, Shih-Wen Liu, Hsiao-Chiu Hsu, Hsin-Ying Lin
  • Publication number: 20150194425
    Abstract: A semiconductor device and method of formation are provided herein. A semiconductor device includes a first active region adjacent a first side of a shallow trench isolation (STI) region. The first active region including a first proximal fin having a first proximal fin height adjacent the STI region, and a first distal fin having a first distal fin height adjacent the first proximal fin, the first proximal fin height less than the first distal fin height. The STI region includes oxide, the oxide having an oxide volume, where the oxide volume is inversely proportional to the first proximal fin height. A method of formation includes forming a first proximal fin with a first proximal fin height less than a first distal fin height of a first distal fin, such that the first proximal fin is situated between the first distal fin and an STI region.
    Type: Application
    Filed: January 6, 2014
    Publication date: July 9, 2015
    Applicant: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: I-Wen Wu, Mei-Yun Wang, Hsien-Cheng Wang, Shih-Wen Liu, Hsiao-Chiu Hsu, Hsin-Ying Lin
  • Publication number: 20150194516
    Abstract: A semiconductor arrangement and method of forming the same are described. A semiconductor arrangement includes a third metal connect in contact with a first metal connect in a first active region and a second metal connect in a second active region, and over a shallow trench isolation region located between the first active region and a second active region. A method of forming the semiconductor arrangement includes forming a first opening over the first metal connect, the STI region, and the second metal connect, and forming the third metal connect in the first opening. Forming the third metal connect over the first metal connect and the second metal connect mitigates RC coupling.
    Type: Application
    Filed: January 6, 2014
    Publication date: July 9, 2015
    Applicant: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: I-Wen Wu, Mei-Yun Wang, Hsien-Cheng Wang, Shih-Wen Liu, Yun Lee, Chao-Hsun Wang
  • Patent number: 9049950
    Abstract: One embodiment of a sleeping bag extension piece or elongated sleeping bag with sufficient length beyond a traditional sleeping bag to rest upon the sleep surface above the user's shoulder line creating a natural body heat seal and restricting air flow between the sleeping bag top and sleep surface above the shoulder line, and having a separation to allow a user's head to protrude.
    Type: Grant
    Filed: June 11, 2012
    Date of Patent: June 9, 2015
    Inventor: Ricky I-wen Wu