Patents by Inventor Jeffrey B. Shealy

Jeffrey B. Shealy has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9805966
    Abstract: A method of wafer scale packaging acoustic resonator devices and an apparatus therefor. The method including providing a partially completed semiconductor substrate comprising a plurality of single crystal acoustic resonator devices, each having a first electrode member, a second electrode member, and an overlying passivation material. At least one of the devices to be configured with an external connection, a repassivation material overlying the passivation material, an under metal material overlying the repassivation material. Copper pillar interconnect structures are then configured overlying the electrode members, and solder bump structures are form overlying the copper pillar interconnect structures.
    Type: Grant
    Filed: July 25, 2014
    Date of Patent: October 31, 2017
    Assignee: AKOUSTIS, INC.
    Inventor: Jeffrey B. Shealy
  • Publication number: 20170302428
    Abstract: A mobile communication system. The system has a housing comprising an interior region and an exterior region and a processing device provided within an interior region of the housing. The system has an rf transmit module coupled to the processing device, and configured on a transmit path. The system has a transmit filter provided within the rf transmit module. In an example, the transmit filter comprises a diplexer filter comprising a single crystal acoustic resonator device.
    Type: Application
    Filed: July 5, 2017
    Publication date: October 19, 2017
    Inventor: Jeffrey B. SHEALY
  • Publication number: 20170264256
    Abstract: A method of manufacture for an acoustic resonator device. The method includes forming a nucleation layer characterized by nucleation growth parameters overlying a substrate and forming a strained piezoelectric layer overlying the nucleation layer. The strained piezoelectric layer is characterized by a strain condition and piezoelectric layer parameters. The process of forming the strained piezoelectric layer can include an epitaxial growth process configured by nucleation growth parameters and piezoelectric layer parameters to modulate the strain condition in the strained piezoelectric layer. By modulating the strain condition, the piezoelectric properties of the resulting piezoelectric layer can be adjusted and improved for specific applications.
    Type: Application
    Filed: July 27, 2016
    Publication date: September 14, 2017
    Inventors: Shawn R. GIBB, Alexander Y. FELDMAN, Mark D. BOOMGARDEN, Michael P. LEWIS, Ramakrishna VETURY, Jeffrey B. SHEALY
  • Publication number: 20170263849
    Abstract: A single crystal acoustic electronic device. The device has a substrate having a surface region. The device has a first electrode material coupled to a portion of the substrate and a single crystal capacitor dielectric material having a thickness of greater than 0.4 microns and overlying an exposed portion of the surface region and coupled to the first electrode material. In an example, the single crystal capacitor dielectric material is characterized by a dislocation density of less than 1012 defects/ cm2. A second electrode material is overlying the single crystal capacitor dielectric material.
    Type: Application
    Filed: May 26, 2017
    Publication date: September 14, 2017
    Inventor: Jeffrey B. SHEALY
  • Patent number: 9716581
    Abstract: A mobile communication system. The system has a housing comprising an interior region and an exterior region and a processing device provided within an interior region of the housing. The system has an rf transmit module coupled to the processing device, and configured on a transmit path. The system has a transmit filter provided within the rf transmit module. In an example, the transmit filter comprises a diplexer filter comprising a single crystal acoustic resonator device.
    Type: Grant
    Filed: July 31, 2014
    Date of Patent: July 25, 2017
    Assignee: AKOUSTIS, INC.
    Inventor: Jeffrey B. Shealy
  • Patent number: 9673384
    Abstract: A single crystal acoustic electronic device. The device has a substrate having a surface region. The device has a first electrode material coupled to a portion of the substrate and a single crystal capacitor dielectric material having a thickness of greater than 0.4 microns and overlying an exposed portion of the surface region and coupled to the first electrode material. In an example, the single crystal capacitor dielectric material is characterized by a dislocation density of less than 1012 defects/cm2. A second electrode material is overlying the single crystal capacitor dielectric material.
    Type: Grant
    Filed: June 6, 2014
    Date of Patent: June 6, 2017
    Assignee: AKOUSTIS, INC.
    Inventor: Jeffrey B. Shealy
  • Publication number: 20170077386
    Abstract: A method of manufacturing an integrated circuit. This method includes forming an epitaxial material comprising single crystal piezo material overlying a surface region of a substrate to a desired thickness and forming a trench region to form an exposed portion of the surface region through a pattern provided in the epitaxial material. Also, the method includes forming a topside landing pad metal and a first electrode member overlying a portion of the epitaxial material and a second electrode member overlying the topside landing pad metal. Furthermore, the method can include processing the backside of the substrate to form a backside trench region exposing a backside of the epitaxial material and the landing pad metal and forming a backside resonator metal material overlying the backside of the epitaxial material to couple to the second electrode member overlying the topside landing pad metal.
    Type: Application
    Filed: November 28, 2016
    Publication date: March 16, 2017
    Inventor: Jeffrey B. SHEALY
  • Patent number: 9571061
    Abstract: A configurable single crystal acoustic resonator (SCAR) device integrated circuit. The circuit comprises a plurality of SCAR devices numbered from 1 through N, where N is an integer of 2 and greater. Each of the SCAR device has a thickness of single crystal piezo material formed overlying a surface region of a substrate member. The single crystal piezo material is characterized by a dislocation density of less than 1012 defects/cm2.
    Type: Grant
    Filed: June 6, 2014
    Date of Patent: February 14, 2017
    Assignee: AKOUSTIS, INC.
    Inventor: Jeffrey B. Shealy
  • Patent number: 9537465
    Abstract: A method of manufacturing an integrated circuit. This method includes forming an epitaxial material comprising single crystal piezo material overlying a surface region of a substrate to a desired thickness and forming a trench region to form an exposed portion of the surface region through a pattern provided in the epitaxial material. Also, the method includes forming a topside landing pad metal and a first electrode member overlying a portion of the epitaxial material and a second electrode member overlying the topside landing pad metal. Furthermore, the method can include processing the backside of the substrate to form a backside trench region exposing a backside of the epitaxial material and the landing pad metal and forming a backside resonator metal material overlying the backside of the epitaxial material to couple to the second electrode member overlying the topside landing pad metal.
    Type: Grant
    Filed: June 6, 2014
    Date of Patent: January 3, 2017
    Assignee: Akoustis, Inc.
    Inventor: Jeffrey B. Shealy
  • Publication number: 20160248395
    Abstract: A configurable single crystal acoustic resonator (SCAR) device integrated circuit. The circuit comprises a plurality of SCAR devices numbered from 1 through N, where N is an integer of 2 and greater. Each of the SCAR device has a thickness of single crystal piezo material formed overlying a surface region of a substrate member. The single crystal piezo material is characterized by a dislocation density of less than 1012 defects/cm2.
    Type: Application
    Filed: May 5, 2016
    Publication date: August 25, 2016
    Inventor: Jeffrey B. SHEALY
  • Patent number: 9362887
    Abstract: A configurable single crystal acoustic resonator (SCAR) device integrated circuit. The circuit comprises a plurality of SCAR devices numbered from 1 through N, where N is an integer of 2 and greater. Each of the SCAR device has a thickness of single crystal piezo material formed overlying a surface region of a substrate member. The single crystal piezo material is characterized by a dislocation density of less than 1012 defects/cm2.
    Type: Grant
    Filed: July 10, 2015
    Date of Patent: June 7, 2016
    Assignee: AKOUSTIS, INC.
    Inventor: Jeffrey B. Shealy
  • Publication number: 20160065172
    Abstract: A substrate structure for an acoustic resonator device. The substrate has a substrate member comprising a plurality of support members configured to form an array structure. In an example, the substrate member has an upper region, and optionally, has a plurality of recessed regions configured by the support members. The substrate has a thickness of single crystal piezo material formed overlying the upper region. In an example, the thickness of single crystal piezo material has a first surface region and a second surface region opposite of the first surface region.
    Type: Application
    Filed: August 26, 2014
    Publication date: March 3, 2016
    Inventor: Jeffrey B. SHEALY
  • Publication number: 20160036580
    Abstract: A mobile communication system. The system has a housing comprising an interior region and an exterior region and a processing device provided within an interior region of the housing. The system has an rf transmit module coupled to the processing device, and configured on a transmit path. The system has a transmit filter provided within the rf transmit module. In an example, the transmit filter comprises a diplexer filter comprising a single crystal acoustic resonator device.
    Type: Application
    Filed: July 31, 2014
    Publication date: February 4, 2016
    Inventor: Jeffrey B. SHEALY
  • Publication number: 20160028368
    Abstract: A method of wafer scale packaging acoustic resonator devices and an apparatus therefor. The method including providing a partially completed semiconductor substrate comprising a plurality of single crystal acoustic resonator devices, each having a first electrode member, a second electrode member, and an overlying passivation material. At least one of the devices to be configured with an external connection, a repassivation material overlying the passivation material, an under metal material overlying the repassivation material. Copper pillar interconnect structures are then configured overlying the electrode members, and solder bump structures are form overlying the copper pillar interconnect structures.
    Type: Application
    Filed: July 25, 2014
    Publication date: January 28, 2016
    Inventor: Jeffrey B. SHEALY
  • Publication number: 20160028367
    Abstract: A method of wafer scale packaging acoustic resonator devices and an apparatus therefor. The method including providing a partially completed semiconductor substrate comprising a plurality of single crystal acoustic resonator devices provided on a silicon and carbide bearing material, each having a first electrode member, a second electrode member, and an overlying passivation material. At least one of the devices to be configured with an external connection, a repassivation material overlying the passivation material, an under metal material overlying the repassivation material. Copper pillar interconnect structures are then configured overlying the electrode members, and solder bump structures are form overlying the copper pillar interconnect structures.
    Type: Application
    Filed: December 10, 2014
    Publication date: January 28, 2016
    Inventor: Jeffrey B. SHEALY
  • Publication number: 20150357993
    Abstract: A configurable single crystal acoustic resonator (SCAR) device integrated circuit. The circuit comprises a plurality of SCAR devices numbered from 1 through N, where N is an integer of 2 and greater. Each of the SCAR device has a thickness of single crystal piezo material formed overlying a surface region of a substrate member. The single crystal piezo material is characterized by a dislocation density of less than 1012 defects/cm2.
    Type: Application
    Filed: July 10, 2015
    Publication date: December 10, 2015
    Inventor: Jeffrey B. SHEALY
  • Publication number: 20150357994
    Abstract: A single crystal acoustic electronic device. The device has a substrate having a surface region. The device has a first electrode material coupled to a portion of the substrate and a single crystal capacitor dielectric material having a thickness of greater than 0.4 microns and overlying an exposed portion of the surface region and coupled to the first electrode material. In an example, the single crystal capacitor dielectric material is characterized by a dislocation density of less than 1012 defects/cm2. A second electrode material is overlying the single crystal capacitor dielectric material.
    Type: Application
    Filed: June 6, 2014
    Publication date: December 10, 2015
    Inventor: Jeffrey B. SHEALY
  • Publication number: 20150357987
    Abstract: A configurable single crystal acoustic resonator (SCAR) device integrated circuit. The circuit comprises a plurality of SCAR devices numbered from 1 through N, where N is an integer of 2 and greater. Each of the SCAR device has a thickness of single crystal piezo material formed overlying a surface region of a substrate member. The single crystal piezo material is characterized by a dislocation density of less than 1012 defects/cm2.
    Type: Application
    Filed: June 6, 2014
    Publication date: December 10, 2015
    Inventor: Jeffrey B. SHEALY
  • Patent number: 7968391
    Abstract: A high voltage and high power gallium nitride (GaN) transistor structure is disclosed. A plurality of structural epitaxial layers including a GaN buffer layer is deposited on a substrate. A GaN termination layer is deposited on the plurality of structural epitaxial layers. The GaN termination layer is adapted to protect the plurality of structural epitaxial layers from surface reactions. The GaN termination layer is sufficiently thin to allow electrons to tunnel through the GaN termination layer. Electrical contacts are deposited on the GaN termination layer, thereby forming a high electron mobility transistor.
    Type: Grant
    Filed: November 8, 2007
    Date of Patent: June 28, 2011
    Assignee: RF Micro Devices, Inc.
    Inventors: Joseph Smart, Brook Hosse, Shawn Gibb, David Grider, Jeffrey B. Shealy
  • Patent number: 7772927
    Abstract: The present invention relates to an active bias Darlington pair amplifier that may operate without a traditional bias resistor. The active bias Darlington pair amplifier includes an output transistor element that is cascaded with and driven from a driver transistor element. Active bias circuitry provides bias to the driver transistor element to regulate bias current in the output transistor element. The bias current in the output transistor element is sensed by the active bias circuitry. The active bias circuitry may include alternating current (AC) circuitry, which may adjust bias under certain radio frequency (RF) drive conditions. The active bias Darlington pair amplifier may include feedback circuitry, which provides feedback from the output transistor element to the driver transistor element. The feedback circuitry may include AC circuitry, which may provide frequency dependent feedback.
    Type: Grant
    Filed: October 6, 2008
    Date of Patent: August 10, 2010
    Assignee: RF Micro Devices, Inc.
    Inventors: Jeffrey B. Shealy, Philip M. Garber