Abstract: A method of manufacturing an insulated gate bipolar transistor includes providing trenches extending from a first surface to a layer section in a semiconductor portion, introducing impurities into mesa sections between the trenches, and forming, from the introduced impurities, second portions of doped regions separated from source regions by body regions. The source regions are electrically connected to an emitter electrode. The second portions have a second mean net impurity concentration exceeding at least ten times a first mean net impurity concentration in first portions of the doped layer. The first portions extend from the body regions to the layer section, respectively.

Abstract: The generation of auxiliary crystal defects is induced in a semiconductor substrate. Then the semiconductor substrate is pre-annealed at a temperature above a dissociation temperature at which the auxiliary crystal defects transform into defect complexes, which may be electrically inactive. Then protons may be implanted into the semiconductor substrate to induce the generation of radiation-induced main crystal defects. The defect complexes may enhance the efficiency of the formation of particle-related dopants based on the radiation-induced main crystal defects.

Abstract: A cavity is formed in a first semiconductor layer that is formed on a semiconducting base layer. The cavity extends from a process surface of the first semiconductor layer to the base layer. A recessed mask liner is formed on a portion of a sidewall of the cavity distant to the process surface or a mask plug is formed in a portion of the cavity distant do the process surface. A second semiconductor layer is grown by epitaxy on the process surface. The second semiconductor layer spans the cavity.

Abstract: In a semiconductor device a barrier region is sandwiched between a drift region and a charge carrier transfer region. The barrier and charge carrier transfer regions form a pn junction. The barrier and drift regions form a homojunction. A mean impurity concentration in the barrier region is at least ten times as high as an impurity concentration in the drift region. A control structure is arranged to form an inversion layer in the drift and barrier regions in an inversion state. No inversion layer is formed in the drift and barrier regions in a non-inversion state.

Abstract: A semiconductor device includes a semiconductor mesa which is formed between cell trench structures extending from a first surface into a semiconductor body. The semiconductor mesa includes a body zone forming a first pn junction with a drift zone between the body zone and a second surface opposite to the first surface. Source zones are arranged along a longitudinal axis of the semiconductor mesa at a first distance from each other and form second pn junctions with the body zone. A barrier structure, which has the conductivity type of the source zones, forms at least one of a unipolar homojunction with the drift zone and a pn junction with the body zone at least outside a vertical projection of the source zones perpendicular to the first surface. The barrier structure may be absent in the vertical projection of the source zones.

Abstract: A semiconductor device having an IGBT structure is operated by applying a gate voltage with a first value to a gate electrode terminal such that current flows through the IGBT between first and second electrode terminals and current flow through a desaturation channel is substantially blocked. A gate voltage with a second value is applied to the gate electrode terminal, the absolute value of the second value being lower than the absolute value of the first value, such that current flows through the IGBT between the first and second electrode terminals and charge carriers flow as a desaturating current through the desaturation channel to the first electrode terminal. A gate voltage with a third value is applied to the gate electrode terminal, the absolute value of the third value being lower than the respective absolute values of the first and second values, such that current flow through the IGBT between the first and second electrode terminals is substantially blocked.

Abstract: A semiconductor device includes a semiconductor body having opposite first and second sides. The semiconductor device further includes a drift zone in the semiconductor body between the second side and a pn junction. A profile of net doping of the drift zone along at least 50% of a vertical extension of the drift zone between the first and second sides is undulated and includes doping peak values between 1×1013 cm?3 and 5×1014 cm?3. A device blocking voltage Vbr is defined by a breakdown voltage of the pn junction between the drift zone and a semiconductor region of opposite conductivity type that is electrically coupled to the first side of the semiconductor body.

Abstract: In a semiconductor diode a semiconductor body includes an injection efficiency control region between a drift region of a first conductivity type and a first electrode region of a second, opposite conductivity type. The injection efficiency control region includes a superjunction structure including a barrier region of the first conductivity type and a compensation region of a second conductivity type arranged consecutively along a lateral direction and directly adjoining each other. A net dopant concentration of the barrier region averaged along a vertical extension of the barrier region is at least three times greater than a net dopant concentration of the drift region averaged along 20% of a vertical extension of the drift zone adjoining the barrier region.

Abstract: A semiconductor device includes an insulated gate bipolar transistor (IGBT) arrangement. The IGBT arrangement includes a carrier confinement reduction region laterally arranged between a cell region and a sensitive region. The IGBT arrangement is configured or formed so that the cell region has a first average density of free charge carriers in an on-state of the IGBT arrangement, the carrier confinement reduction region has a second average density of free charge carriers in the on-state of the IGBT arrangement and the sensitive region has a third average density of free charge carriers in the on-state of the IGBT arrangement. The first average density of free charge carriers is larger than the second average density of free charge carriers and the second average density of free charge carriers is larger than the third average density of free charge carriers.

Abstract: An IGBT includes a mesa section that extends between two cell trench structures from a first surface of a semiconductor portion to a layer section of the semiconductor portion. A source region, which is electrically connected to an emitter electrode, is formed in the mesa section. A doped region, which is separated from the source region by a body region of a complementary conductivity type, includes a first portion with a first mean net impurity concentration and a second portion with a second mean net impurity concentration exceeding at least ten times the first mean net impurity concentration. In the mesa section the first portion extends from the body region to the layer section. The second portions of the doped region virtually narrow the mesa sections in a normal on-state of the IGBT.

Abstract: A semiconductor device includes a pn junction between a drift zone and a charge-carrier transfer region in a semiconductor body. An access channel provides a permanent charge carrier path connecting the drift zone with a recombination region through a separation region between the drift zone and the recombination region. The access channel adjusts a plasma density in the drift zone and the recombination region.

Abstract: A semiconductor device includes a drift zone in a semiconductor body. A charge-carrier transfer region forms a pn junction with the drift zone in the semiconductor body. A control structure electrically connects a recombination region to the drift zone during a desaturation cycle and disconnects the recombination region from the drift zone outside the desaturation cycle. During the desaturation cycle the recombination region reduces a charge carrier plasma in the drift zone and reduces reverse recovery losses without adversely affecting blocking characteristics.

Abstract: A semiconductor mesa is formed in a semiconductor layer between a first cell trench structure and a second cell trench structure extending from a first surface into the semiconductor layer. An opening is formed in a capping layer formed on the first surface, wherein the opening exposes at least a portion of the semiconductor mesa. Through the opening impurities of a first conductivity type are introduced into the exposed portion of the semiconductor mesa. A recess defined by the opening is formed.

Abstract: In a semiconductor device a barrier region is sandwiched between a drift region and a charge carrier transfer region. The barrier and charge carrier transfer regions form a pn junction. The barrier and drift regions form a homojunction. A mean impurity concentration in the barrier region is at least ten times as high as an impurity concentration in the drift region. A control structure is arranged to form an inversion layer in the drift and barrier regions in an inversion state. No inversion layer is formed in the drift and barrier regions in a non-inversion state.

Abstract: A semiconductor device includes an IGBT cell including a second-type doped drift zone, and a desaturation semiconductor structure for desaturating a charge carrier concentration in the IGBT cell. The desaturation structure includes a first-type doped region forming a pn-junction with the drift zone, and two portions of a trench or two trenches arranged in the first-type doped region and beside the IGBT cell in a lateral direction. Each of the two trench portions or each of the two trenches has a wide part below a narrow part. The wide parts confine a first-type doped desaturation channel region of the first-type doped region at least in the lateral direction. The narrow parts confine a first-type doped mesa region of the first-type doped region at least in the lateral direction. The desaturation channel region has a width smaller than the mesa region in the lateral direction, and adjoins the mesa region.

Abstract: A semiconductor device includes an insulated gate bipolar transistor (IGBT) arrangement. The IGBT arrangement includes a carrier confinement reduction region laterally arranged between a cell region and a sensitive region. The IGBT arrangement is configured or formed so that the cell region has a first average density of free charge carriers in an on-state of the IGBT arrangement, the carrier confinement reduction region has a second average density of free charge carriers in the on-state of the IGBT arrangement and the sensitive region has a third average density of free charge carriers in the on-state of the IGBT arrangement. The first average density of free charge carriers is larger than the second average density of free charge carriers and the second average density of free charge carriers is larger than the third average density of free charge carriers.

Abstract: An IGBT includes at least one first type transistor cell, including a base region, a first emitter region, a body region, and a second emitter region. The body region is arranged between the first emitter region and the base region. The base region is arranged between the body region and the second emitter region. The IGBT further includes a gate electrode adjacent the body region and dielectrically insulated from the body region by a gate dielectric, and a base electrode adjacent the base region and dielectrically insulated from the base region by a base electrode dielectric. The base region has a first base region section adjoining the base electrode dielectric and a second base region section arranged between the second emitter region and the first base region section. A doping concentration of the first base region section is higher than a doping concentration of the second base region section.

Abstract: A semiconductor device includes an insulated gate bipolar transistor (IGBT) arrangement. The IGBT arrangement includes a first configuration region of emitter-side insulated gate bipolar transistor structures and a second configuration region of emitter-side insulated gate bipolar transistor structures. The first configuration region and the second configuration region are arranged at a main surface of a semiconductor substrate of the semiconductor device. Further, the IGBT arrangement includes a collector layer and a drift layer. The collector layer is arranged at a backside surface of the semiconductor substrate and the drift layer is arranged between the collector layer and the emitter-side IGBT structures of the first configuration region and the second configuration region. Additionally, the collector layer includes at least a first doping region laterally adjacent to a second doping region.

Abstract: An IGBT includes a mesa section that extends between two cell trench structures from a first surface of a semiconductor portion to a layer section of the semiconductor portion. A source region, which is electrically connected to an emitter electrode, is formed in the mesa section. A doped region, which is separated from the source region by a body region of a complementary conductivity type, includes a first portion with a first mean net impurity concentration and a second portion with a second mean net impurity concentration exceeding at least ten times the first mean net impurity concentration. In the mesa section the first portion extends from the body region to the layer section. The second portions of the doped region virtually narrow the mesa sections in a normal on-state of the IGBT.

Abstract: First and second cell trench structures extend from a first surface into a semiconductor substrate. The first cell trench structure includes a first buried electrode and a first insulator layer between the first buried electrode and a semiconductor mesa separating the first and second cell trench structures. A capping layer covers the first surface. The capping layer is patterned to form an opening having a minimum width larger than a thickness of the first insulator layer. The opening exposes a first vertical section of the first insulator layer at the first surface. An exposed portion of the first insulator layer is removed to form a recess between the semiconductor mesa and the first buried electrode. A contact structure is in the opening and the recess. The contact structure electrically connects both a buried zone in the semiconductor mesa and the first buried electrode and allows for narrower semiconductor mesa width.