Patents by Inventor John A. Foster

John A. Foster has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8945952
    Abstract: Combinatorial workflow is provided for evaluating cleaning processes after forming a gate structure of transistor devices, to provide optimized process conditions for gate stack formation, including metal gate stack using high-k dielectrics. NMOS and PMOS transistor devices are combinatorially fabricated on multiple regions of a substrate, with each region exposed to a different cleaning chemical and process. The transistor devices are then characterized, and the data are compared to categorize the potential damages of different cleaning chemicals and processes. Optimized chemicals and processes can be obtained to satisfy desired device requirements.
    Type: Grant
    Filed: November 5, 2013
    Date of Patent: February 3, 2015
    Assignee: Intermolecular, Inc.
    Inventor: John Foster
  • Patent number: 8901681
    Abstract: A pedestal projection having reduced cross-sectional area secures a MEMs device to a housing surface in a manner which reduces strain on the MEMS die due to differences in coefficients of thermal expansion while more evenly distributing to the MEMS sensor any external forces mechanically coupled through the housing structure. The pedestal projection may be integrally formed with a surface on either MEMS die or housing member and is axially aligned with the structure which anchors the MEMS sensor to the MEMS die.
    Type: Grant
    Filed: March 12, 2013
    Date of Patent: December 2, 2014
    Assignee: Qualtre, Inc.
    Inventor: Michael John Foster
  • Patent number: 8859431
    Abstract: The invention discloses a method for cleaning residues from a semiconductor substrate during a nickel platinum silicidation process. Post silicidation residues of nickel and platinum may not be removed adequately just by an aqua regia solution (comprising a mixture of nitric acid and hydrochloric acid). Therefore, embodiments of the invention provide a multi-step residue cleaning, comprising exposing the substrate to an aqua regia solution, followed by an exposure to a chlorine gas or a solution comprising dissolved chlorine gas, which may further react with remaining platinum residues, rendering it more soluble in aqueous solution and thereby dissolving it from the surface of the substrate.
    Type: Grant
    Filed: June 6, 2013
    Date of Patent: October 14, 2014
    Assignee: Intermolecular, Inc.
    Inventors: Anh Duong, John Foster, Olov Karlsson, James Mavrinac, Usha Raghuram
  • Patent number: 8854067
    Abstract: Methods and structures are described for determining contact resistivities and Schottky barrier heights for conductors deposited on semiconductor wafers that can be combined with combinatorial processing, allowing thereby numerous processing conditions and materials to be tested concurrently. Methods for using multi-ring as well as single-ring CTLM structures to cancel parasitic resistance are also described, as well as structures and processes for inline monitoring of properties.
    Type: Grant
    Filed: August 24, 2012
    Date of Patent: October 7, 2014
    Assignees: Intermolecular, Inc., GLOBALFOUNDRIES, Inc.
    Inventors: Amol Joshi, Charlene Chen, John Foster, Zhendong Hong, Olov Karlsson, Bei Li, Dipankar Pramanik, Usha Raghuram, Mark Victor Raymond, Jingang Su, Bin Yang
  • Publication number: 20140176327
    Abstract: A method, apparatus and computer program product are provided in order to provide timely notification of a medical response service of a subject who may require medical assistance. In the context of a method, information regarding a subject is received from an interface system carried by a head worn device of the subject, such as a helmet worn by the subject. The information provided by the interface system is utilized for non-medical purposes. The method also determines whether the subject is considered to require medical assistance based upon the information regarding the subject. The method may also include causing notification of a medical response service of the subject in an instance in which the subject is considered to require medical assistance.
    Type: Application
    Filed: December 20, 2012
    Publication date: June 26, 2014
    Applicant: NOKIA CORPORATION
    Inventors: Rita Parada, Lina Ester Liner, Charlie Matthew Sutton, Brody Jay Larson, Michelle Christine Shilstone, Laura Gigi Lee, Nick John Foster, Markus Eklund
  • Publication number: 20140179082
    Abstract: Provided are methods for processing semiconductor substrates having hafnium oxide structures as well as one or more of silicon nitride, silicon oxide, polysilicon, and titanium nitride structures. Selected etching solution compositions and processing conditions provide high etching selectivity of hafnium oxide relative to these other materials. As such, hafnium oxide structures may be partially or completely removed without significant damage to other exposed structures made from these other materials. In some embodiments, the etching rate hafnium oxide is two or more times greater than the etching rate of silicon oxide and/or twenty or more times greater that the etching rate of polysilicon. The etching rate of hafnium oxide may be one and half times greater than the etching rate of silicon nitride and/or five or more times greater than the etching rate of titanium nitride.
    Type: Application
    Filed: December 21, 2012
    Publication date: June 26, 2014
    Applicant: INTERMOLECULAR INC.
    Inventors: John Foster, Kim Van Berkel
  • Patent number: 8735302
    Abstract: Metal gate high-k capacitor structures with lithography patterning are used to extract gate work function using a combinatorial workflow. Oxide terracing, together with high productivity combinatorial process flow for metal deposition can provide optimum high-k gate dielectric and metal gate solutions for high performance logic transistors. The high productivity combinatorial technique can provide an evaluation of effective work function for given high-k dielectric metal gate stacks for PMOS and NMOS transistors, which is critical in identifying and selecting the right materials.
    Type: Grant
    Filed: May 24, 2012
    Date of Patent: May 27, 2014
    Assignee: Intermolecular, Inc.
    Inventors: Amol Joshi, John Foster, Zhendong Hong, Olov Karlsson, Bei Li, Usha Raghuram
  • Patent number: 8716146
    Abstract: Provided are methods for processing semiconductor substrates. The methods involve etching silicon nitride structures using phosphoric acid solutions maintained at low temperatures, such as between about 110° C. and 130° C. These temperatures provide adequate etching rates and do not damage surrounding metal silicide and silicon oxide structures. The etching rates of silicon nitride may be 10 Angstroms per minute and greater. Lower temperatures also allow decreasing concentrations of phosphoric acid in the etching solutions, which in some embodiments may be less than 90 weight percent. As a result, more selective etching of the silicon nitride structures may be achieved. This selectivity may be as high as hundred times relative to the silicide and silicon oxide structures. The surface conductivity of the silicide structures may remain substantially unchanged by this etching process.
    Type: Grant
    Filed: July 3, 2012
    Date of Patent: May 6, 2014
    Assignee: Intermolecular, Inc
    Inventors: Gregory Nowling, John Foster
  • Patent number: 8703620
    Abstract: A method for fabricating an integrated circuit from a semiconductor substrate having formed thereon over a first portion of the semiconductor substrate a hard mask layer and having formed thereon over a second portion of the semiconductor substrate an oxide layer. The first portion and the second portion are electrically isolated by a shallow trench isolation feature. The method includes removing the oxide layer from over the second portion and recessing the surface region of the second portion by applying an ammonia-hydrogen peroxide-water (APM) solution to form a recessed surface region. The APM solution is provided in a concentration of ammonium to hydrogen peroxide ranging from about 1:1 to about 1:0.001 and in a concentration of ammonium to water ranging from about 1:1 to about 1:20. The method further includes epitaxially growing a silicon-germanium (SiGe) layer on the recessed surface region.
    Type: Grant
    Filed: August 1, 2012
    Date of Patent: April 22, 2014
    Assignee: GLOBALFOUNDRIES, Inc.
    Inventors: Joanna Wasyluk, Stephan Kronholz, Berthold Reimer, Sven Metzger, Gregory Nowling, John Foster, Paul Besser
  • Patent number: 8693454
    Abstract: A wireless connection between a mobile device and an IP-based wireless telecommunications network is established when the mobile device registers with a network controller (NC) through an access point (AP). When a geographical position is needed for the mobile device (e.g., a 911 call), messages are exchanged between the NC and a serving mobile location center (SMLC), where the SMLC retrieves information from a database that is used to identify the geographic position of the mobile device. The database can store a variety of information related to mobile devices such as: last known position, IP address, MAC address, a mobile or subscriber identifier (such as an International Mobile Subscriber Identity (IMSI)), last CGI, etc. The geographical position is communicated back to the NC, which can then forward the position information to a switch for processing such as for 911 calls.
    Type: Grant
    Filed: February 14, 2012
    Date of Patent: April 8, 2014
    Assignee: T-Mobile USA, Inc.
    Inventors: Magesh Annamalai, Christopher E. Caldwell, Simon Chapman, Christopher Harvey Joul, Justin Mueller, Janne P. Linkola, John Foster Pottle, Ryan Neil Jensen
  • Patent number: 8688764
    Abstract: The present invention is directed to a system, method, and software product for ordering of digital photo services among a plurality order terminals each being associated with one of a plurality of business entities, using a digital image provided on a digital storage device associated with one of a plurality of digital storage device providers. The method includes maintaining information with respect to business relationships between the plurality of digital storage device providers and the plurality of business entities; providing a digital storage device at one of the order terminals; and providing an offering at the one order terminal based on a business relationship between the business entity associated with the one order terminal and the digital device provider associated with the digital storage device.
    Type: Grant
    Filed: January 18, 2002
    Date of Patent: April 1, 2014
    Assignee: Intellectual Ventures Fund 83 LLC
    Inventors: Lou Chauvin, Howard E. Bussey, Christopher M. Dobbs, Kenneth A. Parulski, Timothy G. Thompson, John A. Foster, Pamela J. Gotham
  • Publication number: 20140055152
    Abstract: Methods and structures are described for determining contact resistivities and Schottky barrier heights for conductors deposited on semiconductor wafers that can be combined with combinatorial processing, allowing thereby numerous processing conditions and materials to be tested concurrently. Methods for using multi-ring as well as single-ring CTLM structures to cancel parasitic resistance are also described, as well as structures and processes for inline monitoring of properties.
    Type: Application
    Filed: August 24, 2012
    Publication date: February 27, 2014
    Applicants: Globalfoundries, Inc., Intermolecular, Inc.
    Inventors: Amol Joshi, Charlene Chen, John Foster, Zhendong Hong, Olov Karlsson, Bei Li, Dipankar Pramanik, Usha Raghuram, Mark Victor Raymond, Jingang Su, Bin Yang
  • Publication number: 20140057371
    Abstract: Combinatorial workflow is provided for evaluating cleaning processes after forming a gate structure of transistor devices, to provide optimized process conditions for gate stack formation, including metal gate stack using high-k dielectrics. NMOS and PMOS transistor devices are combinatorially fabricated on multiple regions of a substrate, with each region exposed to a different cleaning chemical and process. The transistor devices are then characterized, and the data are compared to categorize the potential damages of different cleaning chemicals and processes. Optimized chemicals and processes can be obtained to satisfy desired device requirements.
    Type: Application
    Filed: November 5, 2013
    Publication date: February 27, 2014
    Applicant: Intermolecular Inc.
    Inventor: John Foster
  • Publication number: 20140033235
    Abstract: Methods and systems for managing applications by an application manager within a man machine interface (MMI) application framework are disclosed. Aspects of the method may include creating an active application context upon launching a first application by the application manager. The active application context may be transitioned into a suspended application context upon suspending the first application by the application manager. The suspended application context may be stored in an application manager context stack. The stored suspended application context may be acquired from the application manager context stack upon receipt of an exit message by the application manager. The application manager context stack may comprise a last-in-first-out (LIFO) context stack. The first application associated with said suspended application context may be reactivated upon removal of the suspended application context from the application manager context stack.
    Type: Application
    Filed: October 1, 2013
    Publication date: January 30, 2014
    Applicant: Broadcom Corporation
    Inventors: Derek John FOSTER, Lori YOSHIDA
  • Publication number: 20140014689
    Abstract: An apparatus for dispensing a frozen confection is provided comprising: an insulated chamber (1) housing a container (3) of a frozen confection; a refrigeration system (8); a nozzle (4) having an inner end which is connected to the container (3); and an outer end which is located outside the insulated chamber; means for applying pressure to the frozen confection thereby to dispense it from the container (3; a cap (7) which can enclose the outer end (6) of the nozzle (4) when closed and which allows external access to the outer end (6) of the nozzle (4) when open; and one or more channels (12) which allow cold air to flow from the chamber into the region around the outer end of the nozzle; wherein the apparatus comprises a removable holder (10) that supports the container (3) and wherein the spaces between the container (3), the inside of the chamber and the underside of the holder form the one or more channels (12).
    Type: Application
    Filed: March 14, 2012
    Publication date: January 16, 2014
    Inventors: Nicholas Martin Broadbent, David John Foster, Paul Edwin Lewis
  • Publication number: 20140011367
    Abstract: Provided are methods for processing semiconductor substrates. The methods involve etching silicon nitride structures using phosphoric acid solutions maintained at low temperatures, such as between about 110° C. and 130° C. These temperatures provide adequate etching rates and do not damage surrounding metal silicide and silicon oxide structures. The etching rates of silicon nitride may be 10 Angstroms per minute and greater. Lower temperatures also allow decreasing concentrations of phosphoric acid in the etching solutions, which in some embodiments may be less than 90 weight percent. As a result, more selective etching of the silicon nitride structures may be achieved. This selectivity may be as high as hundred times relative to the silicide and silicon oxide structures. The surface conductivity of the silicide structures may remain substantially unchanged by this etching process.
    Type: Application
    Filed: July 3, 2012
    Publication date: January 9, 2014
    Applicant: Intermolecular, Inc.
    Inventors: Gregory Nowling, John Foster
  • Patent number: 8603837
    Abstract: Combinatorial workflow is provided for evaluating cleaning processes after forming a gate structure of transistor devices, to provide optimized process conditions for gate stack formation, including metal gate stack using high-k dielectrics. NMOS and PMOS transistor devices are combinatorially fabricated on multiple regions of a substrate, with each region exposed to a different cleaning chemical and process. The transistor devices are then characterized, and the data are compared to categorize the potential damages of different cleaning chemicals and processes. Optimized chemicals and processes can be obtained to satisfy desired device requirements.
    Type: Grant
    Filed: July 31, 2012
    Date of Patent: December 10, 2013
    Assignee: Intermolecular, Inc.
    Inventor: John Foster
  • Publication number: 20130316472
    Abstract: Metal gate high-k capacitor structures with lithography patterning are used to extract gate work function using a combinatorial workflow. Oxide terracing, together with high productivity combinatorial process flow for metal deposition can provide optimum high-k gate dielectric and metal gate solutions for high performance logic transistors. The high productivity combinatorial technique can provide an evaluation of effective work function for given high-k dielectric metal gate stacks for PMOS and NMOS transistors, which is critical in identifying and selecting the right materials.
    Type: Application
    Filed: May 24, 2012
    Publication date: November 28, 2013
    Applicant: Intermolecular, Inc.
    Inventors: Amol Joshi, John Foster, Zhendong Hong, Olov Karlsson, Bei Li, Usha Raghuram
  • Patent number: 8595687
    Abstract: Methods and systems for processing text input within a man-machine interface (MMI) application framework are provided and may comprise creating at least one text editor by an active application and generating at least one text edit view by the text editor. Text input, for example, predictive input, multi-tap input and/or numeric input, which may be associated with the text edit view, may be received by the text editor. At least one text editor feature may be associated with at least one text editor and the text editor feature may comprise a maximum string length characteristic and/or a cursor characteristic. The text editor feature may be customized for each text editor view and the text input may be buffered by a buffer within the MMI application framework.
    Type: Grant
    Filed: August 25, 2004
    Date of Patent: November 26, 2013
    Assignee: Broadcom Corporation
    Inventors: Lori Yoshida, Derek John Foster
  • Patent number: 8575016
    Abstract: A method for etching a metal gate stack is provided. The method includes forming a gate stack on a substrate, where the gate stack includes a metal gate. A wet etch process is performed on the gate stack. The wet etch process includes submersing the substrate with the gate stack in an aqueous solution composed of a wet etchant and an oxidizer, removing the substrate from the solution and rinsing the solution from the etched gate stack.
    Type: Grant
    Filed: October 19, 2012
    Date of Patent: November 5, 2013
    Assignee: Intermolecular, Inc.
    Inventors: John Foster, Kim Van Berkel