Patents by Inventor John A. Ott

John A. Ott has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9472450
    Abstract: Interconnect structures including a graphene cap located on exposed surfaces of a copper structure are provided. In some embodiments, the graphene cap is located only atop the uppermost surface of the copper structure, while in other embodiments the graphene cap is located along vertical sidewalls and atop the uppermost surface of the copper structure. The copper structure is located within a dielectric material.
    Type: Grant
    Filed: May 10, 2012
    Date of Patent: October 18, 2016
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Griselda Bonilla, Christos D. Dimitrakopoulos, Alfred Grill, James B. Hannon, Qinghuang Lin, Deborah A. Neumayer, Satoshi Oida, John A. Ott, Dirk Pfeiffer
  • Patent number: 9466672
    Abstract: A semiconductor stack includes a substrate; a first semiconductor layer disposed on the substrate; a tensile strained interlayer layer disposed on the first semiconductor layer; and a second semiconductor layer disposed on the strained interlayer; wherein the difference in strain between the first semiconductor layer and the tensile strained interlayer is about 1 to about 2%.
    Type: Grant
    Filed: November 25, 2015
    Date of Patent: October 11, 2016
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Kangguo Cheng, Keith E. Fogel, Pouya Hashemi, John A. Ott, Alexander Reznicek
  • Publication number: 20160276228
    Abstract: A semiconductor material stack of, from bottom to top, a first semiconductor material having a first lattice constant and a second semiconductor material having a second lattice constant that may or may not differ from the first lattice constant and is selected from an III-V compound semiconductor and germanium is provided. The second semiconductor material of the semiconductor material stack is then scanned using an atomic force microscope (AFM) operating in a tapping mode to provide an AFM image of the second semiconductor material of the semiconductor material stack. The resultant AFM image is then analyzed and crystal defects at a topmost surface of the second semiconductor material of the semiconductor material stack can be measured.
    Type: Application
    Filed: May 31, 2016
    Publication date: September 22, 2016
    Inventors: Stephen W. Bedell, John A. Ott
  • Publication number: 20160276483
    Abstract: A finFET structure, and method of forming such structure, in which a germanium enriched nanowire is located in the channel region of the FET, while simultaneously having silicon-germanium fin in the source/drain region of the finFET.
    Type: Application
    Filed: May 27, 2016
    Publication date: September 22, 2016
    Inventors: Kevin K. Chan, Pouya Hashemi, Ali Khakifirooz, John A. Ott, Alexander Reznicek
  • Publication number: 20160268128
    Abstract: A method for forming an epitaxial structure includes providing a two-dimensional material on a crystal semiconductor material and opening up portions of the two-dimensional material to expose the crystal semiconductor material. A structure is epitaxially grown in the portions opened up in the crystal semiconductor material such that the epitaxial growth is selective to the exposed crystal semiconductor material relative to the two-dimensional material.
    Type: Application
    Filed: March 12, 2015
    Publication date: September 15, 2016
    Inventors: Cheng-Wei Cheng, Jeehwan Kim, John A. Ott, Devendra K. Sadana
  • Publication number: 20160259916
    Abstract: A method for generating a report by a computing device is described. The method includes identifying a specific health care intervention. The method also includes creating a health care cohort for the specific health care intervention. The health care cohort includes a definition of a primary intervention. The method further includes generating a report based on the health care cohort.
    Type: Application
    Filed: March 3, 2016
    Publication date: September 8, 2016
    Inventors: Ann Zofia Putnam, Matthew Scott Peters, Craig Gale, Dallin Rogers, Mark John Ott
  • Publication number: 20160225641
    Abstract: A structure and method for reducing defects within a III-V compound semiconductor layer grown epitaxially on a mismatched crystalline substrate is provided. The III-V compound semiconductor layer may be surrounded by a thermally stable layer on its sides and a thermally stable capping layer on its upper surface. Subsequent to epitaxial growth, the III-V compound semiconductor layer may be subjected to high temperature annealing in a pressurized atmosphere of the corresponding Group V material present in the III-V compound semiconductor layer. The thermally stable layer and the capping layer may prevent the evaporation of the Group V material from the III-V compound semiconductor layer, as well as cure and rearrange the crystalline lattice structure of the III-V compound semiconductor layer thereby reducing defect density.
    Type: Application
    Filed: January 29, 2015
    Publication date: August 4, 2016
    Inventors: Stephen W. Bedell, John A. Ott, Devendra K. Sadana, Brent A. Wacaser, Min Yang
  • Patent number: 9406529
    Abstract: A finFET structure, and method of forming such structure, in which a germanium enriched nanowire is located in the channel region of the FET, while simultaneously having silicon-germanium fin in the source/drain region of the finFET.
    Type: Grant
    Filed: March 5, 2015
    Date of Patent: August 2, 2016
    Assignee: International Business Machines Corporation
    Inventors: Kevin K. Chan, Pouya Hashemi, Ali Khakifirooz, John A. Ott, Alexander Reznicek
  • Publication number: 20160204290
    Abstract: Methods for forming a photovoltaic device include forming a buffer layer between a transparent electrode and a p-type layer. The buffer layer includes a doped germanium-free silicon base material. The buffer layer has a work function that falls within barrier energies of the transparent electrode and the p-type layer. An intrinsic layer and an n-type layer are formed on the p-type layer. Devices are also provided.
    Type: Application
    Filed: March 22, 2016
    Publication date: July 14, 2016
    Inventors: AUGUSTIN J. HONG, MARINUS J. HOPSTAKEN, JEEHWAN KIM, JOHN A. OTT, DEVENDRA K. SADANA
  • Publication number: 20160197147
    Abstract: Thermal condensation is employed to obtain a finned structure including strained silicon germanium fins having vertical side walls and a germanium content that may be high relative to silicon. A hard mask is used directly on a low-germanium content silicon germanium layer. The hard mask is patterned and fins are formed beneath the hard mask from the silicon germanium layer. Thermal condensation in an oxidizing ambient causes the formation of regions beneath the hard mask that have a high germanium content. The hard mask is trimmed to a target critical dimension. The regions beneath the hard mask and adjoining oxide material are subjected to reactive ion etch, resulting in the formation of high-germanium content fins with planar, vertically extending sidewalls.
    Type: Application
    Filed: March 13, 2016
    Publication date: July 7, 2016
    Inventors: Karthik Balakrishnan, John Bruley, Pouya Hashemi, Ali Khakifirooz, John A. Ott, Alexander Reznicek
  • Patent number: 9368415
    Abstract: A semiconductor material stack of, from bottom to top, a first semiconductor material having a first lattice constant and a second semiconductor material having a second lattice constant that may or may not differ from the first lattice constant and is selected from an III-V compound semiconductor and germanium is provided. The second semiconductor material of the semiconductor material stack is then scanned using an atomic force microscope (AFM) operating in a tapping mode to provide an AFM image of the second semiconductor material of the semiconductor material stack. The resultant AFM image is then analyzed and crystal defects at a topmost surface of the second semiconductor material of the semiconductor material stack can be measured.
    Type: Grant
    Filed: February 25, 2015
    Date of Patent: June 14, 2016
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Stephen W. Bedell, John A. Ott
  • Patent number: 9324843
    Abstract: Thermal condensation is employed to obtain a finned structure including strained silicon germanium fins having vertical side walls and a germanium content that may be high relative to silicon. A hard mask is used directly on a low-germanium content silicon germanium layer. The hard mask is patterned and fins are formed beneath the hard mask from the silicon germanium layer. Thermal condensation in an oxidizing ambient causes the formation of regions beneath the hard mask that have a high germanium content. The hard mask is trimmed to a target critical dimension. The regions beneath the hard mask and adjoining oxide material are subjected to reactive ion etch, resulting in the formation of high-germanium content fins with planar, vertically extending sidewalls.
    Type: Grant
    Filed: September 5, 2014
    Date of Patent: April 26, 2016
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Karthik Balakrishnan, John Bruley, Pouya Hashemi, Ali Khakifirooz, John A. Ott, Alexander Reznicek
  • Patent number: 9306107
    Abstract: Methods for forming a photovoltaic device include forming a buffer layer between a transparent electrode and a p-type layer. The buffer layer includes a doped germanium-free silicon base material. The buffer layer has a work function that falls within barrier energies of the transparent electrode and the p-type layer. An intrinsic layer and an n-type layer are formed on the p-type layer. Devices are also provided.
    Type: Grant
    Filed: August 14, 2013
    Date of Patent: April 5, 2016
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Augustin J. Hong, Marinus J. Hopstaken, Jeehwan Kim, John A. Ott, Devendra K. Sadana
  • Publication number: 20160071956
    Abstract: Thermal condensation is employed to obtain a finned structure including strained silicon germanium fins having vertical side walls and a germanium content that may be high relative to silicon. A hard mask is used directly on a low-germanium content silicon germanium layer. The hard mask is patterned and fins are formed beneath the hard mask from the silicon germanium layer. Thermal condensation in an oxidizing ambient causes the formation of regions beneath the hard mask that have a high germanium content. The hard mask is trimmed to a target critical dimension. The regions beneath the hard mask and adjoining oxide material are subjected to reactive ion etch, resulting in the formation of high-germanium content fins with planar, vertically extending sidewalls.
    Type: Application
    Filed: September 5, 2014
    Publication date: March 10, 2016
    Inventors: Karthik Balakrishnan, John Bruley, Pouya Hashemi, Ali Khakifirooz, John A. Ott, Alexander Reznicek
  • Patent number: 9205631
    Abstract: Systems and methods for bonding include selectively heating an initial location of a sample to melt a bonding layer at an interface between a first layer and a second layer of the sample. The heating is propagated in a direction away from the initial location such that a melt front of the bonding layer is translated across the interface to provide a void free bond between the first layer and the second layer.
    Type: Grant
    Filed: August 14, 2013
    Date of Patent: December 8, 2015
    Assignee: GLOBALFOUNDRIES INC
    Inventors: Stephen W. Bedell, John A. Ott
  • Patent number: 9105518
    Abstract: Methods for detecting the physical layout of an integrated circuit are provided. The methods of the present disclosure allow large area imaging of the circuit layout without requiring tedious sample preparation techniques. The imaging can be performed utilizing low-energy beam techniques such as scanning electron microscopy; however, more sophisticated imaging techniques can also be employed. In the methods of the present disclosure, spalling is used to remove a portion of a semiconductor layer including at least one semiconductor device formed thereon or therein from a base substrate. In some cases, a buried insulator layer that is located beneath a semiconductor layer including the at least one semiconductor device can be completely or partially removed. In some cases, the semiconductor layer including the at least one semiconductor device can be thinned. The methods improve the detection quality that the buried insulator layer and a thick semiconductor layer can reduce.
    Type: Grant
    Filed: October 25, 2013
    Date of Patent: August 11, 2015
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Stephen W. Bedell, Bahman Hekmatshoar-Tabari, Ali Khakifirooz, John A. Ott, Ghavam G. Shahidi, Davood Shahrjerdi
  • Publication number: 20150179428
    Abstract: A spall releasing plane is formed embedded within a Group III nitride material layer. The spall releasing plane includes a material that has a different strain, a different structure and a different composition compared with the Group III nitride material portions that provide the Group III nitride material layer and embed the spall releasing plane. The spall releasing plane provides a weakened material plane region within the Group III nitride material layer which during a subsequently performed spalling process can be used to release one of the portions of Group III nitride material from the original Group III nitride material layer. In particular, during the spalling process crack initiation and propagation occurs within the spall releasing plane embedded within the original Group III nitride material layer.
    Type: Application
    Filed: December 19, 2013
    Publication date: June 25, 2015
    Applicant: International Business Machines Corporation
    Inventors: Can Bayram, Stephen W. Bedell, Keith E. Fogel, John A. Ott, Devendra K. Sadana
  • Patent number: 9058990
    Abstract: A spall releasing plane is formed embedded within a Group III nitride material layer. The spall releasing plane includes a material that has a different strain, a different structure and a different composition compared with the Group III nitride material portions that provide the Group III nitride material layer and embed the spall releasing plane. The spall releasing plane provides a weakened material plane region within the Group III nitride material layer which during a subsequently performed spalling process can be used to release one of the portions of Group III nitride material from the original Group III nitride material layer. In particular, during the spalling process crack initiation and propagation occurs within the spall releasing plane embedded within the original Group III nitride material layer.
    Type: Grant
    Filed: December 19, 2013
    Date of Patent: June 16, 2015
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Can Bayram, Stephen W. Bedell, Keith E. Fogel, John A. Ott, Devendra K. Sadana
  • Patent number: 9000594
    Abstract: A contiguous layer of graphene is formed on exposed sidewall surfaces and a topmost surface of a copper-containing structure that is present on a surface of a substrate. The presence of the contiguous layer of graphene on the copper-containing structure reduces copper oxidation and surface diffusion of copper ions and thus improves the electromigration resistance of the structure. These benefits can be obtained using graphene without increasing the resistance of copper-containing structure.
    Type: Grant
    Filed: December 16, 2013
    Date of Patent: April 7, 2015
    Assignee: International Business Machines Corporation
    Inventors: John A. Ott, Ageeth A. Bol
  • Publication number: 20150084074
    Abstract: A method of forming an epitaxial semiconductor material that includes forming a graphene layer on a semiconductor and carbon containing substrate and depositing a metal containing monolayer on the graphene layer. An epitaxial layer of a gallium containing material is formed on the metal containing monolayer. A layered stack of the metal containing monolayer and the epitaxial layer of gallium containing material is cleaved from the graphene layer that is present on the semiconductor and carbon containing substrate.
    Type: Application
    Filed: October 22, 2013
    Publication date: March 26, 2015
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Can Bayram, Christos D. Dimitrakopoulos, Keith E. Fogel, Jeehwan Kim, John A. Ott, Devendra K. Sadana