Patents by Inventor Jordan D. Greenlee

Jordan D. Greenlee has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240251554
    Abstract: Some embodiments include an integrated assembly having a memory region and another region adjacent the memory region. Channel-material-pillars are arranged within the memory region, and conductive posts are arranged within said other region. A source structure is coupled to lower regions of the channel-material-pillars. A panel extends across the memory region and the other region. Doped-semiconductor-material is directly adjacent to the panel within the memory region and the other region. The doped-semiconductor-material is at least part of the source structure within the memory region. Liners are directly adjacent to the conductive posts and laterally surround the conductive posts. The liners are between the conductive posts and the doped-semiconductor-material. Some embodiments include methods of forming integrated assemblies.
    Type: Application
    Filed: February 22, 2024
    Publication date: July 25, 2024
    Applicant: Micron Technology, Inc.
    Inventors: Alyssa N. Scarbrough, Jordan D. Greenlee, John D. Hopkins
  • Publication number: 20240251555
    Abstract: Some embodiments include an integrated assembly having a first memory region, a second memory region offset from the first memory region, and an intermediate region between the first and second memory regions. Channel-material-pillars are arranged within the memory regions. Conductive posts are arranged within the intermediate region. A panel extends across the memory regions and the intermediate region. The panel is laterally between a first memory-block-region and a second memory-block-region. Doped-semiconductor-material is within the memory regions and the intermediate region, and is directly adjacent to the panel. The doped-semiconductor-material is at least part of conductive source structures within the memory regions. Insulative rings laterally surround lower regions of the conductive posts and are between the conductive posts and the doped-semiconductor-material. Insulative liners are along upper regions of the conductive posts. Some embodiments include methods of forming integrated assemblies.
    Type: Application
    Filed: February 23, 2024
    Publication date: July 25, 2024
    Applicant: Micron Technology, Inc.
    Inventors: Alyssa N. Scarbrough, John D. Hopkins, Jordan D. Greenlee
  • Publication number: 20240244840
    Abstract: A memory array comprises laterally-spaced memory blocks individually comprising a vertical stack comprising alternating insulative tiers and conductive tiers. Channel-material strings of memory cells extend through the insulative tiers and the conductive tiers. Intervening material is laterally-between and longitudinally-along immediately-laterally-adjacent of the memory blocks. The intervening material in a lowest of the conductive tiers comprises intervenor material. Bridges extend laterally-between the immediately-laterally-adjacent memory blocks. The bridges comprise bridging material that is of different composition from that of the intervenor material. The bridges are longitudinally-spaced-along the immediately-laterally-adjacent memory blocks by the intervenor material and extend laterally into the immediately-laterally-adjacent memory blocks. Other embodiments, including method, are disclosed.
    Type: Application
    Filed: March 28, 2024
    Publication date: July 18, 2024
    Applicant: Micron Technology, Inc.
    Inventors: John D. Hopkins, Jordan D. Greenlee, Nancy M. Lomeli, Alyssa N. Scarbrough
  • Patent number: 12041769
    Abstract: A method of forming a microelectronic device comprises forming a sacrificial material over a base structure. Portions of the sacrificial material are replaced with an etch-resistant material. A stack structure is formed over the etch-resistant material and remaining portions of the sacrificial material. The stack structure comprises a vertically alternating sequence of insulative material and additional sacrificial material arranged in tiers, and at least one staircase structure horizontally overlapping the etch-resistant material and having steps comprising horizontal ends of the tiers. Slots are formed to vertically extend through the stack structure and the remaining portions of the sacrificial material. The sacrificial material and the additional sacrificial material are selectively replaced with conductive material after forming the slots to respectively form lateral contact structures and conductive structures. Microelectronic devices, memory devices, and electronic systems are also described.
    Type: Grant
    Filed: October 17, 2022
    Date of Patent: July 16, 2024
    Inventors: John D. Hopkins, Jordan D. Greenlee, Nancy M. Lomeli
  • Publication number: 20240237330
    Abstract: A method used in forming an array of capacitors comprises forming horizontally-spaced openings into sacrificial material and through insulative material that is between a top and bottom of the sacrificial material. The insulative material at least predominately comprises at least one of a silicon nitride, a silicon boronitride, and a silicon carbonitride. The insulative material with horizontally-spaced openings there-through comprises an insulative horizontal lattice. An insulative lining is deposited within the horizontally-spaced openings and directly above the sacrificial material. The insulative lining at least predominately comprises at least one of a silicon oxide and a silicon oxynitride. During the depositing, the insulative lining is intermittently exposed to a nitrogen-containing plasma. First capacitor electrodes that are individually within individual of the horizontally-spaced openings are formed laterally over the insulative lining that is in the horizontally-spaced openings.
    Type: Application
    Filed: January 9, 2024
    Publication date: July 11, 2024
    Applicant: Micron Technology, Inc.
    Inventors: Jordan D. Greenlee, Andrea Gotti, David McShannon, Silvia Borsari
  • Patent number: 12034057
    Abstract: Some embodiments include a memory array having a vertical stack of alternating insulative levels and wordline levels. Channel material extends vertically along the stack. The wordline levels include conductive regions which have a first metal-containing material and a second metal-containing material. The first metal-containing material at least partially surrounds the second metal-containing material. The first metal-containing material has a different crystallinity than the second metal-containing material. In some embodiments the first metal-containing material is substantially amorphous, and the second metal-containing material has a mean grain size within a range of from greater than or equal to about 5 nm to less than or equal to about 200 nm. Charge-storage regions are adjacent the wordline levels. Charge-blocking regions are between the charge-storage regions and the conductive regions.
    Type: Grant
    Filed: October 7, 2021
    Date of Patent: July 9, 2024
    Assignee: Micron Technology, Inc.
    Inventors: Jordan D. Greenlee, Rita J. Klein, Everett A. McTeer, John Mark Meldrim
  • Publication number: 20240224524
    Abstract: Some embodiments include an integrated assembly having a first memory region, a second memory region, and an intermediate region between the first and second memory regions. The intermediate region has a first edge proximate the first memory region and has a second edge proximate the second memory region. Channel-material-pillars are arranged within the first and second memory regions. Conductive posts are arranged within the intermediate region. Doped-semiconductor-material is within the intermediate region and is configured as a substantially H-shaped structure having a first leg region along the first edge, a second leg region along the second edge, and a belt region adjacent the panel. Some embodiments include methods of forming integrated assemblies.
    Type: Application
    Filed: March 14, 2024
    Publication date: July 4, 2024
    Applicant: Micron Technology, Inc.
    Inventors: John D. Hopkins, Jordan D. Greenlee
  • Publication number: 20240224505
    Abstract: A method used in forming memory circuitry comprises forming transistors individually comprising one source/drain region and another source/drain region. A channel region is between the one and the another source/drain regions. A conductive gate is operatively proximate the channel region. Digitline structures are formed that are individually directly electrically coupled to the another source/drain regions of multiple of the transistors. The digitline structures individually comprise a conductive digitline and an insulator material thereatop. The insulator material has a top. First insulating material is formed directly above the tops of the insulator material and laterally-over longitudinal sides of the digitline structures and covers across the one source/drain regions laterally-between immediately-adjacent of the digitline structures. Second insulating material is formed over the first insulating material.
    Type: Application
    Filed: December 1, 2023
    Publication date: July 4, 2024
    Applicant: Micron Technology, Inc.
    Inventors: Jordan D. Greenlee, Ying Rui, Silvia Borsari, Prashant Raghu, Elisabeth Barr, Yen Ting Lin, Albert P. Chan, Martin Chen
  • Patent number: 12002759
    Abstract: An apparatus comprising at least one contact structure. The at least one contact structure comprises a contact, an insulating material overlying the contact, and at least one contact via in the insulating material. The at least one contact structure also comprises a dielectric liner material adjacent the insulating material within the contact via, a conductive material adjacent the dielectric liner material, and a stress compensation material adjacent the conductive material and in a central portion of the at least one contact via. The stress compensation material is at least partially surrounded by the conductive material. Memory devices, electronic systems, and methods of forming the apparatus are also disclosed.
    Type: Grant
    Filed: April 26, 2022
    Date of Patent: June 4, 2024
    Inventors: Jordan D. Greenlee, Lifang Xu, Rita J. Klein, Xiao Li, Everett A. McTeer
  • Patent number: 11996151
    Abstract: A memory array comprising laterally-spaced memory blocks individually comprises a vertical stack comprising alternating insulative tiers and conductive tiers. Channel-material strings of memory cells extend through the insulative tiers and the conductive tiers. The laterally-spaced memory blocks in a lower one of the conductive tiers comprises elemental-form metal that extends longitudinally-along the laterally-spaced memory blocks proximate laterally-outer sides of the laterally-spaced memory blocks. A metal silicide or a metal-germanium compound is directly against laterally-inner sides of the elemental-form metal in the lower conductive tier and that extends longitudinally-along the laterally-spaced memory blocks in the lower conductive tier. The metal of the metal silicide or of the metal-germanium compound is the same as that of the elemental-form metal. Other embodiments, including method, are disclosed.
    Type: Grant
    Filed: May 10, 2021
    Date of Patent: May 28, 2024
    Assignee: Micron Technology, Inc.
    Inventors: Jordan D. Greenlee, John D. Hopkins, Andrew Li, Alyssa N. Scarbrough
  • Publication number: 20240172412
    Abstract: A method used in forming memory circuitry comprises forming transistors individually comprising one source/drain region and another source/drain region. A channel region is between the one and the another source/drain regions. A conductive gate is operatively proximate the channel region. Openings are formed through insulative material that is directly above the transistors and into the another source/drain regions. Individual of the openings are directly above individual of the another source/drain regions. A laterally-outer insulator material is formed in the individual openings within and below the insulative material. A laterally-inner insulator material is formed in the individual openings within and below the insulative material laterally-over the laterally-outer insulator material. The laterally-outer insulator material and the laterally-inner insulator material are directly against one another and have an interface there-between.
    Type: Application
    Filed: August 31, 2023
    Publication date: May 23, 2024
    Applicant: Micron Technology, Inc.
    Inventors: Li Wei Fang, Vivek Yadav, Jordan D. Greenlee, Silvia Borsari
  • Patent number: 11990528
    Abstract: Some embodiments include a memory array having a vertical stack of alternating insulative levels and control gate levels. Channel material extends vertically along the stack. The control gate levels comprising conductive regions. The conductive regions include at least three different materials. Charge-storage regions are adjacent the control gate levels. Charge-blocking regions are between the charge-storage regions and the conductive regions.
    Type: Grant
    Filed: December 16, 2022
    Date of Patent: May 21, 2024
    Inventors: David Ross Economy, Rita J. Klein, Jordan D. Greenlee, John Mark Meldrim, Brenda D. Kraus, Everett A. McTeer
  • Publication number: 20240164093
    Abstract: Some embodiments include an integrated assembly having a memory region and another region adjacent the memory region. Channel-material-pillars are arranged within the memory region, and conductive posts are arranged within said other region. A source structure is coupled to lower regions of the channel-material-pillars. A panel extends across the memory region and said other region, and separates a first memory-block-region from a second memory-block-region. Doped-semiconductor-material is directly adjacent to the panel within the memory region and the other region. Rings laterally surround lower regions of the conductive posts. The rings are between the conductive posts and the doped-semiconductor-material. The rings include laminates of two or more materials, with at least one of said two or more materials being insulative. Some embodiments include methods for forming integrated assemblies.
    Type: Application
    Filed: January 18, 2024
    Publication date: May 16, 2024
    Applicant: Micron Technology, Inc.
    Inventors: Jordan D. Greenlee, Alyssa N. Scarbrough, John D. Hopkins
  • Publication number: 20240153877
    Abstract: A microelectronic device includes a stack structure, a staircase structure, conductive pad structures, and conductive contact structures. The stack structure includes vertically alternating conductive structures and insulating structures arranged in tiers. Each of the tiers individually includes one of the conductive structures and one of the insulating structures. The staircase structure has steps made up of edges of at least some of the tiers of the stack structure. The conductive pad structures are on the steps of the staircase structure and include beta phase tungsten. The conductive contact structures are on the conductive pad structures. Memory devices, electronic systems, and methods of forming microelectronic devices are also described.
    Type: Application
    Filed: January 2, 2024
    Publication date: May 9, 2024
    Inventors: Jordan D. Greenlee, John D. Hopkins, Rita J. Klein, Everett A. McTeer, Lifang Xu, Daniel Billingsley, Collin Howder
  • Patent number: 11974429
    Abstract: A memory array comprises laterally-spaced memory blocks individually comprising a vertical stack comprising alternating insulative tiers and conductive tiers. Channel-material strings of memory cells extend through the insulative tiers and the conductive tiers. Intervening material is laterally-between and longitudinally-along immediately-laterally-adjacent of the memory blocks. The intervening material in a lowest of the conductive tiers comprises intervenor material. Bridges extend laterally-between the immediately-laterally-adjacent memory blocks. The bridges comprise bridging material that is of different composition from that of the intervenor material. The bridges are longitudinally-spaced-along the immediately-laterally-adjacent memory blocks by the intervenor material and extend laterally into the immediately-laterally-adjacent memory blocks. Other embodiments, including method, are disclosed.
    Type: Grant
    Filed: November 6, 2020
    Date of Patent: April 30, 2024
    Assignee: Micron Technology, Inc.
    Inventors: John D. Hopkins, Jordan D. Greenlee, Nancy M. Lomeli, Alyssa N. Scarbrough
  • Patent number: 11972978
    Abstract: A method used in forming a conductive via of integrated circuitry comprises forming a lining laterally over sidewalls of an elevationally-elongated opening. The lining comprises elemental-form silicon. The elemental-form silicon of an uppermost portion of the lining is ion implanted in the elevationally-elongated opening. The ion-implanted elemental-form silicon of the uppermost portion of the lining is etched selectively relative to the elemental-form silicon of a lower portion of the lining below the uppermost portion that was not subjected to said ion implanting. The elemental-form silicon of the lower portion of the lining is reacted with a metal halide to form elemental-form metal in a lower portion of the elevationally-elongated opening that is the metal from the metal halide. Conductive material in the elevationally-elongated opening is formed atop and directly against the elemental-form metal. Other embodiments, including structure independent of method, are disclosed.
    Type: Grant
    Filed: May 4, 2022
    Date of Patent: April 30, 2024
    Assignee: Micron Technology, Inc.
    Inventors: Yiping Wang, Jordan D. Greenlee, Collin Howder
  • Publication number: 20240130121
    Abstract: A microelectronic device comprising tiers of alternating dielectric materials and conductive materials, pillars extending through the tiers, and a doped dielectric material adjacent to the tiers. The doped dielectric material comprises a heterogeneous chemical composition comprising one or more dopants. Conductive contact structures are in the doped dielectric material. Additional microelectronic devices, microelectronic systems, and methods of forming microelectronic devices are disclosed.
    Type: Application
    Filed: October 17, 2022
    Publication date: April 18, 2024
    Inventors: John D. Hopkins, Jordan D. Greenlee
  • Patent number: 11963359
    Abstract: Some embodiments include an integrated assembly having a first memory region, a second memory region, and an intermediate region between the first and second memory regions. The intermediate region has a first edge proximate the first memory region and has a second edge proximate the second memory region. Channel-material-pillars are arranged within the first and second memory regions. Conductive posts are arranged within the intermediate region. Doped-semiconductor-material is within the intermediate region and is configured as a substantially H-shaped structure having a first leg region along the first edge, a second leg region along the second edge, and a belt region adjacent the panel. Some embodiments include methods of forming integrated assemblies.
    Type: Grant
    Filed: May 19, 2023
    Date of Patent: April 16, 2024
    Assignee: Micron Technology, Inc.
    Inventors: John D. Hopkins, Jordan D. Greenlee
  • Patent number: 11950416
    Abstract: Some embodiments include an integrated assembly having a first memory region, a second memory region offset from the first memory region, and an intermediate region between the first and second memory regions. Channel-material-pillars are arranged within the memory regions. Conductive posts are arranged within the intermediate region. A panel extends across the memory regions and the intermediate region. The panel is laterally between a first memory-block-region and a second memory-block-region. Doped-semiconductor-material is within the memory regions and the intermediate region, and is directly adjacent to the panel. The doped-semiconductor-material is at least part of conductive source structures within the memory regions. Insulative rings laterally surround lower regions of the conductive posts and are between the conductive posts and the doped-semiconductor-material. Insulative liners are along upper regions of the conductive posts. Some embodiments include methods of forming integrated assemblies.
    Type: Grant
    Filed: February 1, 2021
    Date of Patent: April 2, 2024
    Assignee: Micron Technology, Inc.
    Inventors: Alyssa N. Scarbrough, John D. Hopkins, Jordan D. Greenlee
  • Patent number: 11950415
    Abstract: Some embodiments include an integrated assembly having a memory region and another region adjacent the memory region. Channel-material-pillars are arranged within the memory region, and conductive posts are arranged within said other region. A source structure is coupled to lower regions of the channel-material-pillars. A panel extends across the memory region and the other region. Doped-semiconductor-material is directly adjacent to the panel within the memory region and the other region. The doped-semiconductor-material is at least part of the source structure within the memory region. Liners are directly adjacent to the conductive posts and laterally surround the conductive posts. The liners are between the conductive posts and the doped-semiconductor-material. Some embodiments include methods of forming integrated assemblies.
    Type: Grant
    Filed: January 29, 2021
    Date of Patent: April 2, 2024
    Assignee: Micron Technology, Inc.
    Inventors: Alyssa N. Scarbrough, Jordan D. Greenlee, John D. Hopkins