Patents by Inventor Jui-Lin Chen
Jui-Lin Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20250142946Abstract: Semiconductor structures and methods for fabricating semiconductor structures are provided. A semiconductor structure includes a first fin extending in an X-direction and a second fin parallel to the first fin and distanced from the first fin in a Y-direction perpendicular to the X-direction. Each fin is formed with a first device area and a second device area aligned in the X-direction; an isolation region disposed between the fins; an isolation structure disposed between the device areas in each fin; and an isolation layer disposed under the fins. The isolation region contacts the isolation layer, the isolation structure contacts the isolation layer, and the isolation region contacts the isolation structure to isolate the first fin from the second fin and to isolate the first device area from the second device area in each fin.Type: ApplicationFiled: October 25, 2023Publication date: May 1, 2025Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Jui-Lin Chen, Gu-Huan Li, Ping-Wei Wang, Lien-Jung Hung, Chen-Ming Lee
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Publication number: 20250131958Abstract: One aspect of the present disclosure pertains to a device. The device includes a memory macro having a frontside and a backside along a vertical direction. The memory macro includes edge strap areas extending lengthwise along a first direction at edges of the memory macro, a memory cell area having a plurality of memory cells, where the memory cell area is disposed between the edge strap areas along a second direction perpendicular to the first direction, and a middle strap area extending lengthwise along the first direction and disposed between the edge strap areas along the second direction, where the middle strap area divides the memory cell area into two memory cell domains. The middle strap area includes a feedthrough circuit that routes a power signal line of one of the plurality of memory cells to the backside of the memory macro.Type: ApplicationFiled: January 30, 2024Publication date: April 24, 2025Inventors: Ping-Wei Wang, Jui-Lin Chen, Feng-Ming Chang
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Publication number: 20250133681Abstract: A riser cage assembly having a riser cage bracket and a fastener assembly coupled to the riser cage bracket is disclosed. The fastener assembly includes an enclosure, an actuator including drivers, a shaft, and a biasing member. The enclosure has a bore, guide teeth within the bore, and bays defined between the guide teeth. The actuator is movably coupled to an end of the enclosure with the drivers disposed within the bore. The shaft has blades disposed within the bore, and a locking arm protruding beyond the bore from another end of the enclosure. The actuator generates biasing force urging the shaft towards the end of the enclosure. The shaft is translatable along and rotatable along a vertical axis relative to the enclosure, by the actuator and the biasing member to removably fasten the riser cage bracket to the electronic device.Type: ApplicationFiled: October 20, 2023Publication date: April 24, 2025Inventors: Chen-Ruei Tu, Jui Lin Chen
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Publication number: 20250126839Abstract: A method for forming a semiconductor structure is provided. The method includes forming a first active region in which first semiconductor layers and second semiconductor layers are alternatingly stacked over a first lower fin element. In a plan view, the active region includes a first portion and a second portion narrower than the first portion. The method also includes removing the first semiconductor layers of the first active region. The second semiconductor layers of the first portion of the first active region form first nanostructures, and the second semiconductor layers of the second portion of the first active region form second nanostructures. The method also includes forming a first gate stack to surround the first nanostructures, and forming a second gate stack to surround the second nanostructures.Type: ApplicationFiled: January 5, 2024Publication date: April 17, 2025Inventors: Feng-Ming Chang, Jui-Lin Chen, Ping-Wei Wang, Choh Fei Yeap, Yu-Bey Wu
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Publication number: 20250125222Abstract: A semiconductor structure according to the present disclosure includes a first memory cell that includes a first pull-down transistor and a first pull-up transistor sharing a first gate structure extending along a first direction, a second pull-down transistor and a second pull-up transistor sharing a second gate structure extending along the first direction, a first pass-gate transistor having a third gate structure spaced apart but aligned with the second gate structure along the first direction, and a second pass-gate transistor having a fourth gate structure spaced apart but aligned with the first gate structure along the first direction, a frontside interconnect structure disposed over the first memory device, a backside interconnect structure disposed below the first memory device. A source of the second pull-down transistor is electrically coupled to the backside interconnect structure by way of a first backside contact via.Type: ApplicationFiled: January 12, 2024Publication date: April 17, 2025Inventors: Ping-Wei Wang, Feng-Ming Chang, Jui-Lin Chen
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Publication number: 20250120059Abstract: A semiconductor structure according to the present disclosure includes a first memory array in a first cache and a second memory array in a second cache. The first memory array includes a plurality of first memory cells arranged in M1 rows and N1 columns. The second memory array includes a plurality of second memory cells arranged in M2 rows and N2 columns. The semiconductor structure also includes a first bit line coupled to a number of N1 first memory cells in one of the M1 rows, and a second bit line coupled to a number of N2 second memory cells in one of the M2 rows. N1 is smaller than N2, and a width of the first bit line is smaller than a width of the second bit line.Type: ApplicationFiled: January 31, 2024Publication date: April 10, 2025Inventors: Feng-Ming Chang, Jui-Lin Chen, Ping-Wei Wang, Jui-Wen Chang, Lien-Jung Hung
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Publication number: 20250113478Abstract: A semiconductor device according to the present disclosure includes a memory array having a plurality of memory cells arranged in a row, and an interconnect structure disposed over the memory cells and having a bit line coupled to each of the memory cells arranged in the row. The bit line has a first segment coupled to a first portion of the memory cells and a second segment coupled to a second portion of the memory cells. The first segment has a first width and the second segment has a second width that is smaller than the first width.Type: ApplicationFiled: February 6, 2024Publication date: April 3, 2025Inventors: Ping-Wei Wang, Jui-Lin Chen
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Publication number: 20250096076Abstract: An integrated circuit includes a first SRAM cell and a second SRAM cell, each including a plurality of field-effect transistors (FETs), a front metal line over the FETs and a back metal line below the FETs, and a middle strap area disposed between the first SRAM cell and the second SRAM cell. The middle strap area includes a plurality of gate stacks extending lengthwise along a direction, a gate isolation structure extending through a gate stack of the plurality of gate stacks, a feedthrough via (FTV) embedded in the gate isolation structure, a first dielectric gate disposed between the conductive structure and the first SRAM cell, and a second dielectric gate disposed between the conductive structure and the second SRAM cell. The FTV electrically couples the front metal line and the back metal line.Type: ApplicationFiled: September 19, 2023Publication date: March 20, 2025Inventors: Jui-Lin CHEN, Feng-Ming CHANG, Ping-Wei WANG
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Publication number: 20250098138Abstract: Semiconductor structures and methods are provided. An exemplary semiconductor structure according to the present disclosure includes a two-port static random access memory (SRAM) cell having a write port portion and a read port portion electrically coupled to the write port portion. The read port portion includes a transistor having a gate structure. The semiconductor structure also includes a first plurality of metal lines comprising a write bit line and a complementary write bit line are positioned at a first interconnect layer disposed over the gate structure and a read word line positioned at a second interconnect layer and electrically coupled to the gate structure, the second interconnect layer is disposed under the gate structure.Type: ApplicationFiled: September 19, 2023Publication date: March 20, 2025Inventors: Ping-Wei Wang, Feng-Ming Chang, Jui-Lin Chen, Yu-Bey Wu
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Publication number: 20250098137Abstract: Semiconductor structures and methods are provided. An exemplary semiconductor structure according to the present disclosure includes a two-port static random access memory (SRAM) cell having a write port portion and a read port portion electrically coupled to the write port portion. The read port portion includes a transistor having a first source/drain feature and a second source/drain feature. The semiconductor structure also includes a first plurality of metal lines comprising a write bit line and a complementary write bit line, wherein the first plurality of metal lines are positioned at a first metal interconnect layer, wherein the first metal interconnect layer is disposed over the first source/drain feature. The semiconductor structure also includes a read bit line positioned at a second metal interconnect layer, where the second metal interconnect layer is disposed under the first source/drain feature.Type: ApplicationFiled: September 19, 2023Publication date: March 20, 2025Inventors: Ping-Wei Wang, Feng-Ming Chang, Jui-Lin Chen, Yu-Bey Wu
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Publication number: 20250069991Abstract: A semiconductor structure includes a first source/drain (S/D) epitaxial feature, a second S/D epitaxial feature adjacent to the first S/D epitaxial feature, an insulating structure between the first and the second S/D epitaxial features, and a shared S/D contact over top surfaces of the first and the second S/D epitaxial features. A center portion of the shared S/D contact is directly between a side surface of the first S/D epitaxial feature and a side surface of the second S/D epitaxial feature. The center portion is directly above the insulating structure. The semiconductor structure further includes a backside via penetrating through the insulating structure to directly land on a bottom surface of the center portion.Type: ApplicationFiled: August 24, 2023Publication date: February 27, 2025Inventors: Ping-Wei Wang, Jui-Lin Chen
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Publication number: 20250048686Abstract: The present disclosure provides an integrated circuit (IC) structure that includes a semiconductor substrate having a frontside and a backside; a shallow trench isolation (STI) structure formed in the semiconductor substrate and defining an active region, wherein the STI structure includes a STI bottom surface, wherein the semiconductor substrate includes a substrate bottom surface, and wherein the STI bottom surface and the substrate bottom surface are coplanar; a field-effect transistor (FET) over the active region and formed on the frontside of the semiconductor substrate; and a backside dielectric layer disposed on the substrate bottom surface and the STI bottom surface.Type: ApplicationFiled: January 11, 2024Publication date: February 6, 2025Inventors: Ping-Wei Wang, Gu-Huan Li, Jui-Lin Chen
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Publication number: 20250048624Abstract: The present disclosure provides embodiments of electronic fuse devices. An electronic fuse device according to the present disclosure includes a first bit cell comprising a first plurality of active regions extending along a first direction and a second bit cell comprising a second plurality of active regions extending along the first direction. Each of the first plurality of active regions is aligned with one of the second plurality of active regions along the first direction. The first bit cell and the second bit cell are spaced apart along the first direction by a space and the space is free of a well tap cell.Type: ApplicationFiled: October 17, 2023Publication date: February 6, 2025Inventors: Jui-Lin Chen, Meng-Sheng Chang, Ping-Wei Wang
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Publication number: 20250048613Abstract: The present disclosure provides an IC structure that includes a semiconductor substrate having a SRAM region, an input/output and peripheral (IOP) region, and an edge region spanning tween the SRAM region and the IOP region; a STI structure formed on the semiconductor substrate and defining active regions; a SRAM cell formed within the SRAM region; and a backside dielectric layer disposed on a backside of the semiconductor substrate and landing on a bottom surface of the STI structure. The active regions are longitudinally oriented along a first direction; gates are formed on the semiconductor substrate and are evenly distributed with a pitch P along the first direction; the SRAM cell spans a first dimension Ds along the first direction; the edge region spans a second dimension De along the first direction; and a ratio De/Ds equals to 2 or is less than 2.Type: ApplicationFiled: January 12, 2024Publication date: February 6, 2025Inventors: Jui-Lin Chen, Feng-Ming Chang, Ping-Wei Wang, Yu-Bey Wu
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Publication number: 20250048612Abstract: An integrated circuit (IC) device has a memory region in which a plurality of memory cells is implemented. Each of the memory cells has a first dimension in a first horizontal direction. The IC device includes an edge region bordering the memory cell region in the first horizontal direction. The edge region has a second dimension in the first horizontal direction. The second dimension is less than or equal to about 4 times the first dimension. The IC device is formed by revising a first IC layout to generate a second IC layout. The second IC layout is generated by shrinking a dimension of the edge region in the first horizontal direction.Type: ApplicationFiled: January 4, 2024Publication date: February 6, 2025Inventors: Jui-Lin Chen, Feng-Ming Chang, Ping-Wei Wang, Yu-Bey Wu, Chih-Ching Wang
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Patent number: 12213297Abstract: A method comprises forming a first fin including alternating first channel layers and first sacrificial layers and a second fin including alternating second channel layers and second sacrificial layers, forming a capping layer over the first and the second fin, forming a dummy gate stack over the capping layer, forming source/drain (S/D) features in the first and the second fin, removing the dummy gate stack to form a gate trench, removing the first sacrificial layers and the capping layer over the first fin to form first gaps, removing the capping layer over the second fin and portions of the second sacrificial layers to from second gaps, where remaining portions of the second sacrificial layers and the capping layers form a threshold voltage (Vt) modulation layer, and forming a metal gate stack in the gate trench, the first gaps, and the second gaps.Type: GrantFiled: September 1, 2021Date of Patent: January 28, 2025Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Shih-Hao Lin, Chih-Hsiang Huang, Shang-Rong Li, Chih-Chuan Yang, Jui-Lin Chen, Ming-Shuan Li
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Patent number: 12190943Abstract: The current disclosure is directed to a SRAM bit cell having a reduced coupling capacitance. In a vertical direction, a wordline “WL” and a bitline “BL” of the SRAM cell are stacked further away from one another to reduce the coupling capacitance between the WL and the BL. In an embodiment, the WL is vertically spaced apart from the BL with one or more metallization level that none of the WL or the BL is formed from. Connection island structures or jumper structures are provided to connect the upper one of the WL or the BL to the transistors of the SRAM cell.Type: GrantFiled: June 16, 2023Date of Patent: January 7, 2025Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chao-Yuan Chang, Feng-Ming Chang, Jui-Lin Chen, Kian-Long Lim
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Publication number: 20240414906Abstract: A memory cell includes first and second active regions and first and second gate structures. The first gate structure engages the first active region in forming a first transistor. The second gate structure engages the second active region in forming a second transistor. The first and second transistors have a same conductivity type. The memory cell further includes a first epitaxial feature on a source region of the first transistor, a second epitaxial feature on a source region of the second transistor, a first frontside contact directly above and in electrical coupling with the first epitaxial feature, a second frontside contact directly above and in electrical coupling with the second epitaxial feature, and a first backside via directly under and in electrical coupling with one of the first and second epitaxial features with another one of the first and second epitaxial features free of a backside via directly thereunder.Type: ApplicationFiled: October 25, 2023Publication date: December 12, 2024Inventors: Ping-Wei Wang, Jui-Lin Chen
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Publication number: 20240414907Abstract: A memory cell includes first and second active regions and first and second gate structures. The first gate structure engages the first and second active regions in forming a first pull-down transistor and a first pull-up transistor, respectively, and the second gate structure engages the first and second active regions in forming a second pull-down transistor and a second pull-up transistor, respectively. A first frontside source/drain contact is disposed above and electrically couples to a first common source/drain region of the first and second pull-down transistors. A first backside via is disposed under and electrically couples to the first common source/drain region. A first backside metal line is disposed under and electrically couples to the first backside via.Type: ApplicationFiled: October 18, 2023Publication date: December 12, 2024Inventors: Ping-Wei Wang, Jui-Lin Chen, Yu-Bey Wu
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Publication number: 20240397693Abstract: A memory cell includes first and second active regions and first and second gate structures. The first gate structure engages the first and second active regions in forming a first pull-down transistor and a first pull-up transistor, respectively. The second gate structure engages the first and second active regions in forming a second pull-down transistor and a second pull-up transistor, respectively. The memory cell also includes a first source/drain contact via electrically coupled to the first and second pull-down transistors, a second source/drain contact via electrically coupled to the first and second pull-up transistors, a first gate contact electrically coupled to the first gate structure, and a second gate contact electrically coupled to the second gate structure. One of the first and second source/drain contact vias has an area larger than either of the first and second gate contacts in a top view of the memory cell.Type: ApplicationFiled: October 23, 2023Publication date: November 28, 2024Inventors: Jui-Lin Chen, Ping-Wei Wang, Yu-Bey Wu