Abstract: A wheel-accommodating pallet system includes a plate section having an internal storage space formed in a lower portion thereof and a moving unit including front and rear wheels that is fully receivable within the internal storage space when in a folded state. A rotating member transmits rotational force to a wheel-axle assembly through a worm-shaft portion and a worm-wheel assembly to rotate the moving unit by a predetermined angle for folding or unfolding. A rotation-prevention mechanism provides double-locking engagement to prevent unintended folding or unfolding during cargo transport. By enabling complete wheel storage within the plate section, the wheel-accommodating pallet system achieves approximately a forty-percent reduction in the internal storage space compared to conventional pallets. The modular configuration facilitates maintenance, and securing the moving unit inside the plate section reduces vibration and shaking in automated warehouse environments.

Abstract: An impedance matching circuit, which is provided for quick impedance matching, a power supply apparatus, and a plasma processing equipment including the same are provided. The impedance matching circuit includes a parallel capacitor array connected to a radio frequency (RF) power supply to generate a RF signal, and a series capacitor array connected to the RF power supply in series, wherein the parallel capacitor array or the series capacitor array includes a mechanical vacuum variable capacitor and an electrical switch capacitor module connected to the mechanical vacuum variable capacitor in parallel.

Abstract: The present invention disclosed herein relates to a substrate processing apparatus, and more particularly, to a substrate processing apparatus in which a substrate is processed at a high pressure and a low pressure. The present invention discloses a substrate processing apparatus including: a process chamber (100) which has an inner space and in which an installation groove (130) is defined at a central side on a bottom surface (120); a substrate support (200) installed to be inserted into the installation groove (130) and having a top surface on which the substrate is seated; an inner lid part (300) which is installed to be movable vertically in the inner space and descends so that a portion thereof is in close contact with the bottom surface (120) adjacent to the installation groove (130) to define a sealed processing space (S2) in which the substrate support (200) is disposed therein.

Abstract: Provided is a method of braking an autonomous vehicle stopped on a sloped surface. The method includes detecting a roll down of the first vehicle that stopped while adaptive cruise control of the first vehicle is engaged. Detecting the roll down is based on: whether the first vehicle stops on an uphill slope; whether a distance to a second vehicle in front of the first vehicle increases; whether a signal of a wheel sensor of the first vehicle is detected; and/or whether an absolute value of a negative motor speed of the first vehicle increases and whether the signal of the wheel sensor indicates a rearward movement of the first vehicle. The method further includes: determining, based on the detecting of the roll down of the first vehicle, a braking pressure for the first vehicle; and controlling the first vehicle to brake according to the determined braking pressure.

Abstract: The present disclosure relates to a method of controlling a plasma processing apparatus, and a plasma processing apparatus for performing the method. According to one embodiment of the present disclosure, a method of controlling a plasma processing apparatus includes supplying power having a sine wave from a high-frequency power source to a lower electrode to generate a plasma; and supplying power from the high-frequency power source to the lower electrode, to control an ion in the generated plasma, and when a voltage of a wafer disposed on the lower electrode has a negative peak value in a phase region, inputting a negative DC voltage to a focusing ring by a DC power source.

Abstract: A cassette holder for an automated teller machine includes a first holding portion for holding a first cassette, a second holding portion for holding a second cassette, side links disposed at both side surfaces of the first holding portion, and a lock configured to lock or unlock the side links in a state in which the first holding portion is moved to a second position. The first holding portion is movable in the front-rear direction between a first position at which the first holding portion is positioned at a front side of the second holding portion to hold the first cassette in the first holding portion and the second position at which the first holding portion is positioned at a rear side of the second holding portion to hold the second cassette in the second holding portion.

Abstract: The present disclosure relates to an apparatus for manufacturing a secondary battery and is directed to providing an apparatus for manufacturing a secondary battery in which a crimping part is formed by bending an end part of a battery can and which has a simple structure and improved operational reliability. To this end, the present disclosure provides an apparatus for manufacturing a secondary battery, which includes: a jig part that moves from an outside of a battery can toward the battery can and presses the battery can to bend inwardly; and a jig pressing part that presses the jig part so that the jig part presses the battery can by moving in a direction intersecting a movement direction of the jig part.

Abstract: A semiconductor device is provided. The semiconductor device includes a first region having a first gate structure disposed on a substrate and a second region having a second gate structure disposed on the substrate, a hard mask formed on the substrate, the first gate structure, and the second gate structure, a deep trench formed in the substrate between the first region and the second region, and formed to penetrate the hard mask to reach an inside of the substrate, and a planarized gap-fill insulating layer formed on the second gate structure and formed inside the deep trench. A topmost surface of the planarized gap-fill insulating layer and a topmost surface of the hard mask are coplanar.

Abstract: Provided are compositions for preventing or treating cancer including Asarum maculatum Nakai extracts, or a fraction thereof. According to an aspect, an Asarum maculatum Nakai extract has an excellent anticancer efficacy against various cancers including diffuse-type gastric cancer, and a cancer treatment agent having an excellent effect may be developed by using the extract as an active ingredient.

Abstract: A semiconductor device includes: a logic region and a non-volatile memory (NVM) region; a logic gate insulating film disposed on a substrate in the logic region; at least one gate oxidation acceleration ion implantation layer disposed in the NVM region; at least one NVM gate insulating film disposed on the at least one gate oxidation acceleration ion implantation layer; a logic gate electrode disposed on the logic gate insulating film; and at least one NVM gate electrode disposed on the at least one NVM gate insulating film, wherein a thickness of the at least one NVM gate insulating film is equal or greater than a thickness of the logic gate insulating film.

Abstract: The present disclosure relates to a pharmaceutical composition for preventing or treating triple-negative breast cancer, comprising an oligonucleotide as an active ingredient.

Abstract: A semiconductor device is provided. The semiconductor device includes a first region having a first gate structure disposed on a substrate and a second region having a second gate structure disposed on the substrate, a hard mask formed on the substrate, the first gate structure, and the second gate structure, a deep trench formed in the substrate between the first region and the second region, and formed to penetrate the hard mask to reach an inside of the substrate, and a planarized gap-fill insulating layer formed on the second gate structure and formed inside the deep trench. A topmost surface of the planarized gap-fill insulating layer and a topmost surface of the hard mask are coplanar.

Abstract: A write training circuit includes a data receiving circuit, a strobe signal processing circuit, and a skew detection circuit. The data receiving circuit receives data input according to a plurality of multi-phase clock signals to generates received data. The strobe signal processing circuit generates the plurality of multi-phase clock signals by dividing a data strobe signal into divided signals and delaying the divided signals by a predetermined time period. The skew detection circuit generates a replication clock signal corresponding to one of the plurality of multi-phase clock signals and generates skew information according to the replication clock signal. The skew detection circuit generates the skew information under external control or independently of external control depending on which of a plurality of external commands is received.

Abstract: An oligonucleotide variant according to an embodiment of the present disclosure has a structure of Formula 1 may exhibit excellent in-vivo stability and anticancer effects: (N)x-[TGG]m[TTG][TGG]n-(M)y??[Formula 1] wherein, N and M are independently deoxyuridine (dU), deoxycytidine (dC), uridine (U), or cytidine (C), in which a halogen or hydroxy group is bound to 5- or 2?-position thereof; x and y are independently integers of 0 to 10 (except when x and y are simultaneously 0), n is an integer of 1 to 10; and m is an integer of 1 to 10.

Abstract: The present invention relates to a substrate processing apparatus, and more particularly, to a substrate processing apparatus in which a substrate is processed at a high pressure and a low pressure. The substrate processing apparatus of the present invention includes: a process chamber (100) including a chamber body (110) which has an opened upper portion and in which an installation groove (130) is defined at a central side of a bottom surface (120) thereof, and a gate (111) configured to load/unload a substrate (1) is disposed at one side thereof, and a top lid (140) coupled to the upper portion of the chamber body (110) to define an inner space (S1); a substrate support (200) installed to be inserted into the installation groove (130) of the chamber body (110) and having a top surface on which the substrate (1) is seated.

Abstract: A purified water tank assembly is disclosed.

Abstract: An apparatus for and a method of processing a substrate are provided. The apparatus for processing a substrate includes a chamber having a processing space therein, a substrate support member disposed inside the chamber and supporting the substrate, an upper plate disposed above the substrate support member and having a plurality of through-holes, a sensor unit disposed inside the upper plate and measuring an induced electromotive force value generated in a measurement through-hole included in the plurality of through-holes, and a detection unit detecting an amount of ions passing through the measurement through-hole based on the induced electromotive force value.

Abstract: Disclosed is a method for removing a film from a substrate by irradiating a plurality of unit pulse laser beams to an edge region of the substrate. The method includes a first irradiation operation for irradiating a plurality of unit pulse laser beams onto the substrate while the substrate is rotating, and a second irradiation operation for irradiating a plurality of unit pulse laser beams to regions of the substrate onto which the unit pulse laser beams are not irradiated in the first irradiation operation.

Abstract: A calibration device is coupled to a communication line shared by plural devices. The calibration device is configured to perform an iterative eye width scanning by adjusting a set voltage level by a preset level from a first voltage level to a reference center voltage level, wherein the first voltage level corresponds to a cross point where values of signals or data, which are transmitted via the communication lines, are changed in different directions; and determine, as a zero crossing for the signals or the data, a voltage level corresponding to a largest value among a plurality of eye widths obtained through the iterative eye width scanning.

Abstract: A cassette holder for an automated teller machine according to one embodiment includes a first holding portion configured to hold a first cassette, a second holding portion configured to hold a second cassette having a different size from the first cassette, side links disposed at both side surfaces of the first holding portion and configured to move in a front-rear direction in association with movement of the first holding portion, and a locking means configured to lock or unlock the side links in a state in which the first holding portion is moved to a second position, wherein the first holding portion is provided to be movable in the front-rear direction between a first position at which the first holding portion is positioned at a front side of the second holding portion to hold the first cassette in the first holding portion and the second position at which the first holding portion is positioned at a rear side of the second holding portion to hold the second cassette in the second holding portion.