Abstract: A substrate processing apparatus includes an O-ring defined by a central axis, a first guide ring located closer to the central axis than is the O-ring, and a second guide ring located further from the central axis than is the O-ring. A thickness of each of the first guide ring and the second guide ring becomes progressively greater further from the central axis.

Abstract: An electrical device includes a power factor correction circuit including a switch, a first voltage sensor, a second voltage sensor, a memory storing instructions, and at least one processor configured to obtain second input voltage information of the electrical device, based on first input voltage information and DC link voltage information, compare the second input voltage information with preset reference voltage information, determine, based on a comparison of the second input voltage information with the preset reference voltage information, whether an input voltage of the electrical device is at least one of a low voltage or a high voltage, set a protection level of the power factor correction circuit based on the input voltage, and control an operating cycle of the switch of the power factor correction circuit, based on the protection level of the power factor correction circuit.

Abstract: A washing machine including a motor regenerative braking configuration uses a buck power converter capable of reducing a direct current (DC) voltage, in association with charging an energy storage device when a voltage of a DC link capacitor becomes greater than or equal to a certain voltage. The washing machine uses the buck power converter in association with discharging the energy storage device and charging the DC link capacitor when the voltage of the DC link capacitor decreases. The washing machine may utilize regenerative braking energy by reducing or increasing a voltage amount provided from the energy storage device to a load by using a power conversion device.

Abstract: An embodiment provides a focus ring alignment apparatus including a frame, a sensing member that is connected to the frame and is configured to acquire images of a focus ring within in a substrate processing apparatus, and an alignment module that is connected to the frame and is configured to move the focus ring to change a position of the focus ring.

Abstract: An electronic device according to various embodiments of the disclosure may include a first housing, a second housing, a flexible display, a bendable member, and a bending plate. The second housing may slide in a first housing to cause at least a part of the second housing to be drawn out of the first housing in an open state, and may slide in a second direction to cause the at least a part of the second housing to enter the first housing in a closed state. The flexible display may be disposed in a space formed by the first housing and the second housing, and may include a first area visible to an outside, and a second area extending from the first area, accommodated inside the flexible display in a closed state, and visible to the outside in an open state. The bendable member may be disposed on a rear side of the flexible display to support the flexible display in the closed state and in the open state, and may include a plurality of multi-bars disposed at predetermined intervals.

Abstract: An electronic device is provided. The electronic device includes a display, a frame structure including a first conductive member defining an external appearance of the electronic device and operated as an antenna element of the electronic device, a second conductive member coupled and electrically connected to the first conductive member, and a nonconductive member that supports the display together with the second conductive member, a bonding layer including a first layer at least partially disposed between the first conductive member and the nonconductive member, and a second layer at least partially disposed between the second conductive member and the nonconductive member, and at least one conductive connection member disposed at a portion, at which the first conductive member and the second conductive member are coupled to each other, and contacting the first conductive member and the second conductive member.

Abstract: A system is described for protecting the edge region of a substrate during a plasma process. The system includes an outer ring with a plurality of outer uneven portions and an inner ring also with a plurality of inner uneven portions. The outer ring covers the edge region of the substrate. The inner ring may rotate around the center point of the outer ring. When the inner ring is rotated, each of the inner uneven portions and each the outer uneven portions may slide by each other to overlap and to form openings. Changes of the opening ratios in the gaps (or the overlap ratios of the inner and outer uneven portions) may change a thickness of a plasma sheath. Thus, the plasma sheath in an edge region of the substrate may be readily controlled.

Abstract: An organic light emitting diode display device includes a substrate, a protection layer on the substrate, the protection layer including a trench pattern and a recessed portion, a first electrode on the protection layer, a pixel defining layer on the protection layer, the pixel defining layer defining an opening that exposes at least a part of the first electrode, an organic light emitting layer on the first electrode, and a second electrode on the organic light emitting layer. The recessed portion overlaps the opening and is spaced apart from an edge of the opening in a plan view. The trench pattern includes a plurality of trenches extending along a first direction. Each trench of the plurality of trenches is spaced apart from the first electrode in a plan view and has a concave cross-section.

Abstract: A substrate subject to degradation at temperatures above 100° C. is coated with a nanostructured ceramic coating having a thickness in excess of 100 nm, formed on a surface of the substrate, wherein a process temperature for deposition of the nanostructured coating does not exceed 90° C. The coating may be photocatalytic, photovoltaic, or piezoelectric. The coating, when moistened and exposed to ultraviolet light or sunlight, advantageously generates free radicals, which may be biocidal, deodorizing, or assist in degradation of surface deposits on the substrate after use. The substrate may be biological or organic, and may have a metallic or conductive intermediate layer.

Abstract: A display apparatus includes a substrate including a display area and a peripheral area adjacent to the display area, and including a bending area where at least a portion of the peripheral area is bent, a display element on the display area, a pad portion arranged on the peripheral area with the bending area between the display element and the pad portion, an input sensing layer over the display element, and an optical functional layer over the input sensing layer and including a first layer having an opening corresponding to the display element, and a second layer having a different refractive index from the first layer, and the second layer is arranged to extend to the peripheral area and cover the bending area.

Abstract: A semiconductor package includes a base chip, a first semiconductor chip on the base chip, and a first fillet layer between the base chip and the first semiconductor chip. The base chip includes a base substrate, a plurality of through-electrodes penetrating through the base substrate, a protective layer surrounding the plurality of through-electrodes and covering an upper surface of the base substrate, and a plurality of trenches vertically penetrating the protective layer. The plurality of through-electrodes form a transistor area on the base substrate, and the plurality of trenches include first trenches disposed between adjacent through-vias in the transistor area and second trenches disposed in an outer side portion of the transistor area.

Abstract: A plasma processing system includes a radio-frequency (RF) power source unit configured to generate three RF powers; a process chamber to which a process gas supplied and to which the RF powers are applied to generate a plasma; and an impedance matcher between the RF power source unit and the process chamber, the impedance matcher configured to adjust an impedance. The RF power source unit may include a first RF power source connected to a first electrode located in a lower portion of the process chamber to apply a first RF power having a first frequency, a second RF power source connected to the first electrode and to apply a second RF power having a second frequency, and a third RF power source connected to a second electrode located in an upper portion of the process chamber and to apply a third RF power having a third frequency.

Abstract: A display apparatus includes a substrate including a display area and a peripheral area adjacent to the display area, and including a bending area where at least a portion of the peripheral area is bent, a display element on the display area, a pad portion arranged on the peripheral area with the bending area between the display element and the pad portion, an input sensing layer over the display element, and an optical functional layer over the input sensing layer and including a first layer having an opening corresponding to the display element, and a second layer having a different refractive index from the first layer, and the second layer is arranged to extend to the peripheral area and cover the bending area.

Abstract: A semiconductor package includes a package body, a fan-in-chip structure (FICS) in the package body, a first redistribution structure, and a second redistribution structure. The FICS includes a first chip having a front surface and a rear surface, a bridge wiring structure including a bridge wiring layer on the rear surface of the first chip, and a bridge pad electrically connected to the bridge wiring layer. The first redistribution structure is on a bottom surface of the package body and the front surface of the first chip and includes a first redistribution element. The second redistribution structure is on a top surface of the package body and the rear surface of the first chip and includes a second redistribution element electrically connected to the bridge wiring structure.

Abstract: Provided is a display apparatus having improved reliability by effectively controlling spreading of an organic layer. The display apparatus includes a substrate including a display area, and a peripheral area outside the display area, a display element at the display area, an input-sensing layer over the display element, and an optical functional layer on the input-sensing layer, and including a first layer, which corresponds to the display area and the peripheral area, and a second layer on the first layer, and having a greater refractive index than the first layer, wherein the first layer defines a first valley portion defining first holes that is on the peripheral area, and that surrounds the second layer.

Abstract: A semiconductor package includes: a chip-via composite substrate including a substrate, a semiconductor chip, and a plurality of through vias, wherein the substrate has a first surface and a second surface opposite to the first surface and includes a first region and a second region around the first region, wherein the semiconductor chip is provided in the first region and has chip pads and circuit patterns that are electrically connected to the chip pads, and wherein the plurality of through vias is provided in the second region and penetrate the substrate; a first redistribution wiring layer provided on the first surface of the substrate and having first redistribution wirings that are electrically connected to the chip pads and the through vias; and a second redistribution wiring layer provided on the second surface of the substrate and having second redistribution wirings that are electrically connected to the through vias.

Abstract: Provided is a plasma processing apparatus including a substrate chuck in a chamber, a restriction ring surrounding an outer perimeter of the substrate chuck, a movable ring on the restriction ring, and an actuator configured to move the movable ring, wherein grooves formed in the restriction ring are opened or closed by movement of the movable ring. In addition, provided is a plasma processing method using the plasma processing apparatus.

Abstract: Embodiments relate to a user authentication device configured to detect a face region in a target object image including at least part of a face of a target object, recognize masked or unmasked in the face region, extract target object characteristics data from the face region of the target object image, call reference data and authenticate if the target object is a registered device user based on the called reference data and the target object characteristics data. The reference data is generated from an unmasked image of the registered device user.

Abstract: The present disclosure relates to a technology for skeleton-based action recognition based on a graph convolutional network, in which an action processing device receives a frame including a skeleton with respect to actions of an object, extracts spatiotemporal features with respect to the skeleton by using a rank adjacency matrix in which a distance between one node and another node and an adjacency ranking are considered, merges an object and vertices in the input frame based on the extracted spatiotemporal features, and performs a classification task.

Abstract: A display apparatus includes: a first electrode; a bank layer defining a first opening which overlaps the first electrode in a plan view; an emission layer which overlaps the first electrode through the first opening; a second electrode on the emission layer; an encapsulation layer on the second electrode; a first insulating layer on the encapsulation layer, where the first insulating layer includes a first portion overlapping the first opening and defines a trench surrounding the first portion; a touch electrode on the first insulating layer; a second insulating layer on the touch electrode and defining a second opening which overlaps the first opening; and a third insulating layer on the second insulating layer.