Abstract: The present invention is a method for operating a demineralization apparatus provided with a plurality of demineralizing lines arranged in parallel and having demineralizers, the method comprising passing through some of the demineralizing lines water to be treated to produce demineralized water while passing through another demineralizing line(s) dilute water from a dilute water tank to perform washing of the line(s), and returning water used for said washing back to the dilute water tank, and being characterized by, when the water quality of the dilute water is on the high salts concentration side past a predefined value, discharging part of the dilute water so as to let said part join the water to be treated and providing a new supply of dilute water for replenishment.

Abstract: An upper holding device holds a substrate in a horizontal attitude without rotating the substrate. A lower holding device rotates a substrate while holding the substrate by suction. A substrate held by the upper holding device is cleaned with use of a cleaning liquid, and a substrate held by the lower holding device is cleaned with use of a cleaning liquid. Gas in a processing space is exhausted by exhaust equipment of a factory through an exhaust system. When a substrate is held by the upper holding device, gas in the processing space is not exhausted or gas in the processing space is exhausted at a first flow rate. Gas in the processing space is exhausted at a second or third flow rate that is higher than the first flow rate when the substrate is held by the lower holding device.

Abstract: A substrate alignment device includes first and second support members that are arranged to be opposite to each other and be spaced apart from each other in a plan view, and respectively support an outer peripheral end of a substrate from a position below the substrate. Further, the substrate alignment device includes a first pressing member that is arranged to be opposite to the first support member in a plan view, and moves the substrate by pressing one portion of the outer peripheral end of the substrate in a first direction directed from the second support member toward the first support member with the substrate supported by the first and second support members. The first support member includes a movement limiter that limits movement of the substrate in the first direction past a predetermined prescribed position.

Abstract: A cleaner comes into contact with a lower-surface center region of a substrate held by a first holder, so that the lower-surface center region is cleaned. The cleaner comes into contact with a lower-surface outer region of the substrate rotated by a second holder, so that the lower-surface outer region of the substrate is cleaned. During cleaning of the lower-surface center region, the second holder is rotated about a vertical axis while not holding the substrate. Alternatively, during cleaning of the lower-surface center region, the gas injector arranged between the cleaner and the second holder injects gas toward the substrate from a first height spaced apart from the substrate by a predetermined distance. Further, during drying of the lower-surface center region, the gas injector injects gas toward the substrate from a second height closer to the substrate than the first height.

Abstract: A lower-surface center region of a substrate held by a first holder is cleaned by a cleaner. A lower-surface outer region of the substrate rotated by a second holder is cleaned by the cleaner. A mobile base provided with the second holder and the cleaner is moved in a horizontal plane such that a reference position of the first holder coincides with a center axis of the second holder in a plan view when the substrate is received and transferred between the first holder and the second holder, and is moved in the horizontal plane such that the cleaner overlaps with the lower-surface center region of the substrate held by the first holder and a center axis of the cleaner coincides with a first portion different from a center of the substrate in the plan view when the lower-surface center region is cleaned.

Abstract: A first cleaner cleans an upper surface of a substrate by scanning above the substrate to pass through a first point in an outer edge of the substrate in a plan view. A second cleaner cleans an outer peripheral end of the substrate by coming into contact with a second point in the outer edge of the substrate in a plan view. A virtual first straight line passing through the first point and the second point and a virtual second straight line passing through a center of the substrate and is parallel to the first straight line are defined. A third cleaner is arranged below the substrate and opposite to the first cleaner and the second cleaner with the second straight line located between the third cleaner, and the first cleaner and the second cleaner, and cleans a lower surface of the substrate.

Abstract: A substrate is held in a horizontal attitude by a substrate holder. At a processing position, a lower surface of the substrate held by the substrate holder is cleaned by a lower-surface brush. The lower-surface brush is cleaned by a brush cleaner at a waiting position that overlaps with the substrate held by the substrate holder in an up-and-down direction and is below a processing position. The lower-surface brush is lifted and lowered by a lower-surface brush lifting-lowering driver between the processing position and the waiting position.

Abstract: Provided is a polyimide having a repeating unit represented by the following Formula (1): wherein R1 represents a tetravalent group; R2 represents a divalent group; provided that at least one of R1's is represented by the following Formula (2); and among R2's, at least one group is represented by the following Formula (3), and at least one other group is represented by the following Formula (4):

Abstract: A vehicle interior board which is thin, lightweight, has high strength, has less degradation, peeling and the like near an end portion of a metal plate, and has high quality and excellent productivity; and a method for manufacturing the same. The vehicle interior board includes a pair of metal plates and a foamed polyurethane layer formed between the pair of metal plates. A projecting ridge projecting outwardly and extending in a predetermined direction along the outer surface is formed on an outer surface of the metal plate. Thus, it is possible to obtain desired strength and rigidity even when the metal plates or the foamed polyurethane layer are thinned or when a lightweight aluminum plate or the like is adopted as the metal plates. Therefore, it is possible to reduce weight of a vehicle interior board.

Abstract: The substrate processing system is provided with a first substrate holding unit which includes a first base that faces from below a substrate having a protected target surface and a cleaning target surface on the opposite side of the protected target surface and holds the substrate in a first posture in which the protected target surface is facing upward, a protective film coating nozzle which coats a protective film at least at a peripheral edge portion of the protected target surface of the substrate that is held by the first substrate holding unit, a first turning unit which turns around the substrate while in contact with a peripheral edge portion of the substrate so that the posture of the substrate can be changed from the first posture to a second posture in which the protected target surface is facing downward, a second substrate holding unit which includes a second base that faces the substrate from below and holds the substrate in the second posture, and a cleaning unit which cleans the cleaning targ

Abstract: A substrate processing system includes a protective film forming liquid supplying unit which supplies a protective film forming liquid to one surface of a substrate, a protective film forming unit which solidifies or hardens the protective film forming liquid and forms a protective film on the one surface of the substrate, a suction unit which suctions the one surface of the substrate, a processing unit which executes predetermined processing with respect to the other surface of the substrate in a state that the one surface of the substrate is suctioned by the suction unit, and a removing liquid supplying unit which has a removing liquid discharge port that discharges a removing liquid being capable of removing the protective film and supplies the removing liquid toward the one surface of the substrate from the removing liquid discharge port.

Abstract: A vehicle interior board which has less deterioration and peeling near an end portion of a metal plate, has high quality, is thin, lightweight, and has high strength and excellent productivity. The vehicle interior board includes a pair of metal plates and a foamed polyurethane layer formed between the pair of metal plates. At the peripheral edge portion of the vehicle interior board, the foamed polyurethane layer covers peripheral end portions of the metal plates and is formed flush with outer surfaces of the metal plates. This makes it possible to suppress oxidation of the peripheral end portions which are cutting surfaces of the metal plates. Further, bonding is good between the metal plates and the foamed polyurethane layer. Further, it is possible to prevent peeling of the metal plates, chipping of the foamed polyurethane layer, and the like. Furthermore, it is easy to demold a vehicle interior board.

Abstract: It is an object to prevent adhesion of a processing liquid to a non-processing region of a substrate. In order to achieve the object, a substrate processing apparatus includes a substrate rotating mechanism, a discharging portion for discharging a processing liquid to a substrate, a moving portion for moving a discharging portion, and a controller. The discharging portion starts to discharge the processing liquid at a first position and is moved to a second position. The first position is a position of the discharging portion where a section of a passage of the discharging portion is projected onto a first region, and the second position is a position of the discharging portion where the section of the passage is projected onto a second region. The first region is a region on the peripheral edge side of the substrate from the second region.

Abstract: While a substrate is being rotated, the lower surface of a brush is moved along the upper surface of the substrate. The brush and a spray nozzle are moved upward from a takeoff position to a lower non-contact position so as to separate the lower surface of the brush from the upper surface of the substrate. The spray nozzle generates the droplets in a state where the brush and the spray nozzle are located in the lower non-contact position so as to make the droplets collide with the upper surface of the substrate, and then the droplets colliding with the upper surface of the substrate are discharged from a gap between the lower surface of the brush and the upper surface of the substrate while the droplets are being supplied to the lower surface of the brush.

Abstract: A vehicle interior board which is thin, lightweight, has high strength, has less degradation, peeling and the like near an end portion of a metal plate, and has high quality and excellent productivity; and a method for manufacturing the same. The vehicle interior board includes a pair of metal plates and a foamed polyurethane layer formed between the pair of metal plates. A projecting ridge projecting outwardly and extending in a predetermined direction along the outer surface is formed on an outer surface of the metal plate. Thus, it is possible to obtain desired strength and rigidity even when the metal plates or the foamed polyurethane layer are thinned or when a lightweight aluminum plate or the like is adopted as the metal plates. Therefore, it is possible to reduce weight of a vehicle interior board.

Abstract: In parallel with a lower-side scrub cleaning step where a brush is contacted with a lower surface inclined portion of a substrate, a center-side spray cleaning step is performed where a collision position of liquid droplets with respect to an upper surface of the substrate is moved between the center of the substrate and the middle of the substrate while the liquid droplets collide with the upper surface of the substrate. Thereafter, in parallel with an upper-side scrub cleaning step where the brush is contacted with an upper surface inclined portion of the substrate, an outer circumference-side spray cleaning step is performed where the collision position of the liquid droplets with respect to the upper surface of the substrate is moved between the middle of the substrate and the outer circumference of the substrate while the liquid droplets collide with the upper surface of the substrate.

Abstract: A vehicle interior board which has less deterioration and peeling near an end portion of a metal plate, has high quality, is thin, lightweight, and has high strength and excellent productivity. The vehicle interior board includes a pair of metal plates and a foamed polyurethane layer formed between the pair of metal plates. At the peripheral edge portion of the vehicle interior board, the foamed polyurethane layer covers peripheral end portions of the metal plates and is formed flush with outer surfaces of the metal plates. This makes it possible to suppress oxidation of the peripheral end portions which are cutting surfaces of the metal plates. Further, bonding is good between the metal plates and the foamed polyurethane layer. Further, it is possible to prevent peeling of the metal plates, chipping of the foamed polyurethane layer, and the like. Furthermore, it is easy to demold a vehicle interior board.

Abstract: A substrate processing apparatus performs brush cleaning of a substrate. The substrate processing apparatus includes a spin base provided rotatably about a rotation axis, a spin base rotation mechanism that rotates the spin base, and a plurality of first chuck pins provided in the spin base, the first chuck pins being switchable between an opened state and a closed state and capable of clamping an end portion of the substrate from a side surface thereof in the closed state. An upper surface of each of the plurality of first chuck pins has a height the same as or lower than an upper surface of the substrate in the closed state where the end portion of the substrate is clamped.

Abstract: A composition for bonded magnets according to the present invention contains from 88% by mass to 91% by mass (inclusive) of a samarium-iron-nitrogen magnet powder having an average particle diameter of from 1.8 ?m to 2.8 ?m (inclusive), from 0.5% by mass to 2.5% by mass (inclusive) of a polyamide elastomer having a tensile elongation at break of 400% or more and a bending modulus of elasticity of 100 MPa or more, from 0.5% by mass to 2.0% by mass (inclusive) of carbon fibers having fiber diameters of from 10 ?m to 12 ?m (inclusive) and from 0.3% by mass to 1.0% by mass (inclusive) of a carboxylic acid ester, with the balance made up of a polyamide resin which is composed of a polyamide 12 having a weight average molecular weight (Mw) of from 4,500 to 7,500 (inclusive) as determined by molecular weight distribution measurement.

Abstract: A technique for reducing the amount of particles adhering to a substrate with a simple structure is provided. A substrate processing apparatus is an apparatus for processing a substrate by ejecting a processing liquid from a nozzle. The substrate processing apparatus includes supply piping and an air-bubble capturing part. One end of the supply piping is connected via a first filter for removing particles to a tank of a processing-liquid supply part that supplies the processing liquid, and the other end of the supply piping is connected to the nozzle. The air-bubble capturing part is inserted at a position between the first filter and the nozzle in the supply piping, and captures air bubbles contained in the processing liquid. Pressure loss caused by the air-bubble capturing part is approximately equal to or smaller than pressure loss caused by the first filter.