Patents by Inventor Kam-Tou SIO

Kam-Tou SIO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10861790
    Abstract: The present disclosure, in some embodiments, relates to an integrated chip. The integrated chip includes a source region and a drain region separated by a channel region within a substrate. A middle-end-of-the-line (MEOL) structure is over the drain region and a gate structure is over the channel region. The MEOL structure is vertically disposed between the drain region and a plane extending along an upper surface of the gate structure. A first interconnect wire is connected to the MEOL structure by a first conductive contact that is directly over the drain region and that extends between the first interconnect wire and the MEOL structure. A conductive strap is located over the first interconnect wire. The conductive strap connects the first interconnect wire to a power rail having a larger width than the first interconnect wire.
    Type: Grant
    Filed: December 11, 2018
    Date of Patent: December 8, 2020
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chih-Liang Chen, Chih-Ming Lai, Charles Chew-Yuen Young, Chi-Yeh Yu, Jiann-Tyng Tzeng, Kam-Tou Sio, Pin-Dai Sue, Ru-Gun Liu, Shih-Wei Peng, Wen-Hao Chen, Yung-Sung Yen, Chun-Kuang Chen
  • Publication number: 20200380193
    Abstract: A method includes arranging a first cell having a first cell height in a first row. The method further includes arranging a second cell having a second cell height in a second row abutting the first row, wherein the second cell height is different from the first cell height. The method further includes placing a plurality of first cell pins within the first cell, wherein each of the plurality of first cell pins extends along a corresponding routing track. The method further includes placing a plurality of second cell pins over a plurality of selected via placement points in the second cell, wherein at least one second cell pin of the plurality of second cell pins extends along a second routing track across a boundary of the second cell and into the first cell.
    Type: Application
    Filed: August 17, 2020
    Publication date: December 3, 2020
    Inventors: Kam-Tou SIO, Jiann-Tyng TZENG
  • Patent number: 10847460
    Abstract: Examples of an integrated circuit a having an advanced two-dimensional (2D) metal connection with metal cut and methods of fabricating the same are provided. An example method for fabricating a conductive interconnection layer of an integrated circuit may include: patterning a conductive connector portion on the conductive interconnection layer of the integrated circuit using extreme ultraviolet (EUV) lithography, wherein the conductive connector portion is patterned to extend across multiple semiconductor structures in a different layer of the integrated circuit; and cutting the conductive connector portion into a plurality of conductive connector sections, wherein the conductive connector portion is cut by removing conductive material from the metal connector portion at one or more locations between the semiconductor structures.
    Type: Grant
    Filed: September 25, 2019
    Date of Patent: November 24, 2020
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Chih-Liang Chen, Cheng-Chi Chuang, Chih-Ming Lai, Chia-Tien Wu, Charles Chew-Yuen Young, Hui-Ting Yang, Jiann-Tyng Tzeng, Kam-Tou Sio, Ru-Gun Liu, Shun Li Chen, Shih-Wei Peng, Tien-Lu Lin
  • Publication number: 20200357793
    Abstract: A method of forming an integrated circuit structure includes placing a tap cell layout pattern on a layout level, placing a set of standard cell layout patterns adjacent to the tap cell layout pattern, and manufacturing the integrated circuit structure based on at least one of the layout patterns. The placing the first well layout pattern includes placing a first layout pattern extending in a first direction and having a first width, placing a second layout pattern adjacent to the first layout pattern, and having a second width greater than the first width, and placing a first implant layout pattern on a second layout level, extending in the first direction, overlapping the first layout pattern and having a third width greater than the first width.
    Type: Application
    Filed: July 27, 2020
    Publication date: November 12, 2020
    Inventors: Kam-Tou SIO, Chih-Liang CHEN, Charles Chew-Yuen YOUNG, Hui-Zhong ZHUANG, Jiann-Tyng TZENG, Yi-Hsun CHIU
  • Publication number: 20200357786
    Abstract: An integrated circuit structure includes: an integrated circuit structure includes: a first plurality of cell rows extending in a first direction, and a second plurality of cell rows extending in the first direction. Each of the first plurality of cell rows has a first row height and comprises a plurality of first cells disposed therein. Each of the second plurality of cell rows has a second row height different from the first row height and comprises a plurality of second cells disposed therein. The plurality of first cells comprises a first plurality of active regions each of which continuously extends across the plurality of first cells in the first direction. The plurality of second cells comprises a second plurality of active regions each of which continuously extends across the plurality of second cells in the first direction. At least one active region of the first and second pluralities of active regions has a width varying along the first direction.
    Type: Application
    Filed: May 26, 2020
    Publication date: November 12, 2020
    Inventors: Kam-Tou SIO, Jiann-Tyng Tzeng, Chung-Hsing Wang, Yi-Kan Cheng
  • Patent number: 10833061
    Abstract: Gate structures extending continuously above a first active region, a second active region and a non-active region of a substrate of a semiconductor structure are arranged. At least one local interconnect over the non-active region and between two of the gate structures is selectively arranged, to couple at least one of contacts that is arranged above the first active region to at least one of the contacts that is arranged above the second active region.
    Type: Grant
    Filed: December 11, 2018
    Date of Patent: November 10, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Charles Chew-Yuen Young, Chih-Liang Chen, Chih-Ming Lai, Jiann-Tyng Tzeng, Shun-Li Chen, Kam-Tou Sio, Shih-Wei Peng, Chun-Kuang Chen, Ru-Gun Liu
  • Publication number: 20200335507
    Abstract: A semiconductor device including fins arranged so that: in a situation in which any given first one of the fins (first given fin) is immediately adjacent any given second one of the fins (second given fin), and subject to fabrication tolerance, there is a minimum gap, Gmin, between the first and second given fins; and the first and second given fins a minimum pitch, Pmin, that falls in a range as follows: (Gmin+(?90%)*T1)?Pmin?(Gmin+(?110%)*T1).
    Type: Application
    Filed: July 1, 2020
    Publication date: October 22, 2020
    Inventors: Chih-Liang CHEN, Chih-Ming LAI, Charles Chew-Yuen YOUNG, Chin-Yuan TSENG, Jiann-Tyng TZENG, Kam-Tou SIO, Ru-Gun LIU, Wei-Liang LIN, L. C. CHOU
  • Patent number: 10804402
    Abstract: The present disclosure describes various non-planar semiconductor devices, such as fin field-effect transistors (finFETs) to provide an example, having one or more metal rail conductors and various methods for fabricating these non-planar semiconductor devices. In some situations, the one or more metal rail conductors can be electrically connected to gate, source, and/or drain regions of these various non-planar semiconductor devices. In these situations, the one or more metal rail conductors can be utilized to electrically connect the gate, the source, and/or the drain regions of various non-planar semiconductor devices to other gate, source, and/or drain regions of various non-planar semiconductor devices and/or other semiconductor devices. However, in other situations, the one or more metal rail conductors can be isolated from the gate, the source, and/or the drain regions these various non-planar semiconductor devices.
    Type: Grant
    Filed: October 31, 2018
    Date of Patent: October 13, 2020
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chih-Liang Chen, Charles Chew-Yuen Young, Hui-Ting Yang, Jiann-Tyng Tzeng, Kam-Tou Sio, Shih-Wei Peng, Wei-Cheng Lin, Lei-Chun Chou
  • Publication number: 20200303551
    Abstract: A method for forming a non-planar semiconductor device includes: forming a fin structure protruding from a front side of a substrate of the non-planar semiconductor device; depositing a dielectric region on the front side of the substrate, the dielectric region including a conductive rail buried within the dielectric region and in parallel with the fin structure; etching the dielectric region to create a first opening in the dielectric region to expose the conductive rail; depositing a plurality of conductive regions on the dielectric region, one of the conductive regions contacting the conductive rail through the first opening; etching the substrate from a backside of the substrate to form a second opening to expose the conductive rail; and filling a first conductive material into the second opening to form a through-substrate via in the substrate.
    Type: Application
    Filed: June 5, 2020
    Publication date: September 24, 2020
    Inventors: CHIH-LIANG CHEN, LEI-CHUN CHOU, JACK LIU, KAM-TOU SIO, HUI-TING YANG, WEI-CHENG LIN, CHUN-HUNG LIOU, JIANN-TYNG TZENG, CHEW-YUEN YOUNG
  • Patent number: 10784168
    Abstract: The present disclosure relates to an integrated chip. In some embodiments, the integrated chip has a first plurality of source and drain regions disposed within a substrate along a first line extending in a first direction. A plurality of gate structures are arranged over the substrate at a substantially regular pitch, and a plurality of middle-of-the-line (MOL) structures are respectively interleaved between adjacent ones of the plurality of gate structures. The plurality of MOL structures include MOL active structures that are electrically coupled to an overlying conductive interconnect and MOL dummy structures that are not electrically coupled to any overlying conductive interconnect. The plurality of MOL structures are arranged over the first plurality of source and drain regions at an irregular pitch that is larger than the substantially regular pitch.
    Type: Grant
    Filed: October 8, 2018
    Date of Patent: September 22, 2020
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Hui-Ting Yang, Chih-Ming Lai, Chun-Kuang Chen, Chih-Liang Chen, Charles Chew-Yuen Young, Jiann-Tyng Tzeng, Kam-Tou Sio, Meng-Hung Shen, Ru-Gun Liu, Wei-Cheng Lin
  • Patent number: 10769342
    Abstract: A method of generating an integrated circuit layout diagram includes arranging first cells having a first cell height in a first row and arranging second cells having a second cell height less than the first cell height in a second row abutting the first row. The first row and the second row extend along a first direction and are laid out relative to a routing grid including first routing tracks along the first direction and second routing tracks along a second direction perpendicular to the first direction. First cell pins are placed within each first cell extending along second routing tracks. Second cell pins are placed over selected via placement points in each second cell. At least one second cell pin extends along a corresponding second routing track across a boundary of a corresponding second cell and into a corresponding first cell abutting the corresponding second cell.
    Type: Grant
    Filed: August 30, 2019
    Date of Patent: September 8, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Kam-Tou Sio, Jiann-Tyng Tzeng
  • Patent number: 10734377
    Abstract: An integrated circuit structure includes a first well, and a first and a second set of implants. The first well includes a first dopant type, a first portion extending in a first direction and having a first width, and a second portion adjacent to the first portion. The second portion extends in the first direction and has a second width greater than the first width. The first set of implants are in the first portion of the first well, and the second set of implants are in the second portion of the first well. At least one implant of the first set of implants being configured to be coupled to a first supply voltage. Each implant of the second set of implants having a second dopant type different from a first dopant type of the first set of implants.
    Type: Grant
    Filed: October 12, 2017
    Date of Patent: August 4, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Kam-Tou Sio, Chih-Liang Chen, Charles Chew-Yuen Young, Hui-Zhong Zhuang, Jiann-Tyng Tzeng, Yi-Hsun Chiu
  • Patent number: 10714485
    Abstract: A semiconductor device including multiple fins. At least a first set of fins among the multiple fins is substantially parallel. At least a second set of fins among the multiple fins is substantially collinear. For any given first and second fins of the multiple fins having corresponding first and second fin-thicknesses, the second fin-thickness is less than plus or minus about 50% of the first fin-thickness.
    Type: Grant
    Filed: September 10, 2018
    Date of Patent: July 14, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chih-Liang Chen, Chih-Ming Lai, Charles Chew-Yuen Young, Chin-Yuan Tseng, Jiann-Tyng Tzeng, Kam-Tou Sio, Ru-Gun Liu, Wei-Liang Lin, L. C. Chou
  • Patent number: 10700207
    Abstract: A semiconductor device includes a substrate, a dielectric region, a plurality of conductive regions, a first conductive rail and a conductive structure. The dielectric region is situated on the substrate. The plurality of conductive regions are situated on the dielectric region. The first conductive rail is situated within the dielectric region, and is electrically connected to a first conductive region of the plurality of conductive regions. The conductive structure is arranged to penetrate through the substrate and formed under the first conductive rail. The conductive structure is electrically connected to the first conductive rail.
    Type: Grant
    Filed: May 30, 2018
    Date of Patent: June 30, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Chih-Liang Chen, Lei-Chun Chou, Jack Liu, Kam-Tou Sio, Hui-Ting Yang, Wei-Cheng Lin, Chun-Hung Liou, Jiann-Tyng Tzeng, Chew-Yuen Young
  • Publication number: 20200184139
    Abstract: A method of manufacturing an integrated circuit includes generating a first layout design based on design criteria, performing a color mapping between the first layout design and a standard cell layout design thereby generating a via color layout design, and manufacturing the integrated circuit based on the via color layout design. The first layout design has a first set of vias divided into sub-sets of vias based on a corresponding color indicating that vias of the sub-set of vias with a same color, and vias of the sub-set of vias with a different color. The standard cell layout design has a second set of vias arranged in standard cells. The via color layout design has a third set of vias including a portion of the second set of vias and corresponding locations, and color of the corresponding sub-set of vias.
    Type: Application
    Filed: February 18, 2020
    Publication date: June 11, 2020
    Inventors: Wei-Cheng LIN, Chih-Liang CHEN, Chih-Ming LAI, Charles Chew-Yuen YOUNG, Jiann-Tyng TZENG, Kam-Tou SIO, Ru-Gun LIU, Shih-Wei PENG, Wei-Chen CHIEN
  • Publication number: 20200135640
    Abstract: An integrated circuit includes a substrate and a first conductive line extending in a first direction parallel to a top surface of the substrate, wherein the first conductive line is a first distance from the top surface of the substrate. The integrated circuit further includes a second conductive line extending in a second direction parallel to the top surface of the substrate, wherein the second conductive line is a second distance from the top surface of the substrate, and the second distance is greater than the first distance. The integrated circuit further includes a third conductive line extending in the first direction, wherein the second conductive line is a third distance from the top surface of the substrate, and the third distance is greater than the second distance. The integrated circuit further includes a supervia directly connected to the first conductive line and the third conductive line.
    Type: Application
    Filed: August 2, 2019
    Publication date: April 30, 2020
    Inventors: Kam-Tou SIO, Jiann-Tyng TZENG, Wei-Cheng LIN
  • Publication number: 20200134119
    Abstract: A method of generating an integrated circuit layout diagram includes arranging first cells having a first cell height in a first row and arranging second cells having a second cell height less than the first cell height in a second row abutting the first row. The first row and the second row extend along a first direction and are laid out relative to a routing grid including first routing tracks along the first direction and second routing tracks along a second direction perpendicular to the first direction. First cell pins are placed within each first cell extending along second routing tracks. Second cell pins are placed over selected via placement points in each second cell. At least one second cell pin extends along a corresponding second routing track across a boundary of a corresponding second cell and into a corresponding first cell abutting the corresponding second cell.
    Type: Application
    Filed: August 30, 2019
    Publication date: April 30, 2020
    Inventors: Kam-Tou SIO, Jiann-Tyng TZENG
  • Publication number: 20200118875
    Abstract: An embodiment of a semiconductor switch structure includes source contacts, drain contacts, gates and fins. The contacts and gates are elongated in a first direction and are spaced apart from each other in a second direction perpendicular to the first direction. The gates are interspersed between the contacts. The fins underlie both the contacts and the gates. The fins are elongated in the second direction and are spaced apart from each other in the first direction. A contact via extends through one of the contacts without contacting a gate or a fin. A gate via extends through one of the gates without contacting a contact or a fin. A contact-gate via is in contact with both a contact and a gate but not a fin.
    Type: Application
    Filed: December 16, 2019
    Publication date: April 16, 2020
    Inventors: Kam-Tou Sio, Chih-Liang Chen, Charles Chew-Yuen Young, Ho Che Yu
  • Publication number: 20200105660
    Abstract: An IC structure includes a fin structure, a contact overlying the fin structure along a first direction, and an isolation layer between the contact and the fin structure. The isolation layer is adjacent to a portion of the contact along a second direction perpendicular to the first direction.
    Type: Application
    Filed: August 28, 2019
    Publication date: April 2, 2020
    Inventors: Kam-Tou SIO, Cheng-Chi CHUANG, Chih-Ming LAI, Jiann-Tyng TZENG, Wei-Cheng LIN, Lipen YUAN
  • Publication number: 20200083182
    Abstract: The present disclosure, in some embodiments, relates to an integrated chip. The integrated chip includes a first conductive interconnect wire extending in a first direction over a substrate. A second conductive interconnect wire is arranged over the first conductive interconnect wire. A via rail is configured to electrically couple the first conductive interconnect wire and the second conductive interconnect wire. The first conductive interconnect wire and the second conductive interconnect wire extend as continuous structures past one or more sides of the via rail.
    Type: Application
    Filed: November 13, 2019
    Publication date: March 12, 2020
    Inventors: Kam-Tou Sio, Chih-Ming Lai, Chun-Kuang Chen, Chih-Liang Chen, Charles Chew-Yuen Young, Chi-Yeh Yu, Jiann-Tyng Tzeng, Ru-Gun Liu, Wen-Hao Chen