Patents by Inventor Kazuyuki Hayashi

Kazuyuki Hayashi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 7718324
    Abstract: A reflective mask blank for EUV lithography, which comprises a substrate, and a reflective layer to reflect EUV light and an absorber layer to absorb EUV light, formed in this order on the substrate, wherein the absorber layer contains tantalum (Ta) and hafnium (Hf), and in the absorber layer, the content of Hf is from 20 to 60 at. % and the content of Ta is from 40 to 80 at. %, and wherein the absorber layer has a content of N being 0 to at most 35 at. %.
    Type: Grant
    Filed: February 8, 2008
    Date of Patent: May 18, 2010
    Assignee: Asahi Glass Company, Limited
    Inventors: Kazuyuki Hayashi, Kazuo Kadowaki, Takashi Sugiyama
  • Patent number: 7713666
    Abstract: To provide a reflective mask blank for EUV lithography having an absorber layer which has a low reflectance in a wavelength region of EUV light or light for inspection of a pattern and which is easy to control to have a desired layer composition and thickness. A reflective mask blank for EUV lithography, which comprises a substrate, and a reflective layer to reflect EUV light and an absorber layer to absorb EUV light, formed in this order on the substrate, wherein the absorber layer contains tantalum (Ta) and hafnium (Hf), and in the absorber layer, the content of Hf is from 20 to 60 at. % and the content of Ta is from 40 to 80 at. %.
    Type: Grant
    Filed: February 7, 2008
    Date of Patent: May 11, 2010
    Assignee: Asahi Glass Company, Limited
    Inventors: Kazuyuki Hayashi, Kazuo Kadowaki, Takashi Sugiyama
  • Publication number: 20100047878
    Abstract: An L-amino acid is produced by culturing a microorganism belonging to the family Enterobacteriaceae having an L-amino acid-producing ability and modified so that glycerol dehydrogenase and dihydroxyacetone kinase activities are increased, in a medium containing glycerol as a carbon source to produce and accumulate an L-amino acid in the medium or cells, and collecting the L-amino acid from the medium or the cells.
    Type: Application
    Filed: August 24, 2009
    Publication date: February 25, 2010
    Inventors: Yuri Nagai, Kazuyuki Hayashi, Takuji Ueda, Yoshihiro Usuda, Kazuhiko Matsui
  • Publication number: 20100035165
    Abstract: Provision of a reflective mask blank for EUV lithography having an absorber layer which has a low reflectance in the wavelength regions of EUV light and pattern inspection light and whose film composition and film thickness are easily controllable to desired ones. A reflective mask blank for EUV lithography, which comprises a substrate, and a reflective layer to reflect EUV light and an absorber layer to absorb EUV light, formed in this order on the substrate, wherein the absorber layer contains tantalum (Ta), boron (B) and silicon (Si), and in the absorber layer, the content of B is at least 1 at. % and less than 5 at. % and the content of Si is from 1 to 25 at. %, and wherein the absorber layer contains no nitrogen (N) or at most 10 at. % of N.
    Type: Application
    Filed: October 14, 2009
    Publication date: February 11, 2010
    Applicant: ASAHI GLASS COMPANY, LIMITED
    Inventors: KAZUYUKI HAYASHI, KAZUO KADOWAKI, MASAKI MIKAMI, TAKASHI SUGIYAMA
  • Publication number: 20100035087
    Abstract: The present invention relates to ferromagnetic metal particles having an average major axis diameter (L) of 10 to 100 nm which satisfy a relationship between the average major axis diameter (L) and a particle SFD represented by the following formula: Particle SFD?0.0001 L2?0.0217 L+1.75; a process for producing the ferromagnetic metal particles; and a magnetic recording medium using the ferromagnetic metal particles.
    Type: Application
    Filed: August 5, 2009
    Publication date: February 11, 2010
    Applicant: TODA KOGYO CORPORATION
    Inventors: Hiroko Morii, Keisuke Iwasaki, Seiji Ishitani, Mineko Ohsugi, Shinji Horie, Toshiharu Harada, Takehiro Matsuo, Yosuke Yamamoto, Kazuyuki Hayashi
  • Publication number: 20090253055
    Abstract: Provided are a substrate with a conductive film for an EUV mask blank in which the generation of particles due to abrasion between an electrostatic chuck and the substrate is prevented; and a substrate with a multilayer reflective film and an EUV mask blank each employing such a substrate with a conductive film. A substrate with a conductive film to be used for producing a reflective mask blank for EUV lithography, the conductive film containing chromium (Cr) and nitrogen (N), the average concentration of N in the conductive film being at least 0.1 atomic % and less than 40 atomic %, the crystal state of at least a surface of the conductive film being amorphous, the sheet resistance of the conductive film being at most 27 ?/?, and the surface roughness (rms) of the conductive film being at most 0.5 nm.
    Type: Application
    Filed: June 12, 2009
    Publication date: October 8, 2009
    Applicant: ASAHI GLASS COMPANY LIMITED
    Inventors: Kazuyuki Hayashi, Kazuo Kadowaki, Takashi Sugiyama
  • Publication number: 20090245742
    Abstract: A silica-based multi core optical fiber and a fabrication method for the same are provided, and include two or more cores of GeO2—SiO2 glass including an fluorine concentration not less than about 15 w % and a germanium concentration about 0.05 wt % to 2 wt %, in a core. A relative refractive index difference of a cladding and a core is not less than about 3%; and a ratio of a cladding diameter to a core diameter is about 1.02 to 3.0. A silica-based single core optical fiber is also provided, and includes a core having a germanium concentration not less than about 15 wt % and an fluorine concentration about 0.05 wt % to 2 wt %.
    Type: Application
    Filed: December 12, 2008
    Publication date: October 1, 2009
    Applicant: FUJIKURA LTD.
    Inventors: Manabu Kudou, Kazuyuki Hayashi, Takashi Tsumanuma
  • Publication number: 20090220823
    Abstract: The present invention relates to ferromagnetic metal particles having a bulk density (?a) of not more than 0.25 g/cm3, a process for producing the above ferromagnetic metal particles and a magnetic recording medium comprising a non-magnetic substrate; a non-magnetic undercoat layer formed on the non-magnetic substrate which comprises non-magnetic particles and a binder resin; and a magnetic recording layer formed on the non-magnetic undercoat layer which comprises magnetic particles and a binder resin, wherein the above ferromagnetic metal particles were used as the magnetic particles.
    Type: Application
    Filed: February 27, 2009
    Publication date: September 3, 2009
    Applicant: TODA KOGYO CORPORATION
    Inventors: Hiroko MORII, Seiji Ishitani, Keisuke Iwasaki, Hirofumi Nishikawa, Mineko Ohsugi, Toshiharu Harada, Takahiro Matsuo, Yosuke Yamamoto, Kazuyuki Hayashi
  • Publication number: 20090202867
    Abstract: The present invention relates to a process for producing magnetic metal particles for magnetic recording, comprising: heat-treating goethite particles having an aluminum content of 4 to 50 atom % in terms of Al based on whole Fe to obtain hematite particles; and heat-reducing the hematite particles at a temperature of 200 to 600° C., the goethite particles being obtained by adding a peroxodisulfate to a reaction solution comprising: a ferrous salt aqueous solution and a mixed alkali aqueous solution comprising: an alkali hydrogen carbonate aqueous solution or alkali carbonate aqueous solution and an alkali hydroxide aqueous solution before initiation of an oxidation reaction of the reaction solution, and then conducting the oxidation reaction.
    Type: Application
    Filed: February 3, 2009
    Publication date: August 13, 2009
    Applicant: TODA KOGYO CORPORATION
    Inventors: Mineko Ohsugi, Toshiharu Harada, Takahiro Matsuo, Yosuke Yamamoto, Kazuyuki Hayashi
  • Publication number: 20090130574
    Abstract: To provide a sputtering target to be used for production of an EUV mask blank, capable of preventing particles by film peeling even when formation of a reflective multilayer film as a reflective layer and a Ru layer as a protective layer is carried out at a production level using actual machines for a large number of cycles. A sputtering target for forming a ruthenium (Ru) layer in a reflective layer for reflecting EUV light on a substrate, which contains Ru and at least one element selected from the group consisting of boron (B) and zirconium (Zr) in a total content of B and Zr of from 5 at % to 50 at %.
    Type: Application
    Filed: January 14, 2009
    Publication date: May 21, 2009
    Applicant: Asahi Glass Company, Limited
    Inventors: Kazuyuki Hayashi, Takashi Sugiyama
  • Publication number: 20090047519
    Abstract: The soft magnetic material includes a plurality of composite magnetic particles having a metal magnetic particle and an insulating film surrounding the surface of the metal magnetic particle. The metal magnetic particle contains iron as the main component. The insulating film contains aluminum, silicon, phosphorus, and oxygen. The insulating film satisfies the relationship 0.4?MAl/(MAl+MSi)?0.9 and the relationship of 0.25?(MAl+MSi)/MP?1.0 in the case that molar amount of aluminum contained in the insulating film is represented by MAl, the sum of the molar amount of aluminum contained in the insulating film and the molar amount of silicon contained in the insulating film is represented by (MAl+MSi), and the molar amount of phosphorus contained in the insulating film is represented by MP.
    Type: Application
    Filed: November 22, 2006
    Publication date: February 19, 2009
    Applicants: SUMITOMO ELECTRIC INDUSTRIES, LTD., TODA KOGYO CORP.
    Inventors: Toru Maeda, Naoto Igarashi, Haruhisa Toyoda, Seiji Ishitani, Hiroko Morii, Kazuyuki Hayashi
  • Publication number: 20090042064
    Abstract: The present invention relates to non-magnetic particles for non-magnetic undercoat layer of magnetic recording medium, comprising: hematite particles; an inner coating layer comprising a phosphorus-containing inorganic compound which is formed on a surface of the respective hematite particles; and an outer coating layer comprising an aluminum-containing inorganic compound which is formed on an outside of the inner coating layer comprising the phosphorus-containing inorganic compound.
    Type: Application
    Filed: August 8, 2008
    Publication date: February 12, 2009
    Applicant: TODA KOGYO CORPORATION
    Inventors: Seiji ISHITANI, Hiroko Morii, Kazuyuki Hayashi
  • Publication number: 20090022915
    Abstract: The present invention relates to a particle having a mean particle size of 0.01 to 20 ?m, containing tert-butyl (4R)-4-{[((1R)-2-[(1-benzylpiperidin-4-yl)amino]-1-{[(cyclohexylmethyl)thio]methyl}-2-oxoethyl)amino]carbonyl}-1,3-thiazolidine-3-carboxylate. A preparation containing the particle is excellent in pulmonary delivery through inhalation and is easy to handle because of excellent dispersibility of the particle, and thus the present compound can be used as a pulmonary preparation.
    Type: Application
    Filed: March 8, 2006
    Publication date: January 22, 2009
    Applicant: ONO PHARMACEUTICAL CO., LTD.,
    Inventors: Hideo Masuda, Hikaru Sugihara, Akio Nishiura, Kazuyuki Hayashi
  • Publication number: 20090017384
    Abstract: The present invention relates to a process for producing a composite cathode active material for a non-aqueous electrolyte secondary cell which is subjected to surface treatment, comprising: previously mixing the cathode active material with a surface-treating component in the form of a metal compound containing one or more metal elements selected from the group consisting of the first transition series elements and the second transition series elements; and then coating the cathode active material with the surface-treating component using an apparatus capable of effecting a high-speed shearing action.
    Type: Application
    Filed: July 8, 2008
    Publication date: January 15, 2009
    Applicant: TODA KOGYO CORPORATION
    Inventors: Keisuke Iwasaki, Kazuyuki Hayashi
  • Publication number: 20090007821
    Abstract: A functional material comprising fine coloring particles having an average primary particle diameter of 1 to 50 nm in a dried state, and having a BET specific surface area value of to 500 m2/g and a light transmittance of not less than 80%. The functional material composed of fine coloring particles, exhibits not only an excellent transparency but also a high tinting strength and a clear hue.
    Type: Application
    Filed: September 4, 2008
    Publication date: January 8, 2009
    Applicant: TODA KOGYO CORPORATION
    Inventors: Mamoru KAMIGAKI, Hiroko MORII, Kazuyuki HAYASHI, Toru IWAKI
  • Publication number: 20090011341
    Abstract: To provide a reflective mask blank for EUV lithography having an absorber layer, which presents a low reflectance to a light in the wavelength ranges of EUV light and pattern inspection light, and which is easily controlled to have desired film composition and film thickness. A reflective mask blank for EUV lithography, comprising a substrate, and a reflective layer for reflecting EUV light and an absorber layer for absorbing EUV light formed in this order on the substrate, wherein the absorber layer contains tantalum (Ta), boron (B), silicon (Si) and nitrogen (N), and in the absorber layer, the B content is at least 1 at % and less than 5 at %, the Si content is from 1 to 25 at %, and the compositional ratio of Ta to N (Ta:N) is from 8:1 to 1:1.
    Type: Application
    Filed: September 8, 2008
    Publication date: January 8, 2009
    Applicant: ASAHI GLASS CO., LTD.
    Inventors: Kazuyuki Hayashi, Kazuo Kadowaki, Takashi Sugiyama, Masaki Mikami
  • Publication number: 20080318140
    Abstract: To provide an EUV mask blank of which the decrease in the reflectance during EUV exposure is suppressed, and a substrate with a functional film to be used for production of such an EUV mask blank. A substrate with a reflective layer for EUV lithography, comprising a substrate, and a reflective layer for reflecting EUV light and a protective layer for protecting the reflective layer formed in this order on the substrate, wherein the protective layer contains ruthenium (Ru) and at least one element selected from the group consisting of boron (B) and zirconium (Zr); and in the protective layer, the Ru content is from 70 at % to 95 at % and the total content of B and Zr is from 5 at % to 30 at %.
    Type: Application
    Filed: August 27, 2008
    Publication date: December 25, 2008
    Applicant: ASAHI GLASS COMPANY, LIMITED
    Inventors: Kazuyuki Hayashi, Kazuo Kadowaki, Takashi Sugiyama, Masaki Mikami
  • Publication number: 20080258118
    Abstract: There are provided colored composite microparticles having a fine primary particle diameter and exhibiting a high tinting strength, an excellent dispersibility and an excellent light fastness; a process for producing the colored composite microparticles; and a dispersion of the colored composite microparticles. The colored composite microparticles are composite particles comprising silica and an organic pigment in which the silica is enclosed in the organic pigment and contained in an amount of 0.001 to 9% by weight (calculated as Si) based on the weight of the composite particles. The coloring composition for color filters is prepared by dispersing a colorant for color filters comprising the colored composite microparticles in a coloring composition base material, whereas the ink for ink-jet printing is prepared by dispersing a colorant for inks for ink-jet printing comprising the colored composite microparticles in an ink base solution.
    Type: Application
    Filed: March 5, 2008
    Publication date: October 23, 2008
    Applicant: TODA KOGYO CORPORATION
    Inventors: Shinji Horie, Hiroko Morii, Hirofumi Nishikawa, Kazuyuki Hayashi
  • Publication number: 20080248245
    Abstract: A soft magnetic material includes a plurality of composite magnetic particles. Each of the plurality of composite magnetic particles has a metal magnetic particle including iron, a lower film surrounding the surface of the metal magnetic particle and including a nonferrous metal, and an insulating upper film surrounding the surface of the lower film and including an inorganic compound. The inorganic compound contains at least one element of oxygen and carbon. The nonferrous metal has an affinity with at least one of oxygen and carbon that is larger than such affinity of iron. The nonferrous metal has a diffusion coefficient with respect to at least one of oxygen and carbon that is smaller than such diffusion coefficient of iron. Thus, a soft magnetic material that provides desirable magnetic properties, a method of manufacturing a soft magnetic material, a dust core, and a method of manufacturing a dust core are provided.
    Type: Application
    Filed: July 20, 2006
    Publication date: October 9, 2008
    Inventors: Toru Maeda, Haruhisa Toyoda, Naoto Igarashi, Kazuhiro Hirose, Seiji Ishitani, Hiroko Morii, Kazuyuki Hayashi
  • Patent number: 7432314
    Abstract: A functional material comprising fine coloring particles having an average primary particle diameter of 1 to 50 nm in a dried state, and having a BET specific surface area value of 30 to 500 m2/g and a light transmittance of not less than 80%. The functional material composed of fine coloring particles, exhibits not only an excellent transparency but also a high tinting strength and a clear hue.
    Type: Grant
    Filed: December 16, 2002
    Date of Patent: October 7, 2008
    Assignee: Toda Kogyo Corporation
    Inventors: Mamoru Kamigaki, Hiroko Morii, Kazuyuki Hayashi, Toru Iwaki