Abstract: The apparatus controls a tilt angle of a tilt mirror in high speed with high stability, realizing non-linearity compensation. The apparatus includes: a control signal producing unit, which produces a control signal, for feed-forward controlling of the mirror into a target tilt angle, based on a parameter that determines the target tilt angle; a digital filter for removing a resonance frequency component, which is caused by an angle response of the tilt mirror, in the control signal, which is produced by the control signal producing unit; and a square root calculating unit for performing digital square-root calculation so that non-linearity of the control signal, from which the resonance frequency component has been removed, is compensated for.

Abstract: A product wafer processed by a semiconductor manufacturing apparatus is transferred to a check apparatus for checking, and a result thereof is sent to a host computer. A product wafer determined as being failed as a result of the checking is transported into an empty carrier by a built-in type wafer transport apparatus under the instruction of the host computer. The carrier in which the product wafer determined as being failed is accommodated is regarded as a rework lot by the host computer. Based on manufacturing standard information for rework held by the host computer, rework processing is performed through a wafer manufacturing operation. Therefore, such a semiconductor device manufacturing line results in that the carrier accommodating the product wafer is transferred and handled smoothly.

Abstract: An object of the invention is to provide a control apparatus and control method for an optical switch with a three-dimensional structure using MEMS mirrors, that can accurately compensate for a change in characteristic due to a temperature variation from an initial setting time, to perform the high speed switching of optical paths.

Abstract: The present invention aims at providing a control apparatus and a control method of an optical signal exchanger, capable of controlling an optical output level to be constant even when performing the switching of channels with different optical input levels. To this end, according to the control apparatus of the optical signal exchanger, in a three-dimensional type optical signal exchanger using a set of MEMS mirror arrays each having a plurality of tilt mirrors arranged on a plane, each tilt mirror having a reflecting surface an angle of which is controllable, power of an optical signal sequentially reflected by the respective MEMS mirror arrays and output from a specific position is detected by an optical power detection section, and the angle of the reflecting surface of the tilt mirror that has reflected the optical signal is feedback controlled, so that an absolute value of a difference between a previously set target value and the output light power becomes minimum.

Abstract: In a digital filter device which filters a plurality of signals by a single digital filter, an input data memory stores the input data strings generated by computing processors, and a digital filter reads the input data strings in a predetermined sequence to be filtered and generates output data strings. An output data memory stores the output data strings, and a data processor reads the output data strings in a predetermined sequence to be processed. Also, a switch table for associating an address of the input data memory in which the input data strings are stored with an address of the output data memory in which the output data strings are stored is provided, and based on this switch table, a switching controller provides timings of reading the input data strings out of the input data memory and of writing the input data strings as the output data strings into the output data memory through the digital filter.

Abstract: The present invention aims at providing an optical switch control method capable of controlling at a high speed angles of a plurality of tilt mirrors of an optical switch of three-dimensional structure, by a simplified circuit structure. To this end, for an optical switch including a plurality of mirror arrays each arranged with a plurality of tilt mirrors and in which input optical signals are sequentially reflected by the mirror arrays so as to output the optical signals from particular positions, the optical switch control method according to the present invention is constituted to divide the tilt mirrors on one mirror array into a plurality of fixed regions, to divide the tilt mirrors on the other mirror arrays into a plurality of virtual regions, in accordance with connecting states of optical paths, such that the tilt mirrors in each of the virtual regions and the tilt mirrors in each of the fixed regions are related to each other so as to make pairs.

Abstract: The present invention aims at providing an optical switch control method capable of controlling at a high speed angles of a plurality of tilt mirrors of an optical switch of three-dimensional structure, by a simplified circuit structure. To this end, for an optical switch including a plurality of mirror arrays each arranged with a plurality of tilt mirrors and in which input optical signals are sequentially reflected by the mirror arrays so as to output the optical signals from particular positions, the optical switch control method according to the present invention is constituted to divide the tilt mirrors on one mirror array into a plurality of fixed regions, to divide the tilt mirrors on the other mirror arrays into a plurality of virtual regions, in accordance with connecting states of optical paths, such that the tilt mirrors in each of the virtual regions and the tilt mirrors in each of the fixed regions are related to each other so as to make pairs.

Abstract: A product wafer processed by a semiconductor manufacturing apparatus is transferred to a check apparatus for checking, and a result thereof is sent to a host computer. A product wafer determined as being failed as a result of the checking is transported into an empty carrier by a built-in type wafer transport apparatus under the instruction of the host computer. The carrier in which the product wafer determined as being failed is accommodated is regarded as a rework lot by the host computer. Based on manufacturing standard information for rework held by the host computer, rework processing is performed through a wafer manufacturing operation. Therefore, such a semiconductor device manufacturing line results in that the carrier accommodating the product wafer is transferred and handled smoothly.

Abstract: An object of the invention is to provide a control apparatus and a control method having a simple constitution, which can stably perform switching of optical path in an optical signal exchanger, while suppressing an influence on a control due to the mechanical resonance of tilt mirrors. To this end, the control apparatus of the optical signal exchanger is constituted such that in an optical signal exchanger of three-dimensional type using one set of MEMS mirror arrays, each having a plurality of tilt mirrors arranged on a plane, each tilt mirror having a reflecting surface an angle of which is controllable, when the angle of the MEMS mirror on the optical path is feedback controlled by detecting power of an optical signal output from a specific position, a resonance component removing section that removes a resonance frequency component included in a control signal is shared corresponding to a pair of driving electrodes arranged in a coaxial direction of the MEMS mirror.

Abstract: The present invention aims at providing a control apparatus and a control method of an optical signal exchanger, capable of controlling an optical output level to be constant even when performing the switching of channels with different optical input levels. To this end, according to the control apparatus of the optical signal exchanger, in a three-dimensional type optical signal exchanger using a set of MEMS mirror arrays each having a plurality of tilt mirrors arranged on a plane, each tilt mirror having a reflecting surface an angle of which is controllable, power of an optical signal sequentially reflected by the respective MEMS mirror arrays and output from a specific position is detected by an optical power detection section, and the angle of the reflecting surface of the tilt mirror that has reflected the optical signal is feedback controlled, so that an absolute value of a difference between a previously set target value and the output light power becomes minimum.

Abstract: The present invention is to provide a flash lamp device and a flash emitting device with a long working life and in which sufficient trigger energy is produced without emission errors, and the flash lamp device comprises a flash lamp with an arc tube in which a pair of electrodes are disposed in opposition, and a high voltage supply proximal conductor which extends between the electrodes on the exterior of the arc tube of this flash lamp, wherein a dielectric member with a greater permittivity than that of air is installed between the arc tube of the flash lamp and the proximal conductor, and the flash emitting device comprises a plurality of these flash lamp devices, wherein the arc tubes, high voltage supply proximal conductors, and dielectric materials of each of this plurality of flash lamp devices are supported separately on a common base.

Abstract: A drive unit for controlling optical paths of an optical switch having at least one optical switch element and at least one pair of electrodes arranged near the optical switch element, each pair including a first electrode and a second electrode provided at a position opposite to the first electrode. The drive unit includes at least one drive circuit for the at least one optical switch element, respectively. The drive circuit has an output for supplying voltages to the electrodes to generate electrostatic forces between the electrodes and the optical switch element and the voltages are separated into positive voltages supplied to the first electrode and negative voltages supplied to the second electrode.

Abstract: An optical exchange for a wavelength division multiplexed (WDM) network performs a switching operation on a plurality of optical signals, which are input via a plurality of input ports, and outputs the resulting optical signals to a plurality of output ports, which are allocated to the input ports, by making deflection the optical signal; target amounts of the deflection to which the respective input optical signals are stored. The deflection is made using a switching controller, which reads out the target amount of deflection for such destination-of-switching output port with respect to such object-of-switching port, and controlling the deflection in such a manner that the individual input optical signals are deflected based on the respective target amounts of deflection. And during the switching, the power-level controller performs a feedback control for adjusting a power level of the individual deflected output optical signal to a target power level.

Abstract: The object of the present invention is to provide electrical equipment for mounting on vehicles and electrical machines having superior rust-prevention film, which makes it possible to prevent vehicles from generating red rust even if outer surface of magnetic core housing of the vehicle is damaged by bouncing a stone and the like during running, and also to provide manufacturing methods of the same.

Abstract: In connection with an intermediate anchoring of a manipulation cable connecting between a manipulation side and an actuation side of an automobile transmission mechanism, an intermediate anchoring bracket 22 of the manipulation cable 4 is provide integral with the starter 2. Specifically, a front bracket 21 of the starter 2, which is attached to a transmission block 1 with a high positional accuracy according to an original purpose of improving engagement between a ring gear 32 and a pinion 23, and the anchoring bracket 22 defining the intermediate anchoring point position of the manipulation cable 4 are formed integral. By merely attaching the starter 2 to the transmission mechanism block 1 with a small number of parts, an accurate positioning of the anchoring bracket 22 with respect to an actuation point 1a is realized, thereby, a positional accuracy between the intermediate anchoring point position and the actuation point 1a can be improved.

Abstract: The present invention aims at providing a controlling apparatus and a controlling method of an optical switching device capable of automatically correcting angle deviations of tilt-mirrors to thereby reduce an optical loss.

Abstract: The invention is aimed at providing an optical switch using tilt mirrors, in which easy mounting of the optical components is possible by simplifying the construction, and in which a short spatial propagation distance for the light beam is realized. To this end, the optical switch using tilt mirrors of the present invention comprises; a collimator array and a tilt mirror array each formed with an input section and an output section aligned and integrated, and a shift type turn-back mirror that shifts the optical path of the incident light in a predetermined direction and turns back and outputs this.

Abstract: The invention is aimed at providing an optical switch using tilt mirrors, in which easy mounting of the optical components is possible by simplifying the construction, and in which a short spatial propagation distance for the light beam is realized. To this end, the optical switch using tilt mirrors of the present invention comprises; a collimator array and a tilt mirror array each formed with an input section and an output section aligned and integrated, and a shift type turn-back mirror that shifts the optical path of the incident light in a predetermined direction and turns back and outputs this.

Abstract: Disclosed herein is a terminal device including a photodetector, amplitude detecting circuit, light source, drive circuit, and control circuit. The photodetector receives a first optical signal. The amplitude detecting circuit detects the amplitude of an output from the photodetector. The drive circuit supplies a drive current to the light source so that the light source outputs a second optical signal. The control circuit decreases and increases the drive current according to an increase and decrease in the amplitude detected by the amplitude detecting circuit, respectively. In the case that this terminal device is used with another terminal device to construct a network, the dynamic range of the other terminal device can be reduced. Accordingly, the use of this terminal device can improve the extensibility of the network.

Abstract: A ceramic lamp in which the hermetically sealing bodies of electrically conductive cermet are sealed to hermetically sealed tube portions of the lamp vessel with a sealing material is arranged and provided with material components designed to give the hermetically sealing portions a high reliability.