Abstract: An electrostatic chuck includes: a body substrate having a substrate front surface and a substrate rear surface and made of ceramic; an attraction electrode provided in the body substrate; a metal base having a base front surface and a base rear surface, and placed such that the base front surface faces the substrate rear surface of the body substrate; and an internal through hole formed so as to penetrate the base front surface and the base rear surface of the metal base. The body substrate has a plurality of heating regions in each of which a heater electrode is provided. In the internal through hole, a plurality of heater electrode terminals are provided which are electrically connected to the heater electrode in each heating region. The plurality of heater electrode terminals provided in the internal through hole are electrically connected to a connection member provided in the internal through hole.

Abstract: An electrostatic chuck includes: a body substrate having a substrate front surface and a substrate rear surface and made of ceramic; an attraction electrode provided in the body substrate; a metal base having a base front surface and a base rear surface, and placed such that the base front surface faces the substrate rear surface of the body substrate; and an internal through hole formed so as to penetrate the base front surface and the base rear surface of the metal base. The body substrate has a plurality of heating regions in each of which a heater electrode is provided. In the internal through hole, a plurality of heater electrode terminals are provided which are electrically connected to the heater electrode in each heating region. The plurality of heater electrode terminals provided in the internal through hole are electrically connected to a connection member provided in the internal through hole.