Electrostatic chuck

- NGK Spark Plug Co., Ltd.
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Description

FIG. 1 is a perspective view of the top, front and right side of an electrostatic chuck showing my new design;

FIG. 2 is a front elevational view thereof, the rear elevational view being a mirror image thereof;

FIG. 3 is a right side elevational view thereof;

FIG. 4 is a left side elevational view thereof;

FIG. 5 is a top plan view thereof;

FIG. 6 is a bottom plan view thereof; and,

FIG. 7 is a sectional view taking along the line 7—7 in FIG. 5.

Claims

The ornamental design for a electrostatic chuck, as shown and described.

Referenced Cited
U.S. Patent Documents
5474614 December 12, 1995 Robbins
5656093 August 12, 1997 Burkhart et al.
5671116 September 23, 1997 Husain
5675471 October 7, 1997 Kotecki
5838528 November 17, 1998 Os et al.
D420022 February 1, 2000 Burkhart et al.
D425919 May 30, 2000 Burkhart et al.
6513796 February 4, 2003 Leidy et al.
6639783 October 28, 2003 Shamouilian et al.
Patent History
Patent number: D491206
Type: Grant
Filed: Jun 20, 2003
Date of Patent: Jun 8, 2004
Assignee: NGK Spark Plug Co., Ltd. (Aichi)
Inventor: Keisuke Okugawa (Aichi)
Primary Examiner: Lucy Lieberman
Attorney, Agent or Law Firm: Sughrue Mion, PLLC
Application Number: 29/183,944
Classifications
Current U.S. Class: Tool Or Work Holder (D15/140)
International Classification: 1509;