Electrostatic chuck

- NGK Spark Plug Co., Ltd.
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Description

FIG. 1 is a perspective view of the top, front and right side of an electrostatic chuck showing my new design;

FIG. 2 is a front elevational view thereof, the rear elevational view being a mirror image thereof;

FIG. 3 is a right side elevational view thereof;

FIG. 4 is a left side elevational view thereof;

FIG. 5 is a top plan view thereof;

FIG. 6 is a bottom plan view thereof; and,

FIG. 7 is a sectional view taking along the line 7—7 in FIG. 5.

Claims

The ornamental design for a electrostatic chuck, as shown and described.

Referenced Cited
U.S. Patent Documents
5535090 July 9, 1996 Sherman
5656093 August 12, 1997 Burkhart et al.
5825607 October 20, 1998 Burkhart
5838528 November 17, 1998 Os et al.
D406852 March 16, 1999 Burkhart et al.
D407073 March 23, 1999 Burkhart et al.
D420022 February 1, 2000 Burkhart et al.
D420023 February 1, 2000 Flanigan et al.
D425919 May 30, 2000 Burkhart et al.
6081414 June 27, 2000 Flanigan et al.
6595506 July 22, 2003 Zide et al.
Patent History
Patent number: D490093
Type: Grant
Filed: Jun 20, 2003
Date of Patent: May 18, 2004
Assignee: NGK Spark Plug Co., Ltd. (Aichi)
Inventor: Keisuke Okugawa (Aichi)
Primary Examiner: Lucy Lieberman
Attorney, Agent or Law Firm: Sughrue Mion, PLLC
Application Number: 29/183,940
Classifications
Current U.S. Class: Tool Or Work Holder (D15/140)
International Classification: 1509;