Patents by Inventor Kelin J. Kuhn

Kelin J. Kuhn has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20150303258
    Abstract: Methods of forming microelectronic structures are described. Embodiments of those methods include forming a nanowire device comprising a substrate comprising source/drain structures adjacent to spacers, and nanowire channel structures disposed between the spacers, wherein the nanowire channel structures are vertically stacked above each other.
    Type: Application
    Filed: July 1, 2015
    Publication date: October 22, 2015
    Inventors: Kelin J. KUHN, Seiyon KIM, Rafael RIOS, Stephen M. Cea, Martin D. GILES, Annalisa CAPPELLANI, Titash RAKSHIT, Peter CHANG, Willy RACHMADY
  • Patent number: 9129829
    Abstract: Methods of forming microelectronic structures are described. Embodiments of those methods include forming a nanowire device comprising a substrate comprising source/drain structures adjacent to spacers, and nanowire channel structures disposed between the spacers, wherein the nanowire channel structures are vertically stacked above each other.
    Type: Grant
    Filed: May 9, 2014
    Date of Patent: September 8, 2015
    Assignee: Intel Corporation
    Inventors: Kelin J. Kuhn, Seiyon Kim, Rafael Rios, Stephen M. Cea, Martin D. Giles, Annalisa Cappellani, Titash Rakshit, Peter Chang, Willy Rachmady
  • Patent number: 9129827
    Abstract: Techniques are disclosed for converting a strain-inducing semiconductor buffer layer into an electrical insulator at one or more locations of the buffer layer, thereby allowing an above device layer to have a number of benefits, which in some embodiments include those that arise from being grown on a strain-inducing buffer and having a buried electrical insulator layer. For instance, having a buried electrical insulator layer (initially used as a strain-inducing buffer during fabrication of the above active device layer) between the Fin and substrate of a non-planar integrated transistor circuit may simultaneously enable a low-doped Fin with high mobility, desirable device electrostatics and elimination or otherwise reduction of substrate junction leakage. Also, the presence of such an electrical insulator under the source and drain regions may further significantly reduce junction leakage. In some embodiments, substantially the entire buffer layer is converted to an electrical insulator.
    Type: Grant
    Filed: April 13, 2012
    Date of Patent: September 8, 2015
    Assignee: Intel Corporation
    Inventors: Annalisa Cappellani, Van H. Le, Glenn A. Glass, Kelin J. Kuhn, Stephen M. Cea
  • Publication number: 20150228772
    Abstract: Techniques are disclosed for customization of nanowire transistor devices to provide a diverse range of channel configurations and/or material systems within the same integrated circuit die. In accordance with one example embodiment, sacrificial fins are removed and replaced with custom material stacks of arbitrary composition and strain suitable for a given application. In one such case, each of a first set of the sacrificial fins is recessed or otherwise removed and replaced with a p-type layer stack, and each of a second set of the sacrificial fins is recessed or otherwise removed and replaced with an n-type layer stack. The p-type layer stack can be completely independent of the process for the n-type layer stack, and vice-versa. Numerous other circuit configurations and device variations are enabled using the techniques provided herein.
    Type: Application
    Filed: April 20, 2015
    Publication date: August 13, 2015
    Applicant: INTEL CORPORATION
    Inventors: GLENN A. GLASS, KELIN J. KUHN, SEIYON KIM, ANAND S. MURTHY, DANIEL B. AUBERTINE
  • Patent number: 9105344
    Abstract: Described herein are technologies related to self-disabling feature of a integrated circuit device to avoid unauthorized access to stored data information.
    Type: Grant
    Filed: December 20, 2012
    Date of Patent: August 11, 2015
    Assignee: Intel Corporation
    Inventors: Kelin J Kuhn, Christopher J Jezewski, Marko Radosavljevic
  • Patent number: 9087863
    Abstract: Nanowire structures having non-discrete source and drain regions are described. For example, a semiconductor device includes a plurality of vertically stacked nanowires disposed above a substrate. Each of the nanowires includes a discrete channel region disposed in the nanowire. A gate electrode stack surrounds the plurality of vertically stacked nanowires. A pair of non-discrete source and drain regions is disposed on either side of, and adjoining, the discrete channel regions of the plurality of vertically stacked nanowires.
    Type: Grant
    Filed: December 23, 2011
    Date of Patent: July 21, 2015
    Assignee: Intel Corporation
    Inventors: Stephen M. Cea, Annalisa Cappellani, Martin D. Giles, Rafael Rios, Seiyon Kim, Kelin J. Kuhn
  • Publication number: 20150179786
    Abstract: An embodiment concerns selective etching of a structure (e.g., a fin) to form a void with the shape of the original structure. This void then functions as a mold. Flowable dielectric material fills the void to form the same shape as the original structure/mold. Post-processing then occurs (e.g., oxidation build up and annealing) to harden the dielectric in the void. The resulting product is a molded dielectric nanostructure that has the same shape as the original structure but consists of a different material (e.g., dielectric instead of silicon). Other embodiments are described herein.
    Type: Application
    Filed: December 23, 2013
    Publication date: June 25, 2015
    Inventors: Seiyon Kim, Kelin J. Kuhn
  • Patent number: 9029221
    Abstract: Semiconductor devices having three-dimensional bodies with modulated heights and methods to form such devices are described. For example, a semiconductor structure includes a first semiconductor device having a first semiconductor body disposed above a substrate. The first semiconductor body has a first height and an uppermost surface with a first horizontal plane. The semiconductor structure also includes a second semiconductor device having a second semiconductor body disposed above the substrate. The second semiconductor body has a second height and an uppermost surface with a second horizontal plane. The first and second horizontal planes are co-planar and the first and second heights are different.
    Type: Grant
    Filed: December 21, 2011
    Date of Patent: May 12, 2015
    Assignee: Intel Corporation
    Inventors: Annalisa Cappellani, Kelin J. Kuhn, Rafael Rios, Aura Cecilia Davila Latorre, Tahir Ghani
  • Patent number: 9012284
    Abstract: Techniques are disclosed for customization of nanowire transistor devices to provide a diverse range of channel configurations and/or material systems within the same integrated circuit die. In accordance with one example embodiment, sacrificial fins are removed and replaced with custom material stacks of arbitrary composition and strain suitable for a given application. In one such case, each of a first set of the sacrificial fins is recessed or otherwise removed and replaced with a p-type layer stack, and each of a second set of the sacrificial fins is recessed or otherwise removed and replaced with an n-type layer stack. The p-type layer stack can be completely independent of the process for the n-type layer stack, and vice-versa. Numerous other circuit configurations and device variations are enabled using the techniques provided herein.
    Type: Grant
    Filed: July 27, 2012
    Date of Patent: April 21, 2015
    Assignee: Intel Corporation
    Inventors: Glenn A. Glass, Kelin J. Kuhn, Seiyon Kim, Anand S. Murthy, Daniel B. Aubertine
  • Publication number: 20150054468
    Abstract: This disclosure is directed to a self-powered internal medical device. An example device may comprise at least an energy generation module and an operations module to at least control the energy generation module. The energy generation module may include a structure to capture certain molecules in the organic body based at least on size, the structure including a surface of the device in which at least one opening is formed. The at least one opening may be sized to only capture certain molecules. The operations module may initiate oxidation reactions in the captured molecules to generate current for device operation or for storage in an energy storage module. Thermoelectric generation circuitry in the energy generation module may also use heat from the reaction to generate a second current. The operations module may control operation of a sensor module and/or communication module in the device based on the generated energy.
    Type: Application
    Filed: August 20, 2013
    Publication date: February 26, 2015
    Inventors: Dmitri E. Nikonov, Michael C. Mayberry, Ian A. Young, Kelin J. Kuhn
  • Publication number: 20150041847
    Abstract: Tunneling field effect transistors (TFETs) for CMOS architectures and approaches to fabricating N-type and P-type TFETs are described. For example, a tunneling field effect transistor (TFET) includes a homojunction active region disposed above a substrate. The homojunction active region includes a relaxed Ge or GeSn body having an undoped channel region therein. The homojunction active region also includes doped source and drain regions disposed in the relaxed Ge or GeSn body, on either side of the channel region. The TFET also includes a gate stack disposed on the channel region, between the source and drain regions. The gate stack includes a gate dielectric portion and gate electrode portion.
    Type: Application
    Filed: October 22, 2014
    Publication date: February 12, 2015
    Inventors: Roza Kotlyar, Stephen M. Cea, Gilbert Dewey, Benjamin Chu-Kung, Uygar E. Avci, Rafael Rios, Anurag Chaudhry, Thomas D. Linton, JR., Ian A. Young, Kelin J. Kuhn
  • Publication number: 20150021553
    Abstract: A junctionless accumulation-mode (JAM) semiconductive device is isolated from a semiconductive substrate by a reverse-bias band below a prominent feature of a JAM semiconductive body. Processes of making the JAM device include implantation and epitaxy.
    Type: Application
    Filed: October 6, 2014
    Publication date: January 22, 2015
    Applicant: INTEL CORPORATION
    Inventors: ANNALISA CAPPELLANI, KELIN J. KUHN, RAFAEL RIOS, Titash Rakshit, Sivakumar Mudanai
  • Patent number: 8890120
    Abstract: Tunneling field effect transistors (TFETs) for CMOS architectures and approaches to fabricating N-type and P-type TFETs are described. For example, a tunneling field effect transistor (TFET) includes a homojunction active region disposed above a substrate. The homojunction active region includes a relaxed Ge or GeSn body having an undoped channel region therein. The homojunction active region also includes doped source and drain regions disposed in the relaxed Ge or GeSn body, on either side of the channel region. The TFET also includes a gate stack disposed on the channel region, between the source and drain regions. The gate stack includes a gate dielectric portion and gate electrode portion.
    Type: Grant
    Filed: November 16, 2012
    Date of Patent: November 18, 2014
    Assignee: Intel Corporation
    Inventors: Roza Kotlyar, Stephen M. Cea, Gilbert Dewey, Benjamin Chu-Kung, Uygar E. Avci, Rafael Rios, Anurag Chaudhry, Thomas D. Linton, Jr., Ian A. Young, Kelin J. Kuhn
  • Publication number: 20140326952
    Abstract: Methods of forming microelectronic structures are described. Embodiments of those methods include forming a nanowire device comprising a substrate comprising source/drain structures adjacent to spacers, and nanowire channel structures disposed between the spacers, wherein the nanowire channel structures are vertically stacked above each other.
    Type: Application
    Filed: May 9, 2014
    Publication date: November 6, 2014
    Inventors: Kelin J. KUHN, Seiyon KIM, Rafael RIOS, Stephen M. Cea, Martin D. GILES, Annalisa CAPPELLANI, Titash RAKSHIT, Peter CHANG, Willy RACHMADY
  • Patent number: 8853741
    Abstract: A junctionless accumulation-mode (JAM) semiconductive device is isolated from a semiconducive substrate by a reverse-bias band below a prominent feature of a JAM semiconductive body. Processes of making the JAM device include implantation and epitaxy.
    Type: Grant
    Filed: August 12, 2013
    Date of Patent: October 7, 2014
    Assignee: Intel Corporation
    Inventors: Annalisa Cappellani, Kelin J. Kuhn, Rafael Rios, Titash Rakshit, Sivakumar Mudanai
  • Publication number: 20140285980
    Abstract: Techniques are disclosed for converting a strain-inducing semiconductor buffer layer into an electrical insulator at one or more locations of the buffer layer, thereby allowing an above device layer to have a number of benefits, which in some embodiments include those that arise from being grown on a strain-inducing buffer and having a buried electrical insulator layer. For instance, having a buried electrical insulator layer (initially used as a strain-inducing buffer during fabrication of the above active device layer) between the Fin and substrate of a non-planar integrated transistor circuit may simultaneously enable a low-doped Fin with high mobility, desirable device electrostatics and elimination or otherwise reduction of substrate junction leakage. Also, the presence of such an electrical insulator under the source and drain regions may further significantly reduce junction leakage. In some embodiments, substantially the entire buffer layer is converted to an electrical insulator.
    Type: Application
    Filed: April 13, 2012
    Publication date: September 25, 2014
    Inventors: Annalisa Cappellani, Van H. Le, Glenn A. Glass, Kelin J. Kuhn, Stephen M. Cea
  • Publication number: 20140264879
    Abstract: Methods of fabricating a first contact to a semiconductor device, which fundamentally comprises providing a semiconductor device formed on a substrate. The substrate further includes a conductive surface. A dielectric layer is formed over the substrate and has an opening exposing the conductive surface. The opening extends an entire length of the semiconductor device, partway down the entire length of the device, extending from the device onto adjacent field of the device, or and a combination thereof. A barrier layer is formed within the opening. A copper containing material fills the opening to form a first contact to the semiconductor device.
    Type: Application
    Filed: May 28, 2014
    Publication date: September 18, 2014
    Inventors: Kelin J. Kuhn, Kaizad Mistry, Mark Bohr, Chris Auth
  • Publication number: 20140197377
    Abstract: Complimentary metal-oxide-semiconductor nanowire structures are described. For example, a semiconductor structure includes a first semiconductor device. The first semiconductor device includes a first nanowire disposed above a substrate. The first nanowire has a mid-point a first distance above the substrate and includes a discrete channel region and source and drain regions on either side of the discrete channel region. A first gate electrode stack completely surrounds the discrete channel region of the first nanowire. The semiconductor structure also includes a second semiconductor device. The second semiconductor device includes a second nanowire disposed above the substrate. The second nanowire has a mid-point a second distance above the substrate and includes a discrete channel region and source and drain regions on either side of the discrete channel region. The first distance is different from the second distance.
    Type: Application
    Filed: December 23, 2011
    Publication date: July 17, 2014
    Inventors: Seiyon Kim, Kelin J. Kuhn, Tahir Ghani, Anand S. Murthy, Annalisa Cappellani, Stephen M. Cea, Rafael Rios, Glenn A. Glass
  • Patent number: 8766372
    Abstract: Methods of fabricating a first contact to a semiconductor device, which fundamentally comprises providing a semiconductor device formed on a substrate. The substrate further includes a conductive surface. A dielectric layer is formed over the substrate and has an opening exposing the conductive surface. The opening extends an entire length of the semiconductor device, partway down the entire length of the device, extending from the device onto adjacent field of the device, or and a combination thereof. A barrier layer is formed within the opening. A copper containing material fills the opening to form a first contact to the semiconductor device.
    Type: Grant
    Filed: August 7, 2012
    Date of Patent: July 1, 2014
    Assignee: Intel Corporation
    Inventors: Kelin J. Kuhn, Kaizad Mistry, Mark Bohr, Chris Auth
  • Publication number: 20140176367
    Abstract: A system includes a processor and a phased array, coupled to the processor, having an arrayed waveguide for acoustic waves to enable directional sound communication.
    Type: Application
    Filed: December 21, 2012
    Publication date: June 26, 2014
    Inventors: Sasikanth Manipatruni, Kelin J. Kuhn, Debendra Mallik, John C. Johnson