Abstract: The method according to the invention includes the steps of: purging an inside of the processing chamber with gas while applying a thermal impact onto the thin film deposited on the inside of the processing chamber by decreasing the temperature in the processing chamber, so as to forcibly generate a crack in the thin film and forcibly peel the adhered material with a weak adhesive force, in a state where the substrate is not present in the processing chamber; removing the thin film deposited on the inside of the processing chamber by supplying a fluorine-based gas to the inside of the processing chamber heated to a first temperature, in the state where the substrate is not present in the processing chamber; and removing an adhered material remaining on the inside of the processing chamber after removing the thin film by supplying a fluorine-based gas to the inside of the processing chamber heated to a second temperature, in the state where the substrate is not present in the processing chamber.

Abstract: The present invention suppresses metallic contamination in a processing chamber and a breakage of a quartz member, while suppressing decrease in film formation rate in a thin film formation process immediately after dry cleaning of the inside of the processing chamber, and enhances the operation rate of a apparatus. The method according to the invention includes the steps of: removing the thin film on the inside of the processing chamber by supplying a fluorine gas solely or a fluorine gas diluted by an inert gas solely, as the cleaning gas, to the inside of the processing chamber heated to a first temperature; and removing an adhered material remaining on the inside of the processing chamber after removing the thin film by supplying a fluorine gas solely or a fluorine gas diluted by an inert gas solely, as the cleaning gas, to the inside of the processing chamber heated to a second temperature.

Abstract: There are provided the steps of loading a substrate into a reaction vessel; forming a film on the substrate while supplying a film forming gas into the reaction vessel; unloading the substrate after film formation from the reaction vessel; supplying a cleaning gas into the reaction vessel while lowering a temperature in the reaction vessel and removing a deposit deposited on at least an inner wall of the reaction vessel in the film forming step.

Abstract: A boundary line detection apparatus and method and an image processing apparatus and method as well as a recording medium by which the jaggy in the proximity of a boundary line is removed without increasing the sampling rate to remove are disclosed. The differences between pixel values between a noticed pixel and pixels in the proximity of the noticed pixel are compared with each other to detect whether or not a boundary is present in the proximity of the noticed pixel. Then, a length, a direction, and a start point and an end portion of the boundary line are determined. Then, the distance between the noticed pixel and the boundary line is calculated, and the pixel value of the noticed pixel is weighted using the distance. Then, the pixel obtained by the weighting is outputted.

Abstract: An animation generating apparatus for generating a three-dimensional animation tracking a moving object includes a camera parameter setting section setting a point of regard and a point of view based on a current position of the moving object using route data indicating a route of the moving object so that the point of regard is located on the route and the point of view is located behind the point of regard along the route, and a rendering processor generating an image by retrieving necessary rendering data from three-dimensional map data based on the point of regard and point of view set by the camera parameter setting section.

Abstract: An apparatus for cleaning a CVD apparatus that can efficiently remove a by-product such as SiO2 or Si3N4 stuck and deposited onto the surface of an internal wall, an electrode, or the like in a reaction chamber in a film forming process, and a method for cleaning a CVD apparatus. A control monitors luminous intensity data of an F radical in a reaction chamber by optical emission spectroscopy and compares the data with calibrated prestored luminous intensity data, and ends cleaning after a predetermined time passes from reaching a luminous intensity saturation point. Furthermore, concentration data of SiF4 in a gas discharged from the reaction chamber are monitored by a Fourier transform infrared spectrometry and compared with prestored concentration data of SiF4 to decide that the predetermined time has passed when a predetermined cleaning end point concentration is reached, thereby ending the cleaning.

Abstract: There is provided a CVD apparatus capable of efficiently removing a by-product such as SiO2 or Si3N4 which is stuck and deposited onto the surface of an internal wall, an electrode or the like in a CVD chamber in a film forming process, and furthermore, executing cleaning having a small damage over an upper electrode and a counter electrode stage (a lower electrode) and manufacturing a thin film of high quality, and a CVD apparatus cleaning method using the same. In a CVD apparatus cleaning method of introducing a cleaning gas to carry out plasma cleaning over an inside of a CVD chamber after forming a deposited film on a surface of a substrate, a frequency of an RF to be applied to an RF electrode is switched into a first frequency to be applied for forming a film and a second frequency to be applied when executing the plasma cleaning.

Abstract: A communication system adopts communication means having a small effective communication range for communication between mobile terminals and a server functioning as a cell station, so that each server is responsible for a small range only. In this manner, the communication system produces information about how servers are distributed on the network based on the geographic location of each server, thereby pre-delivering the information about such geographic locations and estimating how much and when data is to be delivered based on the positional relationship between servers and mobile terminals for load sharing.

Abstract: A communication system adopts communication means having a small effective communication range for communication between mobile terminals and a server functioning as a cell station, so that each server is responsible for a small range only. In this manner, the communication system produces information about how servers are distributed on the network based on the geographic location of each server, thereby pre-delivering the information about such geographic locations and estimating how much and when data is to be delivered based on the positional relationship between servers and mobile terminals for load sharing.

Abstract: It is an object to provide a cleaning method in a CVD apparatus capable of efficiently removing a by-product such as SiO2 or Si3N4 which is adhered to and deposited on the surfaces of an inner wall, an electrode and the like in a reaction chamber at a film forming step. Furthermore, it is an object to provide a cleaning method in which the amount of a cleaning gas to be discharged is very small, an influence on an environment such as global warming is also lessened and a cost can also be reduced. An energy is applied to a fluorine compound to react the fluorine compound, thereby generating a fluorine gas component and a component other than the fluorine gas component. Furthermore, the fluorine gas component and the component other than the fluorine gas component which are generated are separated from each other so that the fluorine gas component is separated and refined.

Abstract: Map display systems, map data processing apparatuses, map display apparatuses, and map display methods for general navigation systems are provided. A map data processing section categorizes original three-dimensional map data into scene graph data representing a data structure of a three-dimensional map using a tree structure and rendering data for rendering an object included in the three-dimensional map and processes the scene graph data and the rendering data. A map data display section specifies a display area by referring to the scene graph data and reads and displays the rendering data in accordance with the specified display area.

Abstract: It is an object to provide a cleaning method in a CVD apparatus capable of efficiently removing a by-product such as SiO2 or Si3N4 which is adhered to and deposited on the surfaces of an inner wall, an electrode and the like in a reaction chamber and the side wall of a piping of an exhaust path or the like at a film forming step, in which the amount of a cleaning gas to be discharged is very small, an influence on an environment such as global warming can also be lessened and a cost can also be reduced.

Abstract: It is an object to provide a cleaning method in a CVD apparatus capable of efficiently removing a by-product such as SiO2 or Si3N4 which is adhered to and deposited on the surfaces of an inner wall, an electrode and the like in a reaction chamber at a film forming step, in which the amount of a cleaning gas to be discharged is very small, an influence on an environment such as global warming is also lessened and a cost can also be reduced.

Abstract: A communication system adopts communication means having a small effective communication range for communication between mobile terminals and a server functioning as a cell station, so that each server is responsible for a small range only. In this manner, the communication system produces information about how servers are distributed on the network based on the geographic location of each server, thereby pre-delivering the information about such geographic locations and estimating how much and when data is to be delivered based on the positional relationship between servers and mobile terminals for load sharing.

Abstract: An object of the invention is to provide a substance that activates saccharide uptake in epidermal cells and is thus expected to be effective in promoting skin cell neogenesis and metabolism. The invention provides a promoter for saccharide uptake in epidermal keratinocytes which comprises a purine base or a salt thereof as an active ingredient. The present invention further provides a method of promoting saccharide uptake in epidermal keratinocytes, comprising applying a purine base or a salt thereof to the skin.

Abstract: A boundary line detection apparatus and method and an image processing apparatus and method as well as a recording medium by which the juggy in the proximity of a boundary line is removed without increasing the sampling rate to remove are disclosed. The differences between pixel values between a noticed pixel and pixels in the proximity of the noticed pixel are compared with each other to detect whether or not a boundary is present in the proximity of the noticed pixel. Then, a length, a direction, and a start point and an end portion of the boundary line are determined. Then, the distance between the noticed pixel and the boundary line is calculated, and the pixel value of the noticed pixel is weighted using the distance. Then, the pixel obtained by the weighting is outputted.