Abstract: An N-channel MOS transistor is used to configure a DC—DC converter having good characteristics without providing a particular voltage circuit which outputs a voltage higher than an input voltage. An N-channel MOS transistor 11 and a choke coil 12 are connected in series between a negative side of a direct-current power supply and a negative side of the output capacitor 8. A PWM circuit 14 applies pulse signals to a gate of the MOS transistor 11 based on the input voltage divided by the capacitors 9 and 10. The pulse signal of the PWM circuit 14 is formed by the voltage corresponding to the output voltage of the output capacitor 8, and the pulse signal is inputted to the gate of the N-channel MOS transistor 11 through a photocoupler 16.

Abstract: The present invention comprises a turntable which holds a turbine part at a predetermined position, the turn table being rotatably supported by a support member, and rotated and driven by a driving motor, an abrasive feeding unit which feeds an abrasive particle having an elastic material as a core to a predetermined position as an abrasive, and a polishing head including an impeller which is rotated and driven by an impeller driving motor at high speed and applies rotary energy to the abrasive particle to be supplied from the abrasive feeding unit, the polishing head injecting the abrasive particle flying from the tangential direction of the impeller at a predetermined speed toward a surface to be polished of the turbine part held on the turntable, and an abrasive recovery unit which recovers the abrasive particle provided for polishing of the turbine part from the polishing head, and feeding into the abrasive feeding unit.

Abstract: A surface to be polished of a large part is polished by projecting and colliding an abrasive comprising abrasive grains and an elastic petrochemical high polymer material having the specific gravity of 0.5 to 1.8 g/cm3 and elasticity of 10 to 200 ckg/cm2 or an elastic natural material, to the surface to be polished of the large part at a speed of 600 m to 3800 m per minute and by a volume of 5 to 300 cc/cm2·sec per unit area, and sliding the abrasive.

Abstract: The present invention relates to a polishing apparatus for polishing a workpiece, such as a semiconductor wafer, to a flat mirror finish. The polishing apparatus comprises a polishing table having a polishing surface, and a top ring, and the workpiece is interposed between the polishing table and the top ring and pressed at a predetermined pressure to polish the workpiece. The polishing apparatus comprises at least two dressing units for dressing the polishing surface by being brought into contact with the polishing surface, which is a surface of a polishing cloth.

Abstract: An N-channel MOS transistor is used to configure a DC-DC converter having good characteristics without providing a particular voltage circuit which outputs a voltage higher than an input voltage. An N-channel MOS transistor 11 and a choke coil 12 are connected in series between a negative side of a direct-current power supply and a negative side of the output capacitor 8. A PWM circuit 14 applies pulse signals to a gate of the MOS transistor 11 based on the input voltage divided by the capacitors 9 and 10. The pulse signal of the PWM circuit 14 is formed by the voltage corresponding to the output voltage of the output capacitor 8, and the pulse signal is inputted to the gate of the N-channel MOS transistor 11 through a photocoupler 16.

Abstract: A choke valve is controlled finely suited to the running state of an engine. A throttle valve 8 and a choke valve 9 are provided in series on an intake pipe 6, and the opening degree of the choke valve 9 is controlled by a stepping motor 11. A choke valve opening degree upon start of engine (start opening degree) is determined depending on the engine temperature. The start opening degree judging unit 27 judges whether the start opening degree is closer to the fully closed side or fully opened side. The motor initializing unit 28 initializes the stepping motor 11 at the fully closed side or the fully opened side if the start opening degree is at the fully closed side or the fully opened side, respectively. After choke release, a driving signal in a specified number of steps is issued periodically.

Abstract: A choke valve is controlled finely suited to the running state of an engine. A throttle valve 8 and a choke valve 9 are provided in series on an intake pipe 6, and the opening degree of the choke valve 9 is controlled by a stepping motor. The choke valve opening degree upon start of engine (start opening degree) is determined depending on the engine temperature. The stepping motor 11 is initialized at the fully closed side of the choke valve 9 when the power source for starting the engine is turned on. The start opening degree of the choke valve is judged to be closer to the fully closed side or fully opened side, and the stepping motor 11 is initialized at the fully closed side if judged to be close to the fully closed side, and at the fully opened side if at the fully opened side.

Abstract: A choke valve is controlled finely suited to the running state of an engine. A throttle valve 8 and a choke valve 9 are provided in series on an intake pipe 6, and the opening degree of the choke valve 9 is controlled by a stepping motor 11. A choke valve opening degree upon start of engine (start opening degree) and a driving pulse rate of a stepping motor 11 are determined depending on the engine temperature. When lower than the engine temperature TL, the pulse rate is set at first rate, or the lowest rate in a specified range. Depending on the engine temperature, the pulse rate is set higher gradually up to second rate TH. When releasing the choke gradually in warm-up operation, the pulse rate is lowered so as to obtain a choke opening degree of high precision by a high torque.

Abstract: The present invention relates to a polishing apparatus for polishing a workpiece, such as a semiconductor wafer, to a flat mirror finish. The polishing apparatus comprises a polishing table having a polishing surface, and a top ring, and the workpiece is interposed between the polishing table and the top ring, and pressed at a predetermined pressure to polish the workpiece. The polishing apparatus comprises at least two dressing units for dressing the polishing surface by being brought into contact with the ppolishing surface, which is a surface of a polishing cloth.

Abstract: The present invention relates to a polishing apparatus for polishing a workpiece, such as a semiconductor wafer, to a flat mirror finish. The polishing apparatus comprises a polishing table having a polishing surface, and a top ring, and the workpiece is interposed between the polishing table and the top ring and pressed at a predetermined pressure to polish the workpiece. The polishing apparatus comprises at least two dressing units for dressing the polishing surface by being brought into contact with the ppolishing surface, which is a surface of a polishing cloth.

Abstract: It is an object of the invention to provide the operability of an engine power generator having a remote controller. A starting switch 90 of a remote controller 9 and a starting switch on a power generator body's side can be operated in parallel. A stopping switch 91 of the remote controller 9 and a stopping switch on the body's side can be operated in parallel. The stopping switch 91 and an oil level switch 26 are connected to each other in parallel. The starting switch 90 and the stopping switch 91 can be operated when a combination switch 12 is in ON position. An engine 2 can be started and stopped by switching operation on the body's side in parallel to remote control operation.

Abstract: A fault on the generator can be detected with the use of a simple arrangement. The output of the generator 12 which has multi-phase winding and is driven by an engine 11 is rectified and then converted by an inverter 133 into an alternating current at the frequency of a system before interconnected to the source of the system. After the engine 11 is started, the direct current voltage Vdc is monitored with a first fault monitor 40. When the direct current voltage Vdc rises up to a predetermined level, a connector relay 135 is closed. As the output of the inverter 133 is increased, the interconnection with the system source is enabled. After the interconnection, the direct current voltage and the output of the inverter are monitored with a second fault monitor 43. If the direct current voltage drops down to below the predetermined level before the output of the inverter reaches a rated level, the canceling and re-interconnection is repeated.

Abstract: A master disc manufacturing apparatus includes an electron-beam emitting portion for emitting an electron beam, an electron-beam converging portion for converging an electron beam, a retarding voltage applying portion for applying a substrate with a negative potential having a magnitude of decelerating the electron beam, and a vacuum atmosphere producing portion for evacuating a chamber to produce a vacuum atmosphere therein.

Abstract: An apparatus of manufacturing a master by irradiating an electron beam on a substrate mounted on a turntable includes a rotation drive section for rotating the turntable; first and second correction-signal generating sections for respectively detecting first and second asynchronous components of rotational fluctuation of the turntable in a predetermined direction and in a direction perpendicular to the predetermined direction to generate first and second correction signals; and a deflection control section for controlling the electron beam deflection on the basis of the first and second correction signals.

Abstract: A grid-type engine generator apparatus which can prevent reduction in the operational efficiency due to the stop motion of an engine at the cancellation of the interconnection and minimize loads exerted on the startup device for the engine. A network protector is provided for generating a fault signal when detecting a fault on the network source. Upon receiving the fault signal, an interconnection relay is opened to cancel the interconnection and simultaneously, a timer is started. The cancellation permits the engine to run with no load. When the fault signal is maintained until the setting duration of the timer is timed up, a time-out signal is released to stop the engine. On the other hand, when the fault signal is eliminated by canceling the cause of the fault before the setting duration of the timer is passed, the interconnection relay is closed to establish the interconnection again and the timer is reset.

Abstract: A solid product removal apparatus for removing a solid product adhering to an gas exhaust pipe member has a rinsing water inlet pipe member having a tip opening located inside the gas exhaust pipe member for feeding rinsing water into the inside of the gas exhaust pipe member from the tip opening thereof. The solid product removal apparatus is particularly useful when exhaust gas contains an ingredient capable of forming a solid product upon reaction with water inside the gas exhaust pipe member and can rinse off the solid product adhering to the inner face of the gas exhaust pipe member with rinsing water.

Abstract: An information recording apparatus for recording tracks includes: a rotation drive section (RDS) that supports and rotates a master disk with a resist layer; an exposure beam emitting section (EBES) deflectably applying an exposure beam to the disk to form a spot thereon; a relative movement drive section (RMDS) translating the RDS relatively to the spot in a radial direction of the disk; an emission controller supplying the EBES with an instruction for modulating an intensity of the exposure beam according to data to be recorded; and a movement controller supplying the RMDS with an instruction for moving the RDS with the rotating disk by a predetermined moving amount for each disk rotation.

Abstract: The present invention relates to a polishing apparatus for polishing a workpiece to be polished, such as a semiconductor wafer, to a flat mirror finish. The polishing apparatus comprises a polishing table having a polishing surface, and a top ring, and the workpiece to be polished is interposed between the polishing table and the top ring and pressed at a predetermined pressure to polish the workpiece. The polishing apparatus comprises at least two dressing units for dressing the polishing surface by being brought into contact with a surface of a polishing cloth.

Abstract: A master disc manufacturing apparatus includes an electron-beam emitting portion for emitting an electron beam, an electron-beam converging portion for converging an electron beam, a retarding voltage applying portion for applying a substrate with a negative potential having a magnitude of decelerating the electron beam, and a vacuum atmosphere producing portion for evacuating a chamber to produce a vacuum atmosphere therein.

Abstract: A fault on the generator can be detected with the use of a simple arrangement. The output of the generator 12 which has multi-phase winding and is driven by an engine 11 is rectified and then converted by an inverter 133 into an alternating current at the frequency of a system before interconnected to the source of the system. After the engine 11 is started, the direct current voltage Vdc is monitored with a first fault monitor 40. When the direct current voltage Vdc rises up to a predetermined level, a connector relay 135 is closed. As the output of the inverter 133 is increased, the interconnection with the system source is enabled. After the interconnection, the direct current voltage and the output of the inverter are monitored with a second fault monitor 43. If the direct current voltage drops down to below the predetermined level before the output of the inverter reaches a rated level, the canceling and re-interconnection is repeated.