Abstract: There is provided a technique that includes: a first processing module including a first process container in which at least one substrate is processed, a first utility system including a first supply system which supplies a first processing gas into the first process container and a surface of the first utility system is connected or arranged close to the first processing module; and a first vacuum pump arranged at the same level as a first exhaust port of the first process container. The first vacuum pump exhausts an inside of the first process container and includes a first intake port formed laterally at a position substantially facing the first exhaust port of the first process container. A first exhaust pipe configured to substantially linearly bring the first exhaust port into fluid communication with the first intake port and including a first valve installed in a flow path.

Abstract: According to an embodiment, a method of correcting a bend of a joint type-turbine rotor comprises: measuring displacement of a convex portion of the bend at a joined portion of the joint type-turbine rotor or displacement of a surface opposite to the convex portion in a circumferential direction of the joint type-turbine rotor; heating the convex portion; and cooling the joined portion after the step of heating. The steps of heating and cooling are performed during the step of measuring.

Abstract: A rotor blade in an embodiment includes: a suction surface side projecting portion projecting from a suction surface on a leading edge side at a blade tip of the blade effective portion; and a pressure surface side projecting portion projecting from a pressure surface on a trailing edge side at the blade tip of the blade effective portion. The suction surface side projecting portion includes: a leading edge side end surface including a contact surface that comes into contact with the pressure surface side projecting portion of the adjacent rotor blade and a non-contact surface that does not come into contact with the pressure surface side projecting portion of the adjacent rotor blade during rotation; a groove portion formed from the non-contact surface to the trailing edge side; and a joining member joined to the groove portion, the joining member being formed of an erosion-resistance material.

Abstract: A polishing apparatus and a polishing method capable of detecting whether a polishing tool has been brought into contact with a substrate, such as a wafer, and further capable of detecting a position of the polishing tool are disclosed. The polishing apparatus includes a substrate holder configured to hold a substrate, a pressing member configured to press a polishing tool against a surface of the substrate, an actuator configured to apply a pressing force to the pressing member, a motor-drive moving device configured to move the pressing member along the surface of the substrate, and a monitoring device configured to emit an alarm if a motor current supplied to the motor-drive moving device is smaller than a threshold value.

Abstract: According to an embodiment, a method of correcting a bend of a joint type-turbine rotor comprises: measuring displacement of a convex portion of the bend at a joined portion of the joint type-turbine rotor or displacement of a surface opposite to the convex portion in a circumferential direction of the joint type-turbine rotor; heating the convex portion; and cooling the joined portion after the step of heating. The steps of heating and cooling are performed during the step of measuring.

Abstract: An optical measuring device includes: a light source unit; a measurement probe including a fiber bundle, an illumination fiber that illuminates a living tissue with a illumination light, and a plurality of light-receiving fibers that receives return light of the illumination light reflected and/or scattered at the living tissue; a detection unit that receives the return light of the illumination light detected by the plurality of respective light-receiving fibers, and performs photoelectric conversion to detect respective signal intensities; and an association unit that associates the respective signal intensities detected by the detection unit with distances from the illumination fiber to the respective light-receiving fibers on an end face of a distal end portion of the measurement probe, when light having an intensity gradient around the illumination fiber is projected to the end face of the distal end portion of the measurement probe.

Abstract: A polishing apparatus and a polishing method capable of detecting whether a polishing tool has been brought into contact with a substrate, such as a wafer, and further capable of detecting a position of the polishing tool are disclosed. The polishing apparatus includes a substrate holder configured to hold a substrate, a pressing member configured to press a polishing tool against a surface of the substrate, an actuator configured to apply a pressing force to the pressing member, a motor-drive moving device configured to move the pressing member along the surface of the substrate, and a monitoring device configured to emit an alarm if a motor current supplied to the motor-drive moving device is smaller than a threshold value.

Abstract: A calibrator calibrates optical characteristics of an optical measurement apparatus in water by inserting a measurement probe connected to the optical measurement apparatus into the calibrator. The optical measurement apparatus is configured to perform optical measurement on body tissue. The calibrator includes: an accommodation portion that has an opening at one end thereof and accommodates the water, a distal end of the measurement probe being configured to be inserted into the accommodation portion; and a removing unit that is arranged in the water and is configured to remove a substance adhered to the distal end of the measurement probe inserted into the accommodation portion.

Abstract: A steam turbine 3 includes: a turbine rotor 4; a rotor blade 5 implanted to the turbine rotor 4; a stator blade 6 provided at an upstream side of the rotor blade 5; and a turbine casing 13 supporting the stator blade 6 and including the turbine rotor 4, the rotor blade 5 and the stator blade 6, and have a constitution in which a stage 7 is formed by a pair of the rotor blade 5 and the stator blade 6, and a steam passage 8 is formed by arranging plural stages 7 in an axial direction of the turbine rotor 4. A surface treatment to suppress an increase of a surface roughness caused by oxidation is performed for at least a part of a surface of the stator blade 6 and a surface of the rotor blade 5.

Abstract: An endoscope system includes: an endoscope with a unit to be inserted into a subject and captures an inside image of the subject by an imaging unit provided in the unit to generate an image signal; an optical apparatus including a measurement probe to be inserted into the subject through the unit; an endoscope unit that switches between observation light of a plurality of wavelengths and outputs the observation light to observe a target object from the unit; a probe unit that outputs measurement light to measure characteristics of the target object via the measurement probe; a light unit that receives return light via the measurement probe, the return light caused by reflection and/or scattering of the measurement light on the target object; and a switching unit that switches a wavelength band of the measurement light to a different wavelength band from the observation light outputted by the endoscope unit.

Abstract: A medical apparatus is detachably connected with a disposable medical device to be inserted into a subject, and performs a specified treatment. The medical apparatus includes an alteration unit that performs an alteration process of altering the medical device, and a control unit that causes the alteration unit to perform the alteration process at the end of the treatment by the medical apparatus.

Abstract: A probe includes a plurality of optical fibers that includes an irradiation fiber and a light-receiving fiber; and an optical member of which a base end face is arranged to abut on leading end faces of the optical fibers, and a leading end face is exposed to an outer side. The leading end face of the optical member is perpendicular to a longitudinal direction of the probe. Light emitted from the irradiation fiber passes through a path inclined with respect to a perpendicular line of the leading end face.

Abstract: A measurement probe includes a fiber configured to propagate light to irradiate a target to be measured and receive scattered light returned from the target to be measured, an immersion adjustment mechanism configured to communicate outside of the measurement probe with inside of the measurement probe and adjust entrance of liquid from the outside into the measurement probe, and an alteration mechanism configured to alter the fiber by the liquid that has entered into the measurement probe.

Abstract: An optical measuring device includes: a light source unit; a measurement probe including a fiber bundle, an illumination fiber that illuminates a living tissue with a illumination light, and a plurality of light-receiving fibers that receives return light of the illumination light reflected and/or scattered at the living tissue; a detection unit that receives the return light of the illumination light detected by the plurality of respective light-receiving fibers, and performs photoelectric conversion to detect respective signal intensities; and an association unit that associates the respective signal intensities detected by the detection unit with distances from the illumination fiber to the respective light-receiving fibers on an end face of a distal end portion of the measurement probe, when light having an intensity gradient around the illumination fiber is projected to the end face of the distal end portion of the measurement probe.

Abstract: A measurement probe is detachably connected to a bio-optical measurement apparatus which performs optical measurement on body tissue. The measurement probe includes two illumination fibers configured to irradiate the body tissue with low coherent light having a short spatial coherence length, and three or more light-receiving fibers configured to receive scattered light at multiple angles. The three or more light-receiving fibers are arranged on a perpendicular bisector of a line segment connecting centers of the two illumination fibers at a distal end surface of the measurement probe.

Abstract: A plating apparatus can form a bump having a flat top or can form a metal film having a good in-plane uniformity even when the plating of a plating object (substrate) is carried out under high-current density conditions. The plating apparatus includes a plating tank for holding a plating solution; an anode to be immersed in the plating solution in the plating tank; a holder for holding a plating object and disposing the plating object at a position opposite the anode; a paddle, disposed between the anode and the plating object held by the holder, which reciprocates parallel to the plating object to stir the plating solution; and a control section for controlling a paddle drive section which drives the paddle. The control section controls the paddle drive section so that the paddle moves at a velocity whose average absolute value is 70 cm/sec to 100 cm/sec.