Abstract: The present disclosure provides a method, which includes forming a first fin structure and a second fin structure over a substrate, which has a first trench positioned between the first and second fin structures. The method also includes forming a first dielectric layer within the first trench, recessing the first dielectric layer to expose a portion of the first fin structure, forming a first capping layer over the exposed portion of the first fin structure and the recessed first dielectric layer in the first trench, forming a second dielectric layer over the first capping layer in the first trench while the first capping layer covers the exposed portion of the first fin feature and removing the first capping layer from the first fin structure.

Abstract: A semiconductor device includes a first device fin and a second device fin. A first source/drain component is epitaxially grown over the first device fin. A second source/drain component is epitaxially grown over the second device fin. A first dummy fin structure is disposed between the first device fin and the second device fin. A gate structure partially wraps around the first device fin, the second device fin, and the first dummy fin structure. A first portion of the first dummy fin structure is disposed between the first source/drain component and the second source/drain component and outside the gate structure. A second portion of the first dummy fin structure is disposed underneath the gate structure. The first portion of the first dummy fin structure and the second portion of the first dummy fin structure have different physical characteristics.

Abstract: A method for forming a FinFET device structure includes forming a first fin structure in a core region of a substrate and a second fin structure in an input/output region of the substrate with a fin top layer and a hard mask layer over the fin structures. The method also includes forming a dummy oxide layer across the fin structures. The method also includes forming a dummy gate structure over the dummy oxide layer. The method also includes removing the dummy gate structure over fin structures. The method also includes removing the dummy oxide layer and trimming the fin structures. The method also includes forming first and second oxide layers across the first and second fin structures. The method also includes forming first and second gate structures over the first and second oxide layers across the first and second fin structures.

Abstract: Examples of an integrated circuit with FinFET devices and a method for forming the integrated circuit are provided herein. In some examples, an integrated circuit device includes a substrate, a fin extending from the substrate, a gate disposed on a first side of the fin, and a gate spacer disposed alongside the gate. The gate spacer has a first portion extending along the gate that has a first width and a second portion extending above the first gate that has a second width that is greater than the first width. In some such examples, the second portion of the gate spacer includes a gate spacer layer disposed on the gate.

Abstract: Methods are disclosed herein for fabricating integrated circuit devices, such as fin-like field-effect transistors (FinFETs). An exemplary method includes forming a first semiconductor material layer over a fin portion of a substrate; forming a second semiconductor material layer over the first semiconductor material layer; and converting a portion of the first semiconductor material layer to a first semiconductor oxide layer. The fin portion of the substrate, the first semiconductor material layer, the first semiconductor oxide layer, and the second semiconductor material layer form a fin. The method further includes forming a gate stack overwrapping the fin.

Abstract: A semiconductor device includes a substrate, a first semiconductor fin and a second semiconductor fin, a gate structure, a shallow trench isolation (STI) oxide, and a dielectric layer. The first semiconductor fin and a second semiconductor fin extend upwardly from the substrate. The gate structure extends across the first and second semiconductor fins. The shallow trench isolation (STI) oxide has a horizontal portion extending along a top surface of the substrate and vertical portions extending upwardly from the horizontal portion along the first and second semiconductor fins. The dielectric layer has a horizontal portion extending along a top surface of the horizontal portion of the STI oxide and vertical portions extending upwardly from the horizontal portion of the dielectric layer to a position higher than top ends of the vertical portions of the STI oxide.

Abstract: The present disclosure provides a method for fabricating an integrated circuit device. The method includes providing a precursor including a substrate having first and second metal-oxide-semiconductor (MOS) regions. The first and second MOS regions include first and second gate regions, semiconductor layer stacks, and source/drain regions respectively. The method further includes laterally exposing and oxidizing the semiconductor layer stack in the first gate region to form first outer oxide layer and inner nanowire set, and exposing the first inner nanowire set. A first high-k/metal gate (HK/MG) stack wraps around the first inner nanowire set. The method further includes laterally exposing and oxidizing the semiconductor layer stack in the second gate region to form second outer oxide layer and inner nanowire set, and exposing the second inner nanowire set. A second HK/MG stack wraps around the second inner nanowire set.

Abstract: A semiconductor device includes a substrate, a first dielectric fin, a second dielectric fin, a semiconductor fin, an epitaxy structure, and a metal gate structure. The first dielectric fin and the second dielectric fin disposed over the substrate. The semiconductor fin is disposed over the substrate, in which the semiconductor fin is between the first dielectric fin and the second dielectric fin. The epitaxy structure covers at least two surfaces of the semiconductor fin, in which the epitaxy structure is in contact with the first dielectric fin and is separated from the second dielectric fin. The metal gate structure crosses the first dielectric fin, the second dielectric fin, and the semiconductor fin.

Abstract: A semiconductor device includes a first transistor having a first gate structure and a first source/drain feature adjacent to the first gate structure. The semiconductor device further includes a second transistor having a second gate structure and a second source/drain feature adjacent to the second gate structure. In some examples, the semiconductor device further includes a hybrid poly layer disposed between the first transistor and the second transistor. The hybrid poly layer is adjacent to and in contact with each of the first source/drain feature and the second source/drain feature, and the hybrid poly layer provides isolation between the first transistor and the second transistor.

Abstract: Integrated circuit devices, such as fin-like field effect transistors, and methods of fabricating thereof are disclosed herein. An exemplary device includes a fin that includes a first semiconductor layer and a second semiconductor layer disposed on the first semiconductor layer. The second semiconductor layer includes a partially oxidized portion and a completely oxidized portion. A third semiconductor layer is disposed on the partially oxidized portion of the second semiconductor layer, where a source region and a drain region are defined in the third semiconductor layer. A fourth semiconductor layer is disposed on the completely oxidized portion of the second semiconductor layer, where a channel region is defined in the fourth semiconductor layer between the source region and the drain region defined in the third semiconductor layer. A gate structure is disposed over the channel region defined in the fourth semiconductor layer of the fin.

Abstract: A semiconductor device includes a semiconductor fin, a gate structure, and a dielectric isolation plug. The semiconductor fin extends along a first direction above a substrate and includes a silicon germanium layer and a silicon layer over the silicon germanium layer. The gate structure extends across the semiconductor fin along a second direction perpendicular to the first direction. The dielectric isolation plug extends downwardly from a top surface of the silicon layer into the silicon germanium layer when viewed in a cross section taken along the first direction.

Abstract: Aspects of the disclosure provide a semiconductor device and a method for forming the semiconductor device. The semiconductor device includes a first transistor formed in a first region of the semiconductor device. The first transistor includes a first channel structure extending between a source terminal and a drain terminal of the first transistor. The first transistor includes a second channel structure that is stacked on the first channel structure in a vertical direction above a substrate of the semiconductor device. Further, the first transistor includes a first gate structure configured to wrap around the first channel structure and the second channel structure with a first metal cap between the first channel structure and the second channel structure. The first metal cap has a different work function from another portion of the first gate structure.

Abstract: In one example, a semiconductor device includes a substrate, a first elongated fin structure disposed on the substrate, and a second elongated fin structure disposed on the substrate. The longitudinal axis of the first elongated fin structure is aligned with a longitudinal axis of the second elongated fin structure. The device further includes a dummy structure extending between the first elongated fin structure and the second elongated fin structure. The dummy structure includes a dielectric material.

Abstract: A semiconductor device includes a plurality of nanostructures. The nanostructures each contain a semiconductive material. A plurality of first spacers circumferentially wrap around the nanostructures. A plurality of second spacers circumferentially wrap around the first spacers. A plurality of third spacers is disposed between the second spacers vertically. A gate structure surrounds the second spacers and the third spacers.

Abstract: Examples of an integrated circuit with gate cut features and a method for forming the integrated circuit are provided herein. In some examples, a workpiece is received that includes a substrate and a plurality of fins extending from the substrate. A first layer is formed on a side surface of each of the plurality of fins such that a trench bounded by the first layer extends between the plurality of fins. A cut feature is formed in the trench. A first gate structure is formed on a first fin of the plurality of fins, and a second gate structure is formed on a second fin of the plurality of fins such that the cut feature is disposed between the first gate structure and the second gate structure.

Abstract: A semiconductor device has a substrate, a first dielectric fin, and an isolation structure. The substrate has a first semiconductor fin. The first dielectric fin is disposed over the substrate and in contact with a first sidewall of the first semiconductor fin, in which a width of the first semiconductor fin is substantially equal to a width of the first dielectric fin. The isolation structure is in contact with the first semiconductor fin and the first dielectric fin, in which a top surface of the isolation structure is in a position lower than a top surface of the first semiconductor fin and a top surface of the first dielectric fin.

Abstract: An integrated circuit (IC) device comprises a substrate having a metal-oxide-semiconductor (MOS) region; a gate region disposed over the substrate and in the MOS region; and source/drain features in the MOS region and separated by the gate region. The gate region includes a fin structure and a nanowire over the fin structure. The nanowire extends from the source feature to the drain feature.

Abstract: A method includes receiving a substrate; forming on the substrate a semiconductor fin; an isolation structure surrounding the semiconductor fin; and first and second dielectric fins above the isolation structure and sandwiching the semiconductor fin; depositing a spacer feature filling spaces between the semiconductor fin and the first and second dielectric fins; performing an etching process to recess the semiconductor fin, resulting in a trench between portions of the spacer feature; and epitaxially growing a semiconductor material in the trench.

Abstract: Methods for manufacturing semiconductor structures are provided. The method includes alternately stacking first epitaxy layers and second epitaxy layers to form a semiconductor stack and forming a first mask structure and a second mask structure over the semiconductor stack. The method further includes forming spacers on sidewalls of the second mask and patterning the semiconductor stack to form a first fin structure covered by the first mask structure and a second fin structure covered by the second mask structure and the spacers. The method further includes removing the first epitaxy layers of the first fin structure to form first nanostructures and removing the first epitaxy layers of the second fin structure to form second nanostructures. In addition, the second nanostructures are wider than the first nanostructures.

Abstract: A finFET device having a substrate and a fin disposed on the substrate. The fin includes a passive region, a stem region overlying the passive region, and an active region overlying the stem region. The stem region has a first width and the active region has a second width. The first width is less than the second width. The stem region and the active region also have different compositions. A gate structure is disposed on the active region.