Patents by Inventor Kuo Feng

Kuo Feng has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11908953
    Abstract: A manufacturing method of a memory device are provided. The method includes following steps. A gate stacking structure is formed over a substrate. A first insulating layer, a second insulating layer and a mask material layer are sequentially formed over the substrate to cover the gate stacking structure. An ion implantation process is performed on the mask material layer to form a doped portion in the mask material layer. The doped portion caps on a top portion of the gate stacking structure. A first patterning process is performed on the mask material layer using the doped portion as a shadow mask to remove a bottom portion of the mask material layer extending along a surface of the substrate. A second patterning process is performed to remove the doped portion of the mask material layer and an exposed bottom portion of the second insulating layer surrounding the gate stacking structure.
    Type: Grant
    Filed: December 15, 2022
    Date of Patent: February 20, 2024
    Assignee: Winbond Electronics Corp.
    Inventors: Che-Jui Hsu, Ying-Fu Tung, Chun-Sheng Lu, Kuo-Feng Huang, Yu-Chi Kuo, Wang-Ta Li
  • Patent number: 11908745
    Abstract: A semiconductor device includes a first semiconductor layer below a second semiconductor layer; first and second gate dielectric layers surrounding the first and the second semiconductor layers, respectively; and a gate electrode surrounding both the first and the second gate dielectric layers. The first gate dielectric layer has a first top section above the first semiconductor layer and a first bottom section below the first semiconductor layer. The second gate dielectric layer has a second top section above the second semiconductor layer and a second bottom section below the second semiconductor layer. The first top section has a first thickness. The second top section has a second thickness. The second thickness is greater than the first thickness.
    Type: Grant
    Filed: March 13, 2023
    Date of Patent: February 20, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Yung-Hsiang Chan, Wen-Hung Huang, Shan-Mei Liao, Jian-Hao Chen, Kuo-Feng Yu, Kuei-Lun Lin
  • Patent number: 11899223
    Abstract: An optical device is provided. The optical device has a central region and a first-type region surrounding the central region. The first-type region includes a first sub-region and a second sub-region between the central region and the first sub-region. The optical device includes a substrate. The optical device also includes a meta-structure disposed on the substrate. The meta-structure includes first pillars in the first sub-region and second pillars in the second sub-region. In the cross-sectional view of the optical device along the radial direction of the optical device, two adjacent first pillars have a first pitch, two adjacent second pillars have a second pitch, and the second pitch is greater than the first pitch.
    Type: Grant
    Filed: May 24, 2021
    Date of Patent: February 13, 2024
    Assignee: VISERA TECHNOLOGIES COMPANY LIMITED
    Inventors: Kuo-Feng Lin, Yu-Ping Tseng, Chin-Chuan Hsieh
  • Publication number: 20240044820
    Abstract: Disclosed herein is an apparatus comprising: a source configured to emit charged particles, an optical system and a stage; wherein the stage is configured to support a sample thereon and configured to move the sample by a first distance in a first direction; wherein the optical system is configured to form probe spots on the sample with the charged particles; wherein the optical system is configured to move the probe spots by the first distance in the first direction and by a second distance in a second direction, simultaneously, while the stage moves the sample by the first distance in the first direction; wherein the optical system is configured to move the probe spots by the first distance less a width of one of the probe spots in an opposite direction of the first direction, after the stage moves the sample by the first distance in the first direction.
    Type: Application
    Filed: October 10, 2023
    Publication date: February 8, 2024
    Applicant: ASML Netherlands B.V.
    Inventors: Kuo-Feng TSENG, Zhonghua DONG, Yixiang WANG, Zhong-wei CHEN
  • Patent number: 11894276
    Abstract: A method includes providing a structure having a first channel member and a second channel member over a substrate. The first channel member is located in a first region of the structure and the second channel member is located in a second region of the structure. The method also includes forming a first oxide layer over the first channel member and a second oxide layer over the second channel member, forming a first dielectric layer over the first oxide layer and a second dielectric layer over the second oxide layer, and forming a capping layer over the second dielectric layer but not over the first dielectric layer. The method further includes performing an annealing process to increase a thickness of the second oxide layer under the capping layer.
    Type: Grant
    Filed: August 30, 2021
    Date of Patent: February 6, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chih-Wei Lee, Wen-Hung Huang, Kuo-Feng Yu, Jian-Hao Chen, Hsueh-Ju Chen, Zoe Chen
  • Publication number: 20240022010
    Abstract: An electrical connector structure with high performance to support a new generation hardware structure for high-frequency signal transmission is illustrated. In one of the terminal slots of an upper row and a lower row, there are paired differential signal terminals and two ground terminals, by making the paired differential signal terminals not completely isolated to each other and making the two ground terminals adjacent to the paired differential signal terminals not completely isolated to the differential signal terminals respectively, the two differential signal terminals can efficiently transmit the high-frequency signals at a high speed. Moreover, by disposing the rib on the wall surface and by effectively widening the widths of the conductive terminals and shortening the lengths of the conductive terminals, the impendences which the conductive terminals are exposed to the air can be reduced.
    Type: Application
    Filed: February 6, 2023
    Publication date: January 18, 2024
    Inventor: CHIH-KUO FENG
  • Patent number: 11875079
    Abstract: An indication icon sharing method of multi-screens, applied to a first screen and a second screen, comprising: (a) performing a first trigger action by a first control device; (b) displaying a first indication icon at a first location on the first screen corresponding to the first trigger action; and (c) displaying the first indication icon on the second screen.
    Type: Grant
    Filed: October 14, 2021
    Date of Patent: January 16, 2024
    Assignee: ATEN INTERNATIONAL CO., LTD.
    Inventor: Kuo-Feng Kao
  • Publication number: 20240014279
    Abstract: A method of forming a semiconductor device includes forming a fin over a substrate, the fin comprising alternately stacking first semiconductor layers and second semiconductor layers, removing the first semiconductor layers to form spaces each between the second semiconductor layers, forming a gate dielectric layer wrapping around each of the second semiconductor layers, forming a fluorine-containing layer on the gate dielectric layer, performing an anneal process to drive fluorine atoms from the fluorine-containing layer into the gate dielectric layer, removing the fluorine-containing layer, and forming a metal gate on the gate dielectric layer.
    Type: Application
    Filed: July 5, 2022
    Publication date: January 11, 2024
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Hsin-Yi LEE, Shan-Mei LIAO, Kuo-Feng YU, Da-Yuan LEE, Weng CHANG, Chi On CHUI
  • Patent number: 11855208
    Abstract: A method for forming a FinFET device structure is provided. The method includes forming a fin structure extended above a substrate and forming a gate structure formed over a portion of the fin structure. The method also includes forming a source/drain (S/D) structure over the fin structure, and the S/D structure is adjacent to the gate structure. The method further includes doping an outer portion of the S/D structure to form a doped region, and the doped region includes gallium (Ga). The method includes forming a metal silicide layer over the doped region; and forming an S/D contact structure over the metal silicide layer.
    Type: Grant
    Filed: June 11, 2020
    Date of Patent: December 26, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chun-Hsiung Tsai, Shahaji B. More, Cheng-Yi Peng, Yu-Ming Lin, Kuo-Feng Yu, Ziwei Fang
  • Patent number: 11855176
    Abstract: Semiconductor structures are provided. The semiconductor structure includes a fin structure protruding from a substrate and a doped region formed in the fin structure. The semiconductor structure further includes a metal gate structure formed across the fin structure and a gate spacer formed on a sidewall of the metal gate structure. The semiconductor structure further includes a source/drain structure formed over the doped region. In addition, the doped region continuously surrounds the source/drain structure and is in direct contact with the gate spacer.
    Type: Grant
    Filed: August 17, 2020
    Date of Patent: December 26, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Shahaji B. More, Chun-Hsiung Tsai, Cheng-Yi Peng, Shih-Chieh Chang, Kuo-Feng Yu
  • Publication number: 20230411220
    Abstract: Semiconductor device and the manufacturing method thereof are disclosed. An exemplary semiconductor device comprises a first semiconductor stack and a second semiconductor stack over a substrate, wherein each of the first and second semiconductor stacks includes semiconductor layers stacked up and separated from each other; a dummy spacer between the first and second semiconductor stacks, wherein the dummy spacer contacts a first sidewall of each semiconductor layer of the first and second semiconductor stacks; and a gate structure wrapping a second sidewall, a top surface, and a bottom surface of each semiconductor layer of the first and second semiconductor stacks.
    Type: Application
    Filed: July 24, 2023
    Publication date: December 21, 2023
    Inventors: Chih-Yu Hsu, Jian-Hao Chen, Chia-Wei Chen, Shan-Mei Liao, Hui-Chi Chen, Cheng Hong Yang, Shih-Hao Lin, Kuo-Feng Yu, Feng-Cheng Yang, Yen-Ming Chen
  • Patent number: 11845193
    Abstract: A cross laser calibration device used to calibrate a tool center point is provided. The calibration device includes a coordinate orifice plate, a set of cross laser sensors and a rotational and translational movement mechanism. The coordinate orifice plate has an orifice center point. The set of cross laser sensors is arranged on the coordinate orifice plate to generate cross laser lines intersecting at the orifice center point. The set of cross laser sensors is driven by the second motor to rotate around the center point of the second motor, wherein the orifice center point has an off-axis setting relative to the center point of the second motor.
    Type: Grant
    Filed: December 27, 2021
    Date of Patent: December 19, 2023
    Assignee: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
    Inventors: Sheng-Chieh Hsu, Sheng-Han Hsieh, Mou-Tung Hsieh, Tien-Yun Chi, Kuo-Feng Hung
  • Publication number: 20230395432
    Abstract: Semiconductor structures and methods are provided. An exemplary method according to the present disclosure includes providing a workpiece comprising a first channel member directly over a first region of a substrate and a second channel member directly over the first channel member, the first channel member being vertically spaced apart from the second channel member, conformally forming a dielectric layer over the workpiece, conformally depositing a dipole material layer over the dielectric layer, after the depositing of the dipole material layer, performing a thermal treatment process to the workpiece, after the performing of the thermal treatment process, selectively removing the dipole material layer, and forming a gate electrode layer over the dielectric layer.
    Type: Application
    Filed: June 4, 2022
    Publication date: December 7, 2023
    Inventors: Chien-Yuan Chen, Kuo-Feng Yu, Jian-Hao Chen, Chih-Yu Hsu, Yao-Teng Chuang, Shan-Mei Liao
  • Publication number: 20230395435
    Abstract: A method includes providing a structure having a first stack of nanostructures spaced vertically one from another and a second stack of nanostructures spaced vertically one from another, forming a dielectric layer wrapping around each of the nanostructures in the first and second stacks, depositing an n-type work function layer on the dielectric layer and a p-type work function layer on the n-type work function layer and over the first and second stacks. The n-type work function layer wraps around each of the nanostructures in the first stack. The p-type work function layer wraps around each of the nanostructures in the second stack. The method also includes forming an electrode layer on the p-type work function layer and over the first and second stacks.
    Type: Application
    Filed: June 5, 2022
    Publication date: December 7, 2023
    Inventors: Chih-Wei Lee, Jo-Chun Hung, Wen-Hung Huang, Jian-Hao Chen, Kuo-Feng Yu
  • Publication number: 20230395598
    Abstract: A sacrificial layer is formed over a first channel structure of an N-type transistor (NFET) and over a second channel structure of a P-type transistor (PFET). A PFET patterning process is performed at least in part by etching away the sacrificial layer in the PFET while protecting the NFET from being etched. After the PFET patterning process has been performed, a P-type work function (WF) metal layer is deposited in both the NFET and the PFET. An NFET patterning process is performed at least in part by etching away the P-type WF metal layer and the sacrificial layer in the NFET while protecting the PFET from being etched. After the NFET patterning process has been performed, an N-type WF metal layer is deposited in both the NFET and the PFET.
    Type: Application
    Filed: June 4, 2022
    Publication date: December 7, 2023
    Inventors: Jo-Chun Hung, Chih-Wei Lee, Wen-Hung Huang, Hui-Chi Chen, Jian-Hao Chen, Kuo-Feng Yu, Hsin-Han Tsai, Yin-Chuan Chuang, Yu-Ling Cheng, Yu-Xuan Wang, Tefu Yeh
  • Publication number: 20230389256
    Abstract: A transistor includes a gate structure that has a first gate dielectric layer and a second gate dielectric layer. The first gate dielectric layer is disposed over the substrate. The first gate dielectric layer contains a first type of dielectric material that has a first dielectric constant. The second gate dielectric layer is disposed over the first gate dielectric layer. The second gate dielectric layer contains a second type of dielectric material that has a second dielectric constant. The second dielectric constant is greater than the first dielectric constant. The first dielectric constant and the second dielectric constant are each greater than a dielectric constant of silicon oxide.
    Type: Application
    Filed: August 9, 2023
    Publication date: November 30, 2023
    Inventors: Chih-Yu Hsu, Jian-Hao Chen, Chia-Wei Chen, Shan-Mei Liao, Hui-Chi Chen, Yu-Chia Liang, Shih-Hao Lin, Kuei-Lun Lin, Kuo-Feng Yu, Feng-Cheng Yang, Yen-Ming Chen
  • Publication number: 20230387233
    Abstract: In a method of manufacturing a semiconductor device, a gate space is formed by removing a sacrificial gate electrode formed over a channel region, a first gate dielectric layer is formed over the channel region in the gate space, a second gate dielectric layer is formed over the first gate dielectric layer, one or more conductive layers is formed on the second gate dielectric layer, the second gate dielectric layer and the one or more conductive layers are recessed, an annealing operation is performed to diffuse an element of the second gate dielectric layer into the first gate dielectric layer, and one or more metal layers are formed in the gate space.
    Type: Application
    Filed: May 24, 2022
    Publication date: November 30, 2023
    Inventors: Yung-Hsiang CHAN, An-Hung TAI, Hui-Chi CHEN, J.F. CHUEH, Yen-Ta LIN, Ming-Chi HUANG, Cheng-Chieh TU, Jian-Hao CHEN, Kuo-Feng YU
  • Publication number: 20230386926
    Abstract: A dummy gate electrode and a dummy gate dielectric are removed to form a recess between adjacent gate spacers. A gate dielectric is deposited in the recess, and a barrier layer is deposited over the gate dielectric. A first work function layer is deposited over the barrier layer. A first anti-reaction layer is formed over the first work function layer, the first anti-reaction layer reducing oxidation of the first work function layer. A fill material is deposited over the first anti-reaction layer.
    Type: Application
    Filed: August 2, 2023
    Publication date: November 30, 2023
    Inventors: Chia-Ching Lee, Hsin-Han Tsai, Shih-Hang Chiu, Tsung-Ta Tang, Chung-Chiang Wu, Hung-Chin Chung, Hsien-Ming Lee, Da-Yuan Lee, Jian-Hao Chen, Chien-Hao Chen, Kuo-Feng Yu, Chia-Wei Chen, Chih-Yu Hsu
  • Patent number: 11822735
    Abstract: An electronic device and a method of controlling multiple pieces of equipment are provided. The electronic device is coupled to an operating device, a first controlled device and a second controlled device. The electronic device includes an operating interface and a controlled interface. The operating interface is coupled to the operating device. The operating device includes a first operating area and a second operating area. The first operating area is configured to deliver a first operating signal. The second operating area is configured to deliver a second operating signal. The controlled interface is coupled to the first controlled device and the second controlled device. The first controlled device is controlled by the first operating signal. The second controlled device is controlled by the second operating signal.
    Type: Grant
    Filed: July 8, 2022
    Date of Patent: November 21, 2023
    Assignee: Aten International Co., Ltd.
    Inventors: Pei-Chun Lai, Kuo-Feng Kao, Chia-Hao Chen
  • Publication number: 20230371275
    Abstract: A semiconductor device according to the present disclosure includes a first conductive feature and a second conductive feature in a first dielectric layer, a buffer layer over the first dielectric layer, a second dielectric layer over the buffer layer, a first bottom via extending through the buffer layer and the second dielectric layer, a second bottom via extending through the buffer layer and the second dielectric layer, a first bottom electrode disposed on the first bottom via, a second bottom electrode disposed on the second bottom via, a first magnetic tunnel junction (MTJ) stack over the first bottom electrode, and a second MTJ stack over the second bottom electrode. The first MTJ stack and the second MTJ stack have a same thickness. The first MTJ stack has a first width and the second MTJ stack has a second width greater than the first width.
    Type: Application
    Filed: August 3, 2022
    Publication date: November 16, 2023
    Inventors: Yu-Jen Wang, Sheng-Huang Huang, Harry-Hak-Lay Chuang, Hung Cho Wang, Ching-Huang Wang, Kuo-Feng Huang