Abstract: Provided is a MEMS acoustic sensor including a substrate and a cavity, a back plate supported on the substrate and including a plurality of through-holes, at least one anchor projecting from the back plate toward the substrate, and a diaphragm supported by the at least one anchor and deformed by a sound wave introducing from the outside through the cavity, wherein no part of the deformed diaphragm comes into contact with the substrate.

Abstract: Provided is a MEMS acoustic sensor including a substrate and a cavity, a back plate supported on the substrate and including a plurality of through-holes, at least one anchor projecting from the back plate toward the substrate, and a diaphragm supported by the at least one anchor and deformed by a sound wave introducing from the outside through the cavity, wherein no part of the deformed diaphragm comes into contact with the substrate.

Abstract: A fuel supply apparatus of a liquefied gas carrier includes: a compressor for compressing gas fuel into a high pressure; a compressed gas storage tank being filled with the compressed high-pressure gas fuel, for storing the gas fuel; and a decompressor for decompressing the high-pressure gas fuel drawn from the compressed gas storage tank into a pressure suitable to be used in a propulsion system, to supply fuel to the propulsion system. The gas fuel is at least one of a natural boiled-off gas which is naturally evaporated in the cargo tank, a forced boiled-off gas which is artificially evaporated, and a gas additionally supplied for the use of fuel. Further, the compressor is a multistage high-pressure compressor and the decompressor is a multistage decompressor.

Abstract: Provided are an initiator and a method for debonding a wafer supporting system. The initiator for debonding a wafer supporting system includes a rotation chuck having an upper surface on which a wafer supporting system (WSS), which includes a carrier wafer, a device wafer, and a glue layer for bonding the carrier wafer and the device wafer to each other, is seated to rotate the wafer supporting system, a detecting module detecting a height and a thickness of the glue layer and a laser module generating a fracture portion on the glue layer through irradiating a side surface of the glue layer with a laser on the basis of the height and the thickness of the glue layer.

Abstract: The variable liquid device includes: a chamber including a channel, in which a fluid flows, having an inconsistent height in at least a part of the channel; a first fluid filled in the chamber and formed of a non-transmissive material; and a second fluid filled in the chamber and formed of a light transmittable material that does not mix with the first fluid, wherein an aperture, through which light is transmitted, is adjusted according to a variation of an interface between the first fluid and the second fluid.

Abstract: Exemplary embodiments disclose an optical zoom probe including an aperture adjuster configured to adjust an aperture in which light transmitted by a light transmitter passes, a focus adjuster configured to focus the light passed through the aperture and adjust a focal length to an ultra-close location and a close location, and a filter which includes a center region in which incident light passes without change, and a filter region which surrounds the center region and increases a depth of focus (DOF) of light that is focused on the ultra-close location.

Abstract: An aperture adjusting apparatus is provided. The aperture adjusting apparatus includes: a variable part of which an aperture size varies; an optical sensor configured to sense light incident to the variable device part and light output from the variable device part; an aperture calculator configured to calculate a size of an aperture formed in the variable part from light intensity sensed by the optical sensor; and a driving controller configured to control driving of the variable device part by receiving a calculation result fed back from the aperture calculator.

Abstract: A numerical aperture (NA) controlling unit and a variable optical probe including the same are provided. The NA controlling unit includes: an aperture adjustment unit which controls an aperture through which light is transmitted; and a focus control unit that is disposed in a predetermined position with respect to the aperture adjustment unit, that focuses light transmitted through the aperture, and that has an adjustable focal length. The variable optical probe includes: a light transmission unit; a collimator that collimates light transmitted through the light transmission unit into parallel light; an NA controlling unit that focuses light on a sample to be inspected; and a scanner that varies a path of light transmitted through the light transmission unit such that a predetermined region of the sample is scanned by light that passes through the NA controlling unit.

Abstract: A microfluidic device and a method of controlling a fluid included in the microfluidic device. The microfluidic device includes: a chamber; a first fluid that is disposed in the chamber and in which a hygroscopic material is dissolved; a second fluid that is disposed in the chamber and is immiscible with the first fluid; and an electrode portion provide in the chamber and is configured to form an electrical field in the chamber when a voltage is applied to the electrode portion, wherein an interface between the first and second fluids is varied according to the electrical field.

Abstract: An optical zoom probe is provided. The optical zoom probe includes: an aperture adjuster which adjusts an aperture through which light which is transmitted by a light transmitter propagates; and a focus adjuster which focuses light that propagates through the aperture and which includes first and second liquid lenses for each of which respective curvatures are independently controlled so as to adjust a respective focal length.

Abstract: An optical apparatus such as a varifocal fluidic lens is provided. Optical apparatus includes a spacer frame, optical fluid, an elastic membrane, an actuator, an actuator frame, and a thermally deformable frame. Spacer frame defines an internal space including a lens portion and a driving portion that connect to each other, and the driving portion is disposed to surround the lens portion disposed in the center area of the internal space. Optical fluid is filled in the internal space defined by the spacer frame. The elastic membrane is attached on a surface of the spacer frame, to cover a side of the internal space, and the thermally deformable plate is attached on the other surface of the spacer frame, to cover the other side of the internal space. The thermally deformable plate deforms to increase or decrease a volume of the internal space according to a change in temperature.

Abstract: Provided are an initiator and a method for debonding a wafer supporting system. The initiator for debonding a wafer supporting system includes a rotation chuck having an upper surface on which a wafer supporting system (WSS), which includes a carrier wafer, a device wafer, and a glue layer for bonding the carrier wafer and the device wafer to each other, is seated to rotate the wafer supporting system, a detecting module detecting a height and a thickness of the glue layer and a laser module generating a fracture portion on the glue layer through irradiating a side surface of the glue layer with a laser on the basis of the height and the thickness of the glue layer.

Abstract: A retainer for a wafer carrier comprising: a body including a plurality of slots configured to receive side surfaces of wafers; and for each of the slots, a supporting structure formed on a sidewall of the slot and configured to make contact with the side surfaces of a corresponding wafer, the supporting structure being spaced apart from an upper corner of the side surface of the corresponding wafer.

Abstract: Provided is an aperture adjusting apparatus for adjusting an aperture through which light transmits. The aperture adjusting apparatus includes: a chamber configured to have space in which fluid flows, the chamber including a lower channel, an upper channel, and a plurality of reservoir regions connecting the lower channel and the upper channel and each having a non-uniform width crossing a flow direction of a fluid to form a space in which fluid flows; a photo-interceptive first fluid and a photo-transmissive second fluid having a property that the photo-transmissive second fluid does not mix with the first fluid and that are prepared in the chamber; and a first electrode unit in which one or more electrodes to which a voltage is applied are arrayed to form an electric field in the chamber, wherein an aperture through which light transmits is adjusted by a location change of an interface between the first fluid and the second fluid according to the electric field.

Abstract: A microelectrofluidic device includes: a chamber; a first fluid and a second fluid which are contained in the chamber and are not mixable with each other; and a first electrode group including a plurality of electrodes that are disposed on an inner side of the chamber, and to which a voltage is applied to change an interface between the first fluid and the second fluid, wherein the plurality of electrodes are connected to form a first electrode unit, a second electrode unit, and a third electrode unit that are independently turned on or off, and the plurality of electrodes are annular and coated with an insulating material, and adjacent electrodes are connected to different electrode units.

Abstract: A vari-focal fluidic lens is provided. The fluidic lens includes a frame, an first membrane, a second membrane, and an optical fluid. The frame defines an inner space of the fluidic lens including a driving portion and a lens portion that are connected to each other. The elastic membrane is attached to one side of the frame to cover at least the lens portion. The second membrane is attached to an opposite side of the frame to cover at least the driving portion and is deformable in response to temperature change to vary a volume of the inner space. Optical fluid is contained in the inner space.

Abstract: A method of manufacturing a polymer electrode is provided. The method includes adhering a shadow mask onto a substrate, forming a hydrophilic electrode pattern on the substrate, coating the hydrophilic electrode pattern of the substrate with a conductive polymer water solution, removing the shadow mask, and drying the conductive polymer water solution, thus forming the polymer electrode.

Abstract: The variable liquid device includes: a chamber including a channel, in which a fluid flows, having an inconsistent height in at least a part of the channel; a first fluid filled in the chamber and formed of a non-transmissive material; and a second fluid filled in the chamber and formed of a light transmittable material that does not mix with the first fluid, wherein an aperture, through which light is transmitted, is adjusted according to a variation of an interface between the first fluid and the second fluid.

Abstract: A curvature control device includes a first fluid that has a light transmitting property and a polar property; a second fluid that has a light transmitting property; a chamber that the first fluid and the second fluid are accommodated without being mixed with each other, wherein a boundary surface between the first fluid and the second fluid comprises a first surface that is a lens surface and a second surface that induces a change in a curvature of the first surface; a first intermediate plate that is disposed in the chamber, and includes a first through-hole that forms a diameter of a lens corresponding to the first surface and a second through-hole that forms a path of the second fluid; and an electrode portion configured to generate an electric field that changes a position of the second surface.

Abstract: Exemplary embodiments disclose an optical zoom probe including an aperture adjuster configured to adjust an aperture in which light transmitted by a light transmitter passes, a focus adjuster configured to focus the light passed through the aperture and adjust a focal length to an ultra-close location and a close location, and a filter which includes a center region in which incident light passes without change, and a filter region which surrounds the center region and increases a depth of focus (DOF) of light that is focused on the ultra-close location.