Patents by Inventor Leo Mathew

Leo Mathew has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 7817387
    Abstract: An electrostatic discharge (ESD) protected circuit is coupled to a power supply voltage rail and includes a multiple independent gate field effect transistor (MIGFET), a pre-driver, and a hot gate bias circuit. The MIGFET has a source/drain path coupled between an output pad and the power supply voltage rail and has a first gate terminal and a second gate terminal. The pre-driver circuit has an output. The hot gate bias circuit is coupled to the first gate terminal of the MIGFET, and the output of the pre-driver circuit is coupled to the second gate terminal of the MIGFET. The hot gate bias circuit is configured to apply a bias voltage to the first gate terminal of the MIGFET during an ESD event that increases the breakdown voltage of the MIGFET so as to better withstand the ESD event.
    Type: Grant
    Filed: January 9, 2008
    Date of Patent: October 19, 2010
    Assignee: Freescale Semiconductor, Inc.
    Inventors: Michael G. Khazhinsky, Leo Mathew, James W. Miller
  • Patent number: 7811889
    Abstract: A fin field effect transistor (FinFET) memory cell and method of formation has a substrate for providing mechanical support. A first dielectric layer overlies the substrate. A fin structure overlies the dielectric layer and has a first current electrode and a second current electrode separated by a channel. A floating gate has a vertical portion that is adjacent to and electrically insulated from a side of the channel and has a horizontal portion overlying the first dielectric layer and extending laterally away from the channel. The floating gate stores electrical charge. A second dielectric layer is adjacent the floating gate. A control gate adjacent the second dielectric layer and physically separated from the floating gate by the second dielectric layer. The “L-shape” of the floating gate enhances capacitive coupling ratio between the control gate and the floating gate.
    Type: Grant
    Filed: August 8, 2007
    Date of Patent: October 12, 2010
    Assignee: Freescale Semiconductor, Inc.
    Inventors: Vishal P. Trivedi, Leo Mathew
  • Patent number: 7803670
    Abstract: A semiconductor process and apparatus provide a dual or hybrid substrate by forming a second semiconductor layer (214) that is isolated from, and crystallographically rotated with respect to, an underlying first semiconductor layer (212) by a buried insulator layer (213); forming an STI region (218) in the second semiconductor layer (214) and buried insulator layer (213); exposing the first semiconductor layer (212) in a first area (219) of a STI region (218); epitaxially growing a first epitaxial semiconductor layer (220) from the exposed first semiconductor layer (212); and selectively etching the first epitaxial semiconductor layer (220) and the second semiconductor layer (214) to form CMOS FinFET channel regions (e.g., 223) and planar channel regions (e.g., 224) from the first epitaxial semiconductor layer (220) and the second semiconductor layer (214).
    Type: Grant
    Filed: July 20, 2006
    Date of Patent: September 28, 2010
    Assignee: Freescale Semiconductor, Inc.
    Inventors: Ted R. White, Leo Mathew, Bich-Yen Nguyen, Zhonghai Shi, Voon-Yew Thean, Mariam G. Sadaka
  • Publication number: 20100230762
    Abstract: An integrated circuit includes a logic circuit and a memory cell. The logic circuit includes a P-channel transistor, and the memory cell includes a P-channel transistor. The P-channel transistor of the logic circuit includes a channel region. The channel region has a portion located along a sidewall of a semiconductor structure having a surface orientation of (110). The portion of the channel region located along the sidewall has a first vertical dimension that is greater than a vertical dimension of any portion of the channel region of the P-channel transistor of the memory cell located along a sidewall of a semiconductor structure having a surface orientation of (110).
    Type: Application
    Filed: May 24, 2010
    Publication date: September 16, 2010
    Applicant: FREESCALE SEMICONDUCTOR, INC.
    Inventors: James D. Burnett, Leo Mathew, Byoung W. Min
  • Publication number: 20100227475
    Abstract: A method of forming an electronic device can include forming a metallic layer by an electrochemical process over a side of a substrate that includes a semiconductor material. The method can also include introducing a separation-enhancing species into the substrate at a distance from the side, and separating a semiconductor layer and the metallic layer from the substrate, wherein the semiconductor layer is a portion of the substrate. In a particular embodiment, the separation-enhancing species can be incorporated into a metallic layer and moved into the substrate, and in particular embodiment, the separation-enhancing species can be implanted into the substrate. In still another embodiment, both the techniques can be used. In a further embodiment, a dual-sided process can be performed.
    Type: Application
    Filed: May 21, 2010
    Publication date: September 9, 2010
    Inventors: Leo Mathew, Dharmesh Jawarani
  • Patent number: 7754560
    Abstract: An integrated circuit includes a logic circuit and a memory cell. The logic circuit includes a P-channel transistor, and the memory cell includes a P-channel transistor. The P-channel transistor of the logic circuit includes a channel region. The channel region has a portion located along a sidewall of a semiconductor structure having a surface orientation of (110). The portion of the channel region located along the sidewall has a first vertical dimension that is greater than a vertical dimension of any portion of the channel region of the P-channel transistor of the memory cell located along a sidewall of a semiconductor structure having a surface orientation of (110).
    Type: Grant
    Filed: January 10, 2006
    Date of Patent: July 13, 2010
    Assignee: Freescale Semiconductor, Inc.
    Inventors: James D. Burnett, Leo Mathew, Byoung W. Min
  • Patent number: 7749884
    Abstract: A method of forming an electronic device can include forming a metallic layer by an electrochemical process over a side of a substrate that includes a semiconductor material. The method can also include introducing a separation-enhancing species into the substrate at a distance from the side, and separating a semiconductor layer and the metallic layer from the substrate, wherein the semiconductor layer is a portion of the substrate. In a particular embodiment, the separation-enhancing species can be incorporated into a metallic layer and moved into the substrate, and in particular embodiment, the separation-enhancing species can be implanted into the substrate. In still another embodiment, both the techniques can be used. In a further embodiment, a dual-sided process can be performed.
    Type: Grant
    Filed: May 5, 2009
    Date of Patent: July 6, 2010
    Assignee: AstroWatt, Inc.
    Inventors: Leo Mathew, Dharmesh Jawarani
  • Patent number: 7737018
    Abstract: A process of forming an electronic device can include forming a gate electrode layer and forming a patterned masking layer. In a first aspect, a process operation is performed before removing substantially all of a lower portion of the gate electrode layer. In a second aspect, a gate dielectric layer is formed prior to forming the gate electrode layer, and a portion of the gate dielectric layer is exposed after removing the patterned masking layer and prior to forming another masking layer. A portion of the gate electrode layer remains covered during a process where some or all of the portion would be otherwise removed or consumed. By forming the electronic device using such a process, damage to the gate electrode structure while performing subsequent processing can be significantly reduced.
    Type: Grant
    Filed: February 6, 2007
    Date of Patent: June 15, 2010
    Assignee: Freescale Semiconductor, Inc.
    Inventors: Leo Mathew, Voon-Yew Thean, Vishal P. Trivedi
  • Patent number: 7727829
    Abstract: A semiconductor device is formed using a semiconductor substrate. A gate dielectric is formed over the semiconductor substrate. A gate electrode layer is formed over the gate dielectric. A patterned masking layer is formed over the gate electrode layer. A first region of the gate electrode layer lies within an opening in the patterned masking layer. The first region of the gate electrode layer is partially etched to leave an elevated portion of the gate electrode layer and a lower portion adjacent to the elevated portion. A sidewall spacer is formed adjacent to the elevated portion and over the lower portion. An implant is performed into the semiconductor substrate using the elevated portion and the sidewall spacer as a mask. The sidewall spacer and the lower portion are removed.
    Type: Grant
    Filed: February 6, 2007
    Date of Patent: June 1, 2010
    Assignee: Freescale Semiconductor, Inc.
    Inventors: Vishal P. Trivedi, Leo Mathew
  • Patent number: 7709303
    Abstract: A process for forming an electronic device can include forming a semiconductor fin of a first height for a fin-type structure and removing a portion of the semiconductor fin such that the semiconductor fin is shortened to a second height. In accordance with specific embodiment a second semiconductor fin can be formed, each of the first and the second semiconductor fins having a different height representing a channel width. In accordance with another specific embodiment a second and a third semiconductor fin can be formed, each of the first, the second and the third semiconductor fins having a different height representing a channel width.
    Type: Grant
    Filed: January 10, 2006
    Date of Patent: May 4, 2010
    Assignee: Freescale Semiconductor, Inc.
    Inventors: James D. Burnett, Leo Mathew, Byoung W. Min
  • Publication number: 20090294919
    Abstract: A method for processing a substrate comprising at least a buried oxide (BOX) layer and a semiconductor material layer is provided. The method includes etching the semiconductor material layer to form a vertical semiconductor material structure overlying the BOX layer, leaving an exposed portion of the BOX layer. The method further includes exposing a top surface of the exposed portion of the BOX layer to an oxide etch resistant species to form a thin oxide etch resistant layer overlying the exposed portion of the BOX layer.
    Type: Application
    Filed: May 30, 2008
    Publication date: December 3, 2009
    Inventors: Tab A. Stephens, Leo Mathew, Lakshmanna Vishnubholta, Bruce E. White
  • Publication number: 20090286393
    Abstract: A method of forming an electronic device can include forming a patterned layer adjacent to a side of a substrate including a semiconductor material. The method can also include separating a semiconductor layer and the patterned layer from the substrate, wherein the semiconductor layer is a portion of the substrate.
    Type: Application
    Filed: May 15, 2009
    Publication date: November 19, 2009
    Inventors: Leo Mathew, Dharmesh Jawarani
  • Publication number: 20090280635
    Abstract: A method of forming an electronic device can include forming a metallic layer by an electrochemical process over a side of a substrate that includes a semiconductor material. The method can also include introducing a separation-enhancing species into the substrate at a distance from the side, and separating a semiconductor layer and the metallic layer from the substrate, wherein the semiconductor layer is a portion of the substrate. In a particular embodiment, the separation-enhancing species can be incorporated into a metallic layer and moved into the substrate, and in particular embodiment, the separation-enhancing species can be implanted into the substrate. In still another embodiment, both the techniques can be used. In a further embodiment, a dual-sided process can be performed.
    Type: Application
    Filed: May 5, 2009
    Publication date: November 12, 2009
    Inventors: Leo Mathew, Dharmesh Jawarani
  • Publication number: 20090280588
    Abstract: A method of forming an electronic device can include forming a metallic layer over a side of a workpiece including a substrate, a differential etch layer, and a semiconductor layer. The differential etch layer may lie between the substrate and the semiconductor layer, and the semiconductor layer may lie along the side of the workpiece. The process can further include selectively removing at least a majority of the differential etch layer from between the substrate and the semiconductor layer, and separating the semiconductor layer and the metallic layer from the substrate. The selective removal can be performed using a wet etching, dry etching, or electrochemical technique. In a particular embodiment, the same plating bath may be used for plating the metallic layer and selectively removing the differential etch layer.
    Type: Application
    Filed: May 5, 2009
    Publication date: November 12, 2009
    Inventors: Leo Mathew, Dharmesh Jawarani
  • Patent number: 7612619
    Abstract: A device and method for phase detection are disclosed. The device includes a phase differential module that provides a phase difference signal based on the phase difference between a data signal and a reference signal. The phase difference signal is provided to a first gate of a multi-gate fin-type field effect transistor (multi-gate FinFET) of the device. A second gate of the multi-gate FinFET transistor receives a bias signal that provides a phase detection threshold. A phase adjustment signal is provided at one or both of the FinFET current electrodes based on the phase difference signal and the bias signal.
    Type: Grant
    Filed: March 23, 2006
    Date of Patent: November 3, 2009
    Assignee: Freescale Semiconductor, Inc
    Inventors: Mohamed S. Moosa, Leo Mathew, Sriram S. Kalpat
  • Patent number: 7611936
    Abstract: A method for depositing metals on surfaces is provided which comprises (a) providing a substrate (103) having a horizontal surface (107) and a vertical surface (105); (b) depositing a first metal layer (109) over the horizontal and vertical surfaces; (c) depositing a layer of polysilicon (111) over the horizontal and vertical surfaces; (d) treating the layer of polysilicon with a plasma such that a residue (113) remaining from the treatment is preferentially formed over the horizontal surfaces rather than the vertical surfaces, and wherein the residue is resistant to a first metal etch; and (e) exposing the substrate to the first metal etch.
    Type: Grant
    Filed: May 11, 2007
    Date of Patent: November 3, 2009
    Assignee: Freescale Semiconductor, Inc.
    Inventors: Leo Mathew, Ross E. Noble, Raghaw S. Rai
  • Patent number: 7585735
    Abstract: A method of forming a semiconductor device is provided in which a substrate (102) is provided which has a gate dielectric layer (106) disposed thereon, and a gate electrode (116) having first and second sidewalls is formed over the gate dielectric layer. First (146) and second (150) extension spacer structures are formed adjacent the first and second sidewalls, respectively.
    Type: Grant
    Filed: February 1, 2005
    Date of Patent: September 8, 2009
    Assignee: Freescale Semiconductor, Inc.
    Inventors: Leo Mathew, Yang Du, Bich-Yen Nguyen, Voon-Yew Thean
  • Patent number: 7573114
    Abstract: An electronic device can include a gated diode, wherein the gated diode includes a junction diode structure including a junction. A first conductive member spaced apart from and adjacent to the junction can be connected to a first signal line. A second conductive member, spaced apart from and adjacent to the junction, can be both electrically connected to a second signal line and electrically insulated from the first conductive member. The junction diode structure can include a p-n or a p-i-n junction. A process for forming the electronic device is also described.
    Type: Grant
    Filed: August 29, 2008
    Date of Patent: August 11, 2009
    Assignee: Freescale Semiconductor, Inc.
    Inventors: Leo Mathew, Michael G. Khazhinsky
  • Patent number: 7566623
    Abstract: An electronic device can include a semiconductor fin with a first gate electrode adjacent to a first wall, and a second gate electrode adjacent to a second wall. In one embodiment, a conductive member can be formed overlying the semiconductor fin, and a portion of the conductive member can be reacted to form the first and second gate electrodes. In another embodiment, a patterned masking layer can be formed including a masking member over a gate electrode layer, and portion of the masking member overlying the semiconductor fin can be removed. In still another embodiment, a first fin-type transistor structure can include the semiconductor fin, the first and second gate electrodes, and a first insulating cap. The electronic device can also include a second fin-type transistor structure having a second insulating cap thicker than the first insulating cap.
    Type: Grant
    Filed: February 2, 2007
    Date of Patent: July 28, 2009
    Assignee: Freescale Semiconductor, Inc.
    Inventors: Leo Mathew, Brian J. Goolsby, Tab A. Stephens
  • Publication number: 20090184309
    Abstract: A method for forming a phase change memory cell (PCM) includes forming a heater for the phase change memory and forming a phase change structrure electrically coupled to the heater. The forming a heater includes siliciding a material including silicon to form a silicide structure, wherein the heater includes at least a portion of the silicide structure. The phase change structure exhibits a first resistive value when in a first phase state and exhibits a second resistive value when in a second phase state. The silicide structure produces heat when current flows through the silicide structure for changing the phase state of the phase change structure.
    Type: Application
    Filed: January 18, 2008
    Publication date: July 23, 2009
    Inventors: Leo Mathew, Dharmesh Jawarani, Tushar P. Merchant, Ramachandran Muralidhar