Patents by Inventor Liang-An Lin

Liang-An Lin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11916022
    Abstract: Various embodiments of the present disclosure are directed towards a semiconductor processing system including an overlay (OVL) shift measurement device. The OVL shift measurement device is configured to determine an OVL shift between a first wafer and a second wafer, where the second wafer overlies the first wafer. A photolithography device is configured to perform one or more photolithography processes on the second wafer. A controller is configured to perform an alignment process on the photolithography device according to the determined OVL shift. The photolithography device performs the one or more photolithography processes based on the OVL shift.
    Type: Grant
    Filed: June 7, 2022
    Date of Patent: February 27, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yeong-Jyh Lin, Ching I Li, De-Yang Chiou, Sz-Fan Chen, Han-Jui Hu, Ching-Hung Wang, Ru-Liang Lee, Chung-Yi Yu
  • Publication number: 20240063234
    Abstract: The present disclosure relates to a CMOS image sensor, and an associated method of formation. In some embodiments, the CMOS image sensor comprises a substrate and a transfer gate disposed from a front-side surface of the substrate. The CMOS image sensor further comprises a photo detecting column disposed at one side of the transfer gate within the substrate. The photo detecting column comprises a doped sensing layer comprising one or more recessed portions along a circumference of the doped sensing layer in parallel to the front-side surface of the substrate. By forming the photo detecting column with recessed portions, a junction interface is enlarged compared to a previous p-n junction interface without recessed portions, and thus a full well capacity of the photodiode structure is improved.
    Type: Application
    Filed: November 2, 2023
    Publication date: February 22, 2024
    Inventors: Chia-Yu Wei, Hsin-Chi Chen, Kuo-Cheng Lee, Ping-Hao Lin, Hsun-Ying Huang, Yen-Liang Lin, Yu Ting Kao
  • Publication number: 20240063083
    Abstract: A semiconductor device includes: a die having die connectors at a front side of the die; a molding material around the die; and a redistribution structure, where the die connectors of the die are attached to a first side of the redistribution structure, where the redistribution structure includes: a dielectric layer; a conductive line extending along a first surface of the dielectric layer facing the die; and a warpage tuning layer contacting and extending along a first surface of the conductive line facing the die, where a first coefficient of thermal expansion (CTE) of the conductive line is smaller than a second CTE of the warpage tuning layer.
    Type: Application
    Filed: August 19, 2022
    Publication date: February 22, 2024
    Inventors: Chieh-Lung Lai, Meng-Liang Lin, Hsien-Wei Chen, Shin-Puu Jeng
  • Publication number: 20240062825
    Abstract: A memory device and a method for operating the same are provided. In an erase operation, a switch voltage is applied to at least one of a string select line or a ground select line of a selected sub-block of a selected block, a gate control voltage is applied to selected word lines of the selected sub-block, and an erase voltage is applied to bit lines and a common source line of the selected sub-block. The switch voltage is smaller than the erase voltage. The gate control voltage is smaller than the switch voltage and the erase voltage.
    Type: Application
    Filed: August 19, 2022
    Publication date: February 22, 2024
    Inventors: Chun-Chang LU, Wen-Jer TSAI, Wei-Liang LIN
  • Patent number: 11908764
    Abstract: A semiconductor package and a manufacturing method thereof are provided. The semiconductor package includes at least a circuit substrate, a semiconductor die and a filling material. The circuit substrate has a first surface, a second surface opposite to the first surface and a cavity concave from the first surface. The circuit substrate includes a dielectric material and a metal floor plate embedded in the dielectric material and located below the cavity. A location of the metal floor plate corresponds to a location of the cavity. The metal floor plate is electrically floating and isolated by the dielectric material. The semiconductor die is disposed in the cavity and electrically connected with the circuit substrate. The filling material is disposed between the semiconductor die and the circuit substrate. The filling material fills the cavity and encapsulates the semiconductor die to attach the semiconductor die and the circuit substrate.
    Type: Grant
    Filed: August 31, 2021
    Date of Patent: February 20, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Meng-Liang Lin, Po-Yao Chuang, Te-Chi Wong, Shuo-Mao Chen, Shin-Puu Jeng
  • Patent number: 11901279
    Abstract: A semiconductor package and a method of manufacturing the same are provided. The semiconductor package includes a semiconductor die, an encapsulant and a redistribution structure. The encapsulant laterally encapsulates the semiconductor die. The redistribution structure is disposed on the encapsulant and electrically connected with the semiconductor die, wherein the redistribution structure comprises a first conductive via, a first conductive wiring layer and a second conductive via stacked along a stacking direction, the first conductive via has a first terminal surface contacting the first conductive wiring layer, the second conductive via has a second terminal surface contacting the first conductive wiring layer, an area of a first cross section of the first conductive via is greater than an area of the first terminal surface of the first conductive via, and an area of a second cross section of the second conductive via is greater than an area of the second terminal surface of the second conductive via.
    Type: Grant
    Filed: March 14, 2023
    Date of Patent: February 13, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Shih-Ting Hung, Meng-Liang Lin, Shin-Puu Jeng, Yi-Wen Wu, Po-Yao Chuang
  • Patent number: 11898187
    Abstract: Disclosed are components, systems, and methods for glycoprotein or recombinant glycoprotein protein synthesis in vitro and in vivo. In particular, the present invention relates to components, systems, and methods for identifying amino acid glycosylation tag motifs for N-glycosyltransferases and the use of the identified amino acid glycosylation tag motifs in methods for preparing glycoproteins and recombinant glycoproteins in vitro and in vivo.
    Type: Grant
    Filed: August 15, 2018
    Date of Patent: February 13, 2024
    Assignee: Northwestern University
    Inventors: Michael Christopher Jewett, Weston K. Kightlinger, Liang Lin, Milan Mrksich
  • Patent number: 11901277
    Abstract: A semiconductor package and a method of manufacturing the same are provided. The semiconductor package includes a semiconductor die, an encapsulant and a redistribution structure. The encapsulant laterally encapsulates the semiconductor die. The redistribution structure is disposed on the encapsulant and electrically connected with the semiconductor die, wherein the redistribution structure comprises a first conductive via, a first conductive wiring layer and a second conductive via stacked along a stacking direction, the first conductive via has a first terminal surface contacting the first conductive wiring layer, the second conductive via has a second terminal surface contacting the first conductive wiring layer, an area of a first cross section of the first conductive via is greater than an area of the first terminal surface of the first conductive via, and an area of a second cross section of the second conductive via is greater than an area of the second terminal surface of the second conductive via.
    Type: Grant
    Filed: July 3, 2022
    Date of Patent: February 13, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Shih-Ting Hung, Meng-Liang Lin, Shin-Puu Jeng, Yi-Wen Wu, Po-Yao Chuang
  • Patent number: 11901188
    Abstract: Exemplary methods of patterning a device layer are described, including operations of patterning a protector layer and forming a first opening in a first patterning layer to expose a first portion of the protector layer and a first portion of the hard mask layer, which are then are exposed to a first etch to form a first opening in the first portion of the hard mask layer. A second opening is formed in a second patterning layer to expose a second portion of the protector layer and a second portion of the hard mask layer. The second portion of the protector layer and the second portion of the hard mask layer are exposed to an etch to form a second opening in the second portion of the hard mask layer. Exposed portions of the device layer are then etched through the first opening and the second opening.
    Type: Grant
    Filed: March 28, 2022
    Date of Patent: February 13, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chi-Cheng Hung, Chun-Kuang Chen, De-Fang Chen, Wei-Liang Lin, Yu-Tien Shen
  • Patent number: 11901190
    Abstract: A method of reducing corner rounding during patterning of a substrate to form a prescribed pattern comprising a corner includes dividing the pattern into a first pattern and a second pattern, the first pattern forming a first edge of the corner and the second pattern forming a second edge of the corner. At least a portion of the second pattern overlaps the first pattern such that the first edge intersects with the second edge to form a corner of the prescribed pattern. The method further includes forming the first pattern in a first mask layer disposed on a substrate to expose the substrate and forming the second pattern in the first mask layer to expose the substrate. The substrate exposed through the first mask layer is then etched to obtain the pattern.
    Type: Grant
    Filed: April 30, 2018
    Date of Patent: February 13, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chin-Yuan Tseng, Yu-Tien Shen, Wei-Liang Lin, Chih-Ming Lai, Kuo-Cheng Ching, Shi Ning Ju, Li-Te Lin, Ru-Gun Liu
  • Publication number: 20240047401
    Abstract: A package structure is provided. The package structure includes an interposer substrate including an insulating structure, a conductive pad, a first conductive line, and a first conductive via structure. The package structure includes an electronic device bonded to the conductive pad. The package structure includes a chip structure bonded to the first end portion of the first conductive via structure. The package structure includes a first conductive bump connected between the chip structure and the first end portion of the first conductive via structure. The first end portion protrudes into the first conductive bump and is in direct contact with the first conductive bump.
    Type: Application
    Filed: October 17, 2023
    Publication date: February 8, 2024
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Meng-Liang LIN, Po-Yao CHUANG, Shin-Puu JENG
  • Publication number: 20240030199
    Abstract: An embodiment semiconductor device includes an interposer, a semiconductor die electrically connected to the interposer, an integrated passive device die electrically connected to the interposer, the integrated passive device die including two or more seal rings, and a first alignment mark formed on the integrated passive device die within a first area enclosed by a first one of the two or more seal rings. The integrated passive device die may further include two or more integrated passive devices located within respective areas enclosed by respective ones of the two or more seal rings. Each of the two or more integrated passive devices may include electrical connections that are formed as a plurality of micro-bumps, and the first alignment mark may be electrically isolated from the electrical connections, and the first alignment mark and the electrical connections may share a common material.
    Type: Application
    Filed: July 21, 2022
    Publication date: January 25, 2024
    Inventors: Hsien-Wei Chen, Chun Huan Wei, Meng-Liang Lin, Shin-Puu Jeng
  • Patent number: 11881401
    Abstract: A directional patterning method includes following steps. A substrate is provided with a mask layer thereon, and the mask layer has at least one opening pattern therein. A cyclic deposition and etching process is performed to increase a length of the at least one opening pattern.
    Type: Grant
    Filed: May 17, 2021
    Date of Patent: January 23, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Po-Chin Chang, Li-Te Lin, Ru-Gun Liu, Wei-Liang Lin, Pinyen Lin, Yu-Tien Shen, Ya-Wen Yeh
  • Publication number: 20240021561
    Abstract: Various embodiments of the present disclosure are directed towards an integrated chip. The integrated chip includes an interconnect structure overlying a semiconductor substrate and comprising a conductive wire. A passivation structure overlies the interconnect structure. An upper conductive structure overlies the passivation structure and comprises a first conductive layer, a dielectric layer, and a second conductive layer. The first conductive layer is disposed between the dielectric layer and the passivation structure. The second conductive layer extends along a top surface of the dielectric layer and penetrates through the first conductive layer and the passivation structure to the conductive wire.
    Type: Application
    Filed: August 9, 2023
    Publication date: January 18, 2024
    Inventors: Tzu-Yu Lin, Yao-Wen Chang, Chia-Wen Zhong, Yen-Liang Lin
  • Publication number: 20240019787
    Abstract: In a method of forming a pattern, a photo resist layer is formed over an underlying layer, the photo resist layer is exposed to an actinic radiation carrying pattern information, the exposed photo resist layer is developed to form a developed resist pattern, a directional etching operation is applied to the developed resist pattern to form a trimmed resist pattern, and the underlying layer is patterned using the trimmed resist pattern as an etching mask.
    Type: Application
    Filed: July 19, 2023
    Publication date: January 18, 2024
    Inventors: Ru-Gun LIU, Huicheng Chang, Chia-Cheng Chen, Jyu-Horng Shieh, Liang-Yin Chen, Shu-Huei Suen, Wei-Liang Lin, Ya Hui Chang, Yi-Nien Su, Yung-Sung Yen, Chia-Fong Chang, Ya-Wen Yeh, Yu-Tien Shen
  • Publication number: 20240021738
    Abstract: A semiconductor structure including a substrate, a first well region, a second well region, an isolation, a gate structure, and a dielectric layer is provided. The first well region is disposed in the substrate, wherein a dopant of the first well region includes arsenic. The second well region is disposed in the substrate under the first well region, wherein the second well region has a conductivity type different from that of the first doping region. The isolation is disposed in the substrate and surrounds the first well region, wherein a depth of the isolation is substantially greater than or equal to a depth of the first well region from a first surface of the substrate. The gate structure are disposed sequentially over the substrate and overlaps the first well region. A method of forming the semiconductor structure is also provided.
    Type: Application
    Filed: July 14, 2022
    Publication date: January 18, 2024
    Inventors: ANHAO CHENG, CHING-HUNG KAO, YEN-LIANG LIN, MENG-I KANG, KAI-CHI WU, CHIEN-WEI LEE
  • Publication number: 20240014115
    Abstract: A semiconductor structure includes an interposer including redistribution wiring interconnects and redistribution insulating layers; a first semiconductor die attached to the interposer through a first array of solder material portions; and a second semiconductor die attached to the interposer through a second array of solder material portions. The interposer includes at least one inductor structure located between an area of the first array of solder material portions and an area of the second array of solder material portions in a plan view and laterally encloses a respective area in the plan view.
    Type: Application
    Filed: July 5, 2022
    Publication date: January 11, 2024
    Inventors: Hsien-Wei Chen, Meng-Liang Lin, Shin-Puu Jeng
  • Patent number: 11866850
    Abstract: The present disclosure discloses a method for preparing a pure chitosan fiber, and relates to the technical field of preparation of chitosan. The method includes the following steps: S1, preparing an acetic acid solution; S2, preparing a chitosan stock solution; S3, treating a chitosan spinning solution; and S4, preparing a chitosan fiber. In step S3, a pretreatment machine includes a body; an driving mechanism is arranged in the body; a stirring mechanism is arranged in the driving mechanism; a scraping mechanism is arranged below the driving mechanism; a preliminary treatment mechanism is arranged at an inner upper side of the body; the driving mechanism penetrates through the preliminary treatment mechanism and is arranged in the body; a separation mechanism is arranged on a bottom of the body.
    Type: Grant
    Filed: August 22, 2023
    Date of Patent: January 9, 2024
    Assignee: Wenzhou Jiayuan Biotechnology Co. LTD
    Inventors: Liang Lin, Rui Han, Peng Guo, Xinxu Yan
  • Patent number: 11862465
    Abstract: A method of manufacturing a semiconductor device including operations of forming a first hard mask over an underlying layer on a substrate by a photolithographic and etching method, forming a sidewall spacer pattern having a first sidewall portion and a second sidewall portion on opposing sides of the first hard mask, etching the first sidewall portion, etching the first hard mask and leaving the second sidewall portion bridging a gap of the etched first hard mask, and processing the underlying layer using the second hard mask.
    Type: Grant
    Filed: January 31, 2022
    Date of Patent: January 2, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Shih-Chun Huang, Chiu-Hsiang Chen, Ya-Wen Yeh, Yu-Tien Shen, Po-Chin Chang, Chien-Wen Lai, Wei-Liang Lin, Ya Hui Chang, Yung-Sung Yen, Li-Te Lin, Pinyen Lin, Ru-Gun Liu, Chin-Hsiang Lin
  • Publication number: 20230416710
    Abstract: Disclosed herein are engineered nucleases and nuclease systems, including chimeric nucleases and chimeric nuclease systems. Engineered and chimeric nucleases disclosed herein include nucleic acid guided nuclease. Additionally disclosed herein are methods of generating engineered nucleases and methods of using the same.
    Type: Application
    Filed: November 17, 2022
    Publication date: December 28, 2023
    Inventors: Brian C. THOMAS, Christopher BROWN, Cristina BUTTERFIELD, Jyun-Liang LIN, Alan BROOKS, Morayma M. TEMOCHE-DIAZ, Greg COST, Rebecca LAMOTHE