Patents by Inventor Lukas Czornomaz

Lukas Czornomaz has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11674237
    Abstract: Fabricating a crystalline metal-phosphide layer may include providing a crystalline base substrate and a step of forming a crystalline metal-source layer. The method may further include performing a chemical conversion reaction to convert the metal-source layer to the crystalline metal phosphide layer. One or more corresponding semiconductor structures can be also provided.
    Type: Grant
    Filed: May 14, 2019
    Date of Patent: June 13, 2023
    Assignee: International Business Machines Corporation
    Inventors: Yannick Baumgartner, Bernd W. Gotsmann, Jean Fompeyrine, Lukas Czornomaz
  • Patent number: 11621340
    Abstract: The present disclosure relates to a method for fabricating a field-effect transistor structure on a substrate. The method includes forming a first semiconductor structure on the substrate, forming above the first semiconductor structure a gate structure that comprises a spacer layer laterally terminating the gate structure and has a lower etch rate than the first semiconductor structure with respect to a predetermined etchant, forming an undercut below the spacer layer by recessing the first semiconductor structure using the etchant, the undercut extending laterally below the spacer layer by not more than the thickness of the spacer layer, forming on the first semiconductor structure a second semiconductor structure filling the undercut, and forming a third semiconductor structure above the first semiconductor structure, wherein one of the second and third semiconductor structures forms the source of the field-effect transistor structure and the other one forms the drain.
    Type: Grant
    Filed: November 12, 2019
    Date of Patent: April 4, 2023
    Assignee: International Business Machines Corporation
    Inventors: Clarissa Convertino, Cezar Bogdan Zota, Lukas Czornomaz, Kirsten Emilie Moselund
  • Patent number: 11270999
    Abstract: The invention relates to a capacitorless DRAM cell, the cell comprising a heterostructure, a gate structure adjoining the heterostructure in a first direction, a drain structure adjoining the heterostructure in a second direction perpendicular to the first direction, and a source structure adjoining the heterostructure in the direction opposite the second direction, the heterostructure comprising one or more semiconducting channel layers and one or more electrically insulating barrier layers, the channel layers and the barrier layers being alternatingly stacked in the first direction.
    Type: Grant
    Filed: April 7, 2021
    Date of Patent: March 8, 2022
    Assignee: International Business Machines Corporation
    Inventors: Cezar Bogdan Zota, Clarissa Convertino, Lukas Czornomaz, Siegfried Friedrich Karg
  • Patent number: 11201246
    Abstract: The present disclosure relates to a method for fabricating an FET structure. The method includes forming on a substrate a first semiconductor structure and an insulator structure covering the first semiconductor structure with a first insulator layer, forming on the first insulator layer a sacrificial layer extending to a reference plane, forming a second insulator layer on the reference plane, forming a first cavity through the second insulator layer, the sacrificial layer and the first insulator layer, thus exposing a surface of the first semiconductor structure, filling the first cavity with a second semiconductor structure extending from the surface at least up to the first reference plane, forming a third semiconductor structure on the second semiconductor structure, selectively removing the sacrificial layer, thus forming a second cavity, and filling the second cavity with a gate structure.
    Type: Grant
    Filed: November 12, 2019
    Date of Patent: December 14, 2021
    Assignee: International Business Machines Corporation
    Inventors: Clarissa Convertino, Cezar Bogdan Zota, Kirsten Emilie Moselund, Lukas Czornomaz, Davide Cutaia
  • Patent number: 11183978
    Abstract: An amplifier, e.g., a low-noise amplifier, includes a field-effect transistor having a one-dimensional channel. This channel includes a semiconductor material for conducting electrons along a main direction of the channel. This direction is perpendicular to a cross-section of the channel. Dimensions of this cross-section are, together with the semiconductor material, such that the channel exhibits quantized conduction of electrons along its main direction. The amplifier further includes an electrical circuit that is configured to operate the transistor at a value of gate-to-source voltage bias corresponding to a peak value of a peak of a transconductance of the channel with respect to gate-to-source voltage bias values.
    Type: Grant
    Filed: June 6, 2019
    Date of Patent: November 23, 2021
    Assignee: International Business Machines Corporation
    Inventors: Cezar Bogdan Zota, Lukas Czornomaz
  • Patent number: 11075307
    Abstract: Embodiments of the invention are directed to a method of fabrication of an electro-optical device. A non-limiting example of the method relies on a waveguide. A trench is opened in the waveguide and a stack of optically active semiconductor materials is directly grown from a bottom wall of the trench and are stacked along a stacking direction that is perpendicular to a main plane of the waveguide. The stack is partly encapsulated in the waveguide, whereby a bottom layer of the stack is in direct contact with a waveguide core material, whereas upper portions of opposite, lateral sides of the stack are exposed. An insulating layer of material is deposited to cover exposed surfaces of the waveguide and structured to form a lateral growth template. Contact layers are laterally grown due to the lateral growth template formed. The contact layers can include an n-doped and p-doped contact layers.
    Type: Grant
    Filed: July 18, 2019
    Date of Patent: July 27, 2021
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Charles Caër, Yannick Baumgartner, Lukas Czornomaz
  • Publication number: 20210225845
    Abstract: The invention relates to a capacitorless DRAM cell, the cell comprising a heterostructure, a gate structure adjoining the heterostructure in a first direction, a drain structure adjoining the heterostructure in a second direction perpendicular to the first direction, and a source structure adjoining the heterostructure in the direction opposite the second direction, the heterostructure comprising one or more semiconducting channel layers and one or more electrically insulating barrier layers, the channel layers and the barrier layers being alternatingly stacked in the first direction.
    Type: Application
    Filed: April 7, 2021
    Publication date: July 22, 2021
    Inventors: Cezar Bogdan Zota, Clarissa Convertino, Lukas Czornomaz, Siegfried Friedrich Karg
  • Patent number: 11070029
    Abstract: Embodiments are directed to the fabrication of an electro-optical device. The device comprises the forming of an active region with a stack of III-V semiconductor gain materials stacked along a stacking direction z. The active region may be formed as a slab having several lateral surface portions, each extending parallel to the stacking direction z. The device further comprises selectively re-growing two paired elements, which include: a pair of doped layers of III-V semiconductor materials (an n-doped layer and a p-doped layer); and a pair of lateral waveguide cores. The two paired elements may be laterally arranged, two-by-two, on opposite sides of the slab. The elements distinctly adjoin respective ones of the lateral surface portions of the slab, so as for these elements to be separated from each other by the slab. The disclosure may be further directed to related silicon photonics devices.
    Type: Grant
    Filed: April 26, 2019
    Date of Patent: July 20, 2021
    Assignee: International Business Machines Corporation
    Inventors: Charles Caer, Lukas Czornomaz, Stefan Abel, Bert Jan Offrein
  • Publication number: 20210175234
    Abstract: The invention relates to a capacitorless DRAM cell, the cell comprising a heterostructure, a gate structure adjoining the heterostructure in a first direction, a drain structure adjoining the heterostructure in a second direction perpendicular to the first direction, and a source structure adjoining the heterostructure in the direction opposite the second direction, the heterostructure comprising one or more semiconducting channel layers and one or more electrically insulating barrier layers, the channel layers and the barrier layers being alternatingly stacked in the first direction.
    Type: Application
    Filed: December 5, 2019
    Publication date: June 10, 2021
    Inventors: Cezar Bogdan Zota, Clarissa Convertino, Lukas Czornomaz, Siegfried Friedrich Karg
  • Patent number: 11031402
    Abstract: The invention relates to a capacitorless DRAM cell, the cell comprising a heterostructure, a gate structure adjoining the heterostructure in a first direction, a drain structure adjoining the heterostructure in a second direction perpendicular to the first direction, and a source structure adjoining the heterostructure in the direction opposite the second direction, the heterostructure comprising one or more semiconducting channel layers and one or more electrically insulating barrier layers, the channel layers and the barrier layers being alternatingly stacked in the first direction.
    Type: Grant
    Filed: December 5, 2019
    Date of Patent: June 8, 2021
    Assignee: International Business Machines Corporation
    Inventors: Cezar Bogdan Zota, Clarissa Convertino, Lukas Czornomaz, Siegfried Friedrich Karg
  • Publication number: 20210143282
    Abstract: The present disclosure relates to a method for fabricating an FET structure. The method includes forming on a substrate a first semiconductor structure and an insulator structure covering the first semiconductor structure with a first insulator layer, forming on the first insulator layer a sacrificial layer extending to a reference plane, forming a second insulator layer on the reference plane, forming a first cavity through the second insulator layer, the sacrificial layer and the first insulator layer, thus exposing a surface of the first semiconductor structure, filling the first cavity with a second semiconductor structure extending from the surface at least up to the first reference plane, forming a third semiconductor structure on the second semiconductor structure, selectively removing the sacrificial layer, thus forming a second cavity, and filling the second cavity with a gate structure.
    Type: Application
    Filed: November 12, 2019
    Publication date: May 13, 2021
    Inventors: Clarissa Convertino, Cezar Bogdan Zota, Kirsten Emilie Moselund, Lukas Czornomaz, Davide Cutaia
  • Publication number: 20210143263
    Abstract: The present disclosure relates to a method for fabricating a field-effect transistor structure on a substrate. The method includes forming a first semiconductor structure on the substrate, forming above the first semiconductor structure a gate structure that comprises a spacer layer laterally terminating the gate structure and has a lower etch rate than the first semiconductor structure with respect to a predetermined etchant, forming an undercut below the spacer layer by recessing the first semiconductor structure using the etchant, the undercut extending laterally below the spacer layer by not more than the thickness of the spacer layer, forming on the first semiconductor structure a second semiconductor structure filling the undercut, and forming a third semiconductor structure above the first semiconductor structure, wherein one of the second and third semiconductor structures forms the source of the field-effect transistor structure and the other one forms the drain.
    Type: Application
    Filed: November 12, 2019
    Publication date: May 13, 2021
    Inventors: Clarissa Convertino, Cezar Bogdan Zota, Lukas Czornomaz, Kirsten Emilie Moselund
  • Publication number: 20210020796
    Abstract: Embodiments of the invention are directed to a method of fabrication of an electro-optical device. A non-limiting example of the method relies on a waveguide. A trench is opened in the waveguide and a stack of optically active semiconductor materials is directly grown from a bottom wall of the trench and are stacked along a stacking direction that is perpendicular to a main plane of the waveguide. The stack is partly encapsulated in the waveguide, whereby a bottom layer of the stack is in direct contact with a waveguide core material, whereas upper portions of opposite, lateral sides of the stack are exposed. An insulating layer of material is deposited to cover exposed surfaces of the waveguide and structured to form a lateral growth template. Contact layers are laterally grown due to the lateral growth template formed. The contact layers can include an n-doped and p-doped contact layers.
    Type: Application
    Filed: July 18, 2019
    Publication date: January 21, 2021
    Inventors: Charles Caër, Yannick Baumgartner, Lukas Czornomaz
  • Patent number: 10897121
    Abstract: A silicon photonic chip includes a silicon on insulator wafer and an electro-optical device on the silicon on insulator wafer. The electro-optical device is a lateral current injection electro-optical device that includes a slab having a pair of structured doped layers of III-V semiconductor materials arranged side-by-side in the slab, the pair of structured doped layers includes an n-doped layer and a p-doped layer, each of the p-doped layer and the n-doped layer is configured as a two-dimensional photonic crystal. A separation section extends between the pair of structured doped layers, the separation section fully separates the p-doped layer from the n-doped layer. The separation section includes current blocking trenches, and an active region of III-V semiconductor gain materials between the current blocking trenches that form a photonic crystal cavity.
    Type: Grant
    Filed: September 16, 2019
    Date of Patent: January 19, 2021
    Assignee: International Business Machines Corporation
    Inventors: Charles Caér, Lukas Czornomaz
  • Publication number: 20200389134
    Abstract: An amplifier, e.g., a low-noise amplifier, includes a field-effect transistor having a one-dimensional channel. This channel includes a semiconductor material for conducting electrons along a main direction of the channel. This direction is perpendicular to a cross-section of the channel. Dimensions of this cross-section are, together with the semiconductor material, such that the channel exhibits quantized conduction of electrons along its main direction. The amplifier further includes an electrical circuit that is configured to operate the transistor at a value of gate-to-source voltage bias corresponding to a peak value of a peak of a transconductance of the channel with respect to gate-to-source voltage bias values.
    Type: Application
    Filed: June 6, 2019
    Publication date: December 10, 2020
    Inventors: Cezar Bogdan Zota, Lukas Czornomaz
  • Publication number: 20200362446
    Abstract: Fabricating a crystalline metal-phosphide layer may include providing a crystalline base substrate and a step of forming a crystalline metal-source layer. The method may further include performing a chemical conversion reaction to convert the metal-source layer to the crystalline metal phosphide layer. One or more corresponding semiconductor structures can be also provided.
    Type: Application
    Filed: May 14, 2019
    Publication date: November 19, 2020
    Inventors: Yannick Baumgartner, Bernd W. Gotsmann, Jean Fompeyrine, Lukas Czornomaz
  • Patent number: 10840093
    Abstract: A method for fabricating a semiconductor substrate comprises providing a crystalline base substrate, forming an insulating layer on the crystalline base substrate and forming a trench in the insulating layer. This exposes a seed surface of the base substrate. The trench has sidewalls and a bottom. The bottom corresponds to the seed surface of the base substrate. The method further comprises growing, at a first growth step, an elongated seed structure in the trench from the seed surface of the substrate and forming a cavity structure above the insulating layer. The cavity structure covers the elongated seed structure and extends laterally to the elongated seed structure. The method comprises a further step of growing, at a second growth step, the semiconductor substrate in the cavity structure from the elongated seed structure. The invention is notably also directed to corresponding semiconductor structures and corresponding semiconductor substrates.
    Type: Grant
    Filed: September 11, 2018
    Date of Patent: November 17, 2020
    Assignee: International Business Machines Corporation
    Inventors: Yannick Baumgartner, Lukas Czornomaz, Heinz Schmid, Philipp Staudinger
  • Patent number: 10840264
    Abstract: An ultra-thin-body GaN-on-Insulator device and a method of manufacturing may be provided. The device comprises a front-end-of-line processed CMOS platform terminated with an interlayer dielectric material, a first bonding layer atop the interlayer dielectric material and an ultra-thin-body GaN-based hetero-structure terminated with a second bonding layer. The GaN-based hetero-structure is bonded with the second bonding layer to the first bonding layer of the CMOS platform building the ultra-thin-body GaN-on-Insulator device.
    Type: Grant
    Filed: September 28, 2017
    Date of Patent: November 17, 2020
    Assignee: International Business Machines Corporation
    Inventors: Lukas Czornomaz, Herwig Hahn
  • Patent number: 10810506
    Abstract: A quantum processing apparatus comprises control electronics, a switching unit, a bias line, and N electronic circuits. Both the switching unit and the bias line are connected to the control electronics. The N circuits comprise N respective, non-volatilely tunable resistors and N respective frequency-tunable, solid-state qubits. The control electronics are configured to individually tune the resistors via the switching unit, in a configuration mode of the apparatus; and apply a voltage bias to the electronic circuits via the bias line, in an operation mode of the apparatus. The electronic circuits are configured to passively apply respective bias signals to the qubits, wherein such bias signals are impacted by the resistors, in response to the voltage bias applied via the bias line, to operate the qubits at respective frequencies determined according to the respective bias signals.
    Type: Grant
    Filed: March 2, 2020
    Date of Patent: October 20, 2020
    Assignee: International Business Machines Corporation
    Inventors: Cezar Bogdan Zota, Lukas Czornomaz
  • Patent number: 10763644
    Abstract: A lateral current injection electro-optical device includes a slab having a pair of structured, doped layers of III-V semiconductor materials arranged side-by-side in the slab, the pair including an n-doped layer and a p-doped layer, each of the p-doped layer and the n-doped layer includes a two-dimensional photonic crystal, and a separation section extending between the pair of structured layers, the separation section separates the pair of structured layers, the separation section includes current blocking trenches, and an active region of III-V semiconductor gain materials between the current blocking trenches that form a photonic crystal cavity.
    Type: Grant
    Filed: September 16, 2019
    Date of Patent: September 1, 2020
    Assignee: International Business Machines Corporation
    Inventors: Charles Caër, Lukas Czornomaz