Abstract: It is disclosed an optical element (200) wherein one or more light-emitting diodes, LEDs, and additional optics may be provided in an integrated solution that may relatively easily be assembled and maintained in a desired position relatively each other. The optical element (200) may enable one or more LEDs and additional optics to be provided in an integrated solution that is relatively thin and compact in comparison with known devices, such that light from one or more LEDs may be injected into a thin light guide (205, 206) such as an optical fiber, an optical fiber array, a ribbon-shaped light-guiding structure, etc.

Abstract: A light output device comprises a substrate arrangement and a plurality of light source devices (4) integrated into the structure of the substrate arrangement. A respective control circuit (7) is provided for one or more light source devices (4) and also integrated into the structure of the substrate arrangement. Control circuits are embedded with the light source devices into the structure of the substrate. This enables a shared control line or lines (18) to be used to control a group of light source devices.

Abstract: A zone plate includes a plurality of consecutively arranged, adjacent, and alternating first and second regions. The first regions are arranged to be substantially transparent to a first predetermined wavelength of radiation and a second predetermined wavelength of radiation that is different from the first predetermined wavelength of radiation. The second regions are arranged to be substantially opaque, diffractive, or reflective to the first predetermined wavelength of radiation and substantially transparent to the second predetermined wavelength of radiation.

Abstract: The invention relates to a self-cleaning system (10) and window glass. The self-cleaning system comprises a translucent substrate (20), a light-emitting device (30) and a photo-catalytic layer (40) applied to a surface (22) of the translucent substrate for generating a self-cleaning surface. The photo-catalytic layer produces the self-cleaning effect when illuminated with light of a predefined wavelength range. The translucent substrate is translucent for at least a sub-range of the predefined wavelength range. The light-emitting device is arranged for illuminating the photo-catalytic layer via the translucent substrate, an emission spectrum emitted by the light-emitting device comprising light within the sub-range.

Abstract: A lithographic apparatus comprising a support configured to support a patterning device; a substrate table configured to hold a substrate; a projection system configured to project a pattern imparted to a radiation beam by the patterning device onto a target portion of the substrate; and a first multi-layer mirror and a second multi-layer mirror, the first multi-layer mirror and the second multi-layer minor being arranged along a path of the radiation beam, the first multi-layer minor and the second multi-layer mirror each having a reflectivity of at least about 50% in extreme ultra violet wavelength range, and the first multi-layer mirror configured to reduce radiation having wavelengths in a first wavelength range and the second multi-layer minor configured to reduce radiation having wavelengths in a second wavelength range different from the first wavelength range, wherein the first wavelength range and the second wavelength range are outside extreme ultra violet wavelength range.

Abstract: A zone plate includes a plurality of consecutively arranged, adjacent, and alternating first and second regions. The first regions are arranged to be substantially transparent to a first predetermined wavelength of radiation and a second predetermined wavelength of radiation that is different from the first predetermined wavelength of radiation. The second regions are arranged to be substantially opaque, diffractive, or reflective to the first predetermined wavelength of radiation and substantially transparent to the second predetermined wavelength of radiation.

Abstract: A light output device comprises a substrate arrangement with a light source device integrated into the structure of the substrate arrangement. The substrate arrangement comprises first and second optically transmissive substrates, an insulating layer in which the light source device is embedded and provided between the substrates, and a thermally conductive layer provided on at least on of the substrates.

Abstract: A debris mitigation system for trapping contaminant material coming from a debris-generating radiation source. The system includes a contamination barrier constructed and arranged to rotate about an axis, and a magnet structure constructed and arranged to provide a magnetic field for deflecting charged debris from the radiation source. The magnet structure is constructed and arranged to provide a magnetic field through the contamination barrier. The magnetic field, when passing through the contamination barrier, is oriented along planes generally coinciding with the axis of rotation of the contamination barrier.

Abstract: The invention provides a carpet back lighting system comprising a carpet back lighting unit having a lighting unit front face and a unit back face, wherein the lighting unit front face comprises a light source, arranged to generate light, and an anti-slip coating. The back lighting system is suitable as back lighting at a carpet unit back side of a light transmissive carpet unit selected from the group consisting a light transmissive carpet and a light transmissive carpet tile.

Abstract: The invention provides a carpet back lighting system comprising a carpet back lighting unit having a lighting unit front face and a unit back face, wherein the lighting unit front face comprises a light source, arranged to generate light, and accompanying optics. The carpet back lighting system is suitable as back lighting at a carpet unit back side of a light transmissive carpet unit selected from the group consisting a carpet and a carpet tile. Further, the optics are suitable to be arranged to guide light into the light transmissive carpet unit, and wherein the optics are suitable to be arranged to penetrate into at least part of the light transmissive carpet unit.

Abstract: The invention provides a light transmissive multi-layer carpet tile having a carpet tile top face and a carpet tile bottom face. The multi-layer carpet tile comprises a tufted primary backing layer, a pre-coat layer, and a tile backing. The multi-layer carpet tile comprises a light transmissive carpet tile section having a carpet tile light transmission in the range of 0.5-15% for light propagating in a direction from the tile backing to the carpet tile top face and having a wavelength in the visible range.

Abstract: The invention provides a padding for a carpet. The padding comprises a first padding face and a tube at least partly integrated in the padding. The tube comprises a transmissive section, transmissive for light having a predetermined wavelength selected from the visible spectrum. A lighting device may be introduced in the tube. The invention further provides a carpet-padding combination and a combination of the tube and a lighting device.

Abstract: A spectral purity filter is configured to allow transmission therethrough of extreme ultraviolet (EUV) radiation and to refract or reflect non-EUV secondary radiation. The spectral purity filter may be part of a source module and/or a lithographic apparatus.

Abstract: The invention provides a lighting arrangement comprising a carpet structure, and a control unit, The carpet structure comprises a carpet back lighting system comprising a carpet back lighting unit having a lighting unit front face and a unit back face. The lighting unit front face comprises a light source arranged to generate light. The carpet back lighting system comprises a plurality of said light sources. The carpet structure comprises a light transmissive carpet unit comprising a carpet unit front face and a carpet unit back side. The light transmissive carpet unit is selected from the group consisting a carpet and a carpet tile. The lighting unit front face of the carpet back lighting unit and the carpet unit back side of the light transmissive carpet unit are adjacent. The light transmissive carpet unit is arranged to transmit at least part of the light travelling in a direction from the carpet unit back side to the carpet unit front face.

Abstract: A spectral purity filter includes an aperture. The spectral purity filter is configured to enhance the spectral purity of a radiation beam by being configured to absorb radiation of a first wavelength and allow at least a portion of radiation of a second wavelength to transmit through the aperture. The first wavelength is larger than the second wavelength. The spectral purity filter may be used to improve the spectral purity of an Extreme Ultra-Violet (EUV) radiation beam.

Abstract: A spectral purity filter is configured to reflect extreme ultraviolet radiation. The spectral purity filter includes a substrate, and an anti-reflective coating on a top surface of the substrate. The anti-reflective coating is configured to transmit infrared radiation. The filter also includes a multi-layer stack configured to reflect extreme ultraviolet radiation and to substantially transmit infrared radiation.

Abstract: A radiation source is configured to generate radiation. The radiation source includes a first electrode and a second electrode configured to produce an electrical discharge during use to generate radiation-emitting plasma from a plasma fuel. The radiation source also includes a fuel supply configured to supply a plasma fuel to a fuel release area that is associated with the first electrode and the second electrode, and a fuel release configured to induce release of fuel, supplied by the fuel supply, from the fuel release area. The fuel release area is spaced-apart from the first electrode and from the second electrode.

Abstract: A lithographic apparatus comprising a support configured to support a patterning device; a substrate table configured to hold a substrate; a projection system configured to project a pattern imparted to a radiation beam by the patterning device onto a target portion of the substrate; and a first multi-layer mirror and a second multi-layer mirror, the first multi-layer mirror and the second multi-layer minor being arranged along a path of the radiation beam, the first multi-layer minor and the second multi-layer mirror each having a reflectivity of at least about 50% in extreme ultra violet wavelength range, and the first multi-layer mirror configured to reduce radiation having wavelengths in a first wavelength range and the second multi-layer minor configured to reduce radiation having wavelengths in a second wavelength range different from the first wavelength range, wherein the first wavelength range and the second wavelength range are outside extreme ultra violet wavelength range.

Abstract: A radiation source may include a radiation emitter for emitting radiation, a collector for collecting radiation emitted by the radiation emitter, and an outlet configured, in use, to introduce a cooled gas into the radiation source.

Abstract: The present invention relates to a light output device (100) comprising a LED package (4) at least partly embedded in a translucent layer (5) of a thermoplastic material, characterized in that the translucent layer (5) comprises light scattering particles (6) having a higher thermal conductivity than the thermal conductivity of the thermoplastic material of the translucent layer (5).