Abstract: The invention aims to provide substrate treatment equipment that can automatically collect a substrate in a normal condition without needing manual operation. The equipment includes a substrate holder 26 for holding substrates 12 in a multistage manner and a substrate transfer unit 34 for transferring the substrates 12 into the substrate holder 26, wherein a substrate holding condition of the substrate holder 26 is sensed by a sensing section 60. The sensing section 60 has photo-sensors 64a, 64b, and sensing waveforms sensed by the photo-sensors 64a, 64b are compared with a normal waveform. A control section 66 is provided, which controls a substrate transfer unit 34 such that substrates 12 other than at least a substrate 12 that was determined to be abnormal are transferred by the unit.

Abstract: The omni-directional drive device comprises a main wheel (2) comprising an endless annular member rotatable around a center of cross section perpendicular to a corresponding tangential line, electric motors (5R and 5L) for producing rotative forces around the rotation axis of the main wheel (2) and around the center of cross section perpendicular to a corresponding tangential line of the main wheel (2) and an arrangement (rotary members (4R and 4L) fitted with free rollers (3R and 3L)) for converting the rotational forces of the electric motors (5R and 5L) to the rotational forces around the rotation center of the main wheel (2) and around the center (C) of cross section perpendicular to a corresponding tangential line of the main wheel (2).

Abstract: Adverse effects when a carrier is open, such as particles adhesion to the substrate or natural oxidation film deposits on the substrate, as well as a rise in oxygen concentration and contamination of the substrate transfer chamber are prevented. Semiconductor manufacturing apparatus includes a carrier in which a cover unit is provided on a substrate loading/unloading opening for loading and unloading a substrate, a carrier open/close chamber continuously arranged to the carrier, a substrate transfer chamber continuously arranged to the carrier open/close chamber, a substrate processing chamber continuously arranged to the substrate transfer chamber, an exhaust means for exhausting the atmosphere in the carrier open/close chamber by suction, and an exhaust quantity adjuster means for adjusting the suction exhaust quantity of the exhaust means.

Abstract: The invention aims to provide substrate treatment equipment that can automatically collect a substrate in a normal condition without needing manual operation. The equipment includes a substrate holder for holding substrates in a multistage manner and a substrate transfer unit for transferring the substrates into the substrate holder, wherein a substrate holding condition of the substrate holder is sensed by a sensing section. The sensing section has photo-sensors, and sensing waveforms sensed by the photo-sensors are compared with a normal waveform. A control section is provided, which controls a substrate transfer unit such that substrates other than at least a substrate that was determined to be abnormal are transferred by the unit.

Abstract: Provided is a vehicle that can make tight turns without significantly changing an attitude of a rider, and is highly convenient in narrow places. A omni-directional one-wheeled vehicle comprises a vehicle body (7) and a secondary wheel (35) configured to contact a ground surface at a point displaced from a contact point of a driven road wheel (2).

Abstract: Provided is an inverted pendulum mobile vehicle such as a single-passenger coaxial two-wheel vehicle which is capable of turning with a small turning radius without causing discomfort to a rider or a vehicle occupant or causing a cargo or the like on the vehicle from shifting or falling off from the vehicle. The vehicle comprises a wheel supporting frame (12), a body frame (12) supported by the wheel supporting frame so as to be rotatable around a vertical axial line and carry a rider and or a cargo and a body coupler (52, 78, 70) that couples the body frame relative to the wheel supporting frame in a prescribed dynamic positional relationship.

Abstract: In a frictional drive vehicle, a load acting on the vehicle such as the weight of a rider is converted into a force that urges two frictionally engaging parts (3L, 3R, 25) toward each other. Thereby, the contact pressure between the two frictionally engaging parts is maintained at an optimum level under all conditions. A weight of a rider may be transmitted to a drive member that frictionally engages a main wheel via a four-link parallel link mechanism (40, 50).

Abstract: Provided are a substrate processing apparatus, a gas nozzle, and a method of processing a substrate, which is capable of improving heating efficiency of a gas without increasing a size of a reaction container. A gas supply nozzle 300 includes a first extension part 321, a third extension part 323, and a fifth extension part 325, which extend in a circumferential direction of wafers 200, and the first extension part 321, a second extension part 322, a fourth extension part 324, and a sixth extension part 326, which extend in a stacking direction of the wafers 200. The gas supply nozzle 300 may be disposed in a gap between an outer tube and an inner tube to save a space without increasing a size of a processing furnace as in the art. By increasing a gas circulation path of the gas supply nozzle 300, a gas in the gas supply nozzle 300 can be sufficiently heated due to radiant heat of each susceptor 218.

Abstract: Heat generated by a drive source of a friction drive device such as an electric motor is allowed to efficiently dissipate to the atmosphere, and the friction drive device and an omni-directional vehicle using the same is designed in a highly compact manner. Left and right electric drive devices are placed on a central axial line of left and right rotatable drive members, and external teeth members serving as output members of the electric drive devices are directly connected to the respective rotatable drive members in a torque transmitting and heat transmitting relationship.

Abstract: [Task] To allow a wheel that provides a performance required for use in an omni-directional vehicle to be manufactured in an efficient manner. [Solution] An annular member (51) comprises a C-shaped main body (61) and a complementary member (62) defining an endless annular shape jointly with the main body (61), a joint (63) between the main body (61) and complementary member (62) includes mating surfaces that are non-perpendicular to the cross sectional center line of the annular member, and the main body (61) and the complementary member (62) are fixedly joined to each other by using a threaded bolt (64) passed radially through the mating surfaces.

Abstract: A printed board includes footprints which are electrically solder-bonded to a surface-mounting substrate, on which electronic components are mounted, and which assists the heat release from the surface-mounting substrate. The footprint comprises a fillet-forming division which is placed on an outer-edge side of the surface-mounting substrate and where solder is supplied independently when solder-bonding is performed. The fillet-forming division is solder-bonded to the same electrode as the electrode of the surface-mounting substrate to which the footprint is solder-bonded.

Abstract: In a friction drive device comprising first free rollers and second free rollers contacting each other at the outer circumferential surfaces thereof to frictionally transmit power from the second free rollers to the first free rollers, in order to minimize the slippage between the first and second free rollers, minimize the power loss and cause the first free rollers to move as designed, an outer peripheral part of each first free roller defining an outer circumferential surface thereof has a different stiffness from that of an outer peripheral part of each second free roller defining an outer circumferential surface thereof.

Abstract: In a wheel for use in an omni-directional vehicle, gravel and other foreign matters are prevented from being trapped between free rollers forming the wheel, and traveling vibrations and noises are minimized at the same time. The wheel includes an annular member and a plurality of free rollers each rotatably supported by the annular member around a corresponding tangential line of the annular member, and a gap member is placed between each adjacent pair of the free rollers to fill a gap defined between the free rollers.

Abstract: [Task] Provided is a vehicle that can make tight turns without significantly changing an attitude of a rider, and is highly convenient in narrow places. [Solution] A omni-directional one-wheeled vehicle comprises a vehicle body (7) and a secondary wheel (35) configured to contact a ground surface at a point displaced from a contact point of a driven road wheel (2).

Abstract: The invention aims to provide substrate treatment equipment that can automatically collect a substrate in a normal condition without needing manual operation. The equipment includes a substrate holder for holding substrates in a multistage manner and a substrate transfer unit for transferring the substrates into the substrate holder, wherein a substrate holding condition of the substrate holder is sensed by a sensing section. The sensing section has photo-sensors, and sensing waveforms sensed by the photo-sensors are compared with a normal waveform. A control section is provided, which controls a substrate transfer unit such that substrates other than at least a substrate that was determined to be abnormal are transferred by the unit.

Abstract: Provided is an omni-directional drive device that does not complicate the arrangement for a power source for a drive source such as an electric motor, and achieves a high durability and an ease of maintenance. A drive force in a first direction is produced by a movement of a first moveable member (10) itself, and a drive force in a second direction is produced by the rotation of first free rollers (14) retained by the first moveable member, the rotation of the first free rollers (14) being caused by engagement with second free rollers (15) that are retained by a second moveable member (11) and rotative actuation of the second moveable member (11). Electric motors serving as drive sources may be mounted on base members (4 and 5).

Abstract: The invention aims to provide substrate treatment equipment that can automatically collect a substrate in a normal condition without needing manual operation. The equipment includes a substrate holder 26 for holding substrates 12 in a multistage manner and a substrate transfer unit 34 for transferring the substrates 12 into the substrate holder 26, wherein a substrate holding condition of the substrate holder 26 is sensed by a sensing section 60. The sensing section 60 has photo-sensors 64a, 64b, and sensing waveforms sensed by the photo-sensors 64a, 64b are compared with a normal waveform. A control section 66 is provided, which controls a substrate transfer unit 34 such that substrates 12 other than at least a substrate 12 that was determined to be abnormal are transferred by the unit.

Abstract: A semiconductor integrated circuit may include: a mode register and a clock delay control circuit. The mode register may store latency information corresponding to a plurality of frequencies. The clock delay control circuit may generate a delay clock signal using an external clock signal and the latency information. The delay clock signal may be used to control a timing margin of output data read during synchronous burst read operations of a non-volatile memory. A non-volatile memory device may include the semiconductor integrated circuit and a data output unit. The data output unit may use the delay clock signal to control the timing margin of the output data read during synchronous burst read operations. A memory system may include the semiconductor integrated circuit. A computing system may the semiconductor integrated circuit, as well as one or more of a memory controller, bus, modem, microprocessor, user interface, and battery.

Abstract: A repair method for detaching a part from a board in an electronic device module having at least the board and the part bonded with the board by a press fitting process. A repair use block having a repair use through hole is placed on the part, and a repair use bolt is fastened with a repair use female thread formed in the part, in advance, through the repair use through hole. The repair use bolt head abuts against the top surface of the repair use block, then is further fastened, whereupon the part is pulled up together with the repair use female thread upward above the board. When a repair use female thread cannot be directly formed in the part, a repair use auxiliary part which is to be pulled up integrally with the part, is interposed.

Abstract: A semiconductor memory device includes a reference current generating circuit configured to generate a bias signal in response to a precharge signal during a precharge operation. Each of a plurality of sense amplifier circuits is connected to a corresponding one of a plurality of bit lines. Each sense amplifier is configured to precharge a corresponding bit line in response to the bias signal. The reference current generating circuit is configured to maintain the bias signal at a level higher than a voltage of the bit lines, but lower than a supply voltage during a sensing operation.