Patents by Inventor Mark Durlam
Mark Durlam has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20040000415Abstract: A shielded electronic integrated circuit apparatus (5) comprising a substrate (10) with an electronic integrated circuit (15) formed thereon, a dielectric region (12) positioned on the substrate and the electronic integrated circuit wherein the dielectric region and the substrate are substantially surrounded by a magnetic material region (26, 30) deposited using electrochemical deposition and wherein the electronic integrated circuit is shielded from electromagnetic radiation.Type: ApplicationFiled: June 28, 2002Publication date: January 1, 2004Inventors: Nicholas D. Rizzo, Mark A. Durlam, Michael J. Roll, Kelly Kyler, Jaynal A. Molla
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Publication number: 20030175997Abstract: A method of fabricating a magnetoresistive random access memory device comprising the steps of providing a substrate, forming a conductive layer positioned on the substrate, forming a magnetoresistive random access memory device positioned on conductive layer, forming a metal cap on the magnetoresistive random access memory device, and electroless plating a bump metal layer on the metal cap. The bump metal layer acts as a self-aligned via for a bit line subsequently formed thereon.Type: ApplicationFiled: March 12, 2002Publication date: September 18, 2003Inventors: Kelly Kyler, Saied N. Tehrani, John J. D'urso, Gregory W. Grynkewich, Mark A. Durlam, Brian Butcher
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Publication number: 20030134096Abstract: An improved and novel device and fabrication method for a magnetic element, and more particularly a magnetic element (10) including a first electrode (14), a second electrode (18) and a spacer layer (16). The first electrode (14) and the second electrode (18) include ferromagnetic layers (26 & 28). A spacer layer (16) is located between the ferromagnetic layer (26) of the first electrode (14) and the ferromagnetic layer (28) of the second electrode (16) for permitting tunneling current in a direction generally perpendicular to the ferromagnetic layers (26 & 28). The device includes insulative veils (34) characterized as electrically isolating the first electrode (14) and the second electrode (18), the insulative veils (34) including non-magnetic and insulating dielectric properties.Type: ApplicationFiled: January 22, 2003Publication date: July 17, 2003Inventors: Eugene Youjun Chen, Mark Durlam, Saied N. Tehrani, Mark DeHerrera, Gloria Kerszykowski, Kelly Wayne Kyler
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Patent number: 6544801Abstract: An MTJ cell including an insulator layer of material between magnetic material layers with the insulator layer of material having a greater attraction for a third material than the magnetic material layers. The third material is introduced to one or both so that when the cell is heated the third material is redistributed from the magnetic material layer to the insulator layer. Upon redistribution the insulator layer becomes an insulator layer material. Also, a first diffusion barrier layer is positioned between a first metal electrode and one of the magnetic material layers and/or a second diffusion barrier layer is positioned between a second metal electrode and the other magnetic material layer to prevent diffusion of the metal in the electrodes into the magnetic material layers.Type: GrantFiled: August 21, 2000Date of Patent: April 8, 2003Assignee: Motorola, Inc.Inventors: Jon Slaughter, Saied Tehrani, Eugene Chen, Mark Durlam, Mark DeHerrera, Renu Whig Dave
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Patent number: 6518071Abstract: A method of fabricating a MRAM device with a taper comprising the steps of providing a substrate, forming a dielectric region with positioned on the substrate, patterning and isotropically etching through the dielectric region to the substrate to form a trench, depositing the MRAM device within the trench wherein the MRAM device includes a first ferromagnetic region with a width positioned on the substrate, a non-ferromagnetic spacer layer with a width positioned on the first ferromagnetic region, and a second ferromagnetic region with a width positioned on the non-ferromagnetic spacer layer wherein the taper is formed by making the width of the first ferromagnetic region greater than the width of the non-ferromagnetic spacer layer, and the width of the non-ferromagnetic spacer layer greater than the width of the second ferromagnetic region so that the first ferromagnetic region is separated from the second ferromagnetic region.Type: GrantFiled: March 28, 2002Date of Patent: February 11, 2003Assignee: Motorola, Inc.Inventors: Mark A. Durlam, Mark F. Deherrera, Kelly W. Kyler, Brian R. Butcher, Gregory W. Grynkewich, Steven M. Smith, Charles Snyder, Jon M. Slaughter
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Patent number: 6512689Abstract: A magnetoresistive random access memory architecture free of isolation devices includes a plurality of data columns of non-volatile magnetoresistive elements. A reference column includes non-volatile magnetoresistive elements positioned adjacent to the data column. Each column is connected to a current conveyor. A selected data current conveyor and the reference current conveyor are connected to inputs of a differential amplifier for differentially comparing a data voltage to a reference voltage. The current conveyors are connected directly to the ends of the data and reference bitlines. This specific arrangement allows the current conveyors to be clamped to the same voltage which reduces or removes sneak circuits to substantially reduce leakage currents.Type: GrantFiled: January 18, 2002Date of Patent: January 28, 2003Assignee: Motorola, Inc.Inventors: Peter K. Naji, Mark A. Durlam, Saied N. Tehrani
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Patent number: 6365419Abstract: A method of fabricating an MRAM cell includes providing an isolation transistor on a semiconductor substrate and forming an interconnect stack on the substrate in communication with one terminal of the transistor. A via is formed on the upper end of the stack so as to extend from a position below the digit line to a position above the digit line. The via also extends above the upper surface of a dielectric layer to provide an alignment key. A MTJ memory cell is positioned on the upper surface in contact with the via, and the ends of a free layer of magnetic material are spaced from the ends of a pinned edge of magnetic material by using sidewall spacers and selective etching.Type: GrantFiled: August 28, 2000Date of Patent: April 2, 2002Assignee: Motorola, Inc.Inventors: Mark Durlam, Mark DeHerrera, Eugene Chen, Saied Tehrani, Gloria Kerszykowski, Peter K. Naji, Jon Slaughter, Kelly W. Kyler
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Patent number: 6331943Abstract: Magnetic tunnel junction random access memory architecture in which an array of memory cells is arranged in rows and columns and each memory cell includes a magnetic tunnel junction and a control transistor connected in parallel. A control line is connected to the gate of each control transistor in a row of control transistors and a metal programming line extending adjacent to each magnetic tunnel junction is connected to the control line in spaced apart intervals by vias. Further, groups of memory cells in each column are connected in series to form local bit lines which are connected in parallel to global bit lines. The series-parallel configuration is read using a centrally located column to provide a reference signal and data from columns on each side of the reference column is compared to the reference signal or two columns in proximity are differentially compared.Type: GrantFiled: August 28, 2000Date of Patent: December 18, 2001Assignee: Motorola, Inc.Inventors: Peter K. Naji, Mark DeHerrera, Mark Durlam
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Patent number: 6233172Abstract: An improved and novel magnetic element (10; 10′; 50; 50′; 80) including a plurality of thin film layers wherein the bit end magneto-static demagnetizing fields cancel the total positive coupling of the structure to obtain dual magnetic states in a zero external field. Additionally disclosed is a method of fabricating a magnetic element (10) by providing a plurality of thin film layers wherein the bit end magneto-static demagnetizing fields of the thin film layers cancel the total positive coupling of the structure to obtain dual magnetic states in a zero external field.Type: GrantFiled: December 17, 1999Date of Patent: May 15, 2001Assignee: Motorola, Inc.Inventors: Eugene Youjun Chen, Jon Michael Slaughter, Mark Durlam, Mark DeHerrera, Saied N. Tehrani
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Patent number: 6211090Abstract: A method of fabricating a flux concentrator for use in magnetic memory devices including the steps of providing at least one magnetic memory bit (10) and forming proximate thereto a material stack defining a copper (Cu) damascene bit line (56) including a flux concentrating layer (52). The method includes the steps of depositing a bottom dielectric layer (32), an optional etch stop (34) layer, and a top dielectric layer (36) proximate the magnetic memory bit (10). A trench (38) is etched in the top dielectric layer (36) and the bottom dielectric layer (32). A first barrier layer (42) is deposited in the trench (38). Next, a metal system (29) is deposited on a surface of the first barrier layer (42). The metal system (29) includes a copper (Cu) seed material (44), and a plated copper (Cu) material (46), a first outside barrier layer (50), a flux concentrating layer (52), and a second outside barrier layer (54). The metal system (29) is patterned and etched to define a copper (Cu) damascene bit line (56).Type: GrantFiled: March 21, 2000Date of Patent: April 3, 2001Assignee: Motorola, Inc.Inventors: Mark Durlam, Eugene Youjun Chen, Saied N. Tehrani, Jon Michael Slaughter, Gloria Kerszykowski, Kelly Wayne Kyler
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Patent number: 6174737Abstract: An improved and novel MRAM device with magnetic memory elements and circuitry for controlling magnetic memory elements is provided. The circuitry, for example, transistor (12a) having a gate (17a), a drain (18) and a source (16a) is integrated on a substrate (11) and coupled to a magnetic memory element (43) on the circuitry through a plug conductor (19a) and a conductor line (45). The circuitry is fabricated first under the CMOS process and then magnetic memory elements (43, 44). Digit line (29) and bit line (48) are placed under and on top of magnetic memory element (43), respectively, and enabled to access magnetic memory element (43). These lines are enclosed by a high permeability layer (31, 56, 58) excluding a surface facing magnetic memory element (43), which shields and focuses a magnetic field toward magnetic memory element (43).Type: GrantFiled: June 24, 1999Date of Patent: January 16, 2001Assignee: Motorola, Inc.Inventors: Mark Durlam, Gloria Kerszykowski, Jon Slaughter, Theodore Zhu, Eugene Chen, Saied N. Tehrani, Kelly W. Kyler
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Patent number: 6153443Abstract: An improved and novel fabrication method for magnetoresistive random access memory (MRAM) is provided. An MRAM device has memory elements and circuitry for managing the memory elements. The circuitry includes transistor (12a), digit line (29), etc., which are integrated on a substrate (11). The circuitry is fabricated first under the CMOS process and then magnetic memory elements (53, 54). A dielectric layer (40, 41) is deposited on the circuit, and trenches (42, 43) are formed in the dielectric layer. A blanket layer (46), which includes magnetic layers (48, 49) and a non-magnetic layer (50) sandwiched by the magnetic layers, is deposited on dielectric layer (41) and in the trenches. Then, the blanket layer outside the trenches is removed and MRAM elements (53, 54) are formed in the trenches.Type: GrantFiled: December 21, 1998Date of Patent: November 28, 2000Assignee: Motorola, Inc.Inventors: Mark Durlam, Gloria Kerszykowski, Jon M. Slaughter, Eugene Chen, Saied N. Tehrani, Kelly W. Kyler, X. Theodore Zhu
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Patent number: 5966323Abstract: A low switching field magnetoresistive tunneling junction memory cell including a first exchange coupled structure having a pair of magnetoresistive layers and an exchange interaction layer sandwiched therebetween so as to pin the magnetic vectors of the pair of layers anti-parallel, a second exchange coupled structure having a pair of magnetoresistive layers and an exchange interaction layer sandwiched therebetween so as to pin the magnetic vectors of the pair of layers anti-parallel, and electrically insulating material sandwiched between the first and second exchange coupled structures to form a magnetoresistive tunneling junction. Each of the first and second exchange coupled structures, and hence the memory cell, has no net magnetic moment.Type: GrantFiled: December 18, 1997Date of Patent: October 12, 1999Assignee: Motorola, Inc.Inventors: Eugene Chen, Mark Durlam, Saied N. Tehrani
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Patent number: 5959880Abstract: A low aspect ratio magnetoresistive tunneling junction memory cell includes two layers of magnetoresistive material separated by electrically insulating material so as to form a magnetoresistive tunneling junction. An exchange interaction layer is sandwiched between one layer of the junction and a third layer of magnetoresistive material so as to pin the magnetic vector of one layer of the junction anti-parallel to a magnetic vector in the third layer so that magnetostatic interaction between the junction layers is canceled and the magnetic vector of the one layer is free to move in either of the two directions parallel to the polarization axis. Antiferromagnetic material is positioned adjacent the third layer so as to fix the magnetic vector in the third layer uni-directionally parallel to the polarization axis.Type: GrantFiled: December 18, 1997Date of Patent: September 28, 1999Assignee: Motorola, Inc.Inventors: Jing Shi, Theodore Zhu, Saied N. Tehrani, Eugene Chen, Mark Durlam
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Patent number: 5940319Abstract: An improved and novel MRAM device with magnetic memory elements and circuitry for controlling magnetic memory elements is provided. The circuitry, for example, transistor (12a) having a gate (17a), a drain (18) and a source (16a) is integrated on a substrate (11) and coupled to a magnetic memory element (43) on the circuitry through a plug conductor (19a) and a conductor line (45). The circuitry is fabricated first under the CMOS process and then magnetic memory elements (43, 44). Digit line (29) and bit line (48) are placed under and on top of magnetic memory element (43), respectively, and enabled to access magnetic memory element (43). These lines are enclosed by a high permeability layer (31, 56, 58) excluding a surface facing magnetic memory element (43), which shields and focuses a magnetic field toward magnetic memory element (43).Type: GrantFiled: August 31, 1998Date of Patent: August 17, 1999Assignee: Motorola, Inc.Inventors: Mark Durlam, Gloria Kerszykowski, Jon Slaughter, Theodore Zhu, Eugene Chen, Saied N. Tehrani, Kelly W. Kyler
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Patent number: 5902690Abstract: A non-volatile magneto-resistive memory positioned on a semiconductor substrate is shielded from stray magnetic fields by a passivation layer partially or completely surrounding the non-volatile magneto-resistive memory. The passivation layer includes non-conductive ferrite materials, such as Mn--Zn-Ferrite, Ni--Zn-Ferrite, MnFeO, CuFeO, FeO, or NiFeO, for shielding the non-volatile magneto-resistive memory from stray magnetic fields. The non-conductive ferrite materials may also be in the form of a layer which focuses internally generated magnetic fields on the non-volatile magneto-resistive memory to reduce power requirements.Type: GrantFiled: February 25, 1997Date of Patent: May 11, 1999Assignee: Motorola, Inc.Inventors: Clarence J. Tracy, Eugene Chen, Mark Durlam, Theodore Zhu, Saied N. Tehrani
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Patent number: 5861328Abstract: A method of fabricating GMR devices on a CMOS substrate structure with a semiconductor device formed therein. The method includes forming a dielectric system with a planar surface having a roughness in a range of 1 .ANG. to 20 .ANG. RMS on the substrate; disposing and patterning films of giant magneto-resistive material on the planar surface so as to form a memory cell; disposing a dielectric cap on the cell so as to seal the cell and provide a barrier to subsequent operations; forming vias through the dielectric cap and the dielectric system to interconnects of the semiconductor device; forming vias through the dielectric cap to the magnetic memory cell; and depositing a metal system through the vias to the interconnects and to the memory cell.Type: GrantFiled: October 7, 1996Date of Patent: January 19, 1999Assignee: Motorola, Inc.Inventors: Saied N. Tehrani, Eugene Chen, Mark Durlam, Xiaodong T. Zhu, Clarence J. Tracy
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Patent number: 5838607Abstract: Spin polarized apparatus includes a spin polarizing section of magnetic material with an electron input port and a polarized electron port and a transport section of magnetic material with a polarized electron input port electrically coupled to the polarized electron port of the polarizing section and an electron output port. Electrons traversing the polarizing section all have similar spin directions at the output dependent upon the magnetization direction of the polarizing section. Electrons traversing the transport section all have spins in a first direction at the output. The cell has a low resistance when the magnetization direction of the polarizing section is in the first direction (electrons entering the transport section all have spins in the first direction) and a high resistance when the magnetization direction is in an opposite direction (electrons entering the transport section all have spins in the opposite direction).Type: GrantFiled: September 25, 1996Date of Patent: November 17, 1998Assignee: Motorola, Inc.Inventors: Xiaodong T. Zhu, Saied N. Tehrani, Eugene Chen, Mark Durlam
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Patent number: 5831920Abstract: A new and improved magnetic device is provided for memories and sensors. A magnetic random access memory (MRAM) device (20) includes a storage element (21) for magnetically storing states and an amplifier (25) for sensing the states stored in the storage element. A circuit (27) for dissipating electrical charges are coupled to inputs (23,24) of the amplifier (25) to discharge electrical charges applied to the inputs (23,24) of the amplifier (25). The charge dissipating circuit (27) includes junctions (271-274) which are typically connected in series between power (255) and common (257) lines. Electric charges applied to the inputs (23,24) of the amplifier (25) is discharged through the junctions (271-274).Type: GrantFiled: October 14, 1997Date of Patent: November 3, 1998Assignee: Motorola, Inc.Inventors: Eugene Chen, Saied N. Tehrani, Mark Durlam, Peter K. Naji
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Patent number: 5804458Abstract: A method of fabricating a plurality of spaced apart submicron memory cells is disclosed, including the steps of depositing a magnetoresistive system on a substrate formation, depositing and patterning a first layer of material to form sidewalls, and depositing a second, selectively etchable, layer of material on the first layer of material, etching the second layer of material to define spacers on the sidewalls of the first layer of material, etching the magnetoresistive system, using the spacers as a mask, to define a plurality of spaced apart submicron magnetic memory cells, and depositing electrical contacts on the plurality of spaced apart submicron magnetic memory cells.Type: GrantFiled: December 16, 1996Date of Patent: September 8, 1998Assignee: Motorola, Inc.Inventors: Saied N. Tehrani, Mark Durlam, Herbert Goronkin