Abstract: An apparatus related to a lot signalling device used to find misplaced lots. A remote control signalling device comprises a receiver section (5) for receiving an RF-command including a unique address of at least one of said plurality of remote control signalling devices (3) from a central control unit (1), an address memory (6) for storing the address of said remote control signalling device, an output section (7) for signalling an alarm upon receiving the RF-command, if said address included in the RF-command matches the stored address in said address memory (6). A method for processing items at different process stages comprises the steps of: transmitting RF-commands including a unique address of at least one of said plurality of remote control signalling devices by a central control unit (1), signalling an alarm by said remote control signalling device (3) upon reception of an RF-command from said central control unit (1).

Abstract: Particles counts and concentrations are reduced from the backside of a substrate, such as a semiconductor wafer or flat panel display with the invention, to improve precision and uniformity in subsequent operations, including lithography operations. A semiconductor substrate is placed on a chuck (10) in a track system (30), such as a resist coater, a developer, or other form of spin coater. The substrate is processed accordingly to conventional practice and the substrate is removed. The chuck is then cleaned by dispensing a solvent, for example using EGMEA or PGMEA, through a dispense nozzle (38) of the system. Alternatively, or additionally, a brush (36) or sponge which is at least partially saturated with a solvent (39) is moved across the chuck to remove particles. The chuck cleaning can occur between every wafer, every wafer lot, or less periodically, such as between shifts, as the chuck particle accumulation dictates.

Abstract: The present disclosure is a method for in situ monitoring of backside contamination on a semiconductor wafer (120) between processing steps which are performed in a multi-chamber tool (500). In a first form, a laser source (220) and a detector (210) are mounted on a robotic arm (110, 111), or within a semiconductor processing tool (500). The laser (220) and detector (210) move along with the robotic arm (110) as the robotic arm (110) shuffles the wafer (120) between processing carriers (610-650) and chambers (510-540). While in transit the backside of the semiconductor wafer (120) is scanned by a laser beam (221), whereby contamination is detected by a detector (210). The laser (220) and detector (210) then scan the backside of the wafer (120) while the robotic arm (110) is in transit and/or while the robotic arm (110) is stationary in the processing sequence.

Abstract: An apparatus for reading information marks comprising a strobe light activating or reflecting information marks manually placed on objects or wood products. A camera is used for reading the marks. One or more detectors are used to recognize marks and color. A central processing unit is used to process, solve and interpret character and color recognition. A photo-electric eye or a signal from a control device is used to time the strobe and detector. The information contained in the marks is fed directly to the control system and may be used to generate reports.