Patents by Inventor Mark L. Doczy

Mark L. Doczy has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20180287050
    Abstract: MTJ material stacks with a laterally strained free magnetic layer, STTM devices employing such stacks, and computing platforms employing such STTM devices. In some embodiments, perpendicular pMTJ material stacks included free magnetic layers that are compressively strained laterally by a surrounding material, which increases coercive field strength for a more stable device. In some embodiments, a pMTJ material stack is encased in a compressive-stressed material. In some further embodiments, a pMTJ material stack is encased first in a dielectric shell, permitting a conductive material to be deposited over the shell as the compressive-stressed, strain-inducing material layer.
    Type: Application
    Filed: September 25, 2015
    Publication date: October 4, 2018
    Applicant: Intel Corporation
    Inventors: Prashanth P. Madras, MD Tofizur Rahman, Christopher J. Wiegand, Brian Maertz, Oleg Golonzka, Kevin P. O'Brien, Mark L. Doczy, Brian S. Doyle, Tahir Ghani, Kaan Oguz
  • Publication number: 20180248116
    Abstract: Technologies for manufacturing spin transfer torque memory (STTM) elements are disclosed. In some embodiments, the technologies include methods for removing a re-deposited layer and/or interrupting the electrical continuity of a re-deposited layer that may form on one or more sidewalls of an STTM element during its formation. Devices and systems including such STTM elements are also described.
    Type: Application
    Filed: September 18, 2015
    Publication date: August 30, 2018
    Applicant: Intel Corporation
    Inventors: Mark L. DOCZY, Brian S. DOYLE, Charles C. KUO, Kaan OGUZ, Kevin P. O'BRIEN, Satyarth SURI, Tejaswi K. INDUKURI
  • Publication number: 20180248114
    Abstract: MTJ material stacks, pSTTM devices employing such stacks, and computing platforms employing such STTM devices. In some embodiments, perpendicular MTJ material stacks with free magnetic layers are magnetically coupled through a metal material layer for improved stability and low damping. In some advantageous embodiments, layers of a free magnetic material stack are magnetically coupled through a coupling layer of a metal comprising at least molybdenum (Mo). The Mo may be in pure form or alloyed with other constituents.
    Type: Application
    Filed: September 25, 2015
    Publication date: August 30, 2018
    Applicant: Intel Corporation
    Inventors: Kaan Oguz, Kevin P. O'Brien, Christopher J. Wiegand, MD Tofizur Rahman, Brian S. Doyle, Mark L. Doczy, Oleg Golonzka, Tahir Ghani, Justin S. Brockman
  • Publication number: 20180248115
    Abstract: MTJ material stacks, pSTTM devices employing such stacks, and computing platforms employing such pSTTM devices. In some embodiments, perpendicular MTJ material stacks include one or more electrode interface material layers disposed between a an electrode metal, such as TiN, and a seed layer of an antiferromagnetic layer or synthetic antiferromagnetic (SAF) stack. The electrode interface material layers may include either or both of a Ta material layer or CoFeB material layer. In some Ta embodiments, a Ru material layer may be deposited on a TiN electrode surface, followed by the Ta material layer. In some CoFeB embodiments, a CoFeB material layer may be deposited directly on a TiN electrode surface, or a Ta material layer may be deposited on the TiN electrode surface, followed by the CoFeB material layer.
    Type: Application
    Filed: September 25, 2015
    Publication date: August 30, 2018
    Applicant: Intel Corporation
    Inventors: Kaan Oguz, Kevin P. O'Brien, Christopher J. Wiegand, MD Tofizur Rahman, Brian S. Doyle, Mark L. Doczy, Oleg Golonzka, Tahir Ghani, Justin S. Brockman
  • Publication number: 20180240970
    Abstract: MTJ material stacks, pSTTM devices employing such stacks, and computing platforms employing such pSTTM devices. In some embodiments, perpendicular MTJ material stacks include a multi-layered filter stack disposed between a fixed magnetic layer and an antiferromagnetic layer or synthetic antiferromagnetic (SAF) stack. In some embodiments, non-magnetic layers of the filter stack include at least one of Ta, Mo, Nb, W, or Hf. These transition metals may be in pure form or alloyed with other constituents.
    Type: Application
    Filed: September 25, 2015
    Publication date: August 23, 2018
    Applicant: Intel Corporation
    Inventors: Kaan Oguz, Kevin P. O'Brien, Christopher J. Wiegand, MD Tofizur Rahman, Brian S. Doyle, Mark L. Doczy, Oleg Golonzka, Tahir Ghani, Justin S. Brockman
  • Publication number: 20180240969
    Abstract: Technologies for manufacturing spin transfer torque memory (STTM) elements are disclosed. In some embodiments, the technologies include methods for interrupting the electrical continuity of a re-deposited layer that may form on one or more sidewalls of an STTM element during its formation. Devices and systems including such STTM elements are also described.
    Type: Application
    Filed: September 18, 2015
    Publication date: August 23, 2018
    Applicant: INTEL CORPORATION
    Inventors: MARK L. DOCZY, BRIAN S. DOYLE, CHARLES C. KUO, KAAN OGUZ, KEVIN P. O'BRIEN, SATYARTH SURI, TEJASWI K. INDUKURI
  • Publication number: 20180166625
    Abstract: Techniques are disclosed for fabricating a self-aligned spin-transfer torque memory (STTM) device with a dot-contacted free magnetic layer. In some embodiments, the disclosed STTM device includes a first dielectric spacer covering sidewalls of an electrically conductive hardmask layer that is patterned to provide an electronic contact for the STTM's free magnetic layer. The hardmask contact can be narrower than the free magnetic layer. The first dielectric spacer can be utilized in patterning the STTM's fixed magnetic layer. In some embodiments, the STTM further includes an optional second dielectric spacer covering sidewalls of its free magnetic layer. The second dielectric spacer can be utilized in patterning the STTM's fixed magnetic layer and may serve, at least in part, to protect the sidewalls of the free magnetic layer from redepositing of etch byproducts during such patterning, thereby preventing electrical shorting between the fixed magnetic layer and the free magnetic layer.
    Type: Application
    Filed: January 29, 2018
    Publication date: June 14, 2018
    Applicant: INTEL CORPORATION
    Inventors: Charles C. Kuo, Kaan Oguz, Brian S. Doyle, Mark L. Doczy, David L. Kencke, Satyarth Suri, Robert S. Chau
  • Publication number: 20180165065
    Abstract: Described is an apparatus which comprises: a magnetic tunneling junction (MTJ) device with out-of-plane magnetizations for its free and fixed magnetic layers, and configured to have a magnetization offset away from a center and closer to a switching threshold of the MTJ device; and logic for generating random numbers according to a resistive state of the MTJ device.
    Type: Application
    Filed: June 17, 2015
    Publication date: June 14, 2018
    Inventors: Charles C. KUO, Justin S. BROCKMAN, Juan G. ALZATE VINASCO, Kaan OGUZ, Kevin P. O'BRIEN, Brian S. DOYLE, Mark L. DOCZY, Satyarth SURI, Robert S. CHAU, Prashant MAJHI, Ravi PILLARISETTY, Elijah V. KARPOV
  • Publication number: 20180047846
    Abstract: A method of fabricating a MOS transistor having a thinned channel region is described. The channel region is etched following removal of a dummy gate. The source and drain regions have relatively low resistance with the process.
    Type: Application
    Filed: October 11, 2017
    Publication date: February 15, 2018
    Inventors: Justin K. Brask, Robert S. Chau, Suman Datta, Mark L. Doczy, Brian S. Doyle, Jack T. Kavalieros, Amlan Majumdar, Matthew V. Metz, Marko Radosavljevic
  • Patent number: 9882123
    Abstract: Perpendicular spin transfer torque memory (STTM) devices with enhanced stability and methods of fabricating perpendicular STTM devices with enhanced stability are described. For example, a material layer stack for a magnetic tunneling junction includes a fixed magnetic layer. A dielectric layer is disposed above the fixed magnetic layer. A free magnetic layer is disposed above the dielectric layer. A conductive oxide material layer is disposed on the free magnetic layer.
    Type: Grant
    Filed: October 24, 2016
    Date of Patent: January 30, 2018
    Assignee: Intel Corporation
    Inventors: Brian S. Doyle, Charles C. Kuo, Kaan Oguz, Uday Shah, Elijah V. Karpov, Roksana Golizadeh Mojarad, Mark L. Doczy, Robert S. Chau
  • Patent number: 9882121
    Abstract: Techniques are disclosed for fabricating a self-aligned spin-transfer torque memory (STTM) device with a dot-contacted free magnetic layer. In some embodiments, the disclosed STTM device includes a first dielectric spacer covering sidewalls of an electrically conductive hardmask layer that is patterned to provide an electronic contact for the STTM's free magnetic layer. The hardmask contact can be narrower than the free magnetic layer. The first dielectric spacer can be utilized in patterning the STTM's fixed magnetic layer. In some embodiments, the STTM further includes an optional second dielectric spacer covering sidewalls of its free magnetic layer. The second dielectric spacer can be utilized in patterning the STTM's fixed magnetic layer and may serve, at least in part, to protect the sidewalls of the free magnetic layer from redepositing of etch byproducts during such patterning, thereby preventing electrical shorting between the fixed magnetic layer and the free magnetic layer.
    Type: Grant
    Filed: March 28, 2014
    Date of Patent: January 30, 2018
    Assignee: INTEL CORPORATION
    Inventors: Charles C. Kuo, Kaan Oguz, Brian S. Doyle, Mark L. Doczy, David L. Kencke, Satyarth Suri, Robert S. Chau
  • Publication number: 20170345476
    Abstract: A material layer stack for a magnetic tunneling junction, the material layer stack including a fixed magnetic layer; a dielectric layer; a free magnetic layer; and an amorphous electrically-conductive seed layer, wherein the fixed magnetic layer is disposed between the dielectric layer and the seed layer. A non-volatile memory device including a material stack including an amorphous electrically-conductive seed layer; and a fixed magnetic layer juxtaposed and in contact with the seed layer. A method including forming an amorphous seed layer on a first electrode of a memory device; forming a material layer stack on the amorphous seed layer, the material stack including a dielectric layer disposed between a fixed magnetic layer and a free magnetic layer, wherein the fixed magnetic layer.
    Type: Application
    Filed: September 26, 2014
    Publication date: November 30, 2017
    Applicants: Intel Corporation, Intel Corporation
    Inventors: Mark L. DOCZY, Kaan OGUZ, Brian S. DOYLE, Charles C. KUO, Robert S. CHAU, Satyarth SURI
  • Publication number: 20170323972
    Abstract: A transistor having a narrow bandgap semiconductor source/drain region is described. The transistor includes a gate electrode formed on a gate dielectric layer formed on a silicon layer. A pair of source/drain regions are formed on opposite sides of the gate electrode wherein said pair of source/drain regions comprise a narrow bandgap semiconductor film formed in the silicon layer on opposite sides of the gate electrode.
    Type: Application
    Filed: July 26, 2017
    Publication date: November 9, 2017
    Inventors: Robert S. CHAU, Suman DATTA, Jack KAVALIEROS, Justin K. BRASK, Mark L. DOCZY, Matthew METZ
  • Patent number: 9806195
    Abstract: A method of fabricating a MOS transistor having a thinned channel region is described. The channel region is etched following removal of a dummy gate. The source and drain regions have relatively low resistance with the process.
    Type: Grant
    Filed: March 14, 2016
    Date of Patent: October 31, 2017
    Assignee: Intel Corporation
    Inventors: Justin K. Brask, Robert S. Chau, Suman Datta, Mark L. Doczy, Brian S. Doyle, Jack T. Kavalieros, Amlan Majumdar, Matthew V. Metz, Marko Radosavljevic
  • Publication number: 20170309734
    Abstract: A CMOS device includes a PMOS transistor with a first quantum well structure and an NMOS device with a second quantum well structure. The PMOS and NMOS transistors are formed on a substrate.
    Type: Application
    Filed: June 16, 2017
    Publication date: October 26, 2017
    Inventors: Suman DATTA, Mantu K. HUDAIT, Mark L. DOCZY, Jack T. KAVALIEROS, Amlan MAJUMDAR, Justin K. BRASK, Been-Yih JIN, Matthew V. METZ, Robert S. CHAU
  • Patent number: 9779794
    Abstract: Techniques are disclosed for forming a spin-transfer torque memory (STTM) element having an annular contact to reduce critical current requirements. The techniques reduce critical current requirements for a given magnetic tunnel junction (MTJ), because the annular contact reduces contact size and increases local current density, thereby reducing the current needed to switch the direction of the free magnetic layer of the MTJ. In some cases, the annular contact surrounds at least a portion of an insulator layer that prevents the passage of current. In such cases, current flows through the annular contact and around the insulator layer to increase the local current density before flowing through the free magnetic layer. The insulator layer may comprise a dielectric material, and in some cases, is a tunnel material, such as magnesium oxide (MgO). In some cases, a critical current reduction of at least 10% is achieved for a given MTJ.
    Type: Grant
    Filed: March 26, 2014
    Date of Patent: October 3, 2017
    Assignee: INTEL CORPORATION
    Inventors: Brian S. Doyle, David L. Kencke, Kaan Oguz, Mark L. Doczy, Satyarth Suri, Robert S. Chau, Charles C. Kuo, Roksana Golizadeh Mojarad
  • Publication number: 20170271576
    Abstract: A material layer stack for a magnetic tunneling junction, the material layer stack including a fixed magnetic layer; a dielectric layer; a free magnetic layer; and an amorphous electrically-conductive seed layer, wherein the fixed magnetic layer is disposed between the dielectric layer and the seed layer. A non-volatile memory device including a material stack including an amorphous electrically-conductive seed layer; and a fixed magnetic layer juxtaposed and in contact with the seed layer. A method including forming an amorphous seed layer on a first electrode of a memory device; forming a material layer stack on the amorphous seed layer, the material stack including a dielectric layer disposed between a fixed magnetic layer and a free magnetic layer, wherein the fixed magnetic layer.
    Type: Application
    Filed: September 26, 2014
    Publication date: September 21, 2017
    Inventors: Kevin P. O'BRIEN, Kaan OGUZ, Brian S. DOYLE, Mark L. DOCZY, Charles C. KUO, Robert S. CHAU
  • Patent number: 9748391
    Abstract: A transistor having a narrow bandgap semiconductor source/drain region is described. The transistor includes a gate electrode formed on a gate dielectric layer formed on a silicon layer. A pair of source/drain regions are formed on opposite sides of the gate electrode wherein said pair of source/drain regions comprise a narrow bandgap semiconductor film formed in the silicon layer on opposite sides of the gate electrode.
    Type: Grant
    Filed: February 24, 2017
    Date of Patent: August 29, 2017
    Assignee: Intel Corporation
    Inventors: Robert S. Chau, Suman Datta, Jack Kavalieros, Justin K. Brask, Mark L. Doczy, Matthew Metz
  • Publication number: 20170200884
    Abstract: Embodiments of the present disclosure describe configurations and techniques to increase interfacial anisotropy of magnetic tunnel junctions. In embodiments, a magnetic tunnel junction may include a cap layer, a tunnel barrier, and a magnetic layer disposed between the cap layer and the tunnel barrier. A buffer layer may, in some embodiments, be disposed between the magnetic layer and a selected one of the cap layer or the tunnel barrier. In such embodiments, the interfacial anisotropy of the buffer layer and the selected one of the cap layer or the tunnel barrier may be greater than an interfacial anisotropy of the magnetic layer and the selected one of the cap layer or the tunnel barrier. Other embodiments may be described and/or claimed.
    Type: Application
    Filed: August 5, 2014
    Publication date: July 13, 2017
    Inventors: Kaan OGUZ, Mark L. DOCZY, Brian S. DOYLE, Charles C. KUO, Anurag CHAUDHRY, Robert S. CHAU
  • Patent number: 9691856
    Abstract: A CMOS device includes a PMOS transistor with a first quantum well structure and an NMOS device with a second quantum well structure. The PMOS and NMOS transistors are formed on a substrate.
    Type: Grant
    Filed: December 21, 2015
    Date of Patent: June 27, 2017
    Assignee: Intel Corporation
    Inventors: Suman Datta, Mantu K. Hudait, Mark L. Doczy, Jack T. Kavalieros, Amlan Majumdar, Justin K. Brask, Been-Yih Jin, Matthew V. Metz, Robert S. Chau