Patents by Inventor Markus Zundel

Markus Zundel has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11810958
    Abstract: A transistor includes: gate electrodes and field electrodes, wherein in each case one gate electrode and one field electrode are arranged one above another in a vertical direction in a common trench of a semiconductor body; a gate pad to which the gate electrodes are connected; and a source metallization arranged above the semiconductor body. The field electrodes of a first group include at least one contact section. The at least one contact section is arranged between two sections of a gate electrode arranged in the same trench and is connected to the source metallization. The two sections of the gate electrode are separated from one another in a region of the contact section. At least one of the two sections of the gate electrode arranged in the same trench is electrically connected to a gate electrode arranged in a further trench by way of a gate connecting electrode.
    Type: Grant
    Filed: August 12, 2021
    Date of Patent: November 7, 2023
    Assignee: Infineon Technologies AG
    Inventors: Felix Buth, Margarete Deckers, Christian Feuerbaum, Uwe Schmalzbauer, Markus Zundel
  • Patent number: 11804432
    Abstract: A semiconductor device includes a semiconductor substrate having a first main surface and a metal structure above the first main surface. The metal structure has a periphery region that includes a transition section along which the metal structure transitions from a first thickness to a second thickness less than the first thickness. A polymer-based insulating material contacts and covers at least the periphery region of the metal structure. A thickness of the polymer-based insulating material begins to increase on a first main surface of the metal structure that faces away from the semiconductor substrate and continues to increase in a direction towards the transition section. An average slope of a surface of the polymer-based insulating material which faces away from the semiconductor substrate, as measured with respect to the first main surface of the metal structure, is less than 60 degrees along the periphery region of the metal structure.
    Type: Grant
    Filed: February 11, 2021
    Date of Patent: October 31, 2023
    Assignee: Infineon Technologies AG
    Inventors: Markus Zundel, Sergey Ananiev, Andreas Behrendt, Holger Doepke, Uwe Schmalzbauer, Michael Sorger, Dominic Thurmer
  • Patent number: 11695069
    Abstract: According to an embodiment of a semiconductor device, the semiconductor device includes: a first active cell area comprising a first plurality of parallel gate trenches; a second active cell area comprising a second plurality of parallel gate trenches; and a metallization layer above the first and the second active cell areas. The metallization layer includes: a first part contacting a semiconductor mesa region between the plurality of parallel gate trenches in the first and the second active cell areas; and a second part surrounding the first part. The second part of the metallization layer contacts the first plurality of gate trenches along a first direction and the second plurality of gate trenches along a second direction different from the first direction.
    Type: Grant
    Filed: May 10, 2021
    Date of Patent: July 4, 2023
    Assignee: Infineon Technologies AG
    Inventors: Markus Zundel, Stefan Mieslinger, Thomas Ostermann, Andrew Christopher Graeme Wood
  • Patent number: 11664416
    Abstract: A semiconductor device includes a semiconductor body having a first surface. A first trench extends in a vertical direction into the semiconductor body. The semiconductor device also includes a first interlayer in the first trench and a first dopant source in the first trench. The first interlayer is arranged between the first dopant source and the semiconductor body, and the first dopant source includes a first dopant species. The semiconductor device also includes a semiconductor area doped with the first dopant species and which completely surrounds the first trench at least at a depth in the semiconductor body and adjoins the first trench.
    Type: Grant
    Filed: September 12, 2019
    Date of Patent: May 30, 2023
    Assignee: Infineon Technologies AG
    Inventor: Markus Zundel
  • Publication number: 20220285550
    Abstract: A method of manufacturing a semiconductor body includes forming a pattern at a first side of a substrate, forming a semiconductor layer on the first side of the substrate, attaching the substrate and the semiconductor layer to a carrier via a surface of the semiconductor layer, and removing the substrate from a second side opposite to the first side.
    Type: Application
    Filed: May 25, 2022
    Publication date: September 8, 2022
    Inventors: Markus Zundel, Andreas Meiser, Hans-Peter Lang, Thorsten Meyer, Peter Irsigler
  • Publication number: 20220254713
    Abstract: A semiconductor device includes a semiconductor substrate having a first main surface and a metal structure above the first main surface. The metal structure has a periphery region that includes a transition section along which the metal structure transitions from a first thickness to a second thickness less than the first thickness. A polymer-based insulating material contacts and covers at least the periphery region of the metal structure. A thickness of the polymer-based insulating material begins to increase on a first main surface of the metal structure that faces away from the semiconductor substrate and continues to increase in a direction towards the transition section. An average slope of a surface of the polymer-based insulating material which faces away from the semiconductor substrate, as measured with respect to the first main surface of the metal structure, is less than 60 degrees along the periphery region of the metal structure.
    Type: Application
    Filed: February 11, 2021
    Publication date: August 11, 2022
    Inventors: Markus Zundel, Sergey Ananiev, Andreas Behrendt, Holger Doepke, Uwe Schmalzbauer, Michael Sorger, Dominic Thurmer
  • Publication number: 20220052171
    Abstract: A transistor includes: gate electrodes and field electrodes, wherein in each case one gate electrode and one field electrode are arranged one above another in a vertical direction in a common trench of a semiconductor body; a gate pad to which the gate electrodes are connected; and a source metallization arranged above the semiconductor body. The field electrodes of a first group include at least one contact section. The at least one contact section is arranged between two sections of a gate electrode arranged in the same trench and is connected to the source metallization. The two sections of the gate electrode are separated from one another in a region of the contact section. At least one of the two sections of the gate electrode arranged in the same trench is electrically connected to a gate electrode arranged in a further trench by way of a gate connecting electrode.
    Type: Application
    Filed: August 12, 2021
    Publication date: February 17, 2022
    Inventors: Felix Buth, Margarete Deckers, Christian Feuerbaum, Uwe Schmalzbauer, Markus Zundel
  • Patent number: 11239188
    Abstract: A power semiconductor device includes a semiconductor body configured to conduct a load current. A load terminal electrically connected with the semiconductor body is configured to couple the load current into and/or out of the semiconductor body. The load terminal includes a metallization having a frontside and a backside. The backside interfaces with a surface of the semiconductor body. The frontside is configured to interface with a wire structure having at least one wire configured to conduct at least a part of the load current. The frontside has a lateral structure formed at least by at least one local elevation of the metallization. The local elevation has a height in an extension direction defined by a distance between the base and top of the local elevation and, in a first lateral direction perpendicular to the extension direction, a base width at the base and a top width at the top.
    Type: Grant
    Filed: November 20, 2017
    Date of Patent: February 1, 2022
    Assignee: Infineon Technologies AG
    Inventors: Markus Zundel, Rainer Pelzer, Manfred Schneegans
  • Patent number: 11227945
    Abstract: A transistor device includes at least one transistor cell which includes: a source region, a body region and a drift region in a semiconductor body; a gate electrode dielectrically insulated from the body region by a gate dielectric; a field electrode dielectrically insulated from the drift region by a field electrode dielectric; and a contact plug extending from a first surface of the semiconductor body to the field electrode. A portion of the semiconductor body is arranged between the field electrode trench and the first surface of the semiconductor body. The portion of the semiconductor body that is arranged between the field electrode trench and the first surface comprises the body region. The body region directly contacts the upper surface of the field electrode dielectric.
    Type: Grant
    Filed: June 8, 2020
    Date of Patent: January 18, 2022
    Assignee: Infineon Technologies Austria AG
    Inventors: Markus Zundel, Franz Hirler
  • Publication number: 20210265497
    Abstract: According to an embodiment of a semiconductor device, the semiconductor device includes: a first active cell area comprising a first plurality of parallel gate trenches; a second active cell area comprising a second plurality of parallel gate trenches; and a metallization layer above the first and the second active cell areas. The metallization layer includes: a first part contacting a semiconductor mesa region between the plurality of parallel gate trenches in the first and the second active cell areas; and a second part surrounding the first part. The second part of the metallization layer contacts the first plurality of gate trenches along a first direction and the second plurality of gate trenches along a second direction different from the first direction.
    Type: Application
    Filed: May 10, 2021
    Publication date: August 26, 2021
    Inventors: Markus Zundel, Stefan Mieslinger, Thomas Ostermann, Andrew Christopher Graeme Wood
  • Patent number: 11018250
    Abstract: According to an embodiment of a semiconductor device, the semiconductor device includes: a first active cell area comprising a first plurality of parallel gate trenches; a second active cell area comprising a second plurality of parallel gate trenches; and a metallization layer above the first and the second active cell areas. The metallization layer includes: a first part contacting a semiconductor mesa region between the plurality of parallel gate trenches in the first and the second active cell areas; and a second part surrounding the first part. The second part of the metallization layer contacts the first plurality of gate trenches along a first direction and the second plurality of gate trenches along a second direction different from the first direction.
    Type: Grant
    Filed: May 6, 2019
    Date of Patent: May 25, 2021
    Assignee: Infineon Technologies AG
    Inventors: Markus Zundel, Stefan Mieslinger, Thomas Ostermann, Andrew Christopher Graeme Wood
  • Patent number: 10957686
    Abstract: A semiconductor device of an embodiment includes a transistor device in a semiconductor die including a semiconductor body. The transistor device includes transistor cells connected in parallel and covering at least 80% of an overall active area at a first surface of the semiconductor body. The semiconductor device further includes a control terminal contact area at the first surface electrically connected to a control electrode of each of the transistor cells. A first load terminal contact area at the first surface electrically connected to a first load terminal region of each of the transistor cells. The semiconductor device further includes a resistor in the semiconductor die and electrically coupled between the control terminal contact area and the first load terminal contact area, and a pn junction diode electrically connected in series with the resistor. A method of producing the semiconductor device is also described.
    Type: Grant
    Filed: January 16, 2020
    Date of Patent: March 23, 2021
    Assignee: Infineon Technologies AG
    Inventors: Dirk Ahlers, Markus Zundel, Peter Brandl, Kurt Matoy, Thomas Ostermann
  • Patent number: 10879384
    Abstract: An alternator assembly includes an input terminal configured to input an alternating voltage, an output terminal configured to output a rectified voltage, and a gated diode arranged in a load path between the input terminal and the output terminal.
    Type: Grant
    Filed: November 27, 2018
    Date of Patent: December 29, 2020
    Assignee: Infineon Technologies AG
    Inventors: Dirk Ahlers, Markus Zundel, Dietrich Bonart, Ludger Borucki
  • Publication number: 20200357917
    Abstract: According to an embodiment of a semiconductor device, the semiconductor device includes: a first active cell area comprising a first plurality of parallel gate trenches; a second active cell area comprising a second plurality of parallel gate trenches; and a metallization layer above the first and the second active cell areas. The metallization layer includes: a first part contacting a semiconductor mesa region between the plurality of parallel gate trenches in the first and the second active cell areas; and a second part surrounding the first part. The second part of the metallization layer contacts the first plurality of gate trenches along a first direction and the second plurality of gate trenches along a second direction different from the first direction.
    Type: Application
    Filed: May 6, 2019
    Publication date: November 12, 2020
    Inventors: Markus Zundel, Stefan Mieslinger, Thomas Ostermann, Andrew Christopher Graeme Wood
  • Publication number: 20200303539
    Abstract: A transistor device includes at least one transistor cell which includes: a source region, a body region and a drift region in a semiconductor body; a gate electrode dielectrically insulated from the body region by a gate dielectric; a field electrode dielectrically insulated from the drift region by a field electrode dielectric; and a contact plug extending from a first surface of the semiconductor body to the field electrode. A portion of the semiconductor body is arranged between the field electrode trench and the first surface of the semiconductor body. The portion of the semiconductor body that is arranged between the field electrode trench and the first surface comprises the body region. The body region directly contacts the upper surface of the field electrode dielectric.
    Type: Application
    Filed: June 8, 2020
    Publication date: September 24, 2020
    Inventors: Markus Zundel, Franz Hirler
  • Patent number: 10707342
    Abstract: Disclosed is a transistor device and a method for producing thereof. The transistor device includes at least one transistor cell, wherein the at least one transistor cell includes: a source region, a body region and a drift region in a semiconductor body; a gate electrode dielectrically insulated from the body region by a gate dielectric; a field electrode dielectrically insulated from the drift region by a field electrode dielectric; and a contact plug extending from a first surface of the semiconductor body to the field electrode and adjoining the source region and the body region.
    Type: Grant
    Filed: March 1, 2019
    Date of Patent: July 7, 2020
    Assignee: Infineon Technology Austria AG
    Inventors: Markus Zundel, Franz Hirler
  • Patent number: 10672661
    Abstract: A semiconductor wafer having a main surface and a rear surface opposite from the main surface is provided. A die singulation preparation step is performed in kerf regions of the semiconductor wafer. The kerf regions enclose a plurality of die sites. The die singulation preparation step includes forming one or more preliminary kerf trenches between at least two immediately adjacent die sites. The method further includes forming active semiconductor devices in the die sites, and singulating the semiconductor wafer in the kerf regions thereby providing a plurality of discrete semiconductor dies from the die sites. The one or more preliminary kerf trenches are unfilled during the singulating, and the singulating includes removing semiconductor material from a surface of the semiconductor wafer that is between opposite facing sidewalls of the one or more preliminary kerf trenches.
    Type: Grant
    Filed: October 31, 2018
    Date of Patent: June 2, 2020
    Assignee: Infineon Technologies AG
    Inventors: Markus Zundel, Stefan Mieslinger, Thomas Ostermann, Christian Westermeier, Jochen Hilsenbeck, Jens Peter Konrath, Boris Mayerhofer, Anatoly Sotnikov
  • Publication number: 20200152621
    Abstract: A semiconductor device of an embodiment includes a transistor device in a semiconductor die including a semiconductor body. The transistor device includes transistor cells connected in parallel and covering at least 80% of an overall active area at a first surface of the semiconductor body. The semiconductor device further includes a control terminal contact area at the first surface electrically connected to a control electrode of each of the transistor cells. A first load terminal contact area at the first surface electrically connected to a first load terminal region of each of the transistor cells. The semiconductor device further includes a resistor in the semiconductor die and electrically coupled between the control terminal contact area and the first load terminal contact area, and a pn junction diode electrically connected in series with the resistor.
    Type: Application
    Filed: January 16, 2020
    Publication date: May 14, 2020
    Inventors: Dirk Ahlers, Markus Zundel, Peter Brandl, Kurt Matoy, Thomas Ostermann
  • Publication number: 20200135564
    Abstract: A semiconductor wafer having a main surface and a rear surface opposite from the main surface is provided. A die singulation preparation step is performed in kerf regions of the semiconductor wafer. The kerf regions enclose a plurality of die sites. The die singulation preparation step includes forming one or more preliminary kerf trenches between at least two immediately adjacent die sites. The method further includes forming active semiconductor devices in the die sites, and singulating the semiconductor wafer in the kerf regions thereby providing a plurality of discrete semiconductor dies from the die sites. The one or more preliminary kerf trenches are unfilled during the singulating, and the singulating includes removing semiconductor material from a surface of the semiconductor wafer that is between opposite facing sidewalls of the one or more preliminary kerf trenches.
    Type: Application
    Filed: October 31, 2018
    Publication date: April 30, 2020
    Inventors: Markus Zundel, Stefan Mieslinger, Thomas Ostermann, Christian Westermeier, Jochen Hilsenbeck, Jens Peter Konrath, Boris Mayerhofer, Anatoly Sotnikov
  • Publication number: 20200091284
    Abstract: A semiconductor device includes a semiconductor body having a first surface. A first trench extends in a vertical direction into the semiconductor body. The semiconductor device also includes a first interlayer in the first trench and a first dopant source in the first trench. The first interlayer is arranged between the first dopant source and the semiconductor body, and the first dopant source includes a first dopant species. The semiconductor device also includes a semiconductor area doped with the first dopant species and which completely surrounds the first trench at least at a depth in the semiconductor body and adjoins the first trench.
    Type: Application
    Filed: September 12, 2019
    Publication date: March 19, 2020
    Inventor: Markus Zundel