Patents by Inventor Markus Zundel

Markus Zundel has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9698228
    Abstract: Disclosed is a transistor device. The transistor device includes a plurality of field structures which define a plurality of semiconductor mesa regions in a semiconductor body, and each of which comprises a field electrode and a field electrode dielectric; a plurality of gate structures in each semiconductor mesa region, wherein each gate structure comprises a gate electrode and a gate dielectric, and is arranged in a trench of the semiconductor mesa region; a plurality of body regions, a plurality of source regions, and a drift region. Each body region adjoins the gate dielectric of at least one of the plurality of gate structures, and is located between one of the plurality of source regions and the drift region.
    Type: Grant
    Filed: December 21, 2015
    Date of Patent: July 4, 2017
    Assignee: Infineon Technologies AG
    Inventors: Christian Kampen, Markus Zundel
  • Publication number: 20170186663
    Abstract: A semiconductor device includes a drift structure formed in a semiconductor body. The drift structure forms a first pn junction with a body zone of a transistor cell. A gate structure extends from a first surface of the semiconductor body into the drift structure. A heat sink structure extends from the first surface into the drift structure. A thermal conductivity of the heat sink structure is greater than a thermal conductivity of the gate structure and/or a thermal capacity of the heat sink structure is greater than a thermal capacity of the gate structure.
    Type: Application
    Filed: December 16, 2016
    Publication date: June 29, 2017
    Inventors: Johannes Georg Laven, Peter Irsigler, Joachim Mahler, Guenther Ruhl, Hans-Joachim Schulze, Markus Zundel
  • Publication number: 20170170286
    Abstract: A semiconductor device includes a plurality of trenches extending into a semiconductor substrate. Each trench comprises a plurality of enlarged width regions distributed along the trench. At least one electrically conductive trench structure is located in each trench. The semiconductor device comprises an electrically insulating layer arranged between the semiconductor substrate and an electrode structure. The semiconductor device comprises a vertical electrically conductive structure extending through the electrically insulating layer. The vertical electrically conductive structure forms an electrically connection between the electrode structure and an electrically conductive trench structure located in a first trench of at a first enlarged width region.
    Type: Application
    Filed: December 8, 2016
    Publication date: June 15, 2017
    Applicant: Infineon Technologies AG
    Inventors: Markus ZUNDEL, Thomas OSTERMANN, Michael SORGER
  • Patent number: 9646855
    Abstract: Semiconductor device including a metal carrier substrate. Above the carrier substrate a first semiconductor layer of Alx1Gay1Inz1N (x1+y1+z1=1, x1?0, y1?0, z1?0) is formed. A second semiconductor layer of Alx2Gay2Inz2N (x2+y2+z2=1, x2>x1, y2?0, z2?0) is arranged on the first semiconductor layer and a gate region is arranged on the second semiconductor layer. The semiconductor device furthermore includes a source region and a drain region, wherein one of these regions is electrically coupled to the metal carrier substrate and includes a conductive region extending through the first semiconductor layer.
    Type: Grant
    Filed: May 13, 2015
    Date of Patent: May 9, 2017
    Assignee: Infineon Technologies Austria AG
    Inventors: Oliver Haeberlen, Walter Rieger, Christoph Kadow, Markus Zundel
  • Publication number: 20170117383
    Abstract: A method for forming a semiconductor device includes forming an electrical structure at a main surface of a semiconductor substrate and carrying out an anodic oxidation of a back side surface region of a back side surface of the semiconductor substrate to form an oxide layer at the back side surface of the semiconductor substrate. Additionally, the method includes connecting a carrier substrate to the oxide layer and processing a back side of the semiconductor substrate.
    Type: Application
    Filed: January 5, 2017
    Publication date: April 27, 2017
    Inventors: Andreas Meiser, Anton Mauder, Markus Zundel, Hans-Joachim Schulze, Franz Hirler, Hans Weber
  • Patent number: 9634081
    Abstract: A method for producing a polysilicon resistor device may include: forming a polysilicon layer; implanting first dopant atoms into at least a portion of the polysilicon layer, wherein the first dopant atoms include deep energy level donors; implanting second dopant atoms into said at least a portion of said polysilicon layer; and annealing said at least a portion of said polysilicon layer.
    Type: Grant
    Filed: October 8, 2013
    Date of Patent: April 25, 2017
    Assignee: Infineon Technologies AG
    Inventors: Hermann Gruber, Thomas Gross, Werner Irlbacher, Markus Zundel, Mathias von Borcke, Hans Joachim Schulze
  • Publication number: 20170110572
    Abstract: A semiconductor device includes a drift region of a device structure arranged in a semiconductor layer. The drift region includes at least one first drift region portion and at least one second drift region portion. A majority of dopants within the first drift region portion are a first species of dopants having a diffusivity less than a diffusivity of phosphor within the semiconductor layer. Further, a majority of &pants within the second drift region portion are a second species of dopants. Additionally, the semiconductor device includes a trench extending from a surface of the semiconductor layer into the semiconductor layer. A vertical distance of a border between the first drift region portion and the second drift region portion to the surface of the semiconductor layer is larger than 0.5 times a maximal depth of the trench and less than 1.5 times the maximal depth of the trench.
    Type: Application
    Filed: October 7, 2016
    Publication date: April 20, 2017
    Inventors: Markus Zundel, Christian Kampen, Jacob Tillmann Ludwig
  • Publication number: 20170076961
    Abstract: An arrangement is provided. The arrangement may include: a substrate having a front side and a back side, a die region within the substrate, a multi-purpose layer defining a back side of the die region, and an etch stop layer disposed over the multi-purpose layer between the multi-purpose layer and the back side of the substrate. The multi-purpose layer may be formed of an ohmic material, and the etch stop layer may be of a first conductivity type of a first doping concentration.
    Type: Application
    Filed: November 25, 2016
    Publication date: March 16, 2017
    Inventors: Markus Zundel, Andre Schmenn, Damian Sojka, Isabella Goetz, Gudrun Stranzl, Sebastian Werner, Thomas Fischer, Carsten Ahrens, Edward Fuergut
  • Patent number: 9570576
    Abstract: A method for forming a semiconductor device includes forming an electrical structure at a main surface of a semiconductor substrate and carrying out an anodic oxidation of a back side surface region of a back side surface of the semiconductor substrate to form an oxide layer at the back side surface of the semiconductor substrate.
    Type: Grant
    Filed: December 10, 2013
    Date of Patent: February 14, 2017
    Assignee: Infineon Technologies AG
    Inventors: Andreas Meiser, Anton Mauder, Markus Zundel, Hans-Joachim Schulze, Franz Hirler, Hans Weber
  • Patent number: 9570433
    Abstract: A semiconductor device includes a semiconductor substrate including a main surface with a polygonal geometry and a main electric circuit manufactured within a main region on the semiconductor substrate. The main electric circuit is operable to perform an electric main function. The main region extends over the main surface of the semiconductor substrate leaving open at least one corner area at a corner of the polygonal geometry of the main surface of the semiconductor substrate. The corner area extends at least 300 ?m along the edges of the semiconductor substrate beginning at the corner.
    Type: Grant
    Filed: September 21, 2015
    Date of Patent: February 14, 2017
    Assignee: Infineon Technologies AG
    Inventors: Markus Zundel, Vanessa Capodieci, Markus Dinkel, Uwe Schmalzbauer
  • Patent number: 9558933
    Abstract: A method for forming a semiconductor device includes carrying out an anodic oxidation of a surface region of a semiconductor substrate to form an oxide layer at a surface of the semiconductor substrate by generating an attracting electrical field between the semiconductor substrate and an external electrode within an electrolyte to attract oxidizing ions of the electrolyte, causing an oxidation of the surface region of the semiconductor substrate. Further, the method includes reducing the number of remaining oxidizing ions within the oxide layer, while the semiconductor substrate is within an electrolyte.
    Type: Grant
    Filed: October 22, 2015
    Date of Patent: January 31, 2017
    Assignee: Infineon Technologies AG
    Inventors: Hans-Joachim Schulze, Markus Zundel, Anton Mauder, Andreas Meiser, Franz Hirler, Hans Weber
  • Patent number: 9559167
    Abstract: One embodiment provides a semiconductor component including a semiconductor body having a first side and a second side and a drift zone; a first semiconductor zone doped complementarily to the drift zone and adjacent to the drift zone in a direction of the first side; a second semiconductor zone of the same conduction type as the drift zone adjacent to the drift zone in a direction of the second side; at least two trenches arranged in the semiconductor body and extending into the semiconductor body and arranged at a distance from one another; and a field electrode arranged in the at least two trenches adjacent to the drift zone. The at least two trenches are arranged at a distance from the second semiconductor zone in the vertical direction, a distance between the trenches and the second semiconductor zone is greater than 1.
    Type: Grant
    Filed: January 22, 2016
    Date of Patent: January 31, 2017
    Assignee: Infineon Technologies AG
    Inventors: Markus Zundel, Franz Hirler
  • Publication number: 20170012002
    Abstract: A method of manufacturing a semiconductor device includes forming a separation trench into a first main surface of a semiconductor substrate and removing substrate material from a second main surface of the semiconductor substrate, so as to thin the substrate to a thickness of less than 100 ?m, the second main surface being opposite to the first main surface, so as to uncover a bottom side of the trench. Additional methods of manufacturing semiconductor devices are provided.
    Type: Application
    Filed: September 22, 2016
    Publication date: January 12, 2017
    Inventors: Andreas Meiser, Markus Zundel, Martin Poelzl, Paul Ganitzer, Georg Ehrentraut
  • Publication number: 20160365441
    Abstract: A transistor cell includes, in a semiconductor body, a drift region of a first doping type, a source region of the first doping type, a body region of a second doping type, and a drain region of the first doping type. The body region is arranged between the source and drift regions. The drift region is arranged between the body and drain regions. A gate electrode is adjacent the body region and dielectrically insulated from the body region by a gate dielectric, and a field electrode is dielectrically insulated from the drift region by a field electrode dielectric. The drift region includes an avalanche region having a higher doping concentration than sections of the drift region adjacent the avalanche region and which is spaced apart from the field electrode dielectric in a direction perpendicular to the current flow direction. The field electrode is arranged in a needle-shaped trench.
    Type: Application
    Filed: June 14, 2016
    Publication date: December 15, 2016
    Inventors: Ralf Siemieniec, Markus Zundel, Karl-Heinz Bach, Franz Hirler, Christian Kampen, Werner Schustereder
  • Patent number: 9508812
    Abstract: A semiconductor device is provided that comprises a semiconductor substrate comprising an active area and a peripheral region adjacent the active area and structure positioned in the peripheral region for hindering the diffusion of mobile ions from the peripheral region into the active area.
    Type: Grant
    Filed: September 10, 2014
    Date of Patent: November 29, 2016
    Assignee: Infineon Technologies Austria AG
    Inventors: Hans-Joachim Schulze, Stephan Voss, Markus Zundel
  • Patent number: 9490103
    Abstract: Various methods and apparatuses are provided relating to separation of a substrate into a plurality of parts. For example, first a partial separation is performed and then the partially separated substrate is completely separated into a plurality of parts.
    Type: Grant
    Filed: December 21, 2015
    Date of Patent: November 8, 2016
    Assignee: Infineon Technologies AG
    Inventors: Manfred Engelhardt, Gudrun Stranzl, Markus Zundel, Hubert Maier
  • Publication number: 20160307889
    Abstract: A semiconductor component arrangement method includes producing a trench transistor structure including at least one trench disposed in the semiconductor body and at least one gate electrode disposed in the at least one trench. The method also includes producing a capacitor structure comprising an electrode structure disposed in at least one further trench, the electrode structure comprising at least one electrode. The gate electrode and the at least one electrode of the electrode structure are produced by common process steps.
    Type: Application
    Filed: June 30, 2016
    Publication date: October 20, 2016
    Inventors: Markus Zundel, Franz Hirler, Norbert Krischke
  • Publication number: 20160300920
    Abstract: A method of manufacturing a semiconductor device includes forming a trench in a semiconductor body at a first surface of the semiconductor body, forming a polysilicon material in the trench, introducing dopants into the polysilicon material by a high dose and low energy process, and performing a thermal treatment configured to drive-in the dopants into the polysilicon material.
    Type: Application
    Filed: June 21, 2016
    Publication date: October 13, 2016
    Inventors: Hans-Joachim Schulze, Alexander Susiti, Markus Zundel, Reinhard Ploss
  • Publication number: 20160300914
    Abstract: A method for producing a field-effect semiconductor device includes providing a semiconductor body with a first surface defining a vertical direction, defining an active area, forming a vertical trench from the first surface into the semiconductor body, forming a field dielectric layer at least on a side wall and a bottom wall of the vertical trench, depositing a conductive layer on the field dielectric layer, forming a closed cavity on the conductive layer in the vertical trench, and forming an insulated gate electrode on the closed cavity in the vertical trench.
    Type: Application
    Filed: June 22, 2016
    Publication date: October 13, 2016
    Inventors: Stefan Sedlmaier, Markus Zundel, Franz Hirler, Johannes Baumgartl, Anton Mauder, Ralf Siemieniec, Oliver Blank, Michael Hutzler
  • Publication number: 20160293752
    Abstract: An embodiment of a semiconductor device comprises a trench transistor cell array in a semiconductor body. The semiconductor device further comprises an edge termination region of the trench transistor cell array. At least two first auxiliary trench structures extend into the semiconductor body from a first side and are consecutively arranged along a lateral direction. The edge termination region is arranged, along the lateral direction, between the trench transistor cell array and the at least two first auxiliary trench structures. First auxiliary electrodes in the at least two first auxiliary trench structures are electrically connected together and electrically decoupled from electrodes in trenches of the trench transistor cell array.
    Type: Application
    Filed: March 28, 2016
    Publication date: October 6, 2016
    Inventor: Markus Zundel