Patents by Inventor Markus Zundel

Markus Zundel has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20180145045
    Abstract: A power semiconductor device includes a semiconductor body configured to conduct a load current. A load terminal electrically connected with the semiconductor body is configured to couple the load current into and/or out of the semiconductor body. The load terminal includes a metallization having a frontside and a backside. The backside interfaces with a surface of the semiconductor body. The frontside is configured to interface with a wire structure having at least one wire configured to conduct at least a part of the load current. The frontside has a lateral structure formed at least by at least one local elevation of the metallization. The local elevation has a height in an extension direction defined by a distance between the base and top of the local elevation and, in a first lateral direction perpendicular to the extension direction, a base width at the base and a top width at the top.
    Type: Application
    Filed: November 20, 2017
    Publication date: May 24, 2018
    Inventors: Markus Zundel, Rainer Pelzer, Manfred Schneegans
  • Patent number: 9966277
    Abstract: An arrangement is provided. The arrangement may include: a substrate having a front side and a back side, a die region within the substrate, a multi-purpose layer defining a back side of the die region, and an etch stop layer disposed over the multi-purpose layer between the multi-purpose layer and the back side of the substrate. The multi-purpose layer may be formed of an ohmic material, and the etch stop layer may be of a first conductivity type of a first doping concentration.
    Type: Grant
    Filed: November 25, 2016
    Date of Patent: May 8, 2018
    Assignee: Infineon Technologies AG
    Inventors: Markus Zundel, Andre Schmenn, Damian Sojka, Isabella Goetz, Gudrun Stranzl, Sebastian Werner, Thomas Fischer, Carsten Ahrens, Edward Fuergut
  • Patent number: 9960268
    Abstract: A semiconductor device includes a drift region of a device structure arranged in a semiconductor layer. The drift region includes at least one first drift region portion and at least one second drift region portion. A majority of dopants within the first drift region portion are a first species of dopants having a diffusivity less than a diffusivity of phosphor within the semiconductor layer. Further, a majority of dopants within the second drift region portion are a second species of dopants. Additionally, the semiconductor device includes a trench extending from a surface of the semiconductor layer into the semiconductor layer. A vertical distance of a border between the first drift region portion and the second drift region portion to the surface of the semiconductor layer is larger than 0.5 times a maximal depth of the trench and less than 1.5 times the maximal depth of the trench.
    Type: Grant
    Filed: October 7, 2016
    Date of Patent: May 1, 2018
    Assignee: Infineon Technologies AG
    Inventors: Markus Zundel, Christian Kampen, Jacob Tillmann Ludwig
  • Publication number: 20180114788
    Abstract: A semiconductor device of an embodiment includes a transistor device in a semiconductor die including a semiconductor body. The transistor device includes transistor cells connected in parallel and covering at least 80% of an overall active area at a first surface of the semiconductor body. The semiconductor device further includes a control terminal contact area at the first surface electrically connected to a control electrode of each of the transistor cells. A first load terminal contact area at the first surface electrically connected to a first load terminal region of each of the transistor cells. The semiconductor device further includes a resistor in the semiconductor die and electrically coupled between the control terminal contact area and the first load terminal contact area.
    Type: Application
    Filed: October 24, 2017
    Publication date: April 26, 2018
    Inventors: Dirk Ahlers, Markus Zundel, Peter Brandl, Kurt Matoy, Thomas Ostermann
  • Patent number: 9941365
    Abstract: A method for producing a field-effect semiconductor device includes providing a semiconductor body with a first surface defining a vertical direction, defining an active area, forming a vertical trench from the first surface into the semiconductor body, forming a field dielectric layer at least on a side wall and a bottom wall of the vertical trench, depositing a conductive layer on the field dielectric layer, forming a closed cavity on the conductive layer in the vertical trench, and forming an insulated gate electrode on the closed cavity in the vertical trench.
    Type: Grant
    Filed: June 22, 2016
    Date of Patent: April 10, 2018
    Assignee: Infineon Technologies Austria AG
    Inventors: Stefan Sedlmaier, Markus Zundel, Franz Hirler, Johannes Baumgartl, Anton Mauder, Ralf Siemieniec, Oliver Blank, Michael Hutzler
  • Patent number: 9941403
    Abstract: A semiconductor device includes a transistor including a source region, a drain region, and a gate electrode. The gate electrode is disposed in a first trench arranged in a top surface of the semiconductor substrate. The device further includes a control electrode. The control electrode is disposed in a second trench arranged in the top surface of the semiconductor substrate. The second trench has a second shape that is different from a first shape of the first trench.
    Type: Grant
    Filed: September 26, 2012
    Date of Patent: April 10, 2018
    Assignee: Infineon Technologies AG
    Inventors: Till Schloesser, Markus Zundel
  • Patent number: 9941276
    Abstract: A semiconductor component arrangement method includes producing a trench transistor structure including at least one trench disposed in the semiconductor body and at least one gate electrode disposed in the at least one trench. The method also includes producing a capacitor structure comprising an electrode structure disposed in at least one further trench, the electrode structure comprising at least one electrode. The gate electrode and the at least one electrode of the electrode structure are produced by common process steps.
    Type: Grant
    Filed: June 30, 2016
    Date of Patent: April 10, 2018
    Assignee: Infineon Technologies AG
    Inventors: Markus Zundel, Franz Hirler, Norbert Krischke
  • Patent number: 9935055
    Abstract: A method of manufacturing a semiconductor device includes forming a separation trench into a first main surface of a semiconductor substrate and removing substrate material from a second main surface of the semiconductor substrate, so as to thin the substrate to a thickness of less than 100 ?m, the second main surface being opposite to the first main surface, so as to uncover a bottom side of the trench. Additional methods of manufacturing semiconductor devices are provided.
    Type: Grant
    Filed: September 22, 2016
    Date of Patent: April 3, 2018
    Assignee: Infineon Technologies Austria AG
    Inventors: Andreas Meiser, Markus Zundel, Martin Poelzl, Paul Ganitzer, Georg Ehrentraut
  • Patent number: 9899509
    Abstract: An embodiment of a semiconductor device comprises a trench transistor cell array in a semiconductor body. The semiconductor device further comprises an edge termination region of the trench transistor cell array. At least two first auxiliary trench structures extend into the semiconductor body from a first side and are consecutively arranged along a lateral direction. The edge termination region is arranged, along the lateral direction, between the trench transistor cell array and the at least two first auxiliary trench structures. First auxiliary electrodes in the at least two first auxiliary trench structures are electrically connected together and electrically decoupled from electrodes in trenches of the trench transistor cell array.
    Type: Grant
    Filed: March 28, 2016
    Date of Patent: February 20, 2018
    Assignee: Infineon Technologies AG
    Inventor: Markus Zundel
  • Patent number: 9871119
    Abstract: Representative implementations of devices and techniques provide a termination arrangement for a transistor structure. The periphery of a transistor structure may include a recessed area having features arranged to improve performance of the transistor at or near breakdown.
    Type: Grant
    Filed: November 24, 2014
    Date of Patent: January 16, 2018
    Assignee: Infineon Technologies Austria AG
    Inventors: Andrew Wood, Markus Zundel
  • Patent number: 9865792
    Abstract: An embodiment of the invention relates to a Seebeck temperature difference sensor that may be formed in a trench on a semiconductor device. A portion of the sensor may be substantially surrounded by an electrically conductive shield. A plurality of junctions may be included to provide a higher Seebeck sensor voltage. The shield may be electrically coupled to a local potential, or left electrically floating. A portion of the shield may be formed as a doped well in the semiconductor substrate on which the semiconductor device is formed, or as a metal layer substantially covering the sensor. The shield may be formed as a first oxide layer on a sensor trench wall with a conductive shield formed on the first oxide layer, and a second oxide layer formed on the conductive shield. An absolute temperature sensor may be coupled in series with the Seebeck temperature difference sensor.
    Type: Grant
    Filed: May 20, 2014
    Date of Patent: January 9, 2018
    Assignee: Infineon Technologies AG
    Inventors: Donald Dibra, Christoph Kadow, Markus Zundel
  • Patent number: 9847387
    Abstract: What is provided is a field effect component including a semiconductor body, which extends in an edge zone from a rear side as far as a top side and which includes a semiconductor mesa, which extends in a vertical direction, which is perpendicular to the rear side and/or the top side. The semiconductor body in a vertical cross section further includes a drift region, which extends at least in the edge region as far as the top side and which is arranged partly in the semiconductor mesa, and a body region, which is arranged at least partly in the semiconductor mesa and which forms a pn junction with the drift region. The pn junction extends between two sidewalls of the semiconductor mesa.
    Type: Grant
    Filed: May 31, 2016
    Date of Patent: December 19, 2017
    Assignee: Infineon Technologies AG
    Inventors: Markus Zundel, Karl-Heinz Bach, Andrew Christopher Graeme Wood
  • Patent number: 9812563
    Abstract: A transistor cell includes, in a semiconductor body, a drift region of a first doping type, a source region of the first doping type, a body region of a second doping type, and a drain region of the first doping type. The body region is arranged between the source and drift regions. The drift region is arranged between the body and drain regions. A gate electrode is adjacent the body region and dielectrically insulated from the body region by a gate dielectric, and a field electrode is dielectrically insulated from the drift region by a field electrode dielectric. The drift region includes an avalanche region having a higher doping concentration than sections of the drift region adjacent the avalanche region and which is spaced apart from the field electrode dielectric in a direction perpendicular to the current flow direction. The field electrode is arranged in a needle-shaped trench.
    Type: Grant
    Filed: June 14, 2016
    Date of Patent: November 7, 2017
    Assignee: Infineon Technologies AG
    Inventors: Ralf Siemieniec, Markus Zundel, Karl-Heinz Bach, Franz Hirler, Christian Kampen, Werner Schustereder
  • Publication number: 20170317176
    Abstract: A semiconductor device includes a transistor in a semiconductor body having a first main surface. The transistor includes: a source contact electrically connected to a source region; a drain contact electrically connected to a drain region; a gate electrode at the channel region, the channel region and a drift zone disposed along a first direction between the source and drain regions, the first direction being parallel to the first main surface, the channel region patterned into a ridge by adjacent gate trenches formed in the first main surface, the adjacent gate trenches spaced apart in a second direction perpendicular to the first direction, a longitudinal axis of the ridge extending in the first direction and a longitudinal axis of the gate trenches extending in the first direction; and at least one of the source and drain contacts being adjacent to a second main surface opposite the first main surface.
    Type: Application
    Filed: July 11, 2017
    Publication date: November 2, 2017
    Inventors: Andreas Meiser, Rolf Weis, Franz Hirler, Martin Vielemeyer, Markus Zundel, Peter Irsigler
  • Patent number: 9806188
    Abstract: A controllable semiconductor component is produced by providing a semiconductor body with a top side and a bottom side, and forming a first trench protruding from the top side into the semiconductor body and a second trench protruding from the top side into the semiconductor body. In a common process, an oxide layer is formed in the first trench and in the second trench such that the oxide layer fills the first trench and electrically insulates a surface of the second trench. The oxide layer is removed from the first trench completely or at least partly such that the semiconductor body has an exposed first surface area arranged in the first trench. An electrically conductive material is filled into the second trench, and the semiconductor body and the oxide layer are partially removed such that the electrically conductive material has an exposed second surface area at the bottom side.
    Type: Grant
    Filed: June 3, 2016
    Date of Patent: October 31, 2017
    Assignee: Infineon Technologies AG
    Inventors: Andreas Meiser, Markus Zundel
  • Patent number: 9799521
    Abstract: A semiconductor device includes a semiconductor substrate. The semiconductor substrate includes a plurality of first doping regions of a first doping structure arranged at a main surface of the semiconductor substrate and a plurality of second doping regions of the first doping structure arranged at the main surface of the semiconductor substrate. The first doping regions of the plurality of first doping regions of the first doping structure include dopants of a first conductivity type with different doping concentrations. Further, the second doping regions of the plurality of second doping regions of the first doping structure include dopants of a second conductivity type with different doping concentrations. At least one first doping region of the plurality of first doping regions of the first doping structure partly overlaps at least one second doping region of the plurality of second doping regions of the first doping structure causing an overlap region arranged at the main surface.
    Type: Grant
    Filed: March 3, 2016
    Date of Patent: October 24, 2017
    Assignee: Infineon Technologies AG
    Inventors: Markus Zundel, Thomas Schweinboeck, Jesper Wittborn, Erwin Bacher, Juergen Holzmueller, Hans-Joachim Schulze
  • Publication number: 20170263719
    Abstract: A method for manufacturing a semiconductor structure is provided, which may include: forming a p-doped region adjacent to an n-doped region in a substrate; carrying out an anodic oxidation to form an oxide layer on a surface of the substrate, wherein the oxide layer in a first portion of the surface extending along the n-doped region has a greater thickness than the oxide layer in a second portion of the surface extending along the p-doped region.
    Type: Application
    Filed: May 24, 2017
    Publication date: September 14, 2017
    Inventors: Hans-Joachim Schulze, Markus Zundel, Anton Mauder, Andreas Meiser, Franz Hirler, Hans Weber
  • Patent number: 9735243
    Abstract: A semiconductor device comprises a transistor formed in a semiconductor body having a first main surface. The transistor comprises a source region, a drain region, a channel region, a drift zone, a source contact electrically connected to the source region, a drain contact electrically connected to the drain region, and a gate electrode at the channel region. The channel region and the drift zone are disposed along a first direction between the source region and the drain region, the first direction being parallel to the first main surface. The channel region has a shape of a first ridge extending along the first direction. One of the source contact and the drain contact is adjacent to the first main surface, the other one of the source contact and the drain contact is adjacent to a second main surface that is opposite to the first main surface.
    Type: Grant
    Filed: November 18, 2013
    Date of Patent: August 15, 2017
    Assignee: Infineon Technologies AG
    Inventors: Andreas Meiser, Rolf Weis, Franz Hirler, Martin Vielemeyer, Markus Zundel, Peter Irsigler
  • Publication number: 20170194417
    Abstract: A method for producing a polysilicon resistor device may include: forming a polysilicon layer; implanting first dopant atoms into at least a portion of the polysilicon layer, wherein the first dopant atoms include deep energy level donors; implanting second dopant atoms into said at least a portion of said polysilicon layer; and annealing said at least a portion of said polysilicon layer.
    Type: Application
    Filed: March 22, 2017
    Publication date: July 6, 2017
    Inventors: Hermann Gruber, Thomas Gross, Werner Irlbacher, Markus Zundel, Mathias von Borcke, Hans Joachim Schulze
  • Publication number: 20170194484
    Abstract: Disclosed is a transistor device and a method for producing thereof. The transistor device includes at least one transistor cell, wherein the at least one transistor cell includes: a source region, a body region and a drift region in a semiconductor body; a gate electrode dielectrically insulated from the body region by a gate dielectric; a field electrode dielectrically insulated from the drift region by a field electrode dielectric; and a contact plug extending from a first surface of the semiconductor body to the field electrode and adjoining the source region and the body region.
    Type: Application
    Filed: December 22, 2016
    Publication date: July 6, 2017
    Inventors: Markus Zundel, Franz Hirler