Patents by Inventor Markus Zundel

Markus Zundel has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20150348776
    Abstract: A method of manufacturing a semiconductor device includes forming a continuous silicate glass structure over a first surface of a semiconductor body, including a first part of the continuous glass structure over an active area of the semiconductor body and a second part of the continuous glass structure over an area of the semiconductor body outside of the active area. A first composition of dopants included in the first part of continuous glass structure differs from a second composition of dopants of the second part of the continuous glass structure.
    Type: Application
    Filed: August 12, 2015
    Publication date: December 3, 2015
    Inventors: Hans-Joachim Schulze, Alexander Susiti, Markus Zundel, Reinhard Ploss
  • Publication number: 20150346270
    Abstract: A test method in accordance with one or more embodiments may include: providing a semiconductor device to be tested, the semiconductor device including at least one device cell, the at least one device cell having at least one trench, at least one first terminal electrode region and at least one second terminal electrode region, at least one gate electrode, and at least one additional electrode disposed at least partially in the at least one trench, wherein an electrical potential of the at least one additional electrode may be controlled separately from electrical potentials of the at least one first terminal electrode region, the at least one second terminal electrode region and the at least one gate electrode; and applying at least one electrical test potential to at least the at least one additional electrode to detect defects in the at least one device cell.
    Type: Application
    Filed: June 30, 2015
    Publication date: December 3, 2015
    Inventors: Markus Zundel, Franz Hirler, Peter Nelle
  • Patent number: 9202881
    Abstract: One embodiment provides a semiconductor component including a semiconductor body having a first side and a second side and a drift zone; a first semiconductor zone doped complementarily to the drift zone and adjacent to the drift zone in a direction of the first side; a second semiconductor zone of the same conduction type as the drift zone adjacent to the drift zone in a direction of the second side; at least two trenches arranged in the semiconductor body and extending into the semiconductor body and arranged at a distance from one another; and a field electrode arranged in the at least two trenches adjacent to the drift zone. The at least two trenches are arranged at a distance from the second semiconductor zone in the vertical direction, a distance between the trenches and the second semiconductor zone is greater than 1.
    Type: Grant
    Filed: August 5, 2008
    Date of Patent: December 1, 2015
    Assignee: Infineon Technologies AG
    Inventors: Markus Zundel, Franz Hirler
  • Publication number: 20150333058
    Abstract: A semiconductor device in a semiconductor substrate includes a trench in a first main surface of the semiconductor substrate. The trench includes a first trench portion extending in a first direction and a second trench portion extending in the first direction. The first trench portion is connected with the second trench portion in a lateral direction. The first trench portion and the second trench portion are arranged one after the other along the first direction. The semiconductor device further includes a trench conductive structure having a conductive material disposed in the first trench portion, and a trench capacitor structure having a capacitor dielectric and a first capacitor electrode disposed in the second trench portion. The first capacitor electrode includes a layer lining a sidewall of the second trench portion.
    Type: Application
    Filed: July 30, 2015
    Publication date: November 19, 2015
    Inventors: Andreas Meiser, Markus Zundel, Till Schloesser
  • Patent number: 9190511
    Abstract: A semiconductor component with a drift region and a drift control region. One embodiment includes a semiconductor body having a drift region of a first conduction type in the semiconductor body. A drift control region composed of a semiconductor material, which is arranged, at least in sections, is adjacent to the drift region in the semiconductor body. An accumulation dielectric is arranged between the drift region and the drift control region.
    Type: Grant
    Filed: June 11, 2013
    Date of Patent: November 17, 2015
    Assignee: Infineon Technologies Austria AG
    Inventors: Frank Pfirsch, Anton Mauder, Armin Willmeroth, Hans-Joachim Schulze, Stefan Sedlmaier, Markus Zundel, Franz Hirler, Arunjai Mittal
  • Patent number: 9184284
    Abstract: A method for operating a field-effect transistor having a source terminal, a drain terminal, a gate terminal, a drift region and a dielectric region adjoining the drift region, is provided. The method includes: connecting at least one of the drain terminal and the source terminal to a load; applying a sequence of voltage pulses between the gate terminal and the source terminal to repetitively switch the field-effect transistor such that the field-effect transistor is driven in an avalanche mode between the voltage pulses, during the avalanche mode avalanche multiplication occurring in the drift region close to the dielectric region; and applying at least one relaxation pulse to the field-effect transistor to reduce an accumulation of charges in the dielectric region due to hot charge carriers generated in the avalanche mode. Further, a field-effect transistor and a circuit configuration including the field-effect transistor are provided.
    Type: Grant
    Filed: December 31, 2012
    Date of Patent: November 10, 2015
    Assignee: Infineon Technologies AG
    Inventors: Markus Zundel, Peter Nelle
  • Publication number: 20150311294
    Abstract: A method of producing a controllable semiconductor component includes providing a semiconductor body with a top side and a bottom side, and forming a first trench protruding from the top side into the semiconductor body and a second trench protruding from the top side into the semiconductor body. The first trench has a first width and a first depth, and the second trench has a second width greater than the first width and a second depth greater than the first depth. The method further includes forming, in a common process, an oxide layer in the first trench and in the second trench such that the oxide layer fills the first trench and electrically insulates a surface of the second trench, and removing the oxide layer from the first trench completely or at least partly such that the semiconductor body comprises an exposed first surface area arranged in the first trench.
    Type: Application
    Filed: May 14, 2015
    Publication date: October 29, 2015
    Inventors: Andreas Meiser, Markus Zundel
  • Publication number: 20150311163
    Abstract: An anchoring structure for a metal structure of a semiconductor device includes an anchoring recess structure having at least one overhanging side wall, the metal structure being at least partly arranged within the anchoring recess structure.
    Type: Application
    Filed: July 2, 2015
    Publication date: October 29, 2015
    Inventors: Erwin Vogl, Markus Zundel
  • Patent number: 9171950
    Abstract: A semiconductor component is produced by forming a trench in a semiconductor region. The trench has an upper trench region and a lower trench region. The upper trench region is wider than the lower trench region such that a step is formed in the semiconductor region. A dopant is introduced into the step to form a locally delimited dopant region in the semiconductor region.
    Type: Grant
    Filed: August 14, 2012
    Date of Patent: October 27, 2015
    Assignee: Infineon Technologies AG
    Inventors: Andrew Wood, Rudolf Zelsacher, Markus Zundel
  • Patent number: 9171777
    Abstract: A semiconductor device includes a semiconductor substrate including a main surface with a polygonal geometry and a main electric circuit manufactured within a main region on the semiconductor substrate. The main electric circuit is operable to perform an electric main function. The main region extends over the main surface of the semiconductor substrate leaving open at least one corner area at a corner of the polygonal geometry of the main surface of the semiconductor substrate. The corner area extends at least 300 ?m along the edges of the semiconductor substrate beginning at the corner.
    Type: Grant
    Filed: January 29, 2013
    Date of Patent: October 27, 2015
    Assignee: Infineon Technologies AG
    Inventors: Markus Zundel, Vanessa Capodieci, Markus Dinkel, Uwe Schmalzbauer
  • Patent number: 9165921
    Abstract: One embodiment of a semiconductor device includes a dense trench transistor cell array. The dense trench transistor cell array includes a plurality of transistor cells in a semiconductor body. A width w3 of a transistor mesa region of each of the plurality of transistor cells and a width w1 of a first trench of each of the plurality of transistor cells satisfy the following relationship: w3<1.5×w1. The semiconductor device further includes semiconductor diodes. At least one of the semiconductor diodes is arranged between first and second parts of the plurality of transistor cells and includes a diode mesa region adjoining opposing walls of second trenches. A depth d1 of the first trench and a depth d2 of the second trenches differ by at least 20%.
    Type: Grant
    Filed: December 17, 2012
    Date of Patent: October 20, 2015
    Assignee: Infineon Technology AG
    Inventors: Peter Nelle, Markus Zundel
  • Patent number: 9142401
    Abstract: A method of manufacturing a semiconductor device includes forming a continuous silicate glass structure over a first surface of a semiconductor body, including a first part of the continuous glass structure over an active area of the semiconductor body and a second part of the continuous glass structure over an area of the semiconductor body outside of the active area. A first composition of dopants included in the first part of continuous glass structure differs from a second composition of dopants of the second part of the continuous glass structure.
    Type: Grant
    Filed: June 16, 2014
    Date of Patent: September 22, 2015
    Assignee: Infineon Technologies AG
    Inventors: Hans-Joachim Schulze, Alexander Susiti, Markus Zundel, Reinhard Ploss
  • Patent number: 9142447
    Abstract: A semiconductor having an optimized insulation structure which is simple and inexpensive to produce and can be made smaller than LOCOS insulation structures is disclosed. An implantation mask on a surface of a semiconductor substrate is used to implant elements into the semiconductor substrate, which elements, on thermal activation, form an insulation region together with the further elements of the semiconductor substrate. The thermal activation is effected by means of laser irradiation, during which the semiconductor substrate is briefly melted and then recrystallizes during the subsequent cooling, so that the implanted elements form the insulation region together with the further elements of the semiconductor substrate.
    Type: Grant
    Filed: December 23, 2010
    Date of Patent: September 22, 2015
    Assignee: Infineon Technologies Austria AG
    Inventors: Markus Zundel, Norbert Krischke
  • Patent number: 9142444
    Abstract: A semiconductor component comprises a semiconductor body with at least one protective trench in the semiconductor body. An insulation layer is situated at least at the bottom of the protective trench. An electrically conductive layer having a thickness D is formed on the insulation layer in the protective trench, wherein the electrically conductive layer only partly fills the protective trench.
    Type: Grant
    Filed: May 15, 2013
    Date of Patent: September 22, 2015
    Assignee: INFINEON TECHNOLOGIES AG
    Inventors: Markus Zundel, Erwin Bacher, Andreas Behrendt, Joerg Ortner, Walter Rieger, Rudolf Zelsacher
  • Publication number: 20150262942
    Abstract: A semiconductor workpiece includes a semiconductor substrate, at least two chip areas, components of semiconductor devices being formed in the semiconductor substrate in the at least two chip areas, and a separation trench disposed between adjacent chip areas. The separation trench is formed in a first main surface of the semiconductor substrate and extends from the first main surface to a second main surface of the semiconductor substrate. The second main surface is disposed opposite to the first main surface. The separation trench is filled with at least one sacrificial material.
    Type: Application
    Filed: May 29, 2015
    Publication date: September 17, 2015
    Inventors: Andreas Meiser, Markus Zundel, Martin Poelzl, Paul Ganitzer, Georg Ehrentraut
  • Patent number: 9129820
    Abstract: An integrated circuit is formed in a semiconductor substrate. The integrated circuit includes a trench formed in a first main surface of the semiconductor substrate. The trench includes a first trench portion and a second trench portion. The first trench portion is connected with the second trench portion. Openings of the first and second trench portions are adjacent to the first main surface. The integrated circuit further includes a trench transistor structure including a gate electrode disposed in the first trench portion, and a trench capacitor structure including a capacitor dielectric and a first capacitor electrode. The capacitor dielectric and the first capacitor electrode are disposed in the second trench portion. The first capacitor electrode includes a layer conformal with a sidewall of the second trench portion.
    Type: Grant
    Filed: July 25, 2013
    Date of Patent: September 8, 2015
    Assignee: Infineon Technologies AG
    Inventors: Andreas Meiser, Markus Zundel, Till Schloesser
  • Publication number: 20150249020
    Abstract: Semiconductor device including a metal carrier substrate. Above the carrier substrate a first semiconductor layer of Alx1Gay1Inz1N (x1+y1+z1=1, x1?0, y1?0, z1?0) is formed. A second semiconductor layer of Alx2Gay2Inz2N (x2+y2+z2=1, x2>x1, y2?0, z2?0) is arranged on the first semiconductor layer and a gate region is arranged on the second semiconductor layer. The semiconductor device furthermore includes a source region and a drain region, wherein one of these regions is electrically coupled to the metal carrier substrate and includes a conductive region extending through the first semiconductor layer.
    Type: Application
    Filed: May 13, 2015
    Publication date: September 3, 2015
    Applicant: INFINEON TECHNOLOGIES AUSTRIA AG
    Inventors: Oliver Haeberlen, Walter Rieger, Christoph Kadow, Markus Zundel
  • Patent number: 9123559
    Abstract: Methods for producing a semiconductor component that includes a transistor having a cell structure with a number of transistor cells monolithically integrated in a semiconductor body and electrically connected in parallel. In an example method, first trenches extending from the top side into the semiconductor body are produced, as are second trenches that each extend from the top side deeper into the semiconductor body than each of the first trenches. A first dielectric abutting on a first portion of the semiconductor body is produced at a surface of each of the first trenches. Also produced is a second dielectric at a surface of each of the second trenches. In each of the first trenches, a gate electrode is produced, after which a second portion of the semiconductor body is electrically insulated from the first portion of the semiconductor body by removing a bottom layer of the semiconductor body.
    Type: Grant
    Filed: May 31, 2013
    Date of Patent: September 1, 2015
    Assignee: Infineon Technologies AG
    Inventors: Andreas Meiser, Markus Zundel
  • Publication number: 20150221523
    Abstract: An arrangement is provided. The arrangement may include: a substrate having a front side and a back side, a die region within the substrate, a multi-purpose layer defining a back side of the die region, and an etch stop layer disposed over the multi-purpose layer between the multi-purpose layer and the back side of the substrate. The multi-purpose layer may be formed of an ohmic material, and the etch stop layer may be of a first conductivity type of a first doping concentration.
    Type: Application
    Filed: January 16, 2015
    Publication date: August 6, 2015
    Inventors: Markus Zundel, Andre Schmenn, Damian Sojka, Isabella Goetz, Gudrun Stranzl, Sebastian Werner, Thomas Fischer, Carsten Ahrens, Edward Fuergut
  • Patent number: 9099419
    Abstract: A test method in accordance with one or more embodiments may include: providing a semiconductor device to be tested, the semiconductor device including at least one device cell, the at least one device cell having at least one trench, at least one first terminal electrode region and at least one second terminal electrode region, at least one gate electrode, and at least one additional electrode disposed at least partially in the at least one trench, wherein an electrical potential of the at least one additional electrode may be controlled separately from electrical potentials of the at least one first terminal electrode region, the at least one second terminal electrode region and the at least one gate electrode; and applying at least one electrical test potential to at least the at least one additional electrode to detect defects in the at least one device cell.
    Type: Grant
    Filed: October 9, 2012
    Date of Patent: August 4, 2015
    Assignee: INFINEON TECHNOLOGIES AG
    Inventors: Markus Zundel, Franz Hirler, Peter Nelle