Abstract: A semiconductor body (1) comprises a connecting lead (21) for contacting a semiconductor area (2). The conductivity S per unit length of the connecting lead (21) changes from a first value SW to a second value S0. The semiconductor area (2) is electrically conductively connected to the connecting lead (21).

Abstract: A high voltage JFET has a deep well of a first type of conductivity made in a semiconductor substrate, a further well of an opposite second type of conductivity arranged in the deep well, a shallow well of a first type of conductivity arranged in the further well, a first contact region for source and a second contact region for drain arranged in the further well, a third contact region for gate arranged between the first contact region and the second contact region in the shallow well, a first distance between the first contact region and the third contact region being smaller than a second distance between the second contact region and the third contact region, and an electrical connection between the first contact region and the second contact region via at least one channel region present between the deep well and the shallow well in the further well.

Abstract: A method of forming an isolation region is provided that in one embodiment substantially reduces divot formation. In one embodiment, the method includes providing a semiconductor substrate, forming a first pad dielectric layer on an upper surface of the semiconductor substrate and forming a trench through the first pad dielectric layer into the semiconductor substrate. In a following process sequence, the first pad dielectric layer is laterally etched to expose an upper surface of the semiconductor substrate that is adjacent the trench, and the trench is filled with a trench dielectric material, wherein the trench dielectric material extends atop the upper surface of the semiconductor substrate adjacent the trench and abuts the pad dielectric layer.

Abstract: A high voltage NMOS transistor is disclosed where the p-doped body is isolated against the p-doped substrate by a DN well having a pinch-off region where the depth of the DN-well is at minimum. By the forming space charge region at raising drain potentials a shielding of the drain potential results because the space charge region touches the field oxide between source and drain at the pinch-off region. An operation at the high side at enhanced voltage levels is possible.

Abstract: A high-voltage transistor is provided with a well of a first conductivity type, which is arranged in a substrate (10) of a second conductivity type, with a source (14), a drain (12), and a gate electrode (18) above a channel region (KN, KP) formed between the source and the drain, wherein several staggered and nested wells (11, 13, 15, 17) of the same conductivity type extend from the source (14) or the drain (12) into the substrate (10) and wherein the doping concentration (log c) of the wells essentially decreases and is smoothed from the substrate surface with increasing depth (T) and also laterally. In this way, field-strength increases and also unintentional breakdown are prevented. Furthermore, a production method is specified.

Abstract: A transistor and a method for the fabrication of transistors with different gate oxide thicknesses is proposed, in which for the doping of the source, the typical LDD implantation, which is formed after the fabrication of the gate electrode, is replaced by a doping step, which is generated before applying the gate stack. In this way that is already a component of the remaining process sequence in the fabrication of the transistor doping can be used.

Abstract: A method of forming an isolation region is provided that in one embodiment substantially reduces divot formation. In one embodiment, the method includes providing a semiconductor substrate, forming a first pad dielectric layer on an upper surface of the semiconductor substrate and forming a trench through the first pad dielectric layer into the semiconductor substrate. In a following process sequence, the first pad dielectric layer is laterally etched to expose an upper surface of the semiconductor substrate that is adjacent the trench, and the trench is filled with a trench dielectric material, wherein the trench dielectric material extends atop the upper surface of the semiconductor substrate adjacent the trench and abuts the pad dielectric layer.

Abstract: An n-conductively doped source region (2) in a deep p-conducting well (DP), a channel region (13), a drift region (14) formed by a counterdoping region (12), preferably below a gate field plate (6) insulated by a gate field oxide (8), and an n-conductively doped drain region (3) arranged in a deep n-conducting well (DN) are arranged in this order at a top side of a substrate (1). A lateral junction (11) between the deep p-conducting well (DP) and the deep n-conducting well (DN) is present in the drift path (14) in the vicinity of the drain region (3) so as to avoid a high voltage drop in the channel region (13) during the operation of the transistor and to achieve a high threshold voltage and also a high breakdown voltage between source and drain.

Abstract: A method for manufacturing a semiconductor body with a trench comprises the steps of etching the trench (11) in the semiconductor body (10) and forming a silicon oxide layer (12) on at least one side wall (14) of the trench (11) and on the bottom (15) of the trench (11) by means of thermal oxidation. Furthermore, the silicon oxide layer (12) on the bottom (15) of the trench (11) is removed and the trench (11) is filled with polysilicon that forms a polysilicon body (13).

Abstract: In order to produce doping regions (DG) in a substrate (S) having different dopings with the aid of a single mask (DM) different mask regions are provided which have elongated mask openings (MO) having different orientations relative to the spatial direction of an oblique implantation. The substrate is rotated between the first and second oblique implantations, wherein during the first oblique implantation maximum and minimum shadings in the different mask regions are opposite one another and the conditions are precisely reversed during the second oblique implantation after the rotation of the substrate.

Abstract: In a high voltage junction field effect transistor, a first well (11) of a first conductivity type is formed in a substrate (10) of a second conductivity type. A source (14) and a drain (15) which are each of the first conductivity type are formed in the first well. A gate (16) of the second conductivity type is arranged in a second well (12) of the second conductivity type, wherein the second well is of the retrograde type. The source, gate and drain are spaced apart from one another by field oxide regions (13a to 13d). Field plates (17a, 17b) extend over the field oxide (13a, 13b) from the gate (16) in the direction of source and drain.

Abstract: A semiconductor body (1) comprises a connecting lead (21) for contacting a semiconductor area (2). The conductivity S per unit length of the connecting lead (21) changes from a first value SW to a second value S0. The semiconductor area (2) is electrically conductively connected to the connecting lead (21).

Abstract: In a high-voltage PMOS transistor having an insulated gate electrode (18), a p-conductive source (15) in an n-conductive well (11), a p-conductive drain (14) in a p-conductive well (12) which is arranged in the n-conductive well, and having a field oxide area (13) between the gate electrode and drain, the depth (A?-B?) of the n-conductive well underneath the drain (14) is less than underneath the source (15), and the depth (A?-B?) of the p-conductive well is greatest underneath the drain (14).

Abstract: A high voltage NMOS transistor is disclosed where the p-doped body is isolated against the p-doped substrate by a DN well having a pinch-off region where the depth of the DN-well is at minimum. By the forming space charge region at raising drain potentials a shielding of the drain potential results because the space charge region touches the field oxide between source and drain at the pinch-off region. An operation at the high side at enhanced voltage levels is possible.

Abstract: In a high-voltage NMOS transistor with low threshold voltage, it is proposed to realize the body doping that defines the channel region in the form of a deep p-well, and to arrange an additional shallow p-doping as a channel stopper on the transistor head, wherein this additional shallow p-doping is produced in the semiconductor substrate at the end of the deep p-well that faces away from the channel region, and extends up to a location underneath a field oxide region that encloses the active window. The leakage current of the parasitic transistor at the transistor head is suppressed with the channel stopper.

Abstract: A transistor and a method for the fabrication of transistors with different gate oxide thicknesses is proposed, in which for the doping of the source, the typical LDD implantation, which is formed after the fabrication of the gate electrode, is replaced by a doping step, which is generated before applying the gate stack. In this way that is already a component of the remaining process sequence in the fabrication of the transistor doping can be used.

Abstract: A high-voltage transistor is provided with a well of a first conductivity type, which is arranged in a substrate (10) of a second conductivity type, with a source (14), a drain (12), and a gate electrode (18) above a channel region (KN, KP) formed between the source and the drain, wherein several staggered and nested wells (11, 13, 15, 17) of the same conductivity type extend from the source (14) or the drain (12) into the substrate (10) and wherein the doping concentration (log c) of the wells essentially decreases and is smoothed from the substrate surface with increasing depth (T) and also laterally. In this way, field-strength increases and also unintentional breakdown are prevented. Furthermore, a production method is specified.

Abstract: In order to produce doping regions (DG) in a substrate (S) having different dopings with the aid of a single mask (DM) different mask regions are provided which have elongated mask openings (MO) having different orientations relative to the spatial direction of an oblique implantation. The substrate is rotated between the first and second oblique implantations, wherein during the first oblique implantation maximum and minimum shadings in the different mask regions are opposite one another and the conditions are precisely reversed during the second oblique implantation after the rotation of the substrate.

Abstract: A method for manufacturing a semiconductor body with a trench comprises the steps of etching the trench (11) in the semiconductor body (10) and forming a silicon oxide layer (12) on at least one side wall (14) of the trench (11) and on the bottom (15) of the trench (11) by means of thermal oxidation. Furthermore, the silicon oxide layer (12) on the bottom (15) of the trench (11) is removed and the trench (11) is filled with polysilicon that forms a polysilicon body (13).

Abstract: In a high voltage junction field effect transistor comprising a first well (11) of a first conductivity type in a substrate (10) of a second conductivity type, comprising a source (14) and a drain (15) in the first well, which are each of the first conductivity type, and comprising a gate (16) of the second conductivity type, which is arranged in a second well (12) of the second conductivity type, the second well is of the retrograde type, the elements source, gate and drain being spaced apart from one another by field oxide regions (13a to 13d) . Field plates (17a, 17b) extend over the field oxide (13a, 13b) from the gate (16) in the direction of source and drain.