Patents by Inventor Masatoshi Echigo

Masatoshi Echigo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20170001972
    Abstract: The method according to the present invention is a method for purifying a compound represented by a specific formula (1) or a resin having a structure represented by a specific formula (2), the method including a step of bringing a solution (A) including an organic solvent optionally immiscible with water, and the compound or the resin into contact with an acidic aqueous solution.
    Type: Application
    Filed: November 28, 2014
    Publication date: January 5, 2017
    Inventors: Masatoshi ECHIGO, Takashi MAKINOSHIMA, Naoya UCHIYAMA
  • Patent number: 9464068
    Abstract: The allyl compound of the present invention is represented by general formula (?): wherein ring Z1 is a naphthalene ring, ring Z2 is a benzene ring or a naphthalene ring, X is a hydrogen atom or a monovalent substituent having 1 to 18 carbon atoms, R is each independently an alkyl group having 1 to 4 carbon atoms or a halogen atom, m is 1 or 2, n is each independently an integer of 0 to 5, and when m is 1, the ring Z1 and the ring Z2 are bonded to each other via an oxygen atom.
    Type: Grant
    Filed: January 24, 2014
    Date of Patent: October 11, 2016
    Assignee: MITSUBISHI GAS CHEMICAL COMPANY, INC.
    Inventor: Masatoshi Echigo
  • Publication number: 20160176840
    Abstract: A resist composition containing a compound represented by the general formula (1) or (2), a method for forming a resist pattern using the composition, a polyphenolic compound for use in the composition, and an alcoholic compound that can be derived therefrom are described.
    Type: Application
    Filed: January 25, 2016
    Publication date: June 23, 2016
    Inventors: Masatoshi ECHIGO, Masako YAMAKAWA
  • Patent number: 9354516
    Abstract: A resist composition of the present invention is a resist composition containing a resist base material and a solvent. The resist base material contains a specific stereoisomer. A content of the specific stereoisomer in the resist base material is 50 to 100% by mass.
    Type: Grant
    Filed: October 16, 2013
    Date of Patent: May 31, 2016
    Assignee: Mitsubishi Gas Chemical Company, Inc.
    Inventors: Masaaki Takasuka, Masatoshi Echigo, Yu Okada, Yumi Ochiai
  • Publication number: 20160145231
    Abstract: A resist composition containing a compound represented by the general formula (1) or (2), a method for forming a resist pattern using the composition, a polyphenolic compound for use in the composition, and an alcoholic compound that can be derived therefrom are described.
    Type: Application
    Filed: January 19, 2016
    Publication date: May 26, 2016
    Inventors: Masatoshi ECHIGO, Masako YAMAKAWA
  • Publication number: 20160124303
    Abstract: The resist composition according to the present invention is a resist composition comprising a solid component comprising a resist base material, and a solvent. In the resist composition according to the present invention, the resist composition contains 1 to 80% by mass of the solid component and 20 to 99% by mass of the solvent, the resist base material comprises a compound (ctt form) represented by a predetermined formula (1) and a compound represented by a predetermined formula (3), the proportion of the compound (ctt form) represented by the predetermined formula (1) to the resist base material is from 65 to 99% by mass, and the mass ratio of the compound represented by the predetermined formula (3) to the compound (ctt form) represented by the predetermined formula (1) is from 0.01 to 0.53.
    Type: Application
    Filed: May 28, 2014
    Publication date: May 5, 2016
    Inventors: Masaaki Takasuka, Masatoshi Echigo, Yu Okada, Yumi Ochiai
  • Patent number: 9316913
    Abstract: Material for forming an underlayer film for lithography, which has a high carbon concentration, a low oxygen concentration, a relatively high heat resistance and also a relatively high solvent solubility, and which can be applied to a wet process is disclosed. Material for forming an underlayer film for lithography contains a compound represented by general formula (1).
    Type: Grant
    Filed: August 9, 2012
    Date of Patent: April 19, 2016
    Assignee: MITSUBISHI GAS CHEMICAL COMPANY, INC.
    Inventors: Masatoshi Echigo, Go Higashihara, Naoya Uchiyama
  • Patent number: 9239517
    Abstract: The object is to provide a compound having high dissolvability in a safe solvent and high sensitivity, and also capable of obtaining a good resist pattern shape, a radiation-sensitive composition containing the same, and a resist pattern formation method using the composition. For this purpose, a compound (B) obtained by reaction between a polyphenol based cyclic compound (A) and a compound (C) having a particular structure, a radiation-sensitive composition containing the same, and a resist pattern formation method using the composition are provided.
    Type: Grant
    Filed: July 25, 2011
    Date of Patent: January 19, 2016
    Assignee: Mitsubishi Gas Chemical Company, Inc.
    Inventor: Masatoshi Echigo
  • Publication number: 20150376157
    Abstract: The present invention provides a resist composition which is excellent in heat resistance, has high solubility in a safe solvent, has high sensitivity, and can impart a good shape to a resist pattern.
    Type: Application
    Filed: January 28, 2014
    Publication date: December 31, 2015
    Inventors: Masatoshi Echigo, Masako Yamakawa
  • Publication number: 20150376158
    Abstract: The material for forming an underlayer film for lithography of the present invention contains a compound represented by the following general formula (1). (in formula (1), each X independently represents an oxygen atom or a sulfur atom, R1 represents a single bond or a 2n-valent hydrocarbon group having 1 to 30 carbon atoms, the hydrocarbon group may have a cyclic hydrocarbon group, a double bond, a hetero atom or an aromatic group having 6 to 30 carbon atoms, and each R2 independently represents a linear, branched or cyclic alkyl group having 1 to 10 carbon atoms, an aryl group having 6 to 10 carbon atoms, an alkenyl group having 2 to 10 carbon atoms, or a hydroxyl group, provided that at least one R2 represents a hydroxyl group, each m is independently an integer of 1 to 4, n is an integer of 1 to 4, and p is 0 or 1.
    Type: Application
    Filed: February 4, 2014
    Publication date: December 31, 2015
    Inventors: Masatoshi Echigo, Takashi Makinoshima, Naoya Uchiyama
  • Publication number: 20150376202
    Abstract: The material for forming an underlayer film for lithography of the present invention contains a compound having a structure represented by the following general formula (1). (in formula (1), each X independently represents an oxygen atom or a sulfur atom, R1 represents a single bond or a 2n-valent hydrocarbon group having 1 to 30 carbon atoms, the hydrocarbon group may have a cyclic hydrocarbon group, a double bond, a hetero atom or an aromatic group having 6 to 30 carbon atoms, R2 represents a linear, branched or cyclic alkyl group having 1 to 10 carbon atoms, an aryl group having 6 to 10 carbon atoms, an alkenyl group having 2 to 10 carbon atoms, or a hydroxyl group, m is an integer of 0 to 3, n is an integer of 1 to 4, p is 0 or 1, and q is an integer of 1 to 100.
    Type: Application
    Filed: February 4, 2014
    Publication date: December 31, 2015
    Inventors: Masatoshi Echigo, Takashi Makinoshima, Naoya Uchiyama
  • Publication number: 20150368224
    Abstract: The allyl compound of the present invention is represented by general formula (?): wherein ring Z1 is a naphthalene ring, ring Z2 is a benzene ring or a naphthalene ring, X is a hydrogen atom or a monovalent substituent having 1 to 18 carbon atoms, R is each independently an alkyl group having 1 to 4 carbon atoms or a halogen atom, m is 1 or 2, n is each independently an integer of 0 to 5, and when m is 1, the ring Z1 and the ring Z2 are bonded to each other via an oxygen atom.
    Type: Application
    Filed: January 24, 2014
    Publication date: December 24, 2015
    Inventor: Masatoshi Echigo
  • Patent number: 9200105
    Abstract: Provided are a naphthalene formaldehyde resin obtained by reacting a compound (A) represented by formula (1) and formaldehyde (B) in a molar ratio, (A):(B), of 1:1 to 1:20 in the presence of an acidic catalyst, and a deacetalized naphthalene formaldehyde resin and a modified naphthalene formaldehyde resin derived therefrom.
    Type: Grant
    Filed: January 31, 2013
    Date of Patent: December 1, 2015
    Assignee: MITSUBISHI GAS CHEMICAL COMPANY, INC.
    Inventors: Naoya Uchiyama, Go Higashihara, Masatoshi Echigo
  • Publication number: 20150322308
    Abstract: An epoxy resin obtained through the following steps (a) to (d): (a): a step of reacting a compound represented by formula (1) and/or (2) with formaldehyde in the presence of a catalyst to thereby provide an aromatic hydrocarbon-formaldehyde resin; (b): a step of treating the aromatic hydrocarbon-formaldehyde resin obtained in the step (a) with an acidic catalyst and water to thereby provide an acid-treated resin; (c): a step of treating the acid-treated resin obtained in the step (b) with an acidic catalyst and a compound represented by formula (3) to thereby provide a modified resin; and (d): a step of reacting the modified resin obtained in the step (c) with epihalohydrin to thereby provide an epoxy resin.
    Type: Application
    Filed: June 7, 2013
    Publication date: November 12, 2015
    Inventors: Masatoshi Echigo, Naoya Uchiyama
  • Patent number: 9182666
    Abstract: A cyclic compound of the present invention has a molecular weight of 500 to 5000, and is represented by the following formula (1):
    Type: Grant
    Filed: November 14, 2012
    Date of Patent: November 10, 2015
    Assignee: MITSUBISHI GAS CHEMICAL CO., INC.
    Inventors: Masatoshi Echigo, Masako Yamakawa
  • Patent number: 9150491
    Abstract: A bicyclohexane derivative compound useful in the field of photoresist, the field of intermediate of drugs and pesticides, and the like, and a manufacturing method of the same are provided. A bicyclohexane derivative compound represented by the following general formula (II) is provided. (In formula (II), Y independently represents an alkyl group of 1 to 10 carbons, a halogen atom, an acyloxy group, an alkoxycarbonyl group or a hydroxyl group, X1 represents a halogen atom, m represents an integer of 0 to 11, and m represents an integer of 0 to 10.).
    Type: Grant
    Filed: January 13, 2011
    Date of Patent: October 6, 2015
    Assignee: Mitsubishi Gas Chemical Company, Inc
    Inventors: Masatoshi Echigo, Dai Oguro
  • Patent number: 9122153
    Abstract: A cyclic compound having a molecular weight of 500 to 5000 is represented by the following formula (1), wherein at least one of R0 is a monovalent group containing an iodine atom. Also disclosed are a method for producing the cyclic compound, a composition containing the cyclic compound, and a method for forming a resist pattern using the composition.
    Type: Grant
    Filed: August 9, 2012
    Date of Patent: September 1, 2015
    Assignee: MITSUBISHI GAS CHEMICAL COMPANY, INC.
    Inventors: Masatoshi Echigo, Masako Yamakawa
  • Patent number: 9110373
    Abstract: There is provided a novel phenolic resin which can be used as a coating agent or a resist resin for a semiconductor, which has a high carbon concentration and a low oxygen concentration in the resin, which has a relatively high heat resistance and also a relatively high solvent solubility, and which can be applied to a wet process. There are also provided a material useful for forming a novel photoresist underlayer film which has a relatively high solvent solubility, which can be applied to a wet process, and which is excellent in etching resistance as an underlayer film for a multilayer resist, an underlayer film formed using the same, and a pattern forming method using the same. A resin of the present invention is obtained by reacting a compound having a specified structure and an aldehyde having a specified structure in the presence of an acidic catalyst. In addition, a material for forming an underlayer film for lithography of the present invention includes at least the resin and an organic solvent.
    Type: Grant
    Filed: May 30, 2012
    Date of Patent: August 18, 2015
    Assignee: MITSUBISHI GAS CHEMICAL COMPANY, INC.
    Inventors: Naoya Uchiyama, Go Higashihara, Masatoshi Echigo
  • Publication number: 20150090691
    Abstract: Material for forming an underlayer film for lithography, which has a high carbon concentration, a low oxygen concentration, a relatively high heat resistance and also a relatively high solvent solubility, and which can be applied to a wet process is disclosed. Material for forming an underlayer film for lithography contains a compound represented by general formula (1).
    Type: Application
    Filed: August 9, 2012
    Publication date: April 2, 2015
    Applicant: Mitsubishi Gas Chemical Company, Inc.
    Inventors: Masatoshi Echigo, Go Higashihara, Naoya Uchiyama
  • Patent number: 8969629
    Abstract: Disclosed are: a cyclic compound which has high solubility in a safe solvent, is highly sensitive, enables the formation of a resist pattern having a good shape, and rarely causes resist pattern collapse; a process for producing the cyclic compound; a radiation-sensitive composition containing the cyclic compound; and a resist pattern formation method using the composition. Specifically disclosed are: a cyclic compound having a specific structure; a process for producing the cyclic compound; a radiation-sensitive composition containing the compound; and a resist pattern formation method using the composition.
    Type: Grant
    Filed: November 25, 2010
    Date of Patent: March 3, 2015
    Assignee: Mitsubishi Gas Chemical Company, Inc.
    Inventors: Masaaki Takasuka, Masatoshi Echigo, Yu Okada