Abstract: A semiconductor device including: a base material portion that includes a semiconductor substrate and an insulating film that is formed on one face of the semiconductor substrate and on which a vertical hole is formed along the thickness direction of the semiconductor substrate; a vertical hole wiring portion that includes a vertical hole electrode formed on a side wall of the base material portion that forms the vertical hole; a metallic film that is formed within the insulating film and that is electrically connected to the vertical hole wiring portion; and a conductive protective film that is formed to be in contact with the metallic film within the insulating film and that is formed in a region that includes a contact region of a probe during a probe test that is performed in the middle of manufacture on a film face of the metallic film.

Abstract: A semiconductor device includes: a semiconductor substrate that includes a semiconductor; an electrode layer formed on a first surface side inside the semiconductor substrate; a frame layer laminated on the first surface of the semiconductor substrate; a conductor layer formed in an aperture portion formed by processing the semiconductor substrate and the frame layer in such a manner as to expose the electrode layer on the first surface of the semiconductor substrate; a vertical hole formed through the semiconductor substrate from a second surface of the semiconductor substrate to the conductor layer; and a wiring layer that is electrically connected to the electrode layer via the conductor layer at an end portion of the vertical hole, and that extends to the second surface of the semiconductor substrate.

Abstract: A solid-state imaging device includes a first substrate including a light-sensing portion configured to perform photoelectric conversion of incident light and a wiring portion provided on a light-incident side; an optically transparent second substrate provided on a wiring portion side of the first substrate at a certain distance; a through-hole provided in the first substrate; a through-via provided in the through-hole; a front-surface-side electrode connected to the through-via and provided on a front surface of the first substrate; a back-surface-side electrode connected to the through-via and provided on a back surface of the first substrate; and a stopper electrode provided on the front-surface-side electrode and filling a space between the front-surface-side electrode and the second substrate.

Abstract: According to a service management method to supply products-in-circulation to service receivers, a service management system is built that enables the service provider to manage whether the service receivers are using those products-in-circulation delivered from the service provider in an authorized manner. This provides a reasonable service whereby the service receiver is charged only for those products-in-circulation the service receiver has actually used. To this end, the service management device in accordance with the present invention includes: a memory section for registering data of products-in-circulation to be delivered to the service receivers; an input section for entering current status of the products-in-circulation; and an arithmetic processing section for calculating charges on the basis of the number of products-in-circulation that are regarded as having been actually used, not the total number of the delivered product-in-circulations.

Abstract: An angular velocity detector using a vibrator made of an annular thin film. The detector also has electrodes arranged ingeniously to have high detection sensitivity for angular velocities. The detector can detect angular velocities in two axial directions simultaneously. The detector has support portions (1105), (1106) which are formed over a first substrate (1123) and poised above the surface of the first substrate (1100) at a certain spacing therefrom. Resilient support bodies are supported to the support portions and include outer springs (1102) and inner springs (1103). A vibrator (1101) is mounted via the resilient support. An exciting means consisting of a magnet (1124) and an exciting electrode (1108) excites the vibrator to vibrate in a certain direction of vibrations.

Abstract: A MEMS sensor driving device drives a MEMS sensor including a supporter provided on a surface of a substrate, an elastic member having one end connected to the supporter, and an oscillator which is supported by another end of the elastic member in a suspended state over the surface of the substrate and which is displaceable for the substrate. The MEMS sensor driving device includes a detecting unit for detecting an oscillation of the oscillator, and a feedback unit for amplifying a signal representing the oscillation detected by the detecting unit and inputting the amplified signal as a driving signal to the MEMS sensor.

Abstract: According to a service management method to supply products-in-circulation to service receivers, a service management system is built that enables the service provider to manage whether the service receivers are using those products-in-circulation delivered from the service provider in an authorized manner. This provides a reasonable service whereby the service receiver is charged only for those products-in-circulation the service receiver has actually used. To this end, the service management device in accordance with the present invention includes: a memory section for registering data of products-in-circulation to be delivered to the service receivers; an input section for entering current status of the products-in-circulation; and an arithmetic processing section for calculating charges on the basis of the number of products-in-circulation that are regarded as having been actually used, not the total number of the delivered product-in-circulations.

Abstract: A service management method of the present invention is provided so as to enable a service provider to easily obtain information on a user's usage conditions after the sales of a software package, and to provide the user with service to give him a chance and motivation to use a function which is available in the software package but is seldom used. To attain these objects, the service management method of the present invention includes a step for preparing a file showing usage conditions of a plurality of functions constituting the software package, a step for detecting that a function is selected or performed, and a step for updating the file so as to distinguish the detected function from an undetected function.

Abstract: An angular velocity detector using a vibrator made of an annular thin film. The detector also has electrodes arranged ingeniously to have high detection sensitivity for angular velocities. The detector can detect angular velocities in two axial directions simultaneously. The detector has support portions (1105), (1106) which are formed over a first substrate (1123) and poised above the surface of the first substrate (1100) at a certain spacing therefrom. Resilient support bodies are supported to the support portions and include outer springs (1102) and inner springs (1103). A vibrator (1101) is mounted via the resilient support. An exciting means consisting of a magnet (1124) and an exciting electrode (1108) excites the vibrator to vibrate in a certain direction of vibrations.

Abstract: A MEMS sensor driving device drives a MEMS sensor including a supporter provided on a surface of a substrate, an elastic member having one end connected to the supporter, and an oscillator which is supported by another end of the elastic member in a suspended state over the surface of the substrate and which is displaceable for the substrate. The MEMS sensor driving device includes a detecting unit for detecting an oscillation of the oscillator, and a feedback unit for amplifying a signal representing the oscillation detected by the detecting unit and inputting the amplified signal as a driving signal to the MEMS sensor.

Abstract: On a silicon substrate 201, there are formed a silicon oxide 202, an adhesion layer 203 consisting of TiO2, a lower electrode 204 consisting of Pt, a ferroelectric thin film 205, and an upper electrode 206 consisting of Pt. A portion of the ferroelectric thin film adjacent to the upper electrode 206 is formed from a compound with a composition formula of SrBi2 (TaxNb1-x)2O9 where x=0.7. A compound with a value x in the composition formula being greater than 0.7 is used for the portion of the ferroelectric thin film adjacent to the upper electrode 206, so as to generate an appropriate number of grain boundaries on the surface of the ferroelectric film 205, the grain boundaries enabling implementation of anchoring effect between the ferroelectric film 205 and the upper electrode 206, thereby achieving prevention of exfoliation of the upper electrode 206 from the ferroelectric film 205.

Abstract: A terminal of a service provider is characterized in that it includes: a storage unit for registering unique information on a machine of a contract signer; a communications unit for detecting information on a remaining amount of a consumable article in the machine via telephone lines as a network; and a processing unit for making an instruction to dispatch a new machine to the contract signer if the remaining amount of the consumable article has reached a specified value. A comprehensive and essential service is provided covering from sales to continuous use of the machine, by which consumable articles are managed, replaced, and collected without requiring any work done by machine users or any financial burden borne by manufacturers selling the machine.

Abstract: A semiconductor memory device includes: a capacitor formed on a substrate and including a lower electrode, a dielectric film and an upper electrode; a selection transistor formed at the substrate; an electrically conductive plug for providing electrical connection between the selection transistor and the capacitor; and a diffusion barrier film provided between the electrically conductive plug and the lower electrode of the capacitor. The diffusion barrier film is a TaxSi1−xNy film or a HfxSi1−xNy film (where 0.2<x<1 and 0<y<1). The lower electrode includes an Ir film and an IrO2 film which are sequentially formed.

Abstract: On a silicon substrate 201, there are formed a silicon oxide 202, an adhesion layer 203 consisting of TiO2, a lower electrode 204 consisting of Pt, a ferroelectric thin film 205, and an upper electrode 206 consisting of Pt. A portion of the ferroelectric thin film adjacent to the upper electrode 206 is formed from a compound with a composition formula of SrBi2(TaxNb1-x)2O9 where x=0.7. A compound with a value x in the composition formula being greater than 0.7 is used for the portion of the ferroelectric thin film adjacent to the upper electrode 206, so as to generate an appropriate number of grain boundaries on the surface of the ferroelectric film 205, the grain boundaries enabling implementation of anchoring effect between the ferroelectric film 205 and the upper electrode 206, thereby achieving prevention of exfoliation of the upper electrode 206 from the ferroelectric film 205.

Abstract: In the service management method for providing a product-in-circulation to a service receiver, a terminal managed by a service provider includes: a memory section for registering data of a product-in-circulation delivered to a contract signer and an expiring date of the product-in-circulation; an input section for inputting the status on use of the product-in-circulation, or a communications section for detecting the status on use of the product-in-circulation; and an arithmetic processing section for calculating an account of a product-in-circulation whose status on use has been input, of all products-in-circulation delivered to the service receiver, in accordance with expiring date data of the product-in-circulation. According to the arrangement, it is possible to provide a rational service management system whereby the service receiver does not have to purchase extra products-in-circulation in advance, and a product-in-circulation can be charged according to the expiring date.

Abstract: A semiconductor manufacturing apparatus is improved so that apparatus operating condition parameters can be restored to setting values of various levels such as standard, apparatus delivery time or client oriented setting values even if the parameters are overwritten. The semiconductor manufacturing apparatus is constituted by a multi-chamber processing system 4, a transport system 8 of an object and an equipment control unit 210 having a memory apparatus 214 storing the apparatus operating condition parameters and providing the parameters to machine control units 150, 72. The machine control units 150, 72 controls the processing system 4 and the transport system 8 based on the apparatus operating condition parameters.

Abstract: A terminal of a service provider is characterized in that it includes: a storage unit for registering unique information on a machine of a contract signer; a communications unit for detecting information on a remaining amount of a consumable article in the machine via telephone lines as a network; and a processing unit for making an instruction to dispatch a new machine to the contract signer if the remaining amount of the consumable article has reached a specified value. A comprehensive and essential service is provided covering from sales to continuous use of the machine, by which consumable articles are managed, replaced, and collected without requiring any work done by machine users or any financial burden borne by manufacturers selling the machine.

Abstract: A service management method of the present invention is provided so as to enable a service provider to easily obtain information on a user's usage conditions after the sales of a software package, and to provide the user with service to give him a chance and motivation to use a function which is available in the software package but is seldom used. To attain these objects, the service management method of the present invention includes a step for preparing a file showing usage conditions of a plurality of functions constituting the software package, a step for detecting that a function is selected or performed, and a step for updating the file so as to distinguish the detected function from an undetected function.

Abstract: In a label information providing method, first, a service provider collects label information in a label which is affixed to a bottle, then, stores the collected label information in a storage section in a terminal of the service provider. On the other hand, a consumer affixes a label showing an access destination, which allows a user to obtain label information, to a bottle corresponding to the label information. When the consumer purchases wine, he/she can access the terminal of the service provider with reference to the access destination information included in the label affixed to a wine bottle. When accessed, the terminal of the service provider sends out label information corresponding to access details to a user's terminal, thus allowing the consumer to obtain desired label information as electronic data from the service provider. Consequently, a consumer who purchased wine can obtain a label of the wine, where the label has valuable information, by a simple method.

Abstract: According to a service management method to supply products-in-circulation to service receivers, a service management system is built that enables the service provider to manage whether the service receivers are using those products-in-circulation delivered from the service provider in an authorized manner. This provides a reasonable service whereby the service receiver is charged only for those products-in-circulation the service receiver has actually used. To this end, the service management device in accordance with the present invention includes: a memory section for registering data of products-in-circulation to be delivered to the service receivers; an input section for entering current status of the products-in-circulation; and an arithmetic processing section for calculating charges on the basis of the number of products-in-circulation that are regarded as having been actually used, not the total number of the delivered product-in-circulations.