Abstract: A quartz window can withstand a pressure difference between an atmospheric pressure and a negative pressure environment created in a thermal processing apparatus that applies a thermal process to a target object under the negative pressure environment. The quartz window is adapted to be positioned between a radiation heat source and an object to be subjected to a heat treatment in the process chamber. The quartz window has a plate made of quartz and a plurality of ribs formed on the plate so as to reinforce the plate.

Abstract: The present invention is directed to a grease for a rolling bearing containing poly-&agr;-olefin synthetic oil or diphenyl ether synthetic oil, a diurea thickening agent, and an organic antimony compound or an organic molybdenum compound. The present invention is also directed to a rolling bearing in which the grease for a rolling bearing is sealed. The organic antimony compound or the organic molybdenum compound reacts with a metal composing inner and outer bearing rings and a rolling element to form a compound film contributing to the reduction of the force in the tangential direction on a raceway surface of the bearing rings and a surface of the rolling element, thereby preventing an excessively large force in the tangential direction under high-speed rotation. This enables to lengthen the life of the rolling bearing used under particularly severe conditions such as high temperature, high-speed rotation and high road.

Abstract: A virtual blackbody radiation system (10) includes a light-emitting unit (1) including an LED driven by a fixed current, a light-receiving unit (2) including a sapphire rod, and an optical unit (3) including lenses (31, 32) for converging light emitted by the light-emitting unit in a convergent light. A cylindrical member (41)included in the optical unit (3)can be moved along the optical axis by a servomotor (42) included in a focus adjusting unit (4) for positional adjustment. The focus of convergent light relative to the light-receiving unit (2) can be adjusted by moving the lens (32) disposed in the cylindrical member (41) along the optical axis relative to the light-receiving unit (2). The intensity of the convergent light on the light-receiving unit (2) can be adjusted to the intensity of predetermined blackbody radiation.

Abstract: A one-way clutch for switching a power transmitting state and a power transmission interrupting state between an inner ring member and an outer ring member. At a plurality of circumferential portions of one of the inner ring member and the outer ring member, there are formed cam faces between the circumference of the one of the inner and outer ring members for forming wedge-shaped spaces which are narrowed in one circumferential direction. These cam faces are made to have a higher hardness than that of rollers which are individually arranged in the wedge-shaped spaces. As a result, the cam faces are suppressed from wear as the time elapses, and the wedge angle of the wedge-shaped spaces is kept substantially constant.

Abstract: A method of detecting a temperature of an object in a multiple-reflection environment by a radiation pyrometer includes the steps of detecting a radiation strength emitted from a target region of an object, applying a correction to the radiation strength so as to correct the effect of multiple reflections of a radiation emitted from the object, applying a correction to the radiation strength so as to correct a reflection loss caused at an end surface of an optical medium interposed between the object and a sensing head of the pyrometer, applying a correction to the radiation strength with regard to an optical absorption loss caused in the optical medium, and applying a correction to the radiation strength with regard to a stray radiation coming in to the sensing head from a source other than the target region of the object.

Abstract: A thermal processing apparatus rapidly increases and decreases a temperature of a target object at a low-power consumption. The target object is subjected to a thermal treatment in a process camber. A heat source heats the target object from a side of a first surface of the target object. A cooling arrangement including a bottom part of the process chamber cools the object from a side of a second surface opposite to the first surface. A gas having high thermal conductivity is introduced into a space between the target object and the bottom part so as to promote heat transfer from the object to the bottom part of the process chamber. A moving mechanism moves at least one of the object and the bottom part of the process chamber so that the object can be heated with less influence by the cooling arrangement being positioned away from the target object while the target object can be efficiently cooled by the cooling arrangement being positioned close to the target object.

Abstract: A quartz window can withstand a pressure difference between an atmospheric pressure and a negative pressure environment created in a thermal processing apparatus that applies a thermal process to a target object under the negative pressure environment. The quartz window is adapted to be positioned between a radiation heat source and an object to be subjected to a heat treatment in the process chamber. The quartz window has a plate made of quartz and a plurality of ribs formed on the plate so as to reinforce the plate.

Abstract: The process chamber of a thermal CVD apparatus for a semiconductor wafer W has flooring and ceiling plates made of quartz. Lower and upper heaters are arranged behind the flooring and ceiling plates. The supply for supplying a process gas into the process chamber has a shower head directly under the ceiling plate, an outer tube surrounding the shower head, and radial tubes connecting the outer tube and the shower head. The shower head is made of quartz, and its top bottom and top plates can transmit radiation heat from the upper heater.

Abstract: A one-by-one type heat-processing apparatus is disclosed. The one-by-one type heat-processing apparatus includes a processing vessel for processing a semiconductor wafer. A susceptor having a support surface for placing the semiconductor wafer is arranged in the processing vessel. A shower head section is arranged at an interval with respect to the support surface of the susceptor. Processing gas supply pipes for supplying a processing gas are independently connected to the shower head section. A plurality of gas injection holes are formed in the shower head section. First to third heating means for heating the susceptor are attached to the susceptor. The first heating means having a disk-like shape is arranged at almost the center on the lower surface side of the susceptor. The second heating means is concentrically arranged to surround the first heating means. The third heating means is arranged at the peripheral edge portion of the susceptor.

Abstract: A process apparatus comprises a process chamber containing a semiconductor wafer, a gas being able to be supplied to and exhausted from the process chamber, a support table for supporting an object to be processed, which is contained in the process chamber, a gas supply system for supplying the gas into the process chamber, and a gas exhaust system for exhausting the gas from the process chamber. An inner wall of the process chamber and the support table are formed of an aluminum-based material, and the surfaces of these are brought into contact with a fluorine-containing gas, thereby coating the surfaces with AlF.sub.3.

Abstract: A main pump having a wide range of vacuum exhaust capabilities and a high exhaust speed is connected adjacent to a processing chamber and an auxiliary pump having a low exhaust speed is connected by a small-diameter auxiliary pipeline to the exhaust side of the main pump. Since a main pump having a wide range of vacuum exhaust capabilities and a high exhaust speed is connected adjacent to the processing chamber in this manner, not only can improvements in the exhaust characteristics be expected, but it is also possible to reduce the diameter of the auxiliary pipeline from the main pump onward and make the auxiliary pump smaller. Since the auxiliary pump having a low exhaust speed is connected by a small-diameter auxiliary pipeline to the exhaust side of the main pump, the size and cost of the entire system can be reduced.

Abstract: A ball bearing cage is formed with pockets each having an inwardly curved spherical pocket face similar to a ball in shape. At least one of the pockets has a protrusion projecting inwardly thereof from one of inner and outer circumferential edge portions of the pocket face. A ball bearing comprises balls retained between inner and outer bearing rings and equispaced circumferentially thereof by a cage. The cage is formed with pockets each having an inwardly curved spherical pocket face similar to the ball in shape, at least one of the pockets having a protrusion projecting inwardly thereof from an edge portion of the face close to the fixed one of the rings.

Abstract: An antifriction bearing includes a fixed ring which comprises a steel containing up to about 10% of residual austenite. An alternator for vehicles includes a stator mounted on a frame, a rotor having its rotary shaft rotatably supported by a pair of bearings on the frame and a drive pulley mounted on one end of the shaft projecting outward from the frame. The outer ring of at least the bearing toward the pulley comprises a steel containing up to about 10% of residual austenite.

Abstract: A bearing steel having long rolling life comprising, by weight, 0.65 to 0.90% of C, 0.15 to 0.50% of Si, 0.15 to 1.0% of Mn and 2.0 to 5.0% of Cr, and the balance of Fe. Austenite grain size can be prevented from becoming coarser to make hardening in high temperature possible by further adding one or more of 0.0090 to 0.0200% of N, 0.010 to 0.050% of Al and 0.005 to 0.500% of Nb as optional elements to the steel. Further, rolling fatigue life can be improved by further adding one or more of 0.20 to 0.50% of Ni, 0.10 to 2.00% Of Mo and 0.05 to 1.00% of V as optional elements, and machinability can be improved by further adding one or more of 0.02 to 0.05% of S, 0.005 to 0.10% of rare earth elements, 0.02 to 0.30% of Pb, 0.0005 to 0.0100% of Ca, 0.001 to 0.200% of Bi, 0.005 to 0.20% of Se and 0.005 to 0.100% of Te in the steel as optional elements.

Abstract: A device for preventing creep of the outer ring of an antifriction bearing relative to the housing supporting the outer ring. The bearing outer ring has a circumferential groove formed in its outer periphery eccentrically thereof and having fitted therein a bandlike resilient ring which has a curved protruding portion larger than the depth of the groove. In the vicinity of the protruding portion, the resilient ring has its opposite end portions lapped over each other within the groove. When the outer ring acts to creep within the housing, the shallow groove portion of the groove approaches the protruding portion and lapped end portions of the ring, causing the end portions to act as a wedge between the housing and the outer ring to stop the creep.