Patents by Inventor Matthia Bauer

Matthia Bauer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Germanium deposition
    Publication number: 20050191826
    Abstract: A method comprises, in a reaction chamber, depositing a seed layer of germanium over a silicon-containing surface at a first temperature. The seed layer has a thickness between about one monolayer and about 1000 ?. The method further comprises, after depositing the seed layer, increasing the temperature of the reaction chamber while continuing to deposit germanium. The method further comprises holding the reaction chamber in a second temperature range while continuing to deposit germanium. The second temperature range is greater than the first temperature.
    Type: Application
    Filed: February 25, 2005
    Publication date: September 1, 2005
    Inventors: Matthia Bauer, Paul Brabant, Trevan Landin