Patents by Inventor Matthias Goldbach

Matthias Goldbach has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9236482
    Abstract: The present disclosure provides for semiconductor device structures and methods for forming semiconductor device structures, wherein a field-inducing structure is provided lower than an active portion of a fin along a height dimension of that fin, the height dimension extending in parallel to a normal direction of a semiconductor substrate surface in which the fin is formed. The field-inducing structure hereby implements a permanent field effect below the active portion. The active portion of the fin is to be understood as a portion of the fin covered by a gate dielectric.
    Type: Grant
    Filed: May 13, 2015
    Date of Patent: January 12, 2016
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Matthias Goldbach, Martin Trentzsch
  • Publication number: 20150243789
    Abstract: The present disclosure provides for semiconductor device structures and methods for forming semiconductor device structures, wherein a field-inducing structure is provided lower than an active portion of a fin along a height dimension of that fin, the height dimension extending in parallel to a normal direction of a semiconductor substrate surface in which the fin is formed. The field-inducing structure hereby implements a permanent field effect below the active portion. The active portion of the fin is to be understood as a portion of the fin covered by a gate dielectric.
    Type: Application
    Filed: May 13, 2015
    Publication date: August 27, 2015
    Inventors: Matthias Goldbach, Martin Trentzsch
  • Patent number: 9064900
    Abstract: The present disclosure provides for semiconductor device structures and methods for forming semiconductor device structures, wherein a field-inducing structure is provided lower than an active portion of a fin along a height dimension of that fin, the height dimension extending in parallel to a normal direction of a semiconductor substrate surface in which the fin is formed. The field-inducing structure hereby implements a permanent field effect below the active portion. The active portion of the fin is to be understood as a portion of the fin covered by a gate dielectric.
    Type: Grant
    Filed: July 8, 2013
    Date of Patent: June 23, 2015
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Matthias Goldbach, Martin Trentzsch
  • Patent number: 8946821
    Abstract: SRAM integrated circuits are provided having pull up and pull down transistors of an SRAM cell fabricated in and on a silicon substrate. A layer of insulating material overlies the pull up and pull down transistors. Pass gate transistors of the SRAM cell are fabricated in a semiconducting layer overlying the layer of insulating material.
    Type: Grant
    Filed: January 11, 2012
    Date of Patent: February 3, 2015
    Assignee: Globalfoundries, Inc.
    Inventors: Matthias Goldbach, Peter Baars
  • Publication number: 20150008536
    Abstract: The present disclosure provides for semiconductor device structures and methods for forming semiconductor device structures, wherein a field-inducing structure is provided lower than an active portion of a fin along a height dimension of that fin, the height dimension extending in parallel to a normal direction of a semiconductor substrate surface in which the fin is formed. The field-inducing structure hereby implements a permanent field effect below the active portion. The active portion of the fin is to be understood as a portion of the fin covered by a gate dielectric.
    Type: Application
    Filed: July 8, 2013
    Publication date: January 8, 2015
    Inventors: Matthias Goldbach, Martin Trentzsch
  • Patent number: 8921904
    Abstract: Semiconductor devices and related fabrication methods are provided. An exemplary fabrication method involves forming a pair of gate structures having a dielectric region disposed between a first gate structure of the pair and a second gate structure of the pair, and forming a voided region in the dielectric region between the first gate structure and the second gate structure. The first and second gate structures each include a first gate electrode material, wherein the method continues by removing the first gate electrode material to provide second and third voided regions corresponding to the gate structures and forming a second gate electrode material in the first voided region, the second voided region, and the third voided region.
    Type: Grant
    Filed: September 20, 2013
    Date of Patent: December 30, 2014
    Assignee: GLOBALFOUNDRIES, INC.
    Inventors: Peter Baars, Matthias Goldbach
  • Patent number: 8876019
    Abstract: A cleaning device (1) for a lens (2) of a headlight of a motor vehicle has two telescoping tubes (6, 7), the outer tube (6) holding a spray nozzle (9). The outer tube (6) is also surrounded by a protective tube (8) to be fixed in the motor vehicle. When the outer tube (6) is pulled out (9), the spray nozzle is displaced over the lens (2). The connections of the tubes (6, 7) are reliably protected from dirt accumulation.
    Type: Grant
    Filed: June 13, 2006
    Date of Patent: November 4, 2014
    Assignee: Continental Automotive GmbH
    Inventors: Thomas Discher, Matthias Goldbach, Uwe Martin, Rolf-Dieter Schlein, Annegret Kuech
  • Patent number: 8823138
    Abstract: A semiconductor structure includes a resistor. The resistor includes a semiconductor region, a dielectric layer, a first electrical connection and a second electrical connection. The dielectric layer is provided on the semiconductor region and includes a high-k material having a greater dielectric constant than silicon dioxide. The dielectric layer includes a species creating fixed charges. A first electrical connection is provided at a first end of the semiconductor region and a second electrical connection is provided at a second end of the semiconductor region.
    Type: Grant
    Filed: July 9, 2013
    Date of Patent: September 2, 2014
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Matthias Goldbach, Martin Trentzsch
  • Patent number: 8735232
    Abstract: Methods are provided for forming semiconductor devices. One method includes etching trenches into a silicon substrate and filling the trenches with an insulating material to delineate a plurality of spaced apart silicon fins. Dummy gate structures are formed, which includes a first dummy gate structure, that overlie and are transverse to the fins. A back fill material is filled between the dummy gate structures. The first dummy gate structure and an upper portion of the insulating material are removed to expose an active fins portion of the fins. The active fins portion is dimensionally modified to form an altered active fins portion. A high-k dielectric material and a work function determining gate electrode material are deposited overlying the altered active fins portion.
    Type: Grant
    Filed: November 29, 2011
    Date of Patent: May 27, 2014
    Assignee: GlobalFoundries, Inc.
    Inventors: Peter Baars, Matthias Goldbach
  • Publication number: 20140054714
    Abstract: Semiconductor devices and related fabrication methods are provided. An exemplary fabrication method involves forming a pair of gate structures having a dielectric region disposed between a first gate structure of the pair and a second gate structure of the pair, and forming a voided region in the dielectric region between the first gate structure and the second gate structure. The first and second gate structures each include a first gate electrode material, wherein the method continues by removing the first gate electrode material to provide second and third voided regions corresponding to the gate structures and forming a second gate electrode material in the first voided region, the second voided region, and the third voided region.
    Type: Application
    Filed: September 20, 2013
    Publication date: February 27, 2014
    Applicant: GLOBAL FOUNDRIES, INC.
    Inventors: Peter Baars, Matthias Goldbach
  • Publication number: 20140042551
    Abstract: SRAM ICs and methods for their fabrication are provided. One method includes depositing photoresist on a first oxide layer overlying a silicon substrate, forming a pattern of locations, using said photoresist, for the formation of two inverters, each having a pull up transistor, a pull down transistor, and a pass gate transistor on said oxide layer. The method involves anisotropically etching U-shaped channels in the oxide layer corresponding to pattern, and thereafter isotropically etching U-shaped channels in the silicon layer to form saddle-shaped fins in the silicon. A second oxide layer is deposited over the saddle-shaped fins, and a first metal layer is deposited over the second oxide layer. A contact metal layer is formed over the first metal layer and planarized to form local interconnections coupling the gate electrodes of one inverter to a node between the pull up and pull down transistors of the other inverter and to a source/drain of one of the pass gate transistors.
    Type: Application
    Filed: August 9, 2012
    Publication date: February 13, 2014
    Applicant: GLOBALFOUNDRIES INC.
    Inventors: Peter Baars, Matthias Goldbach
  • Patent number: 8647938
    Abstract: SRAM ICs and methods for their fabrication are provided. One method includes depositing photoresist on a first oxide layer overlying a silicon substrate, forming a pattern of locations, using said photoresist, for the formation of two inverters, each having a pull up transistor, a pull down transistor, and a pass gate transistor on said oxide layer. The method involves anisotropically etching U-shaped channels in the oxide layer corresponding to pattern, and thereafter isotropically etching U-shaped channels in the silicon layer to form saddle-shaped fins in the silicon. A second oxide layer is deposited over the saddle-shaped fins, and a first metal layer is deposited over the second oxide layer. A contact metal layer is formed over the first metal layer and planarized to form local interconnections coupling the gate electrodes of one inverter to a node between the pull up and pull down transistors of the other inverter and to a source/drain of one of the pass gate transistors.
    Type: Grant
    Filed: August 9, 2012
    Date of Patent: February 11, 2014
    Assignee: Globalfoundries, Inc.
    Inventors: Peter Baars, Matthias Goldbach
  • Patent number: 8575013
    Abstract: Semiconductor devices and related fabrication methods are provided. An exemplary fabrication method involves forming a pair of gate structures having a dielectric region disposed between a first gate structure of the pair and a second gate structure of the pair, and forming a voided region in the dielectric region between the first gate structure and the second gate structure. The first and second gate structures each include a first gate electrode material, wherein the method continues by removing the first gate electrode material to provide second and third voided regions corresponding to the gate structures and forming a second gate electrode material in the first voided region, the second voided region, and the third voided region.
    Type: Grant
    Filed: October 25, 2011
    Date of Patent: November 5, 2013
    Assignee: GLOBALFOUNDRIES, Inc.
    Inventors: Peter Baars, Matthias Goldbach
  • Publication number: 20130193516
    Abstract: SRAM ICs and methods for their fabrication are provided. One method includes forming dummy gate electrodes overlying a semiconductor substrate and defining locations of gate electrodes for two cross coupled inverters and two pass gate transistors. A first insulating layer is deposited overlying the dummy gate electrodes and gaps between the dummy gate electrodes are filled with a second insulating layer. The second insulating layer is etched to form inter-gate openings exposing portions of the substrate. The first insulating layer is etched to reduce the thickness of selected locations thereof, and the dummy gate electrodes are removed. A gate electrode metal is deposited and planarized to form gate electrodes and local interconnections coupling the gate electrodes of one inverter to a node between the pull up and pull down transistors of the other inverter and to a source/drain of one of the pass gate transistors.
    Type: Application
    Filed: January 26, 2012
    Publication date: August 1, 2013
    Applicant: GLOBALFOUNDRIES INC.
    Inventors: Matthias Goldbach, Peter Baars
  • Publication number: 20130175627
    Abstract: SRAM integrated circuits are provided having pull up and pull down transistors of an SRAM cell fabricated in and on a silicon substrate. A layer of insulating material overlies the pull up and pull down transistors. Pass gate transistors of the SRAM cell are fabricated in a semiconducting layer overlying the layer of insulating material.
    Type: Application
    Filed: January 11, 2012
    Publication date: July 11, 2013
    Applicant: GLOBALFOUNDRIES Inc.
    Inventors: Matthias Goldbach, Peter Baars
  • Publication number: 20130137234
    Abstract: Methods are provided for forming semiconductor devices. One method includes etching trenches into a silicon substrate and filling the trenches with an insulating material to delineate a plurality of spaced apart silicon fins. Dummy gate structures are formed, which includes a first dummy gate structure, that overlie and are transverse to the fins. A back fill material is filled between the dummy gate structures. The first dummy gate structure and an upper portion of the insulating material are removed to expose an active fins portion of the fins. The active fins portion is dimensionally modified to form an altered active fins portion. A high-k dielectric material and a work function determining gate electrode material are deposited overlying the altered active fins portion.
    Type: Application
    Filed: November 29, 2011
    Publication date: May 30, 2013
    Applicant: GLOBALFOUNDRIES INC.
    Inventors: Peter Baars, Matthias Goldbach
  • Publication number: 20130099295
    Abstract: Semiconductor devices and related fabrication methods are provided. An exemplary fabrication method involves forming a pair of gate structures having a dielectric region disposed between a first gate structure of the pair and a second gate structure of the pair, and forming a voided region in the dielectric region between the first gate structure and the second gate structure. The first and second gate structures each include a first gate electrode material, wherein the method continues by removing the first gate electrode material to provide second and third voided regions corresponding to the gate structures and forming a second gate electrode material in the first voided region, the second voided region, and the third voided region.
    Type: Application
    Filed: October 25, 2011
    Publication date: April 25, 2013
    Applicant: GLOBALFOUNDRIES INC.
    Inventors: Peter Baars, Matthias Goldbach
  • Patent number: 7863136
    Abstract: A method of manufacturing integrated circuits including a FET with a gate spacer. One embodiment provides forming a lamella of a semiconductor material and two insulator structures on opposing sides of the lamella. The lamella is recessed. A fin is formed from a central portion of the lamella. The fin is thinner than a first and a second portion of the lamella which face each other on opposing sides of the fin. A first spacer structure is formed which encompasses a first portion of the fin, the first portion adjoining to the first lamella portion. A gate electrode is disposed adjacent to the first spacer structure and encompasses a further portion of the fin on a top side and on two opposing lateral sides.
    Type: Grant
    Filed: September 30, 2008
    Date of Patent: January 4, 2011
    Assignee: Qimonda AG
    Inventors: Matthias Goldbach, Jessica Hartwich, Lars Dreeskornfeld, Arnd Scholz, Tobias Mono
  • Patent number: 7833886
    Abstract: A method of producing a semiconductor element in a substrate includes forming a plurality of micro-cavities in a substrate, creating an amorphization of the substrate to form crystallographic defects and a doping of the substrate with doping atoms, depositing an amorphous layer on top of the substrate, and annealing the substrate, such that at least a part of the crystallographic defects is eliminated using the micro-cavities. The semiconductor element is formed using the doping atoms.
    Type: Grant
    Filed: May 14, 2007
    Date of Patent: November 16, 2010
    Assignees: Infineon Technologies AG, Qimonda AG
    Inventors: Luis-Felipe Giles, Matthias Goldbach, Martin Bartels, Paul Kuepper
  • Patent number: 7825013
    Abstract: An integrated circuit comprises a doped semiconductor portion including an amorphous portion and a contact structure comprising a conductive material. The contact structure is in contact with the amorphous portion. According to another embodiment, an integrated circuit comprises a doped semiconductor portion including a region having a non-stoichiometric composition and a contact structure comprising a conductive material. The contact structure is in contact with the region having a non-stoichiometric composition.
    Type: Grant
    Filed: May 19, 2008
    Date of Patent: November 2, 2010
    Assignee: Qimonda AG
    Inventors: Matthias Goldbach, Dietmar Henke, Sven Schmidbauer