Abstract: An inspection substrate for inspecting a component, such as a liquid confinement system, of an apparatus for processing production substrates is discussed. The inspection substrate includes a body having dimensions similar to a production substrate so that the inspection substrate is compatible with the apparatus, an illumination device, such as light emitting diodes, embedded in the body, a sensor, such as an imaging device or a pressure sensor, that is embedded in the body and configured to generate inspection information, such as image data, relating to a parameter of the component of the apparatus proximate to the inspection substrate, and a storage device embedded in the body and configured to store the inspection information.

Abstract: Devices having nanochannels suitable for confinement and alignment of DNA molecules, as well as methods of fabricating the same and methods of using the same for DNA analysis, are provided. A device can include a dynamically-controlled, unified microchannel-nanochannel platform suitable for confinement and alignment of DNA molecules. The nanochannels can be reversibly formed within nanoslits formed in a deformable substrate or base layer.

Abstract: This application relates to lubrication, and more particularly to an external cooling MQL manipulator and a machine tool and a lubrication method using the machine tool. The external cooling MQL manipulator includes a suspension structure, a robot arm, a controller and an oil mist generator. The suspension structure fixedly connects the robot arm and a frame, and a nozzle is provided on a free end of the robot arm; an oil mist generator is connected to the nozzle for ejecting oil mists to a processing area. When the machine tool works, the controller selects the corresponding lubrication parameters according to the processing parameters such as the cutter type and the workpiece material. The first motor and the second motor are controlled to rotate by the controller according to real-time changes of the processing positions detected by the detecting component, thereby adjusting the position of the nozzle.

Abstract: A membrane for the capture of carbon dioxide is provided. The membrane includes a polymeric porous hollow fiber substrate and a coating disposed on a surface of the polymeric porous hollow fiber substrate, where the coating comprises graphene oxide and an amine. A method of forming a coated polymeric hollow fiber support for the capture of carbon dioxide is also provided. The method includes dispersing graphene oxide in a coating solution comprising a solvent; dispersing an amine in the coating solution; and exposing a polymeric hollow fiber support to the coating solution to form a coating on a surface of the polymeric hollow fiber support, wherein the coated polymeric hollow fiber support has a carbon dioxide/nitrogen selectivity ranging from about 200 to about 2000 and a carbon dioxide permeance ranging from about 100 gas permeation units to about 1000 gas permeation units.

Abstract: Disclosed is an adjustable ultrasonic micro-jet nozzle array with minimal quantity lubrication, relating to cooling of machining. The array-type nozzle includes an inlet conduit, a recycle conduit and a cooling body having a microjet ejection assembly and a recycling assembly. The cooling body includes a microjet ejection chamber which is closed. The inlet conduit is provided at a top of the cooling body and communicates with the microjet ejection chamber. The recycle conduit is located in the microjet ejection chamber, and connects the recycling assembly and an external vacuum machine. The adjustable ultrasonic micro jet nozzle array of the present invention has the advantages of simple structure and being convenient to use. A flow rate of trace cooling fluid is increased to improve the cooling and lubricating effect. A cooling fluid mist is recycled by the vacuum suction to reduce the consumption of the lubricating fluid while ensuring the cooling effect.

Abstract: A method for planarizing excimer laser annealed (ELA) polycrystalline thin films via irradiation. The method includes providing an ELA thin film having an oxide and a top surface with a first surface roughness defined at least by a first plurality of protrusions. The ELA thin film is etched to substantially remove the oxide. At least a portion of the etched ELA thin film is then irradiated using a short-pulse duration excimer laser beam, to form an irradiated thin film with a second surface roughness defined at least by a second plurality of protrusions. The second surface roughness is lower than the first surface roughness.

Abstract: A tracking server receives GPS data from a location tracking device located in a vehicle. The GPS data describes a path that is representative of a pathway of the vehicle used to complete a trip from a starting location to a destination location. The tracking server identifies noisy GPS data included in the received GPS data and revises a portion of path corresponding to the noisy GPS data. The tracking server may update a map database to include one or more road segments associated with the revised portion of the path. Furthermore, the tracking server may calculate a fare for the trip based on the revised path.

Abstract: Embodiments of the present disclosure provide a query processing method and an apparatus, a server and a storage medium. The method includes: determining a word vector representation of a query sequence and an entity vector representation of the query sequence respectively based on respective words and respective entities included in the query sequence; determining a word vector representation of a paragraph and an entity vector representation of the paragraph respectively based on respective words and respective entities included in the paragraph; and determining a similarity between the query sequence and the paragraph according to the word vector representation of the query sequence, the entity vector representation of the query sequence, the word vector representation of the paragraph, and the entity vector representation of the paragraph.

Abstract: An immersion lithographic apparatus having a fluid handling structure, the fluid handling structure configured to confine immersion fluid to a region and including: a meniscus controlling feature having an extractor exit on a surface of the fluid handling structure; and a gas knife system outwards of the extractor exit and including passages each having an exit, the passages having a plurality of first passages having a plurality of corresponding first exits on the surface, and a plurality of second passages having a plurality of corresponding second exits outwards of the first exits on the surface, wherein the surface faces and is substantially parallel to a top surface of a substrate during exposure, and the first exits and the second exits are arranged at a greater distance from the substrate than the extractor exit.

Abstract: The present disclosure relates to methods of printing graphene oxide (GO) and printed GO membranes. An embodiment of the present disclosure includes producing graphene oxide (GO) ink by mixing graphene oxide particles with a solvent. The GO ink can be inserted into a printer and the printer head can expel droplets of GO ink on the substrate. The GO ink can be dried on the substrate and the substrate can then be used for various applications including a medium for filtering water.

Abstract: A method of measuring wear of a substrate holder that is configured to hold a production substrate, the method includes: clamping a measurement substrate to the substrate holder; and measuring strain in the measurement substrate to generate a measurement result. The measurement substrate may have a body having dimensions similar to that of the production substrate; and a strain sensor in the body configured to measure strain in a peripheral portion of the measurement substrate.

Abstract: A tactile sensing system includes at least a stretchable strain sensing layer, an inflatable reservoir, and a means for detecting strain in the stretchable strain sensing layer. The tactile sensing layer may be configured as a tumor detection system by configuring the inflatable reservoir to apply pressure to at least part of a tissue in conjunction with an anatomical contact structure and the stretchable strain sensing layer to be in contact with a region of the surface of the tissue.

Abstract: A multi-degree-of-freedom (Multi-DOF) 3D printing device includes a printer mechanism, a rotatable platform, a visual inspection system, and a control system. The printing mechanism includes a print head. The printing mechanism and the rotatable platform are combined to have three degrees of freedom of translation, and the rotatable platform has two degrees of freedom of rotation. The visual inspection system includes a camera mounted to nearby the print head and the relative position of camera and print head remains constant. The control system is configured to implement the printing process. The model is decomposed into several components, each of which could be printed in a single direction. After one component is printed out, the platform is then rotated so that the cutting plane for the component will be printed is horizontal.

Abstract: The present disclosure provides an artificial intelligence-based triple checking method and apparatus, a device and a storage medium. The method comprises: generating a search query according to a triple to be checked; obtaining webpages of search result corresponding to the query; determining a confidence score of the triple according to the webpages of search result; determining whether the triple is an accurate triple according to the confidence score. The solution of the present disclosure can be employed to achieve efficient check of the triple.

Abstract: An immersion lithographic apparatus having a fluid handling structure, the fluid handling structure configured to confine immersion fluid to a region and including: a meniscus controlling feature having an extractor exit on a surface of the fluid handling structure; and a gas knife system outwards of the extractor exit and including passages each having an exit, the passages having a plurality of first passages having a plurality of corresponding first exits on the surface, and a plurality of second passages having a plurality of corresponding second exits outwards of the first exits on the surface, wherein the surface faces and is substantially parallel to a top surface of a substrate during exposure, and the first exits and the second exits are arranged at a greater distance from the substrate than the extractor exit.

Abstract: A network system dynamically determines a route, including start and end points, for vehicles in a transportation network. The transportation network receives a service request from a user of the transportation network including an origin location for the trip and a destination location for the trip. The transportation network then generates a waypoint plan for one or more vehicles, which includes the requested origin and destination in addition to any previously requested origins and destinations included in the vehicles current route. The network system then determines a directionality for each of the waypoints in the waypoint plan and retrieves candidate start and end points that have an associated directionality within a threshold angle of the directionality of each waypoint and are proximate to the waypoint. The network system evaluates each combination of retrieved candidate points to select a route for the vehicle.

Abstract: A method of measuring wear of a substrate holder that is configured to hold a production substrate, the method includes: clamping a measurement substrate to the substrate holder; and measuring strain in the measurement substrate to generate a measurement result. The measurement substrate may have a body having dimensions similar to that of the production substrate; and a strain sensor in the body configured to measure strain in a peripheral portion of the measurement substrate.

Abstract: Devices having nanochannels suitable for confinement and alignment of DNA molecules, as well as methods of fabricating the same and methods of using the same for DNA analysis, are provided. A device can include a dynamically-controlled, unified microchannel-nanochannel platform suitable for confinement and alignment of DNA molecules. The nanochannels can be reversibly formed within nanoslits formed in a deformable substrate or base layer.

Abstract: Embodiments of a method and apparatus for generating information are provided. An embodiment of the method can include: extracting search data in a preset period; determining target search statements from the search data; determining attributes of the entities in the target search statements; and clustering, for each of the entities involved in the target search statements, the target search statements including the each of the entities according to the attributes in the target search statements including the each of the entities, and determining a target attribute of the each of the entities based on a sum of a number of searches for the target search statements in each of clustered groups. The embodiment can achieve flexible information generation.

Abstract: An inspection substrate for inspecting a component of an apparatus for processing production substrates, the inspection substrate has: a body having dimensions similar to the production substrates so that the inspection substrate is compatible with the apparatus; an illumination device embedded in the body, the illumination device configured to emit radiation toward a target area of the component of the apparatus; an imaging device embedded in the body, the imaging device configured to detect radiation scattered at the target area and generate an image from the detected radiation, wherein the illumination device is configured to emit the radiation such that radiation that is specularly reflected at the target area does not contribute to the image generated by the imaging device.